Method for producing a semiconductor-metal contact through a dielectric layer
Abstract
Procedure for the electrical contacting of a layer (13) of semiconductor coated with at least one layer (12) Dielectric by local heating by means of the energy input radiation from a laser, applying the layer (12) dielectric layer ( 11) metal, characterized by a laser (9) this layer (11) metal locally punctiform or linear manner in a controlled manner such that, after the formation of a molten mixture exclusively from heated briefly the layer (11) metallic layer (12) dielectric and the surface layer (13) of semiconductor, which is immediately below the layer (12) dielectric ends the supply of energy of laser radiation, causing solidification of the molten mixture to an electrical contact between the layer (13) and semiconductor layer (11) metal, that due to melting as small as possible of the surface of the layer (13) of semiconductor, which is below the layer (12) dielectric, has a reduced depth of contact of a few micrometers, so that both the layer (12) dielectric, as well as the layer (13) of semiconductor contact are not modified from the view of its properties beyond the area of electrical contact by overheating during the local supply of thermal energy.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
18 members in 11 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 10046170 | Germany | A |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| WO0225742A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU9181201A | Australia | A | |
| DE10046170A1 | Germany | A1 | |
| WO0225742A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1319254A2 | European Patent Office (EPO) | A2 | |
| JP2004509474A | Japan | A | |
| US2004097062A1 | United States of America | A1 | |
| US6982218B2 | United States of America | B2 | |
| EP1319254B1 | European Patent Office (EPO) | B1 | |
| AU2001291812B2 | Australia | B2 | |
| AT333147TThis record | Austria | T | |
| ATE333147T1 | Austria | T1 | |
| DE50110460D1 | Germany | D1 | |
| DK1319254T3 | Denmark | T3 | |
| PT1319254E | Portugal | E | |
| ES2267815T3 | Spain | T3 | |
| JP4005912B2 | Japan | B2 | |
| CY1106197T1 | Cyprus | T1 |
Numbers
- Application
- 1971984
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES HALBLEITER- METALLKONTAKTES DURCH EINE DIELEKTRISCHE SCHICHT
- English
- METHOD FOR PRODUCING SEMICONDUCTOR METAL CONTACT THROUGH A DIELECTRIC LAYER
Classification
- CPC, 4
- H01L31/18
- H01L21/268
- H01L31/022425
- Y02E10/50
- IPC, 7
- H01L21 00
- H01L21 28
- H01L21 324
- H01L21 42
- H01L31 0224
- H01L31 04
- H01L31 18