US10656013B2

Nanostructure based article, optical sensor and analytical instrument and method of forming same

Summary by NHIP

Optical Sensor with Nanostructures

The apparatus includes a transmissive substrate containing nanostructures that selectively extract specific wavelengths of electromagnetic energy. An input optic directs energy into the substrate via its first major face, entering at an angle greater than or equal to the optic's critical angle and exiting without total internal reflection.

Claim Score by NHIP

Read claim 28, the broadest

Abstract

An apparatus includes a substrate transmissive of electromagnetic energy of at least a plurality of wavelengths, having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, at least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the substrate; and an input optic oriented and positioned to provide electromagnetic energy into the substrate via at least one of the first or the second major face of the substrate. Nanostructures can take the form of photonic crystal arrays, a plasmonic structure arrays, or holographic diffraction gratings. The apparatus may be part of a spectrometer.

US10656013B2, drawing sheet 1
Sheet 1 of 10

Term

10.2 yearsleft in the term

Expires 13 December 2036, including 77 days of term adjustment.

  1. Priority
  2. Filed
  3. Granted
  4. Today
  5. Expires

34 claims: 7 independent, 27 dependent

  1. 1
    An apparatus, the apparatus comprising:a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;at least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the substrate via one of the first major face and the second major face;andan input optic oriented and positioned to provide electromagnetic energy into the substrate via the first major face of the substrate, wherein the input optic is transmissive of electromagnetic energy, which enters the input optic through a first surface of the input optic at an angle greater than or equal to a critical angle of the input optic, and exits through a second surface of the input optic without total internal reflection therein, and wherein the first surface is opposite and faces away from the second surface.
  2. 16
    A method of fabricating an apparatus, the method comprising:forming a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;forming at least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the substrate via one of the first major face and the second major face;andorienting and positioning an input optic to provide electromagnetic energy into the substrate via the first major face of the substrate, wherein the input optic is transmissive of electromagnetic energy, which enters the input optic through a first surface of the input optic at an angle greater than or equal to a critical angle of the input optic, and exits through a second surface of the input optic without total internal reflection therein.
  3. 28
    Broadest claimClaim Score 56, average(NHIP)An apparatus, the apparatus comprising:a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;at least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the substrate via the first major face of the substrate;andan input optic oriented and positioned to provide electromagnetic energy into the substrate via the first major face of the substrate.
  4. 29
    A method of fabricating an apparatus, the method comprising:forming a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;forming at least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the first major face of the substrate;andorienting and positioning an input optic to provide electromagnetic energy into the substrate via the first major face of the substrate.
  5. 30
    An apparatus comprising:a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;an input optic oriented and positioned to provide electromagnetic energy into the substrate via the first major face of the substrate such that the electromagnetic energy intersects the first major face at an oblique angle that is oblique with respect to the first major face, an entirety of the input optic located in a first region;andat least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the substrate via the second major face of the substrate such that the first set of wavelengths pass through the second major face at an angle that is non-parallel with respect to the oblique angle, the at least a first nanostructure located in a second region, and the first region spaced from the second region with respect to the length.
  6. 31
    A method of fabricating an apparatus, the method comprising:forming a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;orienting and positioning an input optic in a first region to provide electromagnetic energy into the substrate via the first major face of the substrate;andforming at least a first nanostructure in a second region that selectively extracts electromagnetic energy of a first set of wavelengths from the second major face of the substrate, wherein the first region is spaced from the second region with respect to the length.
  7. 34
    An apparatus comprising:a substrate that is transmissive of electromagnetic energy of at least a plurality of wavelengths, the substrate having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, the second end opposed to the first end across the length of the substrate, the second major face opposed across the thickness of the substