AT137358T
Method for planarizing an integrated circuit structure
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
34 members in 6 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 26950888 | United States of America | A | |
| 26950888 | United States of America | A | |
| 269508 | – | – | – |
| US19880269508 | – | – | – |
Members34
| Document | Office | Kind | |
|---|---|---|---|
| EP0368504A2 | European Patent Office (EPO) | A2 | |
| JPH02199831A | Japan | A | |
| EP0368504A3 | European Patent Office (EPO) | A3 | |
| EP0386337A2 | European Patent Office (EPO) | A2 | |
| US4962063A | United States of America | A | |
| JPH02266519A | Japan | A | |
| EP0386337A3 | European Patent Office (EPO) | A3 | |
| EP0422748A2 | European Patent Office (EPO) | A2 | |
| EP0422748A3 | European Patent Office (EPO) | A3 | |
| EP0423907A1 | European Patent Office (EPO) | A1 | |
| EP0441653A2 | European Patent Office (EPO) | A2 | |
| EP0441653A3 | European Patent Office (EPO) | A3 | |
| US5112776A | United States of America | A | |
| US5204288A | United States of America | A | |
| US5244841A | United States of America | A | |
| JPH0774146A | Japan | A | |
| EP0386337B1 | European Patent Office (EPO) | B1 | |
| AT135140T | Austria | T | |
| EP0441653B1 | European Patent Office (EPO) | B1 | |
| DE68925892D1 | Germany | D1 | |
| EP0423907B1 | European Patent Office (EPO) | B1 | |
| DE69117999D1 | Germany | D1 | |
| EP0422748B1 | European Patent Office (EPO) | B1 | |
| AT137358TThis record | Austria | T | |
| AT137608T | Austria | T | |
| DE68926344D1 | Germany | D1 | |
| DE68926392D1 | Germany | D1 | |
| ES2087071T3 | Spain | T3 | |
| DE68925892T2 | Germany | T2 | |
| DE69117999T2 | Germany | T2 | |
| DE68926392T2 | Germany | T2 | |
| DE68926344T2 | Germany | T2 | |
| ES2088957T3 | Spain | T3 | |
| ES2088958T3 | Spain | T3 |
2 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN | |
| Publication of translation of european patent specificationUEP | UEP |
Numbers
- Publication, DOCDB
- 137358
- Publication, EPODOC
- AT137358T
- Application
- 90203417
- Application, DOCDB
- 90203417
- Application, EPODOC
- AT19900203417T
Titles2
- German
- PLANARISATIONSMETHODE FÜR IC-STRUKTUR
- English
- PLANARIZATION METHOD FOR IC STRUCTURE
Classification
- CPC, 4
- H01L21/31604
- H01L21/31055
- H01L21/0214
- H01L21/76819
- IPC, 5
- H01L21 302
- H01L21 3065
- H01L21 3105
- H01L21 316
- H01L21 768