Imaging device and method of manufacture
Summary by NHIP
Injection molded imaging package
The method encapsulates a semiconductor device with photosensitive elements in transparent resin within a mold. Color filters form by coloring the resin, and a lens may integrate into the package while leads remain partially exposed before bump bonding the chip.
Claim Score by NHIP
Abstract
An imaging chip is packaged in transparent injection molded material. The chip may have photosensitive elements arranged in a two-dimensional array on semiconductor material. Each element corresponds to a pixel of an image. The package may be formed of epoxy resin. In one aspect of the invention, the transparent plastic material provides a color filter. Second and third packages with complementary color filters may be used to provide signals for a color imaging system. In another aspect of the invention, a lens is integrated into the plastic package. In another aspect of the invention, a semiconductor chip is applied to a pre-formed plastic package by bump bonding.

Term
Term ended
Expired 26 September 2018, 8 years ago.
- Priority
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9 claims: 3 independent, 6 dependent
- 1Broadest claimClaim Score 86, broad(NHIP)A method of making an image device, comprising the steps of:locating a semiconductor device in a mold, said device including an integrated circuit and photosensitive elements;injecting transparent resin into said mold such that said integrated circuit and said photosensitive elements are covered by said transparent resin;providing a color filter by coloring said transparent resin;and subsequently, removing said semiconductor device from said mold.
- 6A method of making an imaging device, comprising the steps of:locating leads and bond pads in a mold, said leads being connected respectively to an associated bond pad;injecting transparent resin into said mold such that inner ends of said leads are encapsulated in said resin, outer ends of said leads and portions of said bond pads remaining exposed outside said resin;curing said resin to form a plastic package supporting said leads and bond pads;and subsequently, bump bonding a semiconductor device to said bond pads to electrically connect said semiconductor device to said leads.
- 9A method of making an image device, comprising the steps of:locating a semiconductor device in a mold, said device including an integrated circuit and photosensitive elements;attaching leads to said semiconductor device, injecting a colored transparent thermosetting resin into said mold such that said integrated circuit and said photosensitive elements are covered by said transparent resin;curing said thermosetting resin to form a package encapsulating said semiconductor device, said package providing a color filter in said transparent resin.
Independent claims3
56 paragraphs in 5 sections, as filed
CROSS-REFERENCE TO RELATED APPLICATIONS
0001This application is a divisional application of U.S. patent application Ser. No. 09/090,315, filed Jun. 4, 1998.
BACKGROUND OF THE INVENTION
00021. Field of the Invention
0003The present invention relates generally to imaging devices. The invention also relates to methods of packaging such devices. More particularly, the invention relates to a transparent plastic package for supporting and/or protecting a photosensitive semiconductor device.
00042. Discussion of the Related Art
0005Solid-state imaging devices are known in the art. They are used to generate electrical signals representative of an incident image. The devices may be responsive to visible, ultraviolet and/or infrared radiation. The devices may also be used to generate color component signals. Solid-state imaging devices are described in U.S. Pat. No. 5,708,263 (Wong), U.S. Pat. No. 5,461,425 (Fowler et al.) and U.S. Pat. No. 4,441,125 (Parkinson).
0006Prior art imaging devices are packaged in ceramic and glass plate structures. Such packages are generally cumbersome and inconvenient, and the materials are relatively expensive. In addition, the known packages require complicated methods of assembly. A ceramic housing must first be produced. The ceramic housing is used to provide support for the glass plate. The housing must be carefully constructed to ensure proper alignment of the imaging device and the glass plate. Then, the imaging device is secured within the ceramic housing. The imaging device needs to be properly aligned in the housing to avoid misalignment with the plate, which could cause optical distortion. And before the glass plate is applied, steps must be taken to provide electrical communication from the leads of the imaging device to the exterior of the solid ceramic housing.
0007Then, the glass plate is applied and it is necessary to permanently secure the plate to the housing. The connection between the glass plate and the housing must be permanent and air tight. In addition, there should be no misalignment of or damage to the plate. All of these steps must be done in a contaminant-free environment. Dust or other contaminants on the imaging device or inside the glass plate could degrade the performance of the device. The various steps may require different machinery. Consequently, it may be necessary to move partially assembled parts from one machine to another.
