Semiconductor device and method for manufacturing the same

BACKGROUND OF THE INVENTION

00011. Field of the Invention

0002The present invention relates to a semiconductor device using a thin film transistor (hereinafter referred to as a TFT) wherein a semiconductor film formed on a substrate and having a crystal structure is used; and a process for manufacturing the same. The semiconductor device in the present specification means any device which functions by the use of a semiconductor characteristic, and the category of the semiconductor device manufactured by the present invention includes a display device, a typical example of which is a liquid crystal display device having therein TFTs, and a semiconductor integrated circuit (such as a microprocessor, a signal processing circuit, or a high frequency circuit).

00032. Description of Related Art

0004In various semiconductor devices having therein semiconductor elements, such as a television, a personal computer or a portable telephone, a display for displaying characters or images is an essential means from which people recognize information. Particularly in recent years, a planar display (flat panel display), a typical example of which is a liquid crystal display device using the electrooptic property of liquid crystal, has been actively used.

0005As one form of the flat panel display, there is known an active matrix driving system wherein a TFT is fitted to each pixel and a picture is displayed by writing data signals successively. TFTs are essential elements for realizing the active matrix driving system.

0006In almost all cases, TFTs are manufactured using amorphous silicon. However, TFTs have a low electric field effect mobility and cannot be operated by frequencies necessary for processing picture signals. Therefore, TFTs are used only as switching elements fitted to respective pixels. A data line driving circuit for outputting picture signals to data lines or a scanning line driving circuit for outputting scanning signals to scanning lines is processed by an outside IC (IC driver) mounted by TAB (tape automated bonding) or COG (chip on glass).

0007However, as the density of pixels becomes larger, the pitch of the pixels becomes narrower; therefore, it is considered that the system in which a driver IC is mounted has a limit. For example, in the case that UXGA (pixel number: 1200×1600) is supposed, 6000 connecting terminals are required in an RGB coloring system at the simplest estimate. An increase in the number of the connecting terminals causes an increase in the probability that contact faults are generated. Moreover, the peripheral area (frame area) of its pixel section increases. As a result, it is unsuccessful that a semiconductor device using this as a display is made small-sized, and the design of the appearance thereof is damaged. In light of such background, a display device integrated with a driving circuit is clearly demanded. By integrating a pixel section with scanning line and data line driving circuits on a single substrate, the number of connecting terminals decreases drastically and the area of the frame area can also be made small.

0008As a means for realizing the above, suggested is a method of making TFTs of a polycrystal silicon film. However, even if polycrystal silicon is used to form TFTs, after all the electric properties thereof are not equivalent to the properties of MOS transistors formed in a monocrystal silicon substrate. For example, the electric field effect mobility thereof is not more than 1/10 of that of monocrystal silicon. This method has a problem that off-state current is large because of defects formed in boundaries between crystal grains.

0009However, for a data line driving circuit, high driving ability (on-state current, I_on) is required and an improvement in the reliability thereof is also required by preventing deterioration based on hot carrier effect. In addition, for a pixel section, low off-state current (I_off) is required.

0010As a TFT construction for reducing the off-state current, a lightly doped drain (LDD) construction is known. This construction is a construction wherein an LDD region, to which an impurity element is added at a low concentration, is arranged between a channel formed region and a source region or a drain region formed by the addition of an impurity element at a high concentration. As a construction effective for preventing deterioration of the on-state current based on hot carries, there is known an LDD construction wherein a gate element is overlapped with some portions of an LDD area (hereinafter, the gate-drain overlapped LDD is abbreviated to the GOLD).

0011In pixels in an active matrix driving system provided with TFTs, pixel electrodes for applying voltage to liquid crystal are set up, and scanning lines (gate lines) connected to gate electrodes cross data lines connected to sources or drains. As an auxiliary capacitor, the following two types are known: an addition capacitor type, wherein a pixel electrode is overlapped with a scanning line (gate line) in the preceding stage; and an accumulation capacitor type, wherein an exclusive capacitor line is set up. In either case, as image quality is made finer and minuter, the size of the TFT or the auxiliary capacitor allowable for each pixel is inevitably made smaller. Therefore, in order to make the numerical aperture of each pixel high within a restricted scope of pixel size, it is indispensable to lay out elements necessary for the construction of these pixels effectively.

0012TFTs are manufactured by laminating semiconductor films, insulating films, or conductive films while etching them into given shapes, using photo masks. However, if the number of the photo masks is simply increased in order to make the construction of the TFTs optimal in accordance with requests for a pixel section or respective driving circuits, the manufacturing steps become complicated and the number of the steps increases unavoidably.

0013In order to realize a high numerical aperture within a restricted scope of pixel size, it is indispensable to lay out elements necessary for the construction of a pixel section effectively.

SUMMARY OF THE INVENTION

0014An object of the present invention is to make the arrangement of pixel electrodes, scanning lines (gate lines) and data lines formed in a pixel section appropriate, and provide a pixel construction wherein a high numerical aperture is realized without increasing the number of masks nor the number of steps.

0015Furthermore, an object thereof is to provide a technique for improving properties of a TFT, and realizing the construction of the TFT optimal for conditions for driving a pixel section or a driving circuit, using a fewer photo masks.

