Masks formed based on integrated circuit layout design having cell that includes extended active region
Claim Score by NHIP
Abstract
A set of masks corresponds to an integrated circuit layout. The integrated circuit layout includes a first cell having a first transistor region and a second transistor region, and a second cell having a third transistor region and a fourth transistor region. The first cell and the second cell adjoin each other at side cell boundaries thereof, the first transistor region and the third transistor region are formed in a first continuous active region, and the second transistor region and the fourth transistor region are formed in a second continuous active region. The set of masks is formed based on the integrated circuit layout.

Term
6.4 yearsleft in the term
Expires 27 February 2033.
- Priority
- Filed
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39 claims: 6 independent, 33 dependent
- 1A set of masks corresponding to an integrated circuit layout, the integrated circuit layout comprising:a first cell comprising a first transistor region and a second transistor region;a second cell comprising a third transistor region and a fourth transistor region, wherein the first cell and the second cell adjoin each other at side cell boundaries thereof, the first transistor region and the third transistor region are formed in a first continuous active region, and the second transistor region and the fourth transistor region are formed in a second continuous active region;and a middle gate strip electrically continuously extending from the first transistor region to the second transistor region, along a line at which the first cell adjoins the second cell, wherein the set of masks is formed based on the integrated circuit layout.
- 9A set of masks corresponding to an integrated circuit layout, the integrated circuit layout comprising:a first cell comprising a first active region and a first side boundary;a second cell comprising a second active region and a second side boundary along the first side boundary;a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;a second gate strip in the second cell parallel to the second side boundary and overlying the second active region;and a dummy gate strip parallel to and between the first gate strip and the second gate strip, wherein the dummy gate strip overlies one of the first active region or and the second active region , and the dummy gate strip is electrically continuous , wherein the set of masks is formed based on the integrated circuit layout.
- 15A set of masks corresponding to an integrated circuit layout, the integrated circuit layout comprising:a first cell comprising a first active region and a first side boundary;a second cell comprising a second active region and a second side boundary along the first side boundary;a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;a second gate strip in the second cell parallel to the second side boundary and overlying the second active region;a blank region abutting the first active region and the second active region;a first dummy gate strip in the first cell between the first gate strip and the first side boundary, and overlying the first active region and the blank region;and a second dummy gate strip in the second cell between the second gate strip and the second side boundary, and overlying the second active region and the blank region , wherein the second dummy gate strip is electrically continuous with the first dummy gate strip , wherein the set of masks is formed based on the integrated circuit layout.
- 21A device, the device comprising:a first cell comprising a first transistor region and a second transistor region;a second cell comprising a third transistor region and a fourth transistor region, wherein the first cell and the second cell adjoin each other at side cell boundaries thereof, the first transistor region and the third transistor region are formed in a first continuous active region, and the second transistor region and the fourth transistor region are formed in a second continuous active region;and a middle gate strip electrically continuously extending from the first transistor region to the second transistor region, along a line at which the first cell adjoins the second cell.
- 28Broadest claimClaim Score 64, broad(NHIP)A device, the device comprising:a first cell comprising a first active region and a first side boundary;a second cell comprising a second active region and a second side boundary along the first side boundary;a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;a second gate strip in the second cell parallel to the second side boundary and overlying the second active region;and a dummy gate strip parallel to and between the first gate strip and the second gate strip, wherein the dummy gate strip is electrically continuous and overlies the first active region and the second active region.
- 34A device, the device comprising:a first cell comprising a first active region and a first side boundary;a second cell comprising a second active region and a second side boundary along the first side boundary;a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;a second gate strip in the second cell parallel to the second side boundary and overlying the second active region;a blank region abutting the first active region and the second active region;a first dummy gate strip between the first gate strip and the first side boundary, and overlying the first active region and the blank region;and a second dummy gate strip overlying the second active region and the blank region, wherein the second dummy gate strip is electrically continuous with the first dummy gate strip.
Independent claims6
49 paragraphs in 4 sections, as filed
PRIORITY CLAIM
0001The present application is a divisional of U.S. application Ser. No. 13/779,104, filed Feb. 27, 2013, which claims the priority of U.S. Provisional Application No. 61/747,751, filed Dec. 31, 2012, which are incorporated herein by reference in their entireties.
BACKGROUND
0002In the design of integrated circuits, particularly digital circuits, standard cells having fixed functions are widely used. Standard cells are typically pre-designed and saved in cell libraries. During an integrated circuit design process, the standard cells are retrieved from the cell libraries and placed into desired locations. Routing is then performed to connect the standard cells with each other and with other circuits on the chip.