0008There is a need in the art for imaging devices that are constructed of low-cost materials. There is also a need in the art for an uncomplicated method of packaging imaging devices. There is also a need in the art for a packaging system that is readily adaptable to existing machinery and skills in the semiconductor device manufacturing industry.
SUMMARY OF THE INVENTION
0009The disadvantages of the prior art are overcome to a great extent by packaging an imaging chip in transparent plastic material. The chip may have photosensitive elements located on semiconductor material. The package may be formed of relatively inexpensive injection molded resin. In one aspect of the invention, the resin is a thermosetting epoxy resin. In another aspect of the invention, the photosensitive elements are arranged in a two-dimensional array. Each element corresponds to a pixel of an image.
0010In another aspect of the invention, the transparent plastic material provides a color filter. Second and third packages with complementary color filters may be used to provide complementary signals in a color imaging system.
0011The present invention also relates to an imaging device that has a package formed of transparent plastic material and a semiconductor chip located within the package. The chip has an array of photosensitive elements for generating electrical signals corresponding to an image. The photosensitive elements are covered by the transparent plastic material.
0012In one aspect of the invention, a lens is incorporated into the plastic package. The lens transmits the image onto the photosensitive elements. The lens may be formed by injection molding.
0013The present invention also relates to a system that has an image source for transmitting an image, a semiconductor device for responding to the image, and a package for protecting and supporting the semiconductor device. The package is formed of injection molded transparent plastic material. The image is transmitted through the plastic material.
0014The present invention also relates to a method of making a packaged imaging device. The method includes the following steps: locating an integrated circuit in a mold; injecting transparent resin into the mold such that the integrated circuit is covered by the resin; curing the resin; and removing the finished product from the mold. In one aspect of the invention, a release agent is applied to the mold for easy removal of the finished product.
0015In another aspect of the invention, a semiconductor chip is applied to a pre-formed plastic package by bump bonding. The package may be formed of injection molded transparent plastic.
0016These and other features and advantages of the invention will become apparent from the following detailed description of preferred embodiments of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS
0017<figref idref="DRAWINGS">FIG. 1</figref> is a isometric view of an imaging device constructed in accordance with the present invention.
0018<figref idref="DRAWINGS">FIG. 2</figref> is a top view of another imaging device constructed in accordance with the invention, at an intermediate stage of manufacture.
0019<figref idref="DRAWINGS">FIG. 3</figref> is a cross-sectional view of an imaging system constructed in accordance with the invention.
0020<figref idref="DRAWINGS">FIG. 4</figref> is a cross-sectional view of another imaging device constructed in accordance with the invention.
0021<figref idref="DRAWINGS">FIG. 5</figref> is a schematic view of another imaging system constructed in accordance with the invention.
0022<figref idref="DRAWINGS">FIG. 6</figref> is a cross-sectional view of another imaging system constructed in accordance with the invention.
0023<figref idref="DRAWINGS">FIG. 7</figref> is a cross-sectional view of yet another imaging device constructed in accordance with the invention.
0024<figref idref="DRAWINGS">FIG. 8</figref> is a bottom view of yet another imaging device constructed in accordance with the invention.
0025<figref idref="DRAWINGS">FIG. 9</figref> is a top view of the imager chip for the device of <figref idref="DRAWINGS">FIG. 8</figref>.
0026<figref idref="DRAWINGS">FIG. 10</figref> is a top view of the package for the device of <figref idref="DRAWINGS">FIG. 8</figref>.
0027<figref idref="DRAWINGS">FIG. 11</figref> is a top view of yet another imaging device constructed in accordance with the invention.
0028<figref idref="DRAWINGS">FIG. 12</figref> is a cross-sectional view of the imaging device of <figref idref="DRAWINGS">FIG. 10</figref>, taken along the line <b>12</b>—<b>12</b>.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
0029Referring now to the drawings, where like reference numerals designate like elements, there is shown in <figref idref="DRAWINGS">FIG. 1</figref> an imaging device <b>10</b> constructed in accordance with the present invention. The device <b>10</b> has a semiconductor chip <b>12</b> and metal leads <b>14</b>. The inner ends <b>16</b> of the leads <b>14</b> are connected to the chip <b>12</b> by suitable lead wires. The lead wires are not shown in <figref idref="DRAWINGS">FIG. 1</figref>.
