Methods for preparing ruthenium metal films

(57) Summary book invention offers the method of preparing a metal ruthenium film from the liquid ruthenium complex of the formula of Ru (ジエン) (CO). Those derivatives that are straight chains and for which it has further hetero atoms like annular ジエン, 2 ring type ジエン, 3 ring type ジエン, those fluorination derivatives, a halogenide, Si, S, Se, P, As, N, or O or those combination or it branched off are mentioned with "ジエン" here. A desirable example is cyclo ヘキサジエン or cyclo ヘプタジエンルテニウムトリ carbonyl.