Thin film transistor array panel and a method for manufacturing the same

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of U.S. application Ser. No. 14/480,751 filed on Sep. 9, 2014, which is a Continuation of U.S. application Ser. No. 13/951,543 filed on Jul. 26, 2013, issued as U.S. Pat. No. 8,836,878 on Sep. 16, 2014, which is a Continuation of U.S. application Ser. No. 13/614,182 filed on Sep. 13, 2012, issued as U.S. Pat. No. 8,497,950 on Jul. 30, 2013, which is a Continuation of U.S. application Ser. No. 13/238,788 filed on Sep. 21, 2011, issued as U.S. Pat. No. 8,289,462 on Oct. 16, 2012, which is a Continuation of U.S. application Ser. No. 12/548,897 filed on Aug. 27, 2009, issued as U.S. Pat. No. 8,045,080 on Oct. 25, 2011, which is a continuation of U.S. application Ser. No. 11/487,837 filed on Jul. 17, 2006, issued as U.S. Pat. No. 7,599,015 on Oct. 6, 2009, which claim priority to Korean Patent Application No. 10-2005-0078742, filed in the Korean Intellectual Property Office on Aug. 26, 2005, the disclosures of which are incorporated by reference herein in their entireties.

BACKGROUND OF THE INVENTION

Technical Field

The present invention relates to a thin film transistor array panel, and more particularly, to a thin film transistor array panel that uses one substrate of a liquid crystal display and a method of manufacturing the same.

Discussion of the Related Art

A liquid crystal display is one of the most widely used flat panel displays. For example, a liquid crystal display is commonly found in a variety of electronic devices such as flat screen televisions, laptop computers, cell phones, and digital cameras.

A liquid crystal display includes two display panels that are formed with a field generating electrode such as a pixel electrode and a common electrode and a liquid crystal layer interposed therebetween. The liquid crystal display displays images by applying a voltage to the field generating electrode to generate an electric field in the liquid crystal layer. The electric field determines alignment of liquid crystal molecules in the liquid crystal layer to control polarization of incident light.

In general, a gate line for transferring a gate signal or a scanning signal, a data line for transferring an image signal or a data signal, a pixel electrode for receiving the image signal, and a thin film transistor for controlling the image signal that is transferred to a pixel electrode of each pixel are formed in a first display panel. Red, green, and blue color filters that are arranged in each pixel to represent various color images are formed in a second display panel that faces the first display panel.

As a size of such a liquid crystal display increases, the display panels can become erroneously aligned during a manufacturing process. Erroneous alignment can lead to deterioration of a contrast ratio and a mixed color phenomenon. To compensate for this, a width of a black matrix that is formed between the pixels is increased. However, as the width of the black matrix increases, an aperture ratio of the pixels decreases.

Accordingly, there is a need for a liquid crystal display that is capable of preventing erroneous alignment of display panels while maintaining an aperture ratio of the pixels.

SUMMARY OF THE INVENTION

An exemplary embodiment of the present invention provides a thin film transistor array panel including: a substrate; a plurality of gate lines that are formed on the substrate; a plurality of data lines that intersect the gate lines; a plurality of thin film transistors that are connected to the gate lines and the data lines; a plurality of color filters that are formed on upper parts of the gate lines, the data lines, and the thin film transistors; a common electrode that is formed on the color filters and that includes a transparent conductor; a passivation layer that is formed on an upper part of the common electrode; and a plurality of pixel electrodes that are formed on an upper part of the passivation layer and that are connected to a drain electrode of each of the thin film transistors.

Each of the pixel electrodes may include a plurality of branch electrodes that are inclined at an angle to at least one of the gate lines or at least one of the data lines, and a connection part for connecting the plurality of branch electrodes.

Each of the branch electrodes may be arranged symmetrically around a center line of the pixel electrode that is parallel to one of the gate lines.

The color filter has an opening and the passivation layer may have a contact hole that exposes the drain electrode through the opening.

The common electrode may have an opening that is smaller than the contact hole and that exposes a part of the color filter on an upper part of the drain electrode, and the passivation layer may completely cover the opening of the common electrode.

The thin film transistor array panel may further include a common signal line that is formed in a same layer as the gate lines and that is electrically connected to the common electrode.