0030The chip <b>12</b>, the lead wires, and the inner ends <b>16</b> of the leads <b>14</b> are completely encapsulated in a transparent plastic package <b>18</b>. The package <b>18</b> provides structural support for the chip <b>12</b>, the lead wires and the leads <b>14</b>. In addition, the package <b>18</b> protects the chip <b>12</b> from the environment. Other features and advantages of the transparent package <b>18</b> are described in more detail below.
0031The chip <b>12</b> may be formed of semiconductor material. The chip <b>12</b> may be, for example, a complementary metal oxide semiconductor (CMOS) device. The chip <b>12</b> has photosensitive elements <b>20</b> for receiving radiant energy from an image source and for generating corresponding electrical signals. The photosensitive elements <b>20</b> are covered by the transparent package <b>18</b>. Suitable circuitry (not illustrated) may also be integrated into the chip <b>12</b>.
0032The photosensitive elements <b>20</b> may be in a suitable two-dimensional array. For example, the elements <b>20</b> may be arranged in a 480×640 array. The invention should not be limited, however, to the number or particular arrangement of photosensitive elements <b>20</b> on the chip <b>12</b>. More or less elements <b>20</b> may be used to practice the invention.
0033The photosensitive elements <b>20</b> generate pixel signals representative of the radiant image that is incident on the surface of the chip <b>12</b>. The signals are transmitted through the wires and the leads <b>14</b>, and processed to reconstruct a version of the image at a remote location. Thus, the imaging device <b>10</b> may be used, for example, in a digital electronic camera. The invention should not be limited, however, to any particular field of use. The invention may be used in a wide variety of radiation sensing systems, image processing systems and other systems.
0034In the illustrated embodiment, the package <b>18</b> is formed of a clear epoxy resin. Other thermosetting resins, or other plastic materials, including thermoplastic resins, may be used if desired. The coefficient of expansion for the plastic material may be substantially different than that of the chip <b>12</b>.
0035The device <b>10</b> may be economically manufactured by injection molding. In operation, the chip <b>12</b>, the wires (not shown in <figref idref="DRAWINGS">FIG. 1</figref>) and the leads <b>14</b> are assembled and located in a suitable mold (not illustrated). Epoxy resin is injected into the mold to completely and integrally surround the chip <b>12</b>, the wires and the inner ends <b>16</b> of the leads <b>14</b>. The epoxy resin is then cured to form the rigid, self-supporting package <b>18</b>. Note that the wires between the chip <b>12</b> and the leads <b>14</b> are not shown in <figref idref="DRAWINGS">FIG. 1</figref> in order to better show the manner in which the chip <b>12</b> is encased in transparent plastic material.
0036Preferably, the injection molding process is controlled to maintain the transparency of the plastic material over the photo-sensitive elements <b>20</b>. For example, the formation of bubbles in the plastic material near the photosensitive elements <b>20</b> should preferably be avoided. Such bubbles may affect the resolution of the imaging device <b>10</b>. For certain uses, however, where high resolution is not required, small bubbles and other imperfections in the molded plastic package <b>18</b> may be tolerated.
0037<figref idref="DRAWINGS">FIG. 2</figref> shows another imaging device <b>30</b> constructed in accordance with the invention. The device <b>30</b> is formed by injection molding the package <b>18</b> on a lead frame <b>32</b>. The lead frame <b>32</b> has a paddle <b>34</b> for supporting the chip <b>12</b>. Lead frames of the type shown in <figref idref="DRAWINGS">FIG. 2</figref> are disclosed for example in U.S. Pat. No. 5,021,864 (Kelly).
0038To manufacture the device <b>30</b>, the chip <b>12</b> is adhesively attached to the paddle <b>34</b>. Wires from pads on the chip <b>12</b> are bonded to the respective leads <b>14</b> on the lead frame <b>32</b>. The assembly <b>12</b>, <b>32</b> is then located in a mold (not illustrated). Clear epoxy is injected into the mold and cured to form the package <b>18</b>. The lead frame <b>32</b> is then trimmed away at the outer ends of the leads <b>14</b> to produce the finished product.
