US3842279A

Method and apparatus for aligning a charged particle beam

Abstract

This record has no abstract on file.

US3842279A, drawing sheet 1
Sheet 1 of 6

Term

Term ended

Expired 15 October 1991, 34.9 years ago.

  1. Priority
  2. Filed
  3. Granted
  4. Expired
  5. Today

9 claims: 3 independent, 6 dependent

  1. 1
    I claim:1. Apparatus for aligning a beam of charged particles with a section of an elongated passageway provided with a transverse wall having a beam aperture through which said beam passes, said wall being effective to emit X-rays when impinged by said charged particles, said beam alignment apparatus comprising: a set of X-ray detectors with collimators, said collimators being 3,842,279 so aligned as to pass X-rays only if they come from certain portions of said wall with which said collimators are aligned, and signal processing means which compares the signals from the various X-ray detectors to ascertain which edge portion of the beam aperture is 5 impinged by an excessive amount of said charged particles and therefore emitting an excessive amount of Xrays, and beam deflecting means responding to said signal processing means so as to equalize the signal strength received by all of said X-ray detectors thereby 10 to align said beam in said aperture.
  2. 3
    The method of realigning a beam of charged particles said beam being produced by a beam generator 20 having an elongated hollow structure provided with a transverse wall having an aperture therethrough, said wall adjacent said aperture being effective to emit Xrays when impinged by said charged particles, said beam generally being aligned to pass longitudinally 25 through said structure, the said method comprising controlling the path of said beam of charged particles through said aperture by sensing the X-rays emitted from said wall when said charged particles impinge on selected portions of said wall and adjusting the path of 30 said beam of charged particles to minimize the magnitude of said X-rays thereby centering said beam of charged particles in said aperture.
  3. 4
    A charged particle beam generator comprising a body member having an evacuated chamber and a pas- 35 sageway leading from said chamber outwardly of said body member, means in said chamber generating and projecting a beam of charged particles through said passageway, a chamber wall member in said passageway, said wall member being provided with first and 40 second wall surfaces spaced longitudinally along the path of said beam of particles, said wall member having an aperture extending between and opening outwardly of said first and second wall surfaces, said first wall surface being on the side of said wall member toward said generating means and effective to emit X-rays as a consequence of the impingement thereon of said charged particles, beam adjusting means adjacent said beam of particles and actuatable to alter the path of said beam of particles, X-ray responsive means, X-ray selecting means selectively transmitting certain of said X-rays produced by a first portion of said first wall surface to said X-ray responsive means and preventing transmission of X-rays produced by other portions of said first wall surface from reaching said X-ray responsive means, and control means operatively connecting said X-ray responsive means with said beam adjusting means, said control means being effective actuate said beam adjusting means to alter the path of said beam of particles in a direction to minimize the magnitude of said X-rays which are received by said X-ray responsive means.