The passivation layer may have a first contact hole and the common electrode may have a second contact hole that exposes the common signal line through the first contact hole, and a contact member for connecting the common signal line and the common electrode through the first and second contact holes may be formed in a same layer as the pixel electrodes.

Another exemplary embodiment of the present invention provides a method of manufacturing a thin film transistor array panel including: forming a gate line on an insulation substrate; forming a gate insulating layer covering the gate line; forming a semiconductor on an upper part of the gate insulating layer; forming a data line and a drain electrode in an upper part of the gate insulating layer, the data line having a source electrode; forming a color filter on upper parts of the data line and the drain electrode; forming a common electrode on an upper part of the color filter; forming a passivation layer covering the common electrode; and forming a pixel electrode on an upper part of the passivation layer.

The passivation layer may be made of benzocyclobutene (BCB) or acryl.

A common signal line may be formed when forming the gate line.

The passivation layer may have a first contact hole and the common electrode may have a second contact hole that exposes a common signal line through the first contact hole. In this case, the method may further include forming a contact member for connecting the common signal line and the common electrode through the first and second contact holes in a same layer as the pixel electrode.

The common electrode may be made of poly-crystalline or amorphous indium tin oxide (no) or indium zinc oxide (IZO).

Yet another exemplary embodiment of the present invention provides a thin film transistor array panel including: a substrate; a plurality of gate lines formed on the substrate; a plurality of data lines intersecting the gate lines; a plurality of thin film transistors connected to the gate lines and the data lines; a plurality of color filters formed above of the gate lines, the data lines, and the thin film transistors; a common electrode formed on the color filters; a first passivation layer formed on an upper part of the common electrode; a second passivation layer formed on an upper part of a drain electrode of each of the thin film transistors; and a plurality of pixel electrodes formed on an upper part of the first passivation layer and that are electrically connected to the drain electrode through an opening.

The common electrode includes an opening exposing a part of the color filter, and a part of the first passivation layer overlaps the opening exposing the part of the color filter to form a side of the opening through which the pixel electrodes are electrically connected to the drain electrode.

Each of the pixel electrodes includes a plurality of branch electrodes disposed in first and second directions.

The first passivation layer has a first contact hole, the common electrode has a second contact hole, and the second passivation layer has a third contact hole that exposes the common signal line through the first and second contact holes, wherein a contact member for connecting the common signal line and the common electrode through the first, second and third contact holes is formed in a same layer as the pixel electrodes.

BRIEF DESCRIPTION OF THE DRAWINGS

<figref idref="DRAWINGS">FIG. 1</figref> is a layout view of a thin film transistor array panel for a liquid crystal display according to an exemplary embodiment of the present invention.

<figref idref="DRAWINGS">FIGS. 2 to 4</figref> are cross-sectional views of the thin film transistor array panel taken along lines II-II, III-III′-III″, and IV-IV of <figref idref="DRAWINGS">FIG. 1</figref>, respectively.

<figref idref="DRAWINGS">FIGS. 5, 7, 9, 11, 13, and 15</figref> are layout views of the thin film transistor array panel of <figref idref="DRAWINGS">FIGS. 1 to 4</figref> during a manufacturing process according to an exemplary embodiment of the present invention.

<figref idref="DRAWINGS">FIGS. 6A to 6C</figref> are cross-sectional views of the thin film transistor array panel taken along lines VIa-VIa, VIb-VIb′-VIb″, and VIc-VIc of <figref idref="DRAWINGS">FIG. 5</figref>, respectively.

<figref idref="DRAWINGS">FIGS. 8A to 8C</figref> are cross-sectional views of the thin film transistor array panel taken along lines VIIIa-VIIIa, VIIIb-VIIIb′-VIIIb″, and VIIIc-VIIIc of <figref idref="DRAWINGS">FIG. 7</figref>, respectively.

<figref idref="DRAWINGS">FIGS. 10A to 10C</figref> are cross-sectional views of the thin film transistor array panel taken along lines Xa-Xa, Xb-Xb′-VIb″, and Xc-Xc of <figref idref="DRAWINGS">FIG. 9</figref>, respectively.