0003Pre-defined design rules are followed when placing the standard cells into the desired locations. For example, spacing the active regions apart from the cell boundaries, so that when neighboring cells are abutted, the active regions of neighboring cells will not adjoin each other. The precaution associated with the active regions; however, incurs area penalties. The reserved space between the active regions and the cell boundaries results in a significant increase in the areas of the standard cells. In addition, because the active regions are spaced apart from the cell boundaries, when the standard cells are placed abutting each other, the active regions will not be joined, even if some of the active regions in the neighboring cells need to be electrically coupled. The spaced apart active regions have to be electrically connected using metal lines. The performance of the resulting device is worse than if the active regions are continuous.
0004Layout patterns and configurations can affect yield and design performance of the standard cells.
BRIEF DESCRIPTION OF THE DRAWINGS
0005For a more complete understanding of the embodiments, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
0006<figref idref="DRAWINGS">FIGS. <b>1</b>A and <b>1</b>B</figref> are a first transistor region and a second transistor region of a single standard cell in accordance with one or more embodiments;
0007<figref idref="DRAWINGS">FIGS. <b>2</b>A through <b>2</b>C</figref> are layouts of different arrangements and types of standard cells in accordance with one or more embodiments.
0008<figref idref="DRAWINGS">FIG. <b>3</b></figref> is a layout of a pair of standard cells having continuous active regions in accordance with one or more embodiments;
0009<figref idref="DRAWINGS">FIG. <b>4</b></figref> is a layout of a single standard cell having an extended active region in accordance with one or more embodiments;
0010<figref idref="DRAWINGS">FIG. <b>5</b></figref> is a layout of a single standard cell having an extended active region and dummy poly biasing in accordance with one or more embodiments;
0011<figref idref="DRAWINGS">FIG. <b>6</b></figref> is a layout of a single standard cell having an extended active region with active region biasing and separate dummy poly biasing in accordance with one or more embodiments;
0012<figref idref="DRAWINGS">FIG. <b>7</b></figref> is a layout of a single standard cell having an extended active region and biasing at a drain region in accordance with one or more embodiments; and
0013<figref idref="DRAWINGS">FIG. <b>8</b></figref> is a layout of a single standard cell having an extended active region and biasing at a source region in accordance with one or more embodiments.
0014<figref idref="DRAWINGS">FIG. <b>9</b></figref> is a layout of a pair of standard cells in accordance with one or more embodiments.
DETAILED DESCRIPTION
0015The making and using of the embodiments of the disclosure are discussed in detail below. It should be appreciated, however, that the embodiments provide many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative, and do not limit the scope of the disclosure.
0016One or more embodiments of integrated circuit design layouts including standard cells are shown. Throughout the various views and embodiments, like reference numbers are used to designate like elements. In some embodiments, an integrated circuit is manufactured by performing one or more lithographic processes, growing processes, etching processes, or other processes based on a set of masks. In some embodiments, a set of masks is fabricated based on an integrated circuit design layout that depicts a plurality of features of the integrated circuit in various component layers.
0017<figref idref="DRAWINGS">FIGS. <b>1</b>A and <b>1</b>B</figref> are a first transistor region and a second transistor region of a single standard cell in accordance with one or more embodiments.
0018In <figref idref="DRAWINGS">FIGS. <b>1</b>A and <b>1</b>B</figref>, according to one or more embodiments, portions of a single standard cell <b>100</b> (e.g., an inverter cell) are depicted separately for facilitating the illustration of the present disclosure. The present disclosure is not limited to generating layouts of inverter cells and is applicable for generating layouts of other types of circuits including, for example, AND, OR, XOR, XNOR gates, and the like.
