WO03081663A3

Correlation of end-of-line data mining with process tool data mining

Abstract

One embodiment of the present invention is a process tool optimization system that includes: (a) a data mining engine that analyzes end-of-line yield data to identify one or more process tools associated with low yield; and (b) in response to output from the analysis, analyzes process tool data from the one or more process tools to identify one or more process tool parameters associated with the low yield.

Term

No projected expiry on record.

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
WO0233745A2	Cites	World Intellectual Property Organization (WIPO)	PX	International search	1-29
DE10032322A1	Cites	Germany	X	International search	1-29
US2001051836A1	Cites	United States of America	X	International search	1-29
US2002022937A1	Cites	United States of America	X	International search	1-29
US2002032888A1	Cites	United States of America	X	International search	1-29
US6314379B1	Cites	United States of America	X	International search	1-29
WILSON D ET AL: "Automatic in-line to end-of-line defect correlation using FSRAM test structure for quick killer defect identification", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS). SAN DIEGO, MAR. 22 - 25, 1994, NEW YORK, IEEE, US, 22 March 1994 (1994-03-22), pages 160 - 163, XP010119608, ISBN: 0-7803-1757-2	Non-patent	–	–	International search	–

17 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims1

Priority claims
Document	Office	Kind	Date
10560702	United States of America	A	2002-03-21

Members17

Family members, oldest first
Document	Office	Kind
US2003182252A1	United States of America	A1	2003-09-25
WO03081663A2	World Intellectual Property Organization (WIPO)	A2	2003-10-02
WO03081663A2	World Intellectual Property Organization (WIPO)	A2	2003-10-02
TW200307972A	Taiwan Province of China	A	2003-12-16
WO03081663A3This record	World Intellectual Property Organization (WIPO)	A3	2004-01-22
WO03081663A3This record	World Intellectual Property Organization (WIPO)	A3	2004-01-22
KR20040094831A	Republic of Korea	A	2004-11-10
KR20040094831A	Republic of Korea	A	2004-11-10
EP1485950A2	European Patent Office (EPO)	A2	2004-12-15
CN1639854A	China	A	2005-07-13
JP2006506800A	Japan	A	2006-02-23
CN1324515C	China	C	2007-07-04
TWI287244B	Taiwan Province of China	B	2007-09-21
US7401066B2	United States of America	B2	2008-07-15
KR100956959B1	Republic of Korea	B1	2010-05-11
KR100956959B1	Republic of Korea	B1	2010-05-11
JP4615222B2	Japan	B2	2011-01-19

10 legal events, as the office reported them to INPADOC

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Events

Legal events, newest first
	Event	Code
2004-12-15	Wipo information: published in national officeWWP	WWP
2004-11-10	Wipo information: published in national officeWWP	WWP
2004-09-21	Wipo information: entry into national phaseWWE	WWE
2004-09-09	Wipo information: entry into national phaseWWE	WWE
2004-09-02	Wipo information: entry into national phaseWWE	WWE
2004-08-30	Wipo information: entry into national phaseWWE	WWE
2003-12-04	Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)DFPE	DFPE
2003-11-26	Ep: the epo has been informed by wipo that ep was designated in this application121	121
2003-10-02	Designated statesAK	AK
2003-10-02	Designated countries for regional patentsAL	AL

Correlation of end-of-line data mining with process tool data mining

Abstract

Term

Priority claims1

Members17

Over the term

Events

Numbers

Titles2

Classification

Designated states2