<figref idref="DRAWINGS">FIGS. 12A to 12C</figref> are cross-sectional views of the thin film transistor array panel taken along lines XIIa-XIIa, XIIb-XIIb′-XIIb″, and XIIc-XIIc of <figref idref="DRAWINGS">FIG. 11</figref>, respectively.

<figref idref="DRAWINGS">FIGS. 14A to 14C</figref> are cross-sectional views of the thin film transistor array panel taken along lines XIVa-XIVa, XIVb-XIVb′-XIVb″, and XIVc-XIVc of <figref idref="DRAWINGS">FIG. 13</figref>, respectively.

<figref idref="DRAWINGS">FIGS. 16A to 16C</figref> are cross-sectional views of the thin film transistor array panel taken along lines XVIa-XVIa, XVIb-XVIb′-XVIb″, and XVIc-XVIc of <figref idref="DRAWINGS">FIG. 15</figref>, respectively.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

A thin film transistor array panel according to an exemplary embodiment of the present invention will be described in detail with reference to <figref idref="DRAWINGS">FIGS. 1 to 4</figref>.

<figref idref="DRAWINGS">FIG. 1</figref> is a layout view of a thin film transistor array panel for a liquid crystal display according to an exemplary embodiment of the present invention. <figref idref="DRAWINGS">FIGS. 2 to 4</figref> are cross-sectional views of the thin film transistor array panel taken along lines II-II, III-III′-III″, and IV-IV of <figref idref="DRAWINGS">FIG. 1</figref>, respectively.

A plurality of gate lines <b>121</b> and a common signal line <b>126</b> are formed on an insulating substrate <b>110</b> that is made of transparent glass, plastic, and so forth.

Each gate line <b>121</b> transfers a gate signal and is extended in a horizontal direction. Each gate line <b>121</b> includes a plurality of gate electrodes <b>124</b> that are protruded in a vertical direction, and a wide end part <b>129</b> for connecting to other layers or an external driving circuit. A gate driving circuit (not shown) that generates a gate signal may be mounted on a flexible printed circuit film (not shown) that is attached to the substrate <b>110</b>, directly mounted on the substrate <b>110</b>, or integrated in the substrate <b>110</b>. When the gate driving circuit is integrated in the substrate <b>110</b>, the gate line <b>121</b> is extended to directly connect to the circuit.

The common signal line <b>126</b> transfers a common voltage that is input from the outside and is positioned adjacent to the end part <b>129</b> of the gate line <b>121</b>. The common signal line <b>126</b> is formed in the same layer as the gate line <b>121</b> and may have an expanding part, as needed.

The gate line <b>121</b> and the common signal line <b>126</b> may be made of aluminum metals such as aluminum (Al) or an aluminum alloy, silver metals such as silver (Ag) or a silver alloy, copper metals such as copper (Cu) or a copper alloy, molybdenum metals such as molybdenum (Mo) or a molybdenum alloy, chromium (Cr), thallium tantalum (Ta), titanium (Ti), and so forth. However, the gate line <b>121</b> and the common signal line <b>126</b> may have a multi-layered structure including two conductive layers (not shown) that have different physical properties. One conductive layer is made of metals having low resistivity, for example aluminum metals, silver metals, copper metals, and so forth, to reduce a signal delay or a voltage drop. Alternatively, the other conductive layer is made of a material such as a molybdenum metal, chromium, thallium tantalum, titanium, and so forth, that have excellent physical, chemical, and electrical contact characteristics with other materials, specifically indium tin oxide (ITO) and indium zinc oxide (IZO). Exemplary combinations of the multi-layered structure may include a chromium lower layer and an aluminum (alloy) upper layer, and an aluminum (alloy) lower layer and a molybdenum (alloy) upper layer. However, the gate line <b>121</b> and the common signal line <b>126</b> may made of various metals or electrical conductors, in addition to the above-described materials.

Side surfaces of the gate line <b>121</b> and the common signal line <b>126</b> are inclined to a surface of the substrate <b>110</b>, and an inclination angle thereof is preferably about 30° to about 80°.

A gate insulating layer <b>140</b> that is made of silicon nitride (SiNx), silicon oxide (SiOx), and so forth is formed on the gate line <b>121</b> and the common signal line <b>126</b>.