0019The standard inverter cell <b>100</b> includes upper and lower boundaries <b>100</b>a and <b>100</b>b and left and right cell boundaries <b>100</b>c and <b>100</b>d as indicated by the dashed lines shown in <figref idref="DRAWINGS">FIGS. <b>1</b>A and <b>1</b>B</figref>. The first transistor region (e.g., a PMOS transistor <b>110</b>) of the standard inverter cell <b>100</b> as shown in <figref idref="DRAWINGS">FIG. <b>1</b>A</figref> includes a p-type active region <b>114</b> (as indicated by the dimensions X<sub>a </sub>by Y<sub>a</sub>) including source region <b>114</b>a (as indicated by the dimensions X<sub>b </sub>by Y<sub>a</sub>) and drain region <b>114</b>b (as indicated by the dimensions X<sub>c </sub>by Y<sub>a</sub>) and a first portion of an active gate strip <b>115</b> as a gate G<sub>1</sub>. The source and drain regions <b>114</b>a and <b>114</b>b are on opposite sides of gate G<sub>1</sub>. Further, dummy gate strips <b>116</b> are placed at left and right boundaries <b>100</b>c and <b>100</b>d. Dummy gate strips <b>116</b> do not act as a gate to any transistors. Each dummy gate strip <b>116</b> has only one-half a width inside the standard inverter cell <b>100</b> and the other half is outside the standard inverter cell <b>100</b>. Active gate strip <b>115</b> and dummy gate strips <b>116</b> are parallel to each other and equally spaced apart. Gate strip <b>115</b> and dummy gate strips <b>116</b> are formed of polysilicon or other conductive materials such as metals, metal alloys and metal silicides. Further, a VDD power supply line is connected to source region <b>114</b>a by a metal connection (e.g., a metal line <b>117</b> and contact plug <b>118</b>), and supplies a voltage level VDD.
0020The second transistor region (e.g., an NMOS transistor <b>119</b>) of the standard inverter cell <b>100</b> as shown in <figref idref="DRAWINGS">FIG. <b>1</b>B</figref> includes a second portion of gate strip <b>115</b> as a gate G<sub>2 </sub>and an n-type active region (i.e., oxide-dimensioned region (OD)) <b>120</b> (as indicated by the dimensions X<sub>a </sub>by Y<sub>b</sub>) including a source region <b>120</b>a (as indicated by the dimensions X<sub>b </sub>by Y<sub>b</sub>) and a drain region <b>120</b>b (as indicated by the dimensions X<sub>c </sub>by Y<sub>b</sub>). Active regions <b>114</b> and <b>120</b> are spaced apart from each other by an isolation region <b>122</b> (e.g., a shallow trench isolation (STI) region) as shown in <figref idref="DRAWINGS">FIG. <b>1</b>B</figref>. A VSS power supply line is connected to source region <b>120</b>a by a metal connection (e.g., a metal line <b>127</b> and a contact plug <b>128</b>) and supplies a ground level or negative voltage level. Gate strip <b>115</b> includes a gate pitch P which is measured from an edge of gate strip <b>115</b> to a respective edge of a neighboring gate strip (e.g., dummy gate <b>116</b>).
0021A width “w” of standard inverter cell <b>100</b> is defined by a measurement from left to right boundaries <b>100</b>c and <b>100</b>d. The cell width is also referred to as the cell pitch. A length of standard inverter cell <b>100</b> is defined by the measurement from upper to lower boundaries <b>100</b>a and <b>100</b>b. In one or more embodiments, edges of active regions <b>114</b> and <b>120</b> are spaced apart from the right and left boundaries <b>100</b>c and <b>100</b>d by a distance a as shown in <figref idref="DRAWINGS">FIG. <b>1</b>A</figref>.
0022<figref idref="DRAWINGS">FIGS. <b>2</b>A through <b>2</b>C</figref> are layouts of different arrangements and types of standard cells in accordance with one or more embodiments.
0023In <figref idref="DRAWINGS">FIG. <b>2</b>A</figref>, the single standard inverter cell <b>100</b> (on the left of reference line R<sub>1</sub>) abuts another standard inverter cell <b>130</b> (on the right of reference line R<sub>1</sub>). The standard cell <b>130</b> includes the same features as that of standard inverter cell <b>100</b> and therefore a detailed description thereof is omitted. The adjoining cells <b>100</b> and <b>130</b> are adjoined at their side boundaries (i.e., the right side boundary <b>100</b>d of cell <b>100</b> and the left side boundary <b>130</b>c of the cell <b>130</b>). A dummy gate strip <b>116</b> is at the adjoining cell boundaries <b>100</b>d and <b>130</b>c, between the active regions <b>114</b> of the PMOS transistor regions <b>110</b> of both cells <b>100</b> and <b>130</b> and between the active regions <b>120</b> of the NMOS transistor regions <b>119</b> of both cells <b>100</b> and <b>130</b>. As such, drain regions <b>114</b>b and <b>120</b>b of cell <b>100</b> are disposed to the left of the dummy gate strip <b>116</b>, and source regions <b>114</b>a and <b>120</b>a of cell <b>130</b> are disposed to the right of the dummy gate strip <b>116</b>.