0039Preferably, the transparent molded material completely surrounds the top surface of the chip <b>12</b>, the bottom surface of the paddle <b>34</b>, and the inner ends <b>16</b> of the leads <b>14</b>. The plastic material may fill the spaces between the inner ends <b>16</b> of the leads <b>14</b> to provide a rugged, integrated assembly. The advantages, features and uses of the imaging device <b>10</b> shown in <figref idref="DRAWINGS">FIG. 1</figref> are applicable to the imaging device <b>30</b> shown in <figref idref="DRAWINGS">FIG. 2</figref>.
0040As shown in <figref idref="DRAWINGS">FIG. 3</figref>, the imaging device <b>10</b> may be assembled adjacent a lens <b>40</b> to provide an imaging system <b>42</b>. A suitable support structure <b>44</b> may be provided to support the imaging device <b>10</b> and the lens <b>40</b>. The lens <b>40</b> provides an image source for the system <b>42</b>. In operation, radiation <b>46</b> incident on the lens <b>40</b> is imaged on the surface of the chip <b>12</b>. The photosensitive elements generate pixel signals representative of the image. The signals are transmitted through lead wires <b>48</b> and signal wires <b>50</b> for processing.
0041Referring now to <figref idref="DRAWINGS">FIG. 4</figref>, a lens <b>52</b> may be molded into a plastic package <b>54</b>. The lens <b>52</b> may be formed during the injection molding of the package <b>54</b>, as a single step operation. The package <b>54</b> is the same as the package <b>18</b> shown in <figref idref="DRAWINGS">FIG. 1</figref> except for the integrally molded lens <b>52</b>. The lens <b>52</b> may be used instead of or as a complement to the lens <b>40</b> of <figref idref="DRAWINGS">FIG. 3</figref>.
0042<figref idref="DRAWINGS">FIG. 5</figref> shows a color imaging system <b>60</b>. The system <b>60</b> has a beam splitter <b>62</b> and first, second and third component imaging devices <b>64</b>, <b>66</b>, <b>68</b>. The beam splitter <b>62</b> transmits the same image onto each of the component imaging devices <b>64</b>, <b>66</b>, <b>68</b>. The split beams of radiation are designated by arrows <b>70</b>, <b>72</b>, <b>74</b>. The component imaging devices <b>64</b>, <b>66</b>, <b>68</b> may be identical to the imaging devices <b>10</b>, <b>30</b> discussed above, except that the molded packages <b>18</b>R, <b>18</b>G, <b>18</b>B for the devices <b>64</b>, <b>66</b>, <b>68</b> are formed of red, green and blue transparent plastic, respectively. The colored packages <b>18</b>R, <b>18</b>G, <b>18</b>B provide respective color component filters.
0043Thus, the chip <b>12</b> for the first component imaging device <b>64</b> receives only the red component of the image from the beam splitter <b>62</b>. The chips <b>12</b> for the second and third imaging devices <b>66</b>, <b>68</b> receive only green and blue components of the image, respectively. Signals from the three imaging devices <b>64</b>, <b>66</b>, <b>68</b> may be combined via signal lines <b>76</b>, <b>78</b>, <b>80</b> to produce a color version of the image at a remote location <b>82</b>.
0044The component imaging devices <b>64</b>, <b>66</b>, <b>68</b> shown in <figref idref="DRAWINGS">FIG. 5</figref> may be provided with integrally molded lenses <b>52</b> of the type shown in <figref idref="DRAWINGS">FIG. 4</figref>. The devices <b>64</b>, <b>66</b>, <b>68</b> may also be used with a separate lens <b>40</b> of the type shown in <figref idref="DRAWINGS">FIG. 3</figref>. In each case, the devices <b>64</b>, <b>66</b>, <b>68</b> may be molded with or without a paddle lead frame <b>32</b>.
0045In an alternative embodiment of the invention, the red, green and blue color filters integrated into the packages <b>18</b> may be replaced by subtractive cyan, magenta and yellow transparent packages. The transparent plastic for the packages may be colored with a variety of different colors depending on the parameters of the system within which the imaging devices are used.