A plurality of semiconductor islands <b>154</b> that are made of hydrogenated amorphous silicon (a-Si), polysilicon, and so forth are formed on the gate insulating layer <b>140</b>. Each semiconductor island <b>154</b> is positioned on a gate electrode <b>124</b> and includes an extension that covers a border of the gate line <b>121</b>.

A plurality of ohmic contacts <b>163</b> and <b>165</b> are formed on the semiconductor islands <b>154</b>. The ohmic contacts <b>163</b> and <b>165</b> may be made of a material such as n+ hydrogenated amorphous silicon in which an n-type impurity such as phosphorus is doped with a high concentration or silicide. The ohmic contacts <b>163</b> and <b>165</b> are formed in pairs and are disposed on the semiconductor islands <b>154</b>.

Side surfaces of the semiconductor islands <b>154</b> and the ohmic contacts <b>163</b> and <b>165</b> are also inclined with respect to a surface of the substrate <b>110</b>, and an inclination angle thereof is about 30° to about 80°.

A plurality of data lines <b>171</b> and a plurality of drain electrodes <b>175</b> are formed on the ohmic contacts <b>163</b> and <b>165</b> and the gate insulating layer <b>140</b>.

Each data line <b>171</b> transfers a data signal and is extended in a vertical direction to intersect the gate lines <b>121</b>. Each data line <b>171</b> includes a plurality of source electrodes <b>173</b> that are extended toward the gate electrode <b>124</b>, and a wide end part <b>179</b> for connecting to other layers or an external driving circuit. A data driving circuit (not shown) that generates a data signal may be mounted on a flexible printed circuit film (not shown) that is attached to the substrate <b>110</b>, directly mounted on the substrate <b>110</b>, or integrated in the substrate <b>110</b>. When the data driving circuit is integrated in the substrate <b>110</b>, the data line <b>171</b> can be extended to directly connect to the circuit.

The drain electrode <b>175</b> is separated from the data line <b>171</b> and faces the source electrode <b>173</b> around the gate electrode <b>124</b>.

One gate electrode <b>124</b>, one source electrode <b>173</b>, one drain electrode <b>175</b>, and the semiconductor island <b>154</b> constitute one thin film transistor (TFT), and a channel of the thin film transistor is formed in the semiconductor island <b>154</b> between the source electrode <b>173</b> and the drain electrode <b>175</b>.

It is preferable that the data line <b>171</b> and the drain electrode <b>175</b> are made of a refractory metal such as molybdenum, chromium, thallium tantalum, and titanium, or their alloys. The data line <b>171</b> and the drain electrode <b>175</b> can have a multi-layered structure including a refractory metal layer (not shown) and a low resistance conductive layer (not shown). Examples of the multi-layered structures include, for example, a dual layer of a chromium or molybdenum (alloy) lower layer and an aluminum (alloy) upper layer, and a triple layer of a molybdenum (alloy) lower layer, an aluminum (alloy) intermediate layer, and a molybdenum (alloy) upper layer. However, the data lines <b>171</b> and the drain electrodes <b>175</b> may be made of various metals or electric conductors, in addition to the above-described materials.

The ohmic contacts <b>163</b> and <b>165</b> exist only between the underlying semiconductor islands <b>154</b> and the overlying data line <b>171</b> and the drain electrode <b>175</b> to reduce a contact resistance therebetween. An extension of the semiconductor island <b>154</b> that is positioned on the gate line <b>121</b> smoothes a surface profile thereof, thereby preventing the data line <b>171</b> from being disconnected. The semiconductor island <b>154</b> has portions that are exposed between the source electrode <b>173</b> and the drain electrode <b>175</b> that are not covered by the data line <b>171</b> and the drain electrode <b>175</b>.

The common signal line <b>126</b> is disposed in the same layer as the gate line <b>121</b>, but it may be disposed in the same layer as the data line <b>171</b>.

A lower passivation layer <b>180</b><i>p </i>is formed on the data line <b>171</b>, the drain electrode <b>175</b>, and the exposed portions of the semiconductor island <b>154</b>. The lower passivation layer <b>180</b><i>p </i>is made of non-organic insulators, and the non-organic insulators include, for example, silicon nitride and silicon oxide. However, the lower passivation layer <b>180</b><i>p </i>can have a dual-layer structure of a lower inorganic layer and an upper organic layer to prevent the exposed portions of the semiconductor island <b>154</b> from being damaged while having excellent insulating characteristics of the organic layer.

