AT477515T

Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing

Abstract

The invention relates to setting other liquid volume to substrate on the method, wherein the method comprises: The bubble for plurality of first resistor, which is connected with a substrate's area, the bubbles provided with a storage unit volume, wherein the area of the bubble collects the volume along change probably the pattern volume of the region; and forceAnd a on.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
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59 members in 10 offices

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Priority claims8

Priority claims
DocumentOfficeKindDate
57687804United States of AmericaP
57687804United States of AmericaP
2005019509United States of AmericaW
2005019509United States of AmericaW
576878P
0519509
US20040576878P
WO2005US19509

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US2005270312A1United States of AmericaA1
WO2005120834A2World Intellectual Property Organization (WIPO)A2
TW200643654ATaiwan Province of ChinaA
WO2005120834A3World Intellectual Property Organization (WIPO)A3
EP1768846A2European Patent Office (EPO)A2
KR20070038987ARepublic of KoreaA
US2007132152A1United States of AmericaA1
WO2007067488A2World Intellectual Property Organization (WIPO)A2
US2007170617A1United States of AmericaA1
WO2007084774A2World Intellectual Property Organization (WIPO)A2
CN101019066AChinaA
TW200730325ATaiwan Province of ChinaA
TW200734706ATaiwan Province of ChinaA
US2007228593A1United States of AmericaA1
TWI290665BTaiwan Province of ChinaB
TW200746256ATaiwan Province of ChinaA
WO2007084774A3World Intellectual Property Organization (WIPO)A3
JP2008502157AJapanA
EP1768846A4European Patent Office (EPO)A4
WO2008066562A2World Intellectual Property Organization (WIPO)A2
WO2008066562A3World Intellectual Property Organization (WIPO)A3
EP1957249A2European Patent Office (EPO)A2
KR20080080338ARepublic of KoreaA
EP1973719A2European Patent Office (EPO)A2
KR20080093414ARepublic of KoreaA
WO2007067488A3World Intellectual Property Organization (WIPO)A3
JP2009518863AJapanA
TWI310726BTaiwan Province of ChinaB
JP2009524249AJapanA
CN101535021AChinaA
CN100570445CChinaC
US7670529B2United States of AmericaB2
US7670530B2United States of AmericaB2
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JP4472011B2JapanB2
EP1768846B1European Patent Office (EPO)B1
AT477515TThis recordAustriaT
ATE477515T1AustriaT1
DE602005022874D1GermanyD1
US2010286811A1United States of AmericaA1
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MY144018AMalaysiaA
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JP4792028B2JapanB2
MY144847AMalaysiaA
US8109753B2United States of AmericaB2
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EP1957249A4European Patent Office (EPO)A4
EP1973719A4European Patent Office (EPO)A4
JP4987012B2JapanB2
KR101193918B1Republic of KoreaB1
MY147830AMalaysiaA
KR101324544B1Republic of KoreaB1
KR101324549B1Republic of KoreaB1
US8647554B2United States of AmericaB2
EP1957249B1European Patent Office (EPO)B1
CN104317161AChinaA