0016In order to solve the above-mentioned problems, the present invention has a construction comprising a first electrode, a first insulating film and a second insulating film formed between a semiconductor film and the first electrode, and a third insulating film formed between the semiconductor film and a second electrode, <ul id="ul0001" list-style="none"><li id="ul0001-0001" num="0000"><ul id="ul0002" list-style="none"><li id="ul0002-0001" num="0017">wherein the semiconductor film is formed on a flat surface of the second insulating film, a cross portion where the first electrode and the second electrode cross the semiconductor film at the same position is formed, and the first electrode and the second electrode are connected to each other through an opening made in the first insulating film and the second insulating film outside the cross portion.</li></ul></li></ul>

0018Besides the above construction, the present invention has a construction comprising a first electrode and a first interconnection; a semiconductor film; a first insulating film and a second insulating film formed between the semiconductor film and the first electrode; a third insulating film formed between the semiconductor film and the second electrode and between the semiconductor film and the second interconnection; and a fourth insulating film formed on the second electrode and the second interconnection, <ul id="ul0003" list-style="none"><li id="ul0003-0001" num="0000"><ul id="ul0004" list-style="none"><li id="ul0004-0001" num="0019">wherein the semiconductor film is formed on a flat surface of the second insulating film, a cross portion where the first electrode and the second electrode cross the semiconductor film at the same position is formed, and the first electrode and the second electrode are connected to each other through an opening made in the first insulating film and the second insulating film outside the cross portion, and the first interconnection and the semiconductor film are connected to each other, through a first opening made in the first to fourth insulating films and through a second opening made in the third insulating film and the fourth insulating film, by means of a third electrode.</li></ul></li></ul>

0020Besides the above constructions, the present invention has a construction comprising a first electrode and a first interconnection; a first insulating film and a second insulating film formed between a semiconductor film and the first electrode; a third insulating film formed between the semiconductor film and a second electrode and between the semiconductor film and a second interconnection; and a fourth insulating film formed on the second electrode and the second interconnection, <ul id="ul0005" list-style="none"><li id="ul0005-0001" num="0000"><ul id="ul0006" list-style="none"><li id="ul0006-0001" num="0021">wherein the semiconductor film is formed on a flat surface of the second insulating film, a cross portion where the first electrode and the second electrode cross the semiconductor film at the same position is formed, and the first electrode and the second electrode are connected to each other through an opening made in the first insulating film and the second insulating film outside the cross portion, the first interconnection and a first impurity region of one-conduction-type formed in the semiconductor film, are connected to each other, through a first opening made in the first to fourth insulating films and through a second opening made in the third insulating film and the fourth insulating film, by a third electrode, and a fourth electrode is connected, through a third opening in the third insulating film and the fourth insulating film, to a second impurity region of the one-conduction-type formed in the semiconductor film.</li></ul></li></ul>

0022By putting the semiconductor film between the first electrode and the second electrode and applying the same voltage thereto, substantially the same effect as obtained by making the film thickness of the semiconductor film substantially half can be obtained. Moreover, a depletion layer is rapidly spread so that the sub-threshold coefficient can be made small. The electric field effect mobility can be improved. Particularly by making edges of the first electrode and the second electrode consistent with each other in the cross portion of the electrodes and the semiconductor film, the advantageous effect can be more satisfactorily exhibited.

0023By making the first interconnection and the second interconnection as a data line and a scanning line, respectively, a pixel section corresponding to an active matrix driving system can be formed. By combining the first to fourth insulating films, pixel electrodes can be formed as a topmost layer. By forming the interconnections to overlap with each other, the area thereof can be made large. By such a construction, the numerical aperture of pixels can be improved.

0024The manufacturing process of the present invention for realizing such a construction comprises the steps of forming a first electrode and a first interconnection on an insulating surface, forming a first insulating film and a second insulating film on the first electrode and the first interconnection, making the second insulating film flat by chemical-mechanical polishing, forming a semiconductor film on the second insulating film, forming a third insulating film on the semiconductor film, making an opening in the first to third insulating films, exposing a part of the first electrode by the opening, forming a second electrode and a second interconnection on the third insulating film, and connecting the first electrode and the second electrode to each other in the opening.

0025Another process comprises the steps of forming a first electrode and a first interconnection on an insulating surface, forming a first insulating film and a second insulating film on the first electrode and the first interconnection, making the second insulating film flat by chemical-mechanical polishing, forming a semiconductor film on the second insulating film, forming a third insulating film on the semiconductor film, making an opening in the first to third insulating films, exposing a part of the first electrode by the opening, forming a second electrode and a second interconnection on the third insulating film, connecting the first electrode and the second electrode to each other in the first opening, forming a fourth insulating film on the second electrode and the second interconnection, making a second opening in the first to fourth insulating films, exposing a part of the first interconnection by the opening, making a third opening in the third and fourth insulating films, exposing a part of the semiconductor film by the opening, forming a third electrode on the fourth insulating film, and connecting the first interconnection and the semiconductor film to each other in the second opening and the third opening.

0026A further process comprises the steps of forming a first electrode and a first interconnection on an insulating surface, forming a first insulating film and a second insulating film on the first electrode and the first interconnection, making the second insulating film flat by chemical-mechanical polishing, forming a semiconductor film on the second insulating film, forming a third insulating film on the semiconductor film, making an opening in the first to third insulating films, exposing a part of the first electrode by the opening, forming a second electrode and a second interconnection on the third insulating film, connecting the first electrode and the second electrode to each other in the first opening, forming a pair of one-conduction-type impurity regions in the semiconductor film, forming a fourth insulating film on the second electrode and the second interconnection, making a second opening in the first to fourth insulating films, exposing a part of the first interconnection by the opening, making a third opening in the third and fourth insulating films, exposing a part of one of the one-conduction-type impurity regions formed in the semiconductor film by the opening, forming a third electrode on the fourth insulating film, and connecting the first interconnection and the one of the one-conduction-type regions formed in the semiconductor film to each other in the second opening and the third opening.

0027According to the manufacturing processes, a semiconductor device composed of a driving circuit section and a pixel section can be manufactured from n-channel type TFTs and p-channel type TFTs, using seven photo masks. Using chemical-mechanical polishing, irregularities on the lower side of the semiconductor film, resulting from the first electrode and the first interconnection, can be removed.

BRIEF DESCRIPTION OF THE DRAWINGS

0028<figref idref="DRAWINGS">FIGS. 1A and 1B</figref> are sectional views of the construction of a TFT of the present invention.

0029<figref idref="DRAWINGS">FIGS. 2A</figref> to <b>2</b>C are sectional views for explaining the steps of manufacturing a driving circuit section and a pixel section in a luminous device.

0030<figref idref="DRAWINGS">FIGS. 3A and 3B</figref> are sectional views for explaining the steps of manufacturing the driving circuit section and the pixel section in the luminous device.