0024Further, in one or more embodiments, the active regions <b>114</b> of the cells <b>100</b> and <b>130</b> are discrete (i.e., spaced apart from each other), and the active regions <b>120</b> of cells <b>100</b> and <b>130</b> are also discrete. In one or more embodiments, active regions of adjoining cells are continuous in <figref idref="DRAWINGS">FIG. <b>2</b>B</figref> as explained below, to prevent area penalties, i.e., increased area usage, during a layout design process, and to increase gate density and the long OD region (LOD) effect. LOD effect refers the improved performance and reduced process variation as a result of a long, continuous OD region in comparison with a shorter, discrete OD region.
0025In <figref idref="DRAWINGS">FIG. <b>2</b>B</figref>, standard inverter cells <b>100</b> (on the left of reference line R<sub>2</sub>) and <b>130</b> (on the right of reference line R<sub>2</sub>) are adjoined at side boundaries <b>100</b>d and <b>130</b>c. Further, the standard inverter cells <b>100</b> and <b>130</b> include a continuous active region <b>132</b> (as indicated by the dimensions X<sub>1 </sub>by Y<sub>1</sub>) in the PMOS transistor regions <b>110</b> and a continuous active region <b>134</b> (as indicated by dimensions X<sub>1 </sub>by Y<sub>2</sub>) in the NMOS transistor <b>119</b>. The dummy gate strip <b>116</b> and adjacent drain region <b>114</b>b of the standard inverter cell <b>100</b> and adjacent source region <b>114</b>a of the standard inverter cell <b>130</b> together form a parasitic transistor (e.g., transistor P<b>1</b> in the PMOS transistor region <b>110</b>). The dummy gate strip <b>116</b> and adjacent drain region <b>120</b>b and adjacent source region <b>120</b>a together form a parasitic transistor (e.g., transistor N<b>1</b> in the NMOS transistor region <b>119</b>). As a result, unwanted capacitance exists between the parasitic transistors P<b>1</b> and N<b>1</b> because of these parasitic transistors P<b>1</b> and N<b>1</b> are within close proximity to each other. The resulting unwanted capacitance affects circuit performance.
0026<figref idref="DRAWINGS">FIG. <b>2</b>C</figref> is another example of a standard cell <b>140</b> according to one or more embodiments. The standard cell <b>140</b> is similar to the standard cell <b>100</b>; however, in standard cell <b>140</b>, an extended active region <b>142</b> (as indicated by the dimensions X<sub>2 </sub>by Y<sub>3</sub>) is included in the PMOS transistor region <b>110</b> and an extended active region <b>143</b> (as indicated by the dimensions X<sub>2 </sub>by Y<sub>4</sub>) is included in the NMOS transistor region <b>119</b>. The standard cell <b>140</b> is referred to as a poly on OD edge (PODE) cell. As shown, extended active regions <b>142</b> and <b>143</b> extend over an edge of dummy gate strips <b>116</b> at side boundaries <b>140</b>c and <b>140</b>d of the standard cell <b>140</b>. When two PODE type standard cells are abutted (as depicted in <figref idref="DRAWINGS">FIG. <b>9</b></figref>), a blank region <b>149</b> exists between the two cells such that the cells have discrete OD regions similar to that shown in <figref idref="DRAWINGS">FIG. <b>1</b>B</figref>. In cases with devices where the edge of the OD regions have some sinking or recess effect, the use of PODE type standard cells resolve this issue by extending the poly to the OD edge. When the OD is recessed at the edge and other layers need to be placed above the recess, the device performance is potentially degraded. Thus, in order to avoid the OD recess, a poly is used to block the OD edge. If two PODE type standard cells abut each other, the devices should be separated (as depicted in <figref idref="DRAWINGS">FIG. <b>9</b></figref>).
0027<figref idref="DRAWINGS">FIG. <b>3</b></figref> is a layout of an example variation of a combination of the standard cells <b>100</b> (on the left of reference line R<sub>3</sub>) and <b>130</b> (on the right of reference line R<sub>3</sub>) as similarly shown in <figref idref="DRAWINGS">FIG. <b>2</b>B</figref>. The layout of <figref idref="DRAWINGS">FIG. <b>3</b></figref> includes continuous active regions <b>132</b> and <b>134</b> and is used for illustrating an operation for eliminating parasitic capacitance within the continuous active regions <b>132</b> and <b>134</b>.
