Nova Patents
ATE257522T1

Methods for preparing ruthenium metal films

Abstract

The present invention provides methods for the preparation of ruthenium metal films from liquid ruthenium complexes of the formula (diene)Ru(CO)3 wherein "diene" refers to linear, branched, or cyclic dienes, bicyclic dienes, tricyclic dienes, fluorinated derivatives thereof, derivatives thereof additionally containing heteroatoms such as halide, Si, S, Se, P, As, N, or 0, or combinations thereof.

Term

Term ended

Projected expiry passed 11 August 2019, 7.1 years ago.

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88 members in 24 offices

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14087898United States of AmericaA
9918261United States of AmericaW

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AT257522TAustriaT
ATE257522T1This recordAustriaT1
DE69914092D1GermanyD1
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