A plurality of color filters <b>230</b> are formed on the lower passivation layer <b>180</b><i>p. </i>

Most of the color filters <b>230</b> exist in an area that is surrounded with the gate lines <b>121</b> and the data lines <b>171</b>, and the color filters <b>230</b> have an opening <b>235</b> for exposing a part of the drain electrode <b>175</b>. The color filters <b>230</b> can be formed in a band shape by extending them in a vertical direction along a column of a pixel electrode <b>191</b>. The color filters <b>230</b> can have a side wall of a tapered structure on an upper part of the data line <b>171</b>, and neighboring edges thereof can become flat by overlapping each other or can be used as a light blocking member for blocking light. Each color filter <b>230</b> can display one of three primary colors consisting of red, green, and blue.

The lower passivation layer <b>180</b><i>p </i>may be omitted.

A common electrode <b>270</b> for receiving a common signal is formed on upper parts of the lower passivation layer <b>180</b><i>p </i>and the color filters <b>230</b>. As shown in <figref idref="DRAWINGS">FIG. 4</figref>, the common electrode <b>270</b> has a contact hole <b>276</b> for exposing the common signal line <b>126</b> through the gate insulating layer <b>140</b> and the lower passivation layer <b>180</b><i>p</i>, and as shown in <figref idref="DRAWINGS">FIG. 2</figref>, the common electrode <b>270</b> has an opening <b>275</b> for exposing the color filter <b>230</b> on the upper part of the drain electrode <b>175</b>. The opening <b>275</b> of the common electrode <b>270</b> exposes a part of the color filter <b>230</b> for defining the opening <b>235</b> of the color filter <b>230</b>. The common electrode <b>270</b> is made of a transparent conductive material such as poly-crystalline, mono-crystalline, or amorphous ITO and IZO. The common electrode <b>270</b> is formed in an area surrounded with the gate line <b>121</b> and the data line <b>171</b>, and is removed in an area in which end parts <b>129</b> and <b>179</b> of the gate line <b>121</b> and the data line <b>171</b> are disposed.

An upper passivation layer <b>810</b><i>q </i>that is made of an organic insulating material or an inorganic insulating material such as silicon oxide or silicon nitride is formed on upper parts of the common electrode <b>270</b>, the exposed color filter <b>230</b>, and the lower passivation layer <b>180</b><i>p</i>. The organic insulator may preferably have a dielectric constant of about 4.0 or less, and may have photosensitivity, provide a flat surface, and be made of benzocyclobutene (BCB) or an acryl having excellent uniformity.

A plurality of contact holes <b>182</b> for exposing the end part <b>179</b> of the data line <b>171</b> through the lower passivation layer <b>180</b><i>p </i>and a plurality of contact holes <b>185</b> for exposing the drain electrode <b>175</b> through the opening <b>235</b> of the color filter <b>230</b> are formed in the upper passivation layer <b>180</b><i>q</i>. A plurality of contact holes <b>181</b> for exposing the end part <b>129</b> of the gate line <b>121</b> are formed in the upper passivation layer <b>180</b><i>q</i>, the lower passivation layer <b>180</b><i>p</i>, and the gate insulating layer <b>140</b>.

Furthermore, the upper passivation layer <b>180</b><i>q </i>has a contact hole <b>186</b> for exposing a part of the common electrode <b>270</b> that defines the contact hole <b>276</b> of the common electrode <b>270</b> and for exposing the common signal line <b>126</b>.

A plurality of pixel electrodes <b>191</b> and a plurality of contact assistants <b>81</b>, <b>82</b>, and <b>86</b> are formed on the upper passivation layer <b>180</b><i>q</i>. They may be made of a transparent conductive material such as poly-crystalline or amorphous ITO and IZO.