0031<figref idref="DRAWINGS">FIGS. 4A and 4B</figref> are sectional views for explaining the steps of manufacturing the driving circuit section and the pixel section in the luminous device.

0032<figref idref="DRAWINGS">FIGS. 5A and 5B</figref> are sectional views for explaining the steps of manufacturing the driving circuit section and the pixel section in the luminous device.

0033<figref idref="DRAWINGS">FIG. 6</figref> is a sectional view for explaining the steps of manufacturing the driving circuit section and the pixel section in the luminous device.

0034<figref idref="DRAWINGS">FIGS. 7A and 7B</figref> are top views for explaining the step of manufacturing the pixel section of the luminous device.

0035<figref idref="DRAWINGS">FIGS. 8A and 8B</figref> are top views for explaining the step of manufacturing the pixel section of the luminous device.

0036<figref idref="DRAWINGS">FIG. 9</figref> is a top view for explaining the construction of the pixel section of the luminous device.

0037<figref idref="DRAWINGS">FIGS. 10A and 10B</figref> are sectional views for explaining the steps of manufacturing a driving circuit section and a pixel section in a liquid crystal display device.

0038<figref idref="DRAWINGS">FIGS. 11A and 11B</figref> are sectional views for explaining the steps of manufacturing the driving circuit section and the pixel section in the liquid crystal display device.

0039<figref idref="DRAWINGS">FIGS. 12A and 12B</figref> are top views for explaining the step of manufacturing the pixel section of the liquid crystal display device.

0040<figref idref="DRAWINGS">FIG. 13</figref> is a top view for explaining the construction of the pixel section of the liquid crystal display device.

0041<figref idref="DRAWINGS">FIG. 14</figref> is a sectional view for explaining the construction of the liquid crystal display device.

0042<figref idref="DRAWINGS">FIG. 15</figref> is a sectional view illustrating the construction of a luminous device.

0043<figref idref="DRAWINGS">FIG. 16</figref> is a perspective view for explaining the construction of a substrate on which a pixel section and a driving circuit section are formed.

0044<figref idref="DRAWINGS">FIG. 17</figref> is a graph showing the oscillation frequency characteristic of a ring oscillator circuit against driving voltage.

PREFERRED EMBODIMENTS OF THE INVENTION

0045Referring to <figref idref="DRAWINGS">FIGS. 1</figref>, an embodiment of the present invention will be described. In <figref idref="DRAWINGS">FIG. 1A</figref>, a first electrode <b>11</b> is formed on a substrate <b>10</b> having an insulating surface. The first electrode <b>11</b> is made of one or more alloys or compounds selected from tungsten (W), molybdenum (Mo), tantalum (Ta) and titanium (Ti). The thickness thereof is from 150 to 400 nm.

0046As a first insulating film <b>12</b> covering the first electrode <b>11</b>, a silicon oxynitride film or a silicon nitride film is formed to have a thickness of 10 to 50 nm. In the case of using the silicon oxynitride film, there is used a film produced from a mixed gas of SiH₄, NH₃and N₂O by plasma CVD and containing therein 20 to 40 atomic % of nitrogen. In either case of this silicon oxynitride film or silicon nitride film, it is possible to prevent the diffusion of impurities such as alkali metals from the substrate <b>10</b> because of the use of the insulating film containing nitrogen.

0047A second insulating film <b>13</b> is formed on the first insulating film <b>12</b>. The second insulating film <b>13</b> is formed to have a thickness of 0.5 to 10 μm, using a silicon oxynitride film or a silicon oxide film. The surface of the first insulating film <b>12</b> has irregularities resulting from the previously-formed first electrode <b>11</b>. The irregularities are made flat by polishing the surface. As a manner of making the surface flat, chemical-mechanical polishing (hereinafter referred to as CMP) is preferably used. As a polishing material (slurry) for the CMP of the second insulating film, there is preferably used, for example, a slurry wherein fumed silica particles obtained by decomposing silicon chloride gas thermally are dispersed in a KOH-added aqueous solution. By the CMP, the second insulating film <b>13</b> is removed by about 0.1 to 0.5 μm, so as to make the surface flat.

0048A semiconductor film <b>14</b><i>a </i>having a crystal structure is formed on the second insulating film <b>13</b> whose surface is made flat. This is obtained by crystallizing an amorphous semiconductor film formed on the second insulating film <b>13</b>. After the deposition of the amorphous semiconductor film, the film is crystallized by heating treatment or the application of a laser. The material of the amorphous semiconductor film is not limited. Preferably, the material may be a silicon semiconductor film, a semiconductor film wherein germanium is added, as a lattice strain relieving agent, to silicon (Si_xGe_1-x; 0&lt;x&lt;1, typically X=0.00 to 0.05), or the like.

0049A third insulating film <b>14</b><i>b </i>is formed on the semiconductor film <b>14</b><i>a</i>, and further a second electrode <b>15</b> is formed to cross the semiconductor film <b>14</b><i>a</i>. The first electrode <b>11</b> and the second electrode <b>15</b> are arranged in such a manner that their edges are substantially consistent with each other. The crossing portion of the semiconductor film, sandwiched between the two, becomes a channel formed region <b>18</b>. Outside the channel formed region <b>18</b>, a first impurity region <b>19</b> making a source or a drain and a second impurity region <b>20</b> making an LDD are formed. The LDD <b>20</b> is not essential, but may be formed if necessary. Additionally, a fourth insulating film <b>16</b> and an interconnection <b>17</b> are set if necessary.

0050As illustrated in <figref idref="DRAWINGS">FIG. 1B</figref>, the first electrode <b>11</b> and the second electrode <b>15</b> are electrically connected to each other outside the semiconductor film <b>14</b><i>a </i>and in an opening <b>21</b> made in the first insulating film <b>12</b>, the second insulating film <b>13</b> and the third insulating film <b>14</b><i>b. </i>

0051The thickness of the film removed by the CMP is decided, considering the thickness of the first insulating film <b>12</b> and the second insulating film <b>13</b>, the dielectric constant thereof, and the thickness of the third insulating film <b>14</b><i>b</i>. The remaining film functions substantially as a gate insulating film. Accordingly, the polishing may be performed in such a manner that both of the first insulating film <b>12</b> and the second insulating film <b>13</b> remain on the first electrode <b>11</b>, or the first insulating film <b>12</b> may be exposed.