0028As shown in <figref idref="DRAWINGS">FIG. <b>3</b></figref>, the standard cells <b>100</b> and <b>130</b> are the same as shown in <figref idref="DRAWINGS">FIG. <b>2</b>B</figref>, therefore a description of the elements is omitted. In one or more embodiments, a poly cut is performed (as depicted by box A) to separate upper and lower portions of the dummy gate strip <b>116</b>. The upper portion (i.e., the portion above box A) is electrically connected to the VDD power supply line and the lower portion (i.e., the portion below box A) is electrically connected to the VSS power supply line. The electrical connection to VDD and VSS is made by metal connections to turn off the parasitic transistors (P<b>1</b> and N<b>1</b>). For example, poly metal VDD connection is used to electrically couple the VDD power supply line to a metal line <b>117</b> at the source region <b>114</b>a of the second standard cell <b>130</b>. Also, poly metal VSS connection is used to electrically couple the VSS power supply line to a metal line <b>127</b> at the source region <b>120</b>a of the second standard cell <b>130</b>.) The use of the continuous active regions <b>132</b> and <b>134</b> provides the benefit of regaining gate density and the LOD effect.
0029<figref idref="DRAWINGS">FIG. <b>4</b></figref> is a layout of a standard cell <b>150</b> having an oxide diffusion (OD) extension layers including extended active regions <b>152</b> and <b>154</b> in accordance with one or more embodiments. The standard cell <b>150</b> in <figref idref="DRAWINGS">FIG. <b>4</b></figref> is a single standard cell having OD extension layers and is similar to the standard cell <b>100</b> shown in <figref idref="DRAWINGS">FIGS. <b>1</b>A and <b>1</b>B</figref> except in the PMOS transistor region <b>110</b> includes three additional gate strips (<b>115</b>b, <b>115</b>c, and <b>115</b>d) and an additional source region <b>114</b>c. The gate strip <b>115</b>b is between and functions as the gate electrode for the drain region <b>114</b>b and the additional source region <b>114</b>c. The gate strip <b>115</b>c can be used for connection with another device or as a dummy gate strip.
0030The standard cell <b>150</b> includes the first gate strip <b>115</b>a, the second gate strip <b>115</b>b, and the third gate strip <b>115</b>c are in parallel with each other. Upper and lower boundaries <b>150</b>a and <b>150</b>b are at opposite ends of the standard cell <b>150</b>, and left and right side boundaries <b>150</b>c and <b>150</b>d are parallel to the plurality of gate strips <b>115</b>a, <b>115</b>b and <b>115</b>c. The PMOS transistor <b>110</b> comprises a first portion of the first gate strip <b>115</b>a as a first gate G<sub>1 </sub>and a first portion of the second gate strip <b>115</b>b as a second gate G<sub>2</sub>.
0031The PMOS transistor <b>110</b> further includes the extended active region <b>152</b> (as indicated by dimensions X<sub>3 </sub>by Y<sub>5</sub>) including a first source region <b>114</b>a and a first drain region <b>114</b>b at opposite sides of the first gate G<sub>1</sub>, and the first drain region <b>114</b>b and a second source region <b>114</b>c at opposite sides of the second gate G<sub>2</sub>. The active region <b>152</b> is extended by two gate pitches (i.e., one gate pitch on each side). The use of an extended active region allows the metal (M<b>0</b>) poly to be positioned in the active OD region and therefore there is no degradation regarding the device size.
0032Standard cell <b>150</b> further includes a NMOS transistor <b>119</b> including a second portion of the first gate strip <b>115</b>a as a third gate G<sub>3 </sub>and a second portion of the second gate strip <b>115</b>b as a fourth gate G<sub>4</sub>, the second extended active region <b>154</b> (as indicated by dimensions X<sub>3 </sub>by Y<sub>6</sub>) includes a third source region <b>120</b>a opposite first source region <b>114</b>a of the PMOS transistor <b>110</b> and adjacent to third gate G<sub>3</sub>, and a second drain region <b>120</b>b opposite second source region <b>114</b>c and adjacent to fourth gate G<sub>4</sub>.
0033First and second source regions <b>114</b>a and <b>114</b>c of PMOS transistor <b>110</b> are connected with VDD power supply line by metal connections (e.g., metal line <b>117</b> and contact plugs <b>118</b>). Further, third source region <b>120</b>a of NMOS transistor <b>119</b> is connected with VSS power supply line by a metal connection (e.g., metal line <b>127</b> and contact plug <b>128</b>). In one or more embodiments, first gate strip <b>115</b>a is an active gate strip and second gate strip <b>116</b> is a dummy gate strip. Further, according to one or more embodiments, gate strip <b>115</b>d is a non-operative floating poly and gate strip <b>115</b>c is an active gate strip for other devices (not shown).