The pixel electrode <b>191</b> is extended in a horizontal direction, and includes a plurality of branch electrodes <b>191</b><i>a </i>that overlap the common electrode <b>270</b> and includes a connection part <b>191</b><i>b </i>around the plurality of branch electrodes <b>191</b><i>a </i>that commonly connects the plurality of branch electrodes <b>191</b><i>a. </i>

Each branch electrode <b>191</b><i>a </i>is inclined to the gate line <b>121</b> or is in a horizontal direction at a predetermined angle, and is arranged symmetrically around a horizontal center line of the pixel electrode <b>191</b> that is parallel to the gate line <b>121</b>.

An outer border of the connection part <b>191</b><i>b </i>that defines a border of the pixel electrode <b>191</b> has a rectangular shape.

The pixel electrode <b>191</b> is physically and electrically connected to the drain electrode <b>175</b> through the contact hole <b>185</b> and the opening <b>235</b> to receive a data voltage from the drain electrode <b>175</b>. Because the upper passivation layer <b>180</b><i>q </i>that defines the contact hole <b>185</b> completely covers the opening <b>275</b> of the common electrode <b>270</b>, the pixel electrode <b>191</b> and the common electrode <b>270</b> are isolated from each other.

The pixel electrode <b>191</b> to which a data voltage is applied and the common electrode <b>270</b> to which a common voltage is applied generate an electric field, thereby determining a direction of liquid crystal molecules of a liquid crystal layer (not shown) that is positioned between the two electrodes <b>191</b> and <b>270</b>. Polarization of light that passes through the liquid crystal layer changes depending on a direction of the liquid crystal molecules.

The pixel electrode <b>191</b> and the common electrode <b>270</b> constitute a liquid crystal capacitor by using the liquid crystal layer as a dielectric material, thereby maintaining an applied voltage even after a thin film transistor is turned off. The electrodes <b>191</b> and <b>270</b> also constitute a storage capacitor by using the upper passivation layer <b>180</b><i>q </i>as a dielectric material, thereby strengthening voltage sustainability of the liquid crystal capacitor.

The contact assistants <b>81</b> and <b>82</b> are connected to the end part <b>129</b> of the gate line <b>121</b> and the end part <b>179</b> of the data line <b>171</b> through the contact holes <b>181</b> and <b>182</b>, respectively. The contact assistants <b>81</b> and <b>82</b> complement adhesion between the end part <b>129</b> of the gate line <b>121</b> and the end part <b>179</b> of the data line <b>171</b> and an outside apparatus, and protect them.

Furthermore, the contact assistant <b>86</b> comes in contact with the common signal line <b>126</b> that is exposed through the contact hole <b>276</b> and the common electrode <b>270</b> that is exposed through the contact hole <b>186</b>, whereby the common signal line <b>126</b> and the common electrode <b>270</b> are electrically connected to each other. The common electrode <b>270</b> receives a common voltage from the common signal line <b>126</b>.

In such a thin film transistor array panel, an electric field between the common electrode <b>270</b> and the pixel electrode <b>191</b> is formed in both a parallel direction and a vertical direction of the substrate <b>110</b>, such that the liquid crystal molecules are inclined while twisting. Therefore, transmittance can be improved while securing a wide viewing angle.

Furthermore, visibility can be increased by disposing the branch electrodes <b>191</b><i>a </i>in two directions.

Since the color filter <b>230</b> is disposed on the gate line <b>121</b>, the data line <b>171</b>, and the thin film transistors, erroneous alignment with other display panels can be reduced even when a size of the thin film transistor array panel increases. In addition, an aperture ratio of the pixels can be improved.

Furthermore, since the common electrode <b>270</b> is positioned between the pixel electrode <b>191</b> and the data line <b>171</b>, a parasitic capacitance generated between the pixel electrode <b>191</b> and the data line <b>171</b> can be reduced. Accordingly, a phenomenon in which vertical line blurs are generated can be prevented and an erroneous alignment margin between the data line <b>171</b> and the pixel electrode <b>191</b> can be reduced.

Furthermore, a sustain capacity formed between the electrodes <b>191</b> and <b>270</b> can be reduced by adjusting a thickness of the upper passivation layer <b>180</b><i>q </i>formed between the common electrode <b>171</b> and the pixel electrode <b>191</b>. Accordingly, a size of the thin film transistor can be reduced, whereby an aperture ratio of the pixels can be improved.