0052For example, the first insulating film <b>12</b> and the second insulating film <b>13</b> are made of silicon oxynitride films, and the dielectric constant thereof is 7.5. In the case that the third insulating film <b>14</b><i>b </i>is made of a silicon oxide film, the dielectric constant thereof is 3.9. In the two, a difference is generated. In this case, it is advisable about the finished size after the CMP to set the total film thickness of the first insulating film <b>12</b> and the second insulating film <b>13</b> to 150 nm and set the film thickness of the third insulating film <b>14</b><i>b </i>to 110 nm.

0053As a TFT, the following types are known depending on the arrangement of a semiconductor film, a gate insulating film and a gate electrode: a top gate type (planar type), a bottom gate type (reverse stagger type), and so on. In all cases, in order to make the sub-threshold coefficient thereof small, it is necessary to make the film thickness small. In the case that a semiconductor film obtained by crystallizing an amorphous semiconductor film is used in a TFT, the crystallinity of the amorphous semiconductor film becomes worse as the thickness thereof becomes smaller. As a result, the effect resulting from the matter that the film thickness is made small cannot be purely obtained. However, by placing electrodes on and beneath a semiconductor film as illustrated in <figref idref="DRAWINGS">FIG. 1</figref>, the same effect as obtained by making the thickness of the semiconductor film substantially half can be obtained. As a result, depletion is more rapidly attained with the application of voltage. Thus, the electric field effect mobility and the sub-threshold coefficient can be made small.

0054The first electrode <b>11</b> has been described herein, but using this layer at the same time, interconnections for transmitting various signals or electric power can be formed. If it is combined with flattening treatment by CMP, no effect is produced on a semiconductor film etc. formed thereon. The density of interconnections can be made high by multi-layered interconnections. The following will describe specific examples which are applied to an active matrix driving display device by way of Examples.

EXAMPLES

Example 1

0055Referring to the drawings, an embodiment of the present invention will be described. Herein, there will be detailed a process of forming a pixel section and TFTs (n-channel type TFTs and p-channel type TFTs) of a driving circuit set up near the pixel section, simultaneously, on the same substrate. <figref idref="DRAWINGS">FIGS. 2A</figref> to <b>6</b>, which are referred to in the present embodiment, are sectional views for explaining the steps of manufacturing them. <figref idref="DRAWINGS">FIGS. 7A</figref> to <b>9</b> are top views corresponding thereto. For convenience of the description, common reference numbers are used.

0056In <figref idref="DRAWINGS">FIG. 2A</figref>, for a substrate <b>101</b>, a glass substrate, a quartz substrate, a ceramic substrate or the like can be used. It is allowable to use an insulating film formed on the surface of a silicon substrate, a metal substrate or a stainless substrate. It is also allowable to use a heat-resistant plastic substrate giving resistance against treating temperature in the present example.

0057First interconnections <b>102</b>, <b>105</b> and <b>108</b> and first electrodes <b>103</b>, <b>104</b>, <b>106</b> and <b>109</b> are formed on an insulating surface of this substrate <b>101</b>. The first interconnections and the first electrodes are made of a conductive material consisting of one or more selected from W, Mo, Ti and Ta. <figref idref="DRAWINGS">FIG. 7A</figref> shows a top view of them in a pixel section. Herein, the interconnections <b>105</b> and <b>108</b> are used as a data line and an electric power supplying line, respectively. The first electrodes <b>106</b> and <b>109</b> are used as gate electrodes of one type of the TFTs.

0058After the first interconnections and the first electrodes are formed, a first insulating film <b>110</b> and a second insulating film <b>111</b> are formed. The first insulating film <b>110</b> is formed to have a thickness of 10 to 50 nm, using a silicon oxynitride film. The second insulating film <b>111</b> is formed to have a thickness of 0.5 to 1 μm, using a silicon oxide film or a silicon oxynitride film.

0059The surface of the second insulating film has irregularities resulting from the previously-formed first interconnections and first electrodes. Preferably, the irregularities are made flat. As the manner of the flattening, CMP is used. As a polishing material (slurry) for the CMP of the second insulating film, there is preferably used, for example, a slurry wherein fumed silica particles obtained by decomposing silicon chloride gas thermally are dispersed in a KOH-added aqueous solution. By the CMP, the second insulating film is removed by about 0.1 to 0.5 μm, so as to make the surface flat.

0060In this way, a second insulating film <b>112</b> made flat is formed, as illustrated in <figref idref="DRAWINGS">FIG. 2B. A</figref> semiconductor film is formed thereon. The semiconductor film <b>113</b> is made of a semiconductor having a crystal structure. This is obtained by crystallizing an amorphous semiconductor film formed on the second insulating film <b>112</b>. After the deposition of the amorphous semiconductor film, the film is crystallized by heating treatment or the application of a laser. The material of the amorphous semiconductor film is not limited. Preferably, the material may be silicon, silicon germanium alloy (Si_xGe_1-x; 0&lt;x&lt;1, typically X=0.001 to 0.05), or the like.

0061Thereafter, the semiconductor film <b>113</b> is divided into an island form by etching, to form semiconductor films <b>114</b> to <b>117</b>, as illustrated in FIG. <b>2</b>C. <figref idref="DRAWINGS">FIG. 7B</figref> shows a top view thereof, wherein the first electrodes and the semiconductor films are arranged to cross.

0062Next, as illustrated in <figref idref="DRAWINGS">FIG. 3A</figref>, a third insulating film <b>118</b> is formed to cover the semiconductor films <b>114</b> to <b>117</b>. The third insulating film <b>118</b> is made of an insulator containing silicon by plasma CVD or sputtering. The thickness thereof is set to 40 to 150 μm. The third insulating film formed to cover the semiconductor films <b>114</b> to <b>117</b> is used as a gate insulating film of the TFTs manufactured in the present embodiment.

