AT42419T
Process for obtaining negative images from positive photoresists
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
21 members in 8 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 76470085 | United States of America | A |
Members21
| Document | Office | Kind | |
|---|---|---|---|
| JPS6238448A | Japan | A | |
| EP0212482A2 | European Patent Office (EPO) | A2 | |
| KR870002479A | Republic of Korea | A | |
| EP0212482A3 | European Patent Office (EPO) | A3 | |
| EP0212482B1 | European Patent Office (EPO) | B1 | |
| AT42419TThis record | Austria | T | |
| DE3662952D1 | Germany | D1 | |
| US4929536A | United States of America | A | |
| US4931381A | United States of America | A | |
| HK71490A | Hong Kong, China | A | |
| CA1282627C | Canada | C | |
| CA2042735A1 | Canada | A1 | |
| EP0459708A2 | European Patent Office (EPO) | A2 | |
| KR910020501A | Republic of Korea | A | |
| EP0459708A3 | European Patent Office (EPO) | A3 | |
| US5217840A | United States of America | A | |
| US5256522A | United States of America | A | |
| JPH0627654A | Japan | A | |
| KR950000236B1 | Republic of Korea | B1 | |
| US5399456A | United States of America | A | |
| JPH0772797B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN |
Numbers
- Application
- 86110953
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG NEGATIVER BILDER AUS EINEM POSITIV ARBEITENDEN PHOTORESIST.
- English
- METHOD FOR PRODUCING NEGATIVE PICTURES FROM A POSITIVELY WORKING PHOTORESIST.
Classification
- CPC, 2
- G03F7/0226
- G03F7/38
- IPC, 7
- G03C1 485
- G03F7 004
- G03F7 022
- G03F7 039
- G03F7 26
- G03F7 38
- H01L21 027