0046In an alternative embodiment of the invention, a single imaging device <b>10</b> may be associated with a color filter array (CFA) <b>84</b> (<figref idref="DRAWINGS">FIG. 6</figref>). An example of a color filter array is shown in U.S. Pat. No. 5,668,596 (Vogel). The color filter array <b>84</b> may provide a separate color filter (red, green or blue) for each pixel of the image. The individual filters on the color filter array <b>84</b> are aligned with the photosensitive elements <b>20</b> on the chip <b>12</b> such that the single chip may be used for color image processing. In the embodiment shown in <figref idref="DRAWINGS">FIG. 6</figref>, the plastic material making up the package <b>18</b> is clear (with no color).
0047Referring now to <figref idref="DRAWINGS">FIG. 7</figref>, in another embodiment of the invention, the color filter array <b>84</b> may be located within and entirely surrounded by the plastic material of the package <b>18</b>. As in the embodiment of <figref idref="DRAWINGS">FIG. 6</figref>, the individual filters of the color filter array <b>84</b> are aligned with the respective photosensitive elements <b>20</b> on the chip <b>12</b> for color processing.
0048Referring now to <figref idref="DRAWINGS">FIGS. 8–10</figref>, another imaging device <b>90</b> constructed in accordance with the invention is formed by bump bonding a semiconductor chip <b>92</b> onto a pre-molded plastic package <b>94</b>. <figref idref="DRAWINGS">FIG. 9</figref> shows the chip <b>92</b> by itself, before the chip <b>92</b> is bonded to the package <b>94</b>. The chip <b>92</b> generally has the features and advantages of the chip <b>12</b> discussed above. In addition, the chip <b>92</b> has bond pads <b>96</b>. The pre-molded package <b>94</b> is shown in <figref idref="DRAWINGS">FIG. 10</figref>. The package <b>94</b> may be formed of the transparent epoxy material discussed above. In addition, the package <b>94</b> has bond pads <b>98</b> for providing electrical connections to respective metal leads <b>14</b>. The preferred method of making the imaging device <b>90</b> is described in more detail below.
0049To manufacture the imaging device <b>90</b>, the leads <b>14</b> and the bond pads <b>98</b> for the package <b>94</b> are assembled in a mold (not illustrated). Transparent epoxy resin (or another moldable material) is injected into the mold. The plastic material is cured to form a structure that rigidly supports the leads <b>14</b> and the bond pads <b>98</b>. The chip <b>92</b> is then flipped and bump bonded onto the pads <b>98</b>. The pads <b>96</b> on the chip <b>92</b> are soldered to the pads <b>98</b> on the package <b>94</b> to establish electrical connections between the photosensitive elements <b>20</b> and the leads <b>14</b>. If desired, a suitable resin may be applied to the back surface of the chip <b>92</b> to complete the device <b>90</b>.
0050In an alternative embodiment of the invention, the package <b>94</b> may be colored for use in a color imaging system of the type shown in <figref idref="DRAWINGS">FIG. 5</figref>. The packages <b>94</b> may be formed with or without integral lenses <b>52</b> of the type shown in <figref idref="DRAWINGS">FIG. 4</figref>.
0051Referring now to <figref idref="DRAWINGS">FIGS. 11 and 12</figref>, another imaging device <b>110</b> constructed in accordance with the present invention includes a housing <b>112</b>, a chip <b>12</b>, and a molded transparent plastic cover <b>114</b>. The photosensitive elements <b>20</b> are connected to suitable leads <b>14</b> on the chip <b>12</b>.
0052To manufacture the device <b>110</b>, the rigid housing <b>112</b> may be made of ceramic or molded plastic. The chip <b>12</b> is then located in the housing <b>112</b> and connected to the leads <b>14</b>. The cover <b>114</b> may then be formed by injecting molten epoxy resin (or another suitable plastic material) into the housing <b>112</b>. The molten material encapsulates the chip <b>12</b> and the leads <b>14</b>.
0053The molten material may be conveniently contained within the housing <b>112</b> during the molding process by the side walls <b>116</b> of the housing <b>112</b>. The housing <b>112</b> has a closed bottom <b>118</b> to prevent molten plastic from draining out of the housing <b>112</b> by gravity. Thus, the housing <b>112</b> serves as a mold during the formation of the cover <b>114</b>.