0034In one or more embodiments, first drain region <b>114</b>b of PMOS transistor <b>110</b> is electrically connected with second drain region <b>120</b>b of NMOS transistor <b>119</b> by a metal connection.
0035<figref idref="DRAWINGS">FIG. <b>5</b></figref> is a layout of a single standard cell <b>160</b> having extended active regions and dummy poly biasing to prevent parasitic capacitance in accordance with one or more embodiments. The layout of standard cell <b>160</b> is similar to the layout of standard cell <b>150</b> shown in <figref idref="DRAWINGS">FIG. <b>5</b></figref>. Compared with standard cell <b>150</b>, PMOS transistor <b>110</b> and NMOS transistor <b>119</b> include extended active region <b>161</b> (as indicated by dimensions X<sub>4 </sub>and Y<sub>7</sub>) and extended active region <b>162</b> (as indicated by dimensions X<sub>4 </sub>and Y<sub>8</sub>) which are extended by one gate pitch at one side (e.g., a left side boundary <b>160</b>c) of standard cell <b>160</b> instead of both sides. In the example depicted in <figref idref="DRAWINGS">FIG. <b>5</b></figref>, the active regions <b>161</b> and <b>162</b> are not extended beyond the third source region <b>114</b>c of PMOS transistor <b>110</b> of standard cell <b>160</b> and second drain region <b>120</b>b of NMOS transistor <b>119</b>. Therefore, third source region <b>114</b>c of PMOS transistor <b>110</b> of standard cell <b>160</b> and second drain region <b>120</b>b of NMOS transistor <b>119</b> align near the side cell boundary <b>160</b>d.
0036Standard cell <b>160</b> further includes a third gate strip <b>115</b>c parallel to first gate strip <b>115</b>a and includes an upper portion as a fifth gate G<sub>5 </sub>and a lower portion as a sixth gate G<sub>6</sub>. First and second dummy source regions <b>164</b> and <b>165</b> corresponding to PMOS transistor <b>110</b> and NMOS transistor <b>119</b> are defined within the extension of the active regions <b>161</b> and <b>162</b>. First and second dummy source regions <b>164</b> and <b>165</b> are disposed to the left of the third gate strip <b>115</b>c and adjacent to a side boundary (e.g., the left side boundary <b>160</b>c). VDD power supply line is electrically connected to first dummy source region <b>164</b> and VSS power supply line is electrically connected to second dummy source region <b>165</b> by metal connections. Use of first and second dummy source regions <b>164</b> and <b>165</b> at boundary <b>160</b>c prevents the generation of parasitic capacitance, and protects the source region <b>114</b>a and the LOD effect as a result of the extended active regions <b>161</b> and <b>162</b>.
0037In one or more embodiments, third gate strip <b>115</b>c is a dummy gate strip and is biased at VDD power supply line or the VSS power supply line.
0038In some embodiments, some or all layouts of standard cells for NOT, AND, OR, XOR, or XNOR gates, and/or the like are arranged in a manner that the source regions are positioned adjacent to the cell side boundaries, such as side boundaries <b>160</b>c and <b>160</b>d of cell <b>160</b>. Accordingly, generation of parasitic transistors at the side boundaries <b>160</b>c and <b>160</b>d when abutting another cell is prevented.
0039<figref idref="DRAWINGS">FIG. <b>6</b></figref> is a layout of single standard cell <b>160</b>′ with active region biasing and separate dummy poly biasing in accordance with one or more embodiments. In <figref idref="DRAWINGS">FIG. <b>6</b></figref>, compared with the standard cell <b>160</b> in <figref idref="DRAWINGS">FIG. <b>5</b></figref>, a poly cut is performed (as depicted box “A”) at fifth gate G<sub>5 </sub>and sixth gate G<sub>6 </sub>and fifth gate G<sub>5 </sub>is electrically connected with VDD power supply line by a metal connection, and sixth gate G<sub>6 </sub>is electrically connected with VSS power supply line by a metal connection. Since the fifth gate G<sub>5 </sub>and the sixth gate G<sub>6 </sub>are cut, and the fifth gate G<sub>5 </sub>which corresponds to a parasitic transistor, is connected to power, the connection of fifth gate G<sub>5 </sub>to power disables the fifth gate G<sub>5 </sub>Further, sixth gate G<sub>6 </sub>is connected to ground and is not used as a transistor.
