AT333147T

Method for producing a semiconductor-metal contact through a dielectric layer

Abstract

Procedure for the electrical contacting of a layer (13) of semiconductor coated with at least one layer (12) Dielectric by local heating by means of the energy input radiation from a laser, applying the layer (12) dielectric layer ( 11) metal, characterized by a laser (9) this layer (11) metal locally punctiform or linear manner in a controlled manner such that, after the formation of a molten mixture exclusively from heated briefly the layer (11) metallic layer (12) dielectric and the surface layer (13) of semiconductor, which is immediately below the layer (12) dielectric ends the supply of energy of laser radiation, causing solidification of the molten mixture to an electrical contact between the layer (13) and semiconductor layer (11) metal, that due to melting as small as possible of the surface of the layer (13) of semiconductor, which is below the layer (12) dielectric, has a reduced depth of contact of a few micrometers, so that both the layer (12) dielectric, as well as the layer (13) of semiconductor contact are not modified from the view of its properties beyond the area of ​​electrical contact by overheating during the local supply of thermal energy.

Term

No projected expiry on record.

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18 members in 11 offices

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10046170GermanyA

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WO0225742A2World Intellectual Property Organization (WIPO)A2
AU9181201AAustraliaA
DE10046170A1GermanyA1
WO0225742A3World Intellectual Property Organization (WIPO)A3
EP1319254A2European Patent Office (EPO)A2
JP2004509474AJapanA
US2004097062A1United States of AmericaA1
US6982218B2United States of AmericaB2
EP1319254B1European Patent Office (EPO)B1
AU2001291812B2AustraliaB2
AT333147TThis recordAustriaT
ATE333147T1AustriaT1
DE50110460D1GermanyD1
DK1319254T3DenmarkT3
PT1319254EPortugalE
ES2267815T3SpainT3
JP4005912B2JapanB2
CY1106197T1CyprusT1