0054The molten plastic material is cured or hardened to produce a rugged, integrated final product. The solid plastic material <b>114</b> secures the chip <b>12</b> in place within the housing <b>112</b> and protects the chip <b>12</b> from the environment.
0055The cover <b>114</b> may be clear or colored, as in the embodiments discussed above. A lens <b>52</b> may be molded into the cover <b>114</b>, if desired. A color filter array <b>84</b> of the type shown in <figref idref="DRAWINGS">FIG. 7</figref> may be molded into the cover <b>114</b>, if desired.
0056The above descriptions and drawings are only illustrative of preferred embodiments which achieve the features and advantages of the present invention, and it is not intended that the present invention be limited thereto. Any modification of the present invention which comes within the spirit and scope of the following claims is considered part of the present invention.
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| Information Disclosure Statement (IDS) Filed | – | |
| Date Forwarded to ExaminerFWDX | FWDX | |
| Response after Non-Final ActionA... | A... | |
| Mail Non-Final RejectionNon-final rejectionMCTNF | MCTNF | |
| Non-Final RejectionNon-final rejectionCTNF | CTNF | |
| Date Forwarded to Examiner | – | |
| Date Forwarded to Examiner | – | |
| Disposal for a RCE / CPA / R129AbandonedABN9 | ABN9 | |
| Request for Continued Examination (RCE)RCEX | RCEX | |
| Workflow incoming amendment IFWWAMD | WAMD | |
| Workflow - Request for RCE - BeginBRCE | BRCE | |
| Mail Final Rejection (PTOL - 326)Final rejectionMCTFR | MCTFR | |
| Final RejectionFinal rejectionCTFR | CTFR | |
| Date Forwarded to ExaminerFWDX | FWDX | |
| Reference capture on IDSRCAP | RCAP | |
| Information Disclosure Statement (IDS) Filed | – | |
| Information Disclosure Statement (IDS) Filed | – | |
| Response after Non-Final ActionA... | A... | |
| Workflow incoming amendment IFWWAMD | WAMD | |
| Mail Non-Final RejectionNon-final rejectionMCTNF | MCTNF | |
| Non-Final RejectionNon-final rejectionCTNF | CTNF | |
| IFW TSS Processing by Tech Center CompleteTSSCOMP | TSSCOMP | |
| Miscellaneous Incoming LetterLET. | LET. | |
| Case Docketed to Examiner in GAUDOCK | DOCK | |
| Reference capture on IDSRCAP | RCAP | |
| Information Disclosure Statement (IDS) Filed | – | |
| Information Disclosure Statement (IDS) Filed | – | |
| Case Docketed to Examiner in GAUDOCK | DOCK | |
| Application Dispatched from OIPEOIPE | OIPE | |
| Application Is Now CompleteCOMP | COMP | |
| IFW Scan & PACR Auto Security Review | – | |
| IFW Scan & PACR Auto Security Review | – | |
| Reference capture on IDSRCAP | RCAP | |
| Preliminary AmendmentA.PE | A.PE | |
| Information Disclosure Statement (IDS) Filed | – | |
| Information Disclosure Statement (IDS) Filed | – | |
| Initial Exam Team nnIEXX | IEXX |
9 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Lapsed due to failure to pay maintenance feeLapsedFP | FP | |
| Lapse for failure to pay maintenance feesLapsedPATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITYLAPS | LAPS | |
| Information on status: patent discontinuationPATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362STCH | STCH | |
| Fee payment procedureMAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.)FEPP | FEPP | |
| Fee paymentFPAY | FPAY | |
| Fee paymentFPAY | FPAY | |
| AssignmentAS | AS | |
| AssignmentAS | AS | |
| Fee payment procedurePAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITYFEPP | FEPP |
Numbers
- Publication
- 7157302
- Application
- 10284248
Titles
- English
- Imaging device and method of manufacture
Patent term adjustment
- A delay
- +135 daysthe office missed an examination deadline
- Applicant delay
- −21 days
- Net adjustment
- 114 days
Classification
- CPC, 4
- H10F77/50
- H10F39/804
- H10F39/806
- H10F39/011
- IPC, 3
- H01L21 00
- H10P95 00
- H01L31 0203