Now, a method of manufacturing the thin film transistor array panel shown in <figref idref="DRAWINGS">FIGS. 1 to 4</figref> according to an exemplary embodiment of the present invention will be described in detail with reference to <figref idref="DRAWINGS">FIGS. 5 to 16</figref><i>c. </i>

<figref idref="DRAWINGS">FIGS. 5, 7, 9, 11, 13, and 15</figref> are layout views of the thin film transistor array panel of <figref idref="DRAWINGS">FIGS. 1 to 4</figref> during a manufacturing process according to an exemplary embodiment of the present invention. <figref idref="DRAWINGS">FIGS. 6A to 6C</figref> are cross-sectional views of the thin film transistor array panel taken along lines VIa-VIa, VIb-VIb′-VIb″, and VIc-VIc of <figref idref="DRAWINGS">FIG. 5</figref>, respectively. <figref idref="DRAWINGS">FIGS. 8A to 8C</figref> are cross-sectional views of the thin film transistor array panel taken along lines VIIIa-VIIIa, VIIIb-VIIIb′-VIIIb″, and VIIIc-VIIIc of <figref idref="DRAWINGS">FIG. 7</figref>, respectively. <figref idref="DRAWINGS">FIGS. 10A to 10C</figref> are cross-sectional views of the thin film transistor array panel taken along lines Xa-Xa, Xb-Xb′-VIb″, and Xc-Xc of <figref idref="DRAWINGS">FIG. 9</figref>, respectively. <figref idref="DRAWINGS">FIGS. 12A to 12C</figref> are cross-sectional views of the thin film transistor array panel taken along lines XIIa-XIIa, XIIb-XIIb′-XIIb″, and XIIc-XIIc of <figref idref="DRAWINGS">FIG. 11</figref>, respectively. <figref idref="DRAWINGS">FIGS. 14A to 14C</figref> are cross-sectional views of the thin film transistor array panel taken along lines XIVa-XIVa, XIVb-XIVb′-XIVb″, and XIVc-XIVc of <figref idref="DRAWINGS">FIG. 13</figref>, respectively. <figref idref="DRAWINGS">FIGS. 16A to 16C</figref> are cross-sectional views of the thin film transistor array panel taken along lines XVIa-XVIa, XVIb-XVIb′-XVIb″, and XVIc-XVIc of <figref idref="DRAWINGS">FIG. 15</figref>, respectively.

As shown in <figref idref="DRAWINGS">FIGS. 5 to 6C</figref>, the gate line <b>121</b> and the common signal line <b>126</b> including a plurality of gate electrodes <b>124</b> and a plurality of end parts <b>129</b> are formed by patterning with a photolithography process using a mask after stacking conductive layers by sputtering, etc., on the insulation substrate <b>110</b> that is made of transparent glass, etc.

As shown in <figref idref="DRAWINGS">FIGS. 7 to 8C</figref>, a plurality of extrinsic semiconductor islands <b>164</b> and a plurality of intrinsic semiconductor islands <b>154</b> are formed on the gate insulating layer <b>140</b> by stacking three layers of the gate insulating layer <b>140</b> having a thickness of about 1500 Å to about 5000 Å, an intrinsic amorphous silicon having a thickness of about 500 Å to about 2000 Å, and an extrinsic amorphous silicon having a thickness of about 300 Å to about 600 Å and performing a photolithography process in the extrinsic amorphous silicon and intrinsic amorphous silicon.

As shown in <figref idref="DRAWINGS">FIGS. 9 to 10C</figref>, a plurality of the data lines <b>171</b> and a plurality of the drain electrodes <b>175</b> including a plurality of source electrodes <b>173</b> and the end part <b>179</b> are formed by patterning with a dry or wet etching process after depositing a conductive layer to a thickness of about 1500 Å to about 3000 Å with a process such as sputtering.

A plurality of the ohmic contact islands <b>163</b> and <b>165</b> are formed, and portions of the intrinsic semiconductor <b>154</b> under the ohmic contact islands <b>163</b> and <b>165</b> are exposed by removing a part of the extrinsic semiconductor <b>164</b> that is not covered with the data line <b>171</b> and the drain electrode <b>175</b>. It is preferable that an oxygen plasma process is performed later to stabilize a surface of the exposed portions of the intrinsic semiconductor <b>154</b>.