0063A conductive film is formed on the third insulating film <b>118</b> to form gate electrodes and interconnections. In the present invention, the gate electrodes are formed by laminating two or more conductive films. A first conductive film <b>119</b> formed on the third insulating film <b>118</b> is made of a nitride of a high melting point metal such as molybdenum or tungsten. A second conductive film <b>120</b> formed thereon is made of a high melting point metal, a low-resistance metal such as aluminum or copper, polysilicon, or the like. Specifically, for the first conductive film, a nitride of one or more selected from W, Mo, Ta and Ti is selected, and for the second conductive film, an alloy of one or more selected from W, Mo, Ta, Ti, Al and Cu, or n-type polycrystal silicon is selected. After a mask <b>121</b> is formed, the first conductive film and the second conductive film <b>120</b> are etched to form second interconnections and second electrodes.

0064As illustrated in <figref idref="DRAWINGS">FIG. 3B</figref>, by a first etching treatment, first-shape electrodes <b>122</b> to <b>125</b> (made of first conductive films <b>122</b><i>a </i>to <b>125</b><i>a</i>, and second conductive films <b>122</b><i>b </i>to <b>125</b><i>b</i>),edges of which are tapered, are formed. The surface of a third insulating film <b>130</b> not covered with the first-shape electrodes <b>122</b> to <b>125</b> and a first-shape interconnection <b>130</b> is etched by about 20 to 50 nm, so that regions having a small thickness are formed.

0065A first doping treatment is conducted by ion implantation, or ion doping wherein ions are implanted without performing mass separation. In the doping, the first-shape electrodes <b>122</b> to <b>125</b> are used as a mask to form one-conduction-type impurity regions <b>126</b> to <b>129</b> having a first concentration in the semiconductor films <b>114</b> to <b>117</b>. The first concentration is set to 1×10²⁰to 1.5×10²¹/cm³.

0066Next, as illustrated in <figref idref="DRAWINGS">FIG. 4A</figref>, a second etching treatment is conducted without removing the mask composed of the resist. In this etching treatment, the second conductive film is subjected to anisotropic etching to form second-shape electrodes <b>131</b> to <b>134</b> (made of first conductive films <b>131</b><i>a </i>to <b>134</b><i>a </i>and second conductive films <b>131</b><i>b </i>to <b>134</b><i>b</i>). By this etching treatment, the width of the second-shape electrodes <b>131</b> to <b>134</b> is made small, and these electrodes are formed in such a manner that the edges thereof are positioned inside the one-conduction-type impurity regions <b>126</b> to <b>129</b> having the first concentration. As described in the next step, the length of LDDs is decided by this shrunk width.

0067<figref idref="DRAWINGS">FIG. 8A</figref> is a top view thereof, and illustrates a state that the second-shape electrodes <b>133</b> and <b>134</b> are arranged to overlap with the semiconductor films <b>116</b> and <b>117</b>, respectively, and form cross portions. The cross portions are arranged at the same positions as cross portions where the first electrodes cross the semiconductor films. The first electrode <b>106</b> and the second electrode <b>133</b> are electrically connected through an opening made in the third insulating film, the first insulating film and the second insulating film.

0068In this state, a second doping treatment is conducted to add a one-conduction-type impurity to the semiconductor films <b>114</b> to <b>117</b>. One-conduction-type impurity regions <b>135</b> to <b>138</b> having a second concentration, which result from this doping treatment, are formed in self-alignment to overlap partially with the first conductive films <b>131</b><i>a </i>to <b>134</b><i>a </i>constituting the second-shape electrodes <b>131</b> to <b>134</b>. The impurity added by ion doping is passed through the first conductive films <b>131</b><i>a </i>to <b>134</b><i>a</i>, and added. Therefore, the number of ions reaching the semiconductor films is reduced so that the concentration thereof inevitably becomes low. The concentration thereof is from 1×10¹⁷to 1×10¹⁹/cm³.

0069Next, as illustrated in <figref idref="DRAWINGS">FIG. 4B</figref>, masks <b>139</b> and <b>140</b> made of a resist are formed, and then a third doping treatment is conducted. By this third doping treatment, impurity regions <b>141</b> and <b>142</b> of a conduction-type reverse to the one-conduction-type, which have a third concentration, are formed in the semiconductor films <b>115</b> and <b>117</b>. This reverse-conduction-type impurity regions having the third concentration are formed in regions overlapping with the second-shape electrodes <b>132</b> and <b>134</b>. The impurity element is added at a concentration within the range of 1.5×10²⁰to 5×10²¹/cm³.

0070By the above-mentioned steps, the regions to which the impurity is added to control valence electrons are formed in the respective semiconductor films. The first electrodes <b>103</b>, <b>104</b>, <b>106</b> and <b>109</b> and the second-shape electrodes <b>131</b> to <b>134</b> function as gate electrodes at positions where they cross the semiconductor films. They also become gate electrodes. The second-shape interconnection <b>13</b> constitutes a capacitor at a site where it overlaps with the first interconnection.

0071Thereafter, the step of activating the impurity elements added to the respective semiconductor films is performed. This activation is performed by instantaneous annealing in a gas-heating manner. The temperature for the heating treatment is from 400 to 700° C., typically from 450 to 500° C. in the atmosphere of nitrogen. Besides, laser annealing using a second harmonic wave (532 nm) of a YAG laser may be used. In order to perform the activation by the application of a laser ray, a second harmonic wave (532 nm) of a YAG laser is used to be applied to the semiconductor films. Of course, the same manner is performed in the RTA method using a lamp light source, as well as the laser ray. The semiconductor films are heated by radiant heat of the lamp light source from both surfaces of the substrate or a substrate shell.

0072Thereafter, as illustrated in <figref idref="DRAWINGS">FIG. 5A</figref>, a fourth insulating film <b>143</b> made of silicon nitride is formed by plasma CVD to have a thickness of 50 to 100 nm. A clean oven is used to perform a heat treatment at 410° C. In this way, the semiconductor films are hydrogenated with hydrogen released from the silicon nitride film.