0040<figref idref="DRAWINGS">FIG. <b>7</b></figref> is a layout of a single standard cell <b>170</b> having extended active region <b>171</b> (as indicated by dimensions X<sub>5 </sub>by Y<sub>9</sub>) and extended active region <b>172</b> (as indicated by dimensions X<sub>5 </sub>by Y<sub>10</sub>) in accordance with one or more embodiments. Active regions <b>171</b> and <b>172</b> are extended by one gate pitch at a right side of standard cell <b>170</b>. Some of the elements within standard cell <b>170</b> are the same as standard cell <b>160</b> therefore a description thereof is omitted.
0041In <figref idref="DRAWINGS">FIG. <b>7</b></figref>, third gate strip <b>115</b>c is parallel to and adjacent to second gate strip <b>115</b>b and includes the upper portion as the fifth gate G<sub>5 </sub>and the lower portion as the sixth gate G<sub>6</sub>. First and second dummy source regions <b>174</b> and <b>175</b> are defined within the corresponding active regions <b>171</b> and <b>172</b> and are disposed to the right of the gate strip <b>115</b>c along a side boundary <b>170</b>d of standard cell <b>170</b>. First dummy source region <b>174</b> and second source region <b>114</b>c are at opposite sides of fifth gate G<sub>5</sub>, and second dummy source region <b>175</b> and second drain region <b>120</b>b are at opposite sides of sixth gate G<sub>6</sub>. VDD power supply line is electrically connected to first dummy source region <b>174</b> and VSS power supply line is electrically connected to second dummy source region <b>175</b>. As shown in <figref idref="DRAWINGS">FIG. <b>7</b></figref>, in one or more embodiments, source region <b>175</b> is electrically coupled to VSS (i.e., also referred to as biasing performed at a drain side of NMOS transistor <b>119</b>). Third gate strip <b>115</b>c is connected with VSS power supply line to effectively disable the parasitic transistor formed by the drain region <b>120</b>b, the source region <b>175</b>, and the gate G<sub>6</sub>.
0042<figref idref="DRAWINGS">FIG. <b>8</b></figref> is a layout of a single standard cell <b>180</b> having an extended active region <b>181</b> (as indicated by dimensions X<sub>6 </sub>by Y<sub>11</sub>) and an extended active region <b>182</b> (as indicated by dimensions X<sub>6 </sub>by Y<sub>12</sub>) and performing biasing at a source region in accordance with one or more embodiments.
0043In <figref idref="DRAWINGS">FIG. <b>8</b></figref>, standard cell <b>180</b> is an inverter, for example, and includes first, second and third gate strips <b>115</b>a, <b>115</b>b and <b>115</b>c parallel with each other. Upper and lower boundaries <b>180</b>a and <b>180</b>b on opposite ends of standard cell <b>180</b> and left and right side boundaries <b>180</b>c and <b>180</b>d parallel to first, second and third gates <b>115</b>a, <b>115</b>b and <b>115</b>c. A PMOS transistor <b>110</b> includes a first portion of first gate strip <b>115</b>a as a first gate G<sub>1</sub>, first extended active region <b>181</b> including a first source region <b>114</b>a and a first drain region <b>114</b>b at opposite sides of first gate G<sub>1</sub>, a first portion of second gate strip <b>115</b>b as a second gate G<sub>2</sub>, a first dummy source region <b>184</b> and first source region <b>114</b>a disposed opposite second gate G<sub>2</sub>, and a first portion of third gate strip <b>115</b>c as a third gate G<sub>3 </sub>and a second dummy source region <b>185</b> and first drain region <b>114</b>b disposed opposite third gate G<sub>3</sub>.
