Magnetic mirror plasma source

A dipole ion source (Fig. 1) substrate [the two cathode surfaces and] (1) Reaches, and contains (3) very much. A gap is demarcated between a substrate and a pole and an asymmetrical mirror magnetic field includes a compression end. A substrate is arranged at the low compression end of a magnetic field, and an anode (4) confines an electron in the loop of the hole current which continued while forming the electric field which penetrates a magnetic field. An asymmetrical magnetic field assists the ion beam on a substrate.