0073Next, a fifth insulating film <b>144</b> made of an organic insulating material is formed on the passivation film (the fourth film) <b>143</b>. The reason why the organic insulating material is used is that the surface of the insulating film <b>144</b> is made flat. In order to obtain a more satisfactory flat face, this surface is desirably subjected to flattening treatment by CMP. In the case of using CMP together, the fifth insulating film which can be used may be a silicon oxide film formed by plasma CVD, an SOG (spin on glass) or PSG formed by coating, or the like.

0074A transparent conductive film <b>145</b> made mainly of indium tin oxide is formed on the thus-flattened fifth insulating film <b>144</b>, to have a thickness of 60 to 120 nm. Since fine irregularities are formed in this surface, the surface is desirably polished and flattened by CMP using aluminum oxide as an abrasive agent. <figref idref="DRAWINGS">FIG. 8B</figref> illustrates a top view of this state.

0075Thereafter, the transparent conductive film <b>145</b> is etched to form a third electrode <b>146</b>. Openings are made in the 1st to 5th insulating films, or the fourth insulating film and the fifth insulating film (including the passivation film <b>143</b>), and then interconnections <b>147</b> to <b>153</b> are formed. The interconnections are formed by laminating a titanium film and an aluminum film.

0076If the one-conduction-type impurity regions are made into an n-type and the reverse conduction-type impurity regions are made into a p-type in the above-mentioned steps, a driving circuit section <b>200</b> having an n-channel type TFT <b>202</b> and a p-channel type TFT <b>203</b>, and a pixel section <b>201</b> having an n-channel type TFT <b>204</b> and a p-channel type TFT <b>205</b> are formed on the same substrate.

0077In the n-channel type TFT <b>202</b> of the driving circuit section <b>200</b>, a pair of gate electrodes <b>131</b> and <b>103</b> sandwiches a channel formed region <b>160</b>. The one-conduction-type impurity region <b>135</b> having the second concentration functions as an LDD, and the one-conduction-type impurity region <b>126</b> having the first concentration functions as a source or drain region. In the p-channel type TFT <b>203</b>, a pair of gate electrodes <b>132</b> and <b>104</b> sandwiches a channel formed region <b>161</b>. The reverse conduction-type impurity region <b>141</b> functions as a source or drain region. The length, in the channel length direction, of the LDD is from 0.5 to 2.5 μm, preferably 1.5 μm. A main purpose of such a construction of the LDD is to prevent deterioration of the TFTs based on hot carrier effect. The n-channel type TFT and the p-channel type TFT can constitute a shift register circuit, a buffer circuit, a level shifter circuit, a latch circuit or the like. The construction of the n-channel type TFT <b>202</b> is particularly suitable for a buffer circuit having a high driving voltage, in order to prevent the deterioration based on hot carrier effect.

0078In the n-channel type TFT <b>204</b> of the pixel section <b>201</b>, a pair of gate electrodes <b>133</b> and <b>106</b> sandwiches a channel formed region <b>162</b>. The one-conduction-type impurity region <b>136</b> having the second concentration functions as an LDD, and the one-conduction-type impurity region <b>128</b> having the first concentration functions as a source or drain region. This n-channel type TFT <b>204</b> is in a form wherein two TFTs are connected to each other in series so as to sandwich the one-conduction-type impurity region having the first concentration.

0079As described above, in the present invention, a pair of gate electrodes is formed to sandwich a semiconductor film, whereby the thickness of the semiconductor is made substantially half and further depletion advances rapidly with the application of gate voltage to increase electric field effect mobility. The sub-threshold coefficient can be made low. As a result, by using a TFT having this structure in a driving circuit, the driving voltage thereof can be made low. Moreover, the current driving ability is improved and the size (particularly the channel width) of the TFT can be made small. For this reason, the integration degree can be improved.

0080The pixel section <b>201</b> has a construction which can be applied to a luminous device in an active matrix driving manner. <figref idref="DRAWINGS">FIG. 6</figref> illustrates a state that a luminous element formed on the fifth insulating film. A partition layer <b>170</b> covering the n-channel type TFT <b>204</b> and the p-channel type TFT <b>205</b> is formed on the fifth insulating film. Since the organic compound layers and the cathodes cannot be subjected to wet treatment (treatment such as etching with a chemical liquid, or water-washing), the partition layer <b>170</b> made of a photosensitive resin material is formed on the fifth insulating film, so as to match with the third electrode <b>146</b>. For the formation of the partition layer <b>170</b>, an organic resin material such as polyimide, polyamide, polyimide amide or acrylic polymer is used. This partition layer <b>170</b> is formed to cover edges of the third electrodes. Edges of the partition layer <b>170</b> are formed to be tapered at an angle of 45 to 60 degrees.

0081<figref idref="DRAWINGS">FIG. 9</figref> illustrates a top view of the pixel section in this state. In <figref idref="DRAWINGS">FIGS. 9</figref>, the partition layer <b>170</b> is formed in areas surrounded by dotted lines.

0082The luminous device in an active matrix driving manner, illustrated herein, is composed of organic luminescent elements arranged in a matrix form. Each of the organic luminescent elements <b>174</b> is composed of an anode, a cathode, and an organic compound layer formed therebetween. In the case that the third electrode <b>146</b> is made of a transparent conductive film, the electrode is an anode. The organic compound layer is formed by combining a hole transporting material having a relatively high hole mobility, an electron transporting material opposite thereto, a luminescent material, and so on. They may be produced into the form of layers, or produced into the form of mixed materials.

0083Even if the organic materials are combined, they are formed into a thin film having a thickness of about 100 nm. For this purpose, it is necessary to heighten the flatness of the surface of ITO formed as the anode. In the case that the flatness is bad, a short circuit is generated between the organic compound layer and the cathode formed on the organic compound layer if things come to the worst. To prevent this, a method of forming an insulating film having a thickness of 1 to 5 nm may be adopted. As the insulating film, there may be used polyimide, polyimide amide, polyamide, acrylic polymer or the like. A fourth electrode <b>172</b> can be made up to a cathode, using an alkali metal or an alkali earth metal such as MgAg or LiF, or the like material.