0044Standard cell <b>180</b> further includes NMOS transistor <b>119</b> including a second portion of first gate strip <b>115</b>a as a fourth gate G<sub>4</sub>, second extended active region <b>182</b> including a second source region <b>120</b>a opposite first source region <b>114</b>a and second source region <b>120</b>a and second drain region <b>120</b>b disposed at opposite sides of the fourth gate G<sub>4</sub>. A second portion of second gate strip <b>115</b>b as a fifth gate G<sub>5</sub>, and a third dummy source region <b>186</b> and second source region <b>120</b>a are disposed at opposite sides of the fifth gate G<sub>5</sub>, and a second portion of third gate strip <b>120</b>c as a sixth gate G<sub>6</sub>, the second drain region <b>120</b>b and a third drain region <b>120</b>c are disposed at opposite sides of sixth gate G<sub>6</sub>. First dummy source region <b>184</b>, second dummy source region <b>185</b> and first source region <b>114</b>a are connected with VDD power supply line by metal connections, and third dummy source region <b>186</b>, and second source region <b>120</b>a are connected with the VSS power supply line by metal connections. As shown, first, second and third source regions <b>184</b>, <b>185</b> and <b>186</b> are disposed along the side boundaries <b>180</b>c and <b>180</b>d of standard cell <b>180</b>. Biasing is performed on the source side of the standard cell <b>180</b>. The first, second and third drain regions <b>114</b>b, <b>120</b>b and <b>120</b>c are connected together and act as an output of the inverter.
0045<figref idref="DRAWINGS">FIG. <b>9</b></figref> illustrates a pair of PODE type standard cells according to one or more embodiments. As shown in <figref idref="DRAWINGS">FIG. <b>9</b></figref>, two PODE type standard cells <b>140</b> (on the left of reference line R<sub>4</sub>) and <b>190</b> (on the right of reference line R<sub>4</sub>) are provided. Details regarding the standard cell <b>140</b> are discussed above with regards to <figref idref="DRAWINGS">FIG. <b>2</b>C</figref>. Standard cell <b>190</b> has cell boundaries <b>190</b>a, <b>190</b>b, <b>190</b>c and <b>190</b>d and further comprises the same components as that of standard cell <b>140</b>, therefore a detailed description of standard cell <b>190</b> is omitted to avoid unnecessary repetition. As mentioned above, when PODE type standard cells <b>140</b> and <b>190</b> are abutted as shown in <figref idref="DRAWINGS">FIG. <b>9</b></figref>, blank region <b>149</b> exists between the two cells such that the cells have discrete OD regions similar to that shown in <figref idref="DRAWINGS">FIG. <b>2</b>A</figref>.
0046One or more embodiments include a set of masks corresponding to an integrated circuit layout. The integrated circuit layout comprises a first cell comprising a first transistor region and a second transistor region, and a second cell comprising a third transistor region and a fourth transistor region. The first cell and the second cell adjoin each other at side cell boundaries thereof, the first transistor region and the third transistor region are formed in a first continuous active region, and the second transistor region and the fourth transistor region are formed in a second continuous active region. The set of masks is formed based on the integrated circuit layout.
0047One or more embodiments include a set of masks corresponding to an integrated circuit layout. The integrated circuit layout comprises a first cell comprising a first active region and a first side boundary, and a second cell comprising a second active region and a second side boundary along the first side boundary. The integrated circuit layout further comprises a first gate strip in the first cell parallel to the first side boundary and overlying the first active region, a second gate strip in the second cell parallel to the second side boundary and overlying the second active region, and a dummy gate strip parallel to and between the first gate strip and the second gate strip, wherein the dummy gate strip overlies at least one of the first active region or the second active region. The set of masks is formed based on the integrated circuit layout.
0048One or more embodiments include a set of masks corresponding to an integrated circuit layout. The integrated circuit layout comprises a first cell comprising a first active region and a first side boundary, and a second cell comprising a second active region and a second side boundary along the first side boundary. The integrated circuit layout further comprises a first gate strip in the first cell parallel to the first side boundary and overlying the first active region, a second gate strip in the second cell parallel to the second side boundary and overlying the second active region, a blank region abutting the first active region and the second active region, a first dummy gate strip in the first cell between the first gate strip and the first side boundary, and overlying the first active region and the blank region, and a second dummy gate strip in the second cell between the second gate strip and the second side boundary, and overlying the second active region and the blank region. The set of masks is formed based on the integrated circuit layout.
0049Although the embodiments and their advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the embodiments as defined by the appended claims. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, and composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the disclosure. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps. In addition, each claim constitutes a separate embodiment, and the combination of various claims and embodiments are within the scope of the disclosure.
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Numbers
- Publication
- RE049331
- Application
- 15956629
Titles
- English
- Masks formed based on integrated circuit layout design having cell that includes extended active region
Classification
- CPC, 4
- G06F30/392
- H10D84/85
- H10D89/10
- H01L27/0207
- IPC, 4
- H01L27 02
- H01L27 092
- G06F30 392
- H10D84 85