As shown in <figref idref="DRAWINGS">FIGS. 11 to 12C</figref>, the lower passivation layer <b>180</b><i>p </i>is formed by stacking an inorganic insulating layer such as silicon nitride, and the color filter <b>230</b> having the opening <b>235</b> for exposing the lower passivation layer <b>180</b><i>p </i>on the upper part of the drain electrode <b>175</b> is formed on the upper part of the lower passivation layer <b>180</b><i>p</i>. The color filter <b>230</b> includes red, green, and blue color filters that are sequentially disposed in each pixel, and each color filter is sequentially formed by exposing and developing an organic film with a photolithography process after coating a negative photosensitivity organic film including red, green, and blue color pigment.

As shown in <figref idref="DRAWINGS">FIGS. 13 to 14C</figref>, a transparent conductive material such as poly-crystalline, mono-crystalline, or amorphous ITO and IZO is stacked on the upper part of the color filter <b>230</b>, and the common electrode <b>270</b> having the opening <b>275</b> for exposing the opening <b>235</b> of the color filter <b>230</b> and the contact hole <b>276</b> for exposing the lower passivation layer <b>180</b><i>p </i>on an upper part of the common signal line <b>126</b> are formed by patterning with a photolithography process using a mask. Because a low temperature process can be used and deposition is performed in an amorphous state when forming the common electrode <b>270</b> with amorphous ITO or IZO, adhesive strength of the common electrode <b>270</b> with an organic material such as the color filter <b>230</b> can be improved.

As shown in <figref idref="DRAWINGS">FIGS. 15 to 16C</figref>, the contact hole <b>185</b> for exposing the drain electrode <b>175</b> through the opening <b>235</b> of the color filter <b>230</b>, and the contact holes <b>181</b> and <b>182</b> for exposing the end parts <b>129</b> and <b>179</b> of the gate line <b>121</b> and the data line <b>171</b> are formed by coating an organic insulating material on the upper part of the common electrode <b>270</b> and patterning the material with the gate insulating layer <b>140</b> or the lower passivation layer <b>180</b><i>p </i>with a photolithography process. The contact hole <b>186</b> is also formed, and the common signal line <b>126</b> and the common electrode <b>270</b> are exposed through the contact hole <b>186</b> by etching the lower passivation layer <b>180</b><i>p </i>and the gate insulating layer <b>140</b> that are exposed through the contact hole <b>276</b> of the common electrode <b>270</b> and the contact hole <b>186</b>. The upper passivation layer <b>180</b><i>q </i>is formed of a BCB organic material or an acryl organic material having excellent planarization characteristics. The BCB organic material can be coated to have a uniform thickness of about 1.5 μm. Because an acryl organic material has photosensitivity, it can be used as an etching mask for etching lower layers to be performed later.

As described above with reference to <figref idref="DRAWINGS">FIGS. 1 to 4</figref>, a transparent conductive material such as ITO or IZO is deposited on the upper passivation layer <b>180</b><i>q</i>, and the pixel electrode <b>191</b> and contact assistants <b>81</b>, <b>82</b>, and <b>86</b> are formed by etching with a photolithography process using a mask.

In a method of manufacturing a thin film transistor array panel according to an exemplary embodiment of the present invention, the gate line <b>121</b> can be prevented from being damaged by an ITO or IZO etching liquid when forming the common electrode <b>270</b> and the pixel electrode <b>191</b> after forming the color filter <b>230</b>.

In the thin film transistor array panel according to an exemplary embodiment of the present invention, an aperture ratio of a pixel can be increased and vertical line blurs can be prevented by reducing erroneous alignment of the display panels and reducing a size of the thin film transistor array panel.

Furthermore, in a method of manufacturing the thin film transistor array panel according to an exemplary embodiment of the present invention, the signal line can be prevented from being damaged by an ITO or IZO etching liquid when forming a color filter between a signal line and a common electrode and a pixel electrode. In addition, an upper passivation layer can be used as a mask by forming the upper passivation layer with a photosensitivity material, thus simplifying the manufacturing process.

While the present invention has been described in detail with reference to the exemplary embodiments, those skilled in the art will appreciate that various modifications and substitutions can be made thereto without departing from the spirit and scope of the present invention as set forth in the appended claims.