0084For the fourth electrode <b>172</b>, a material containing magnesium (Mg), lithium (Li) or calcium (Ca), which has a small work function is used. An electrode made of MgAg (material wherein Mg and Ag are mixed with each other (Mg:Ag=10:1)) is preferably used. Besides, a MgAg Al electrode, a LiAl electrode, or a LiFAl electrode may be used. Thereon is formed an insulating film <b>173</b> made of silicon nitride or DLC to have a thickness of 2 to 30 nm, preferably 5 to 10 nm. The DLC film can be formed by plasma CVD. Even if the DLC film is formed at a temperature of 100° C. or less, the film can cover edges of the partition layer <b>170</b> satisfactorily. Stress inside the DLC film can be relieved by incorporating a very small amount of argon thereto. The DLC film can be used as a protective film. Since the DLC film has a high gas-barrier property against CO, CO₂, H₂O and the like, the DLC film is suitable for the insulating film <b>173</b> used as a barrier film.

0085<figref idref="DRAWINGS">FIG. 15</figref> is a view illustrating the construction of a luminous device having such a pixel section <b>450</b>. An organic resin <b>512</b> is charged on an insulating film <b>511</b> formed on the pixel section <b>450</b>, to seal a substrate <b>513</b> airtightly. A sealing member <b>515</b> may be fitted to edges thereof to make the air-tightness thereof higher. A flexible print circuit (FPC) is fitted to a terminal section <b>453</b>.

0086The construction of the active matrix type luminous device of the present example will be described, referring to <figref idref="DRAWINGS">FIG. 16</figref>, which is a perspective view. The active matrix driving type luminous device of the present example is composed of a pixel section <b>602</b>, a scanning line driving circuit <b>603</b> and a data line driving circuit <b>604</b>, which are formed on a glass substrate <b>601</b>. A switching TFT <b>605</b> in the pixel section is an n-channel type TFT, and is arranged at a point where a gate interconnection <b>606</b> connected to the scanning line driving circuit <b>603</b> crosses a source interconnection <b>607</b> connected to the data line driving circuit <b>604</b>. The drain region of a switching TFT <b>605</b> is connected to the gate of a current-controlling TFT <b>608</b>.

0087Furthermore, the data line side of the current-controlling TFT <b>608</b> is connected to a power supplying line <b>609</b>. Grounding voltage (earth voltage) is applied to the power supplying line <b>609</b>. An organic luminescent element <b>610</b> is connected to the drain region of the current-controlling TFT <b>608</b>. A given voltage (10 to 12 V in the present example) is applied to the cathode of the organic luminescent element <b>610</b>.

0088Input/output interconnections (connecting interconnections) <b>612</b> and <b>613</b> for transmitting signals to the driving circuit and an input/output interconnection <b>614</b> connected to the power supplying line <b>609</b> are fitted to an FPC <b>611</b>, which becomes external input/output terminals. As described above, a luminous device wherein the TFTs and the organic luminous device are combined with each other can be completed.

Example 2

0089Another embodiment of the present invention will be described, referring to drawings. One example of the construction of a pixel construction and a driving circuit suitable for a liquid crystal display device will be described. <figref idref="DRAWINGS">FIGS. 10A</figref> to <b>11</b>B, which are referred to in the present embodiment, are sectional views for explaining the process of the manufacture thereof. <figref idref="DRAWINGS">FIGS. 12A</figref> to <b>13</b> are top views corresponding thereto. In the following description, common reference numbers are used for convenience.

0090In <figref idref="DRAWINGS">FIG. 10A</figref>, a substrate <b>301</b>, first interconnections <b>302</b> to <b>306</b>, and semiconductor films <b>310</b> to <b>312</b> divided into an island form are the same as in Embodiment 1. <figref idref="DRAWINGS">FIG. 12A</figref> illustrates atop view thereof in this state.

0091First, a first insulating film <b>307</b> of a silicon oxynitride film is formed to have a thickness of 50 nm. A silicon oxide film made by TEOS is used to form a second insulating film <b>308</b> of 1 μm thickness. The surface is made flat by CMP, and subsequently a silicon oxynitride film <b>309</b> is formed as a third insulating film <b>309</b>, to produce a three-layer structure. Of course, the same structure as in Embodiment 1 may be used.

0092Next, as illustrated in <figref idref="DRAWINGS">FIG. 10B</figref>, a fourth insulating film <b>313</b><i>a </i>covering semiconductor films <b>310</b> to <b>312</b> is formed. The fourth insulating film <b>313</b><i>a </i>is made of an insulator containing silicon by plasma CVD or sputtering. The thickness thereof is from 40 to 150 nm.

0093Second interconnections <b>313</b><i>b </i>and <b>314</b> to <b>316</b> are formed thereon. The material of the second interconnections is not limited, and the interconnections are composed of a first layer made of a nitride of a high melting point metal such as molybdenum or tungsten, and a high melting point metal, a low-resistance metal such as aluminum or copper, polysilicon or the like, which is formed on the first layer. Specifically, for the first layer a nitride of one or more selected from W, Mo, Ta and Ti is selected, and for the second layer an alloy of one or more selected from W, Mo, Ta, Ti, Al and Cu, or an n-type polycrystal silicon is used. <figref idref="DRAWINGS">FIG. 12B</figref> illustrates a top view of this state.

0094Thereafter, impurity regions are formed in the respective semiconductor films by ion doping in the same way as in Embodiment 1. Furthermore, heat treatments for activation and hydrogenation are performed. In the heat treatments, it is advisable to use the RTA method in a gas-heating manner.

0095A passivation film <b>317</b> made of a silicon nitride film and a fifth insulating film <b>318</b> made of an organic resin material such as acrylic polymer, polyimide, polyamide, and polyimide amide are formed. This lamination is a fifth insulating film. The surface of the fifth insulating film is desirably made flat by CMP. Thereafter, openings are made and then interconnections <b>319</b> to <b>322</b> and a pixel electrode <b>323</b> are formed.

0096In this way, a driving circuit section <b>400</b> having an n-channel type TFT <b>402</b> and a p-channel type TFT <b>403</b> and a pixel section <b>401</b> having an n-channel type TFT <b>404</b> and a p-channel type TFT <b>405</b> are formed.

0097In the n-channel type TFT <b>402</b> of the driving circuit section <b>400</b>, a channel formed region <b>330</b> is formed at a portion where the first interconnection <b>303</b> crosses the second interconnection <b>313</b><i>b </i>in the semiconductor film <b>310</b>. A one-conduction-type impurity region <b>334</b> having a second concentration functions as an LDD, and a one-conduction-type impurity region <b>335</b> having a first concentration functions as a source or drain region. The length, in the channel length direction, of the LDD is from 0.5 to 2.5 μm, preferably 1.5 μm. A main purpose of such a construction of the LDD is to prevent deterioration of the TFTs based on hot carrier effect. In the p-channel type TFT <b>403</b>, a channel formed region <b>331</b> is formed at a portion where the first interconnection <b>304</b> crosses the second interconnection <b>314</b> in the semiconductor film <b>311</b>. An impurity region <b>336</b> of a conduction-type reverse to the one-conduction-type, which has a third concentration, functions as a source or drain region. The n-channel type TFT and the p-channel type TFT can constitute a shift register circuit, a buffer circuit, a level shifter circuit, a latch circuit or the like. The construction of the first n-channel type TFT <b>402</b> is particularly suitable for a buffer circuit having a high driving voltage, in order to prevent the deterioration based on hot carrier effect.

0098The present invention can be applied to a circuit made basically of an NMOS or a PMOS, as well as a circuit made of the CMOS.

0099In the n-channel type TFT <b>404</b> of the pixel section <b>401</b>, a channel formed region <b>332</b> is formed at a portion where the first interconnection <b>306</b> crosses the second interconnection <b>315</b> in the semiconductor film <b>312</b>. A one-conduction-type impurity region <b>337</b> having the second concentration functions as an LDD, and a one-conduction-type impurity region <b>338</b> having the first concentration functions as a source or drain region. This n-channel type TFT <b>404</b> is in a form wherein two TFTs are connected to each other in series so as to sandwich the one-conduction-type impurity region having the first concentration.

0100In the pixel section <b>401</b>, a capacitor section connected to the n-channel type TFT <b>404</b> is composed of the semiconductor film <b>312</b>, the fourth insulating film and a second interconnection <b>316</b>.

0101<figref idref="DRAWINGS">FIG. 13</figref> illustrates a top view of the pixel section in this state. Line A-A′ corresponds to FIG. <b>11</b>A. Line B-B′ corresponds to FIG. <b>11</b>B.

0102As described above, in the present invention, a pair of gate electrodes is formed to sandwich a semiconductor film, whereby the thickness of the semiconductor film is made substantially half and further depletion advances rapidly with the application of gate voltage to increase electric field effect mobility. The sub-threshold coefficient can be made low.

0103After the formation of the construction illustrated in <figref idref="DRAWINGS">FIG. 11A</figref>, an oriented film <b>453</b> is formed and subjected to rubbing treatment, as illustrated in FIG. <b>14</b>. Before the formation of the oriented film <b>453</b>, columnar spacers for keeping a substrate interval may be formed at desired positions by patterning an organic resin film such as an acrylic resin film, which is not illustrated. Spherical spacers may be scattered onto the entire surface of the substrate, instead of the columnar spacers.

0104Next, a counter electrode <b>451</b> is formed on a counter substrate <b>450</b>. An oriented film <b>452</b> is formed thereon and subjected to rubbing treatment. The counter electrode <b>451</b> is made of ITO. A counter substrate <b>450</b> on which a seal pattern <b>454</b> is formed is adhered thereto. Thereafter, a liquid crystal material <b>455</b> is injected into the space between both of the substrates, and then the space is completely sealed with a sealant (not illustrated). As the liquid crystal material, any known liquid crystal material may be used. In this way, an active matrix driving type liquid crystal display device illustrated in <figref idref="DRAWINGS">FIG. 14</figref> is completed.

Example 3

0105<figref idref="DRAWINGS">FIG. 17</figref> shows the characteristic of a 19-stage ring oscillator, which is an example of the operation characteristic of TFTs manufactured by the present invention. About-the sizes of the TFTs, the channel length (L) and the channel width (W) of the n-channel type TFT are 5 μm and 10 μm, respectively, and the channel length (L) and the channel width (W) of the p-channel type TFT are 5 μm and 20 μm, respectively. The TFTs of the present invention are manufactured according to Example 1. First electrodes and second electrodes are formed along the up-and-down direction, to sandwich a semiconductor film to produce gate electrodes. Edges thereof are substantially aligned with each other.

0106Comparative sample 1 is composed of conventional TFTs, wherein first electrodes (gate electrodes) are formed on one side of a semiconductor film. Comparative sample 2 is a product wherein first electrodes and second electrodes are formed along the up-and-down direction to sandwich a semiconductor film to produce gate electrodes and one of the two kinds of electrodes is formed to overlap with the entire surface of the semiconductor film.

0107<figref idref="DRAWINGS">FIG. 17</figref> is a graph wherein oscillation frequency against driving voltage is plotted. In the TFTs of the present invention, a higher oscillation frequency can be obtained at a low voltage than in Comparative samples 1 and 2. The advantageous effect is remarkable. This indirectly demonstrates the fact that the sub-threshold coefficient of the TFTs became smaller. The superiority of the present invention is actually shown. It is considered that in Comparative sample 2, its oscillation frequency is lowered by parasitic capacitance.

0108As described above, a pair of gate electrodes is formed to sandwich a semiconductor film, whereby the thickness of the semiconductor is made substantially half and further depletion advances rapidly with the application of gate voltage to increase electric field effect mobility. The sub-threshold coefficient can be made low. As a result, using a TFT having this construction, the driving voltage thereof can be lowered. Moreover, the current driving ability thereof is improved and the size (particularly the channel width) of the TFT can be made small. Therefore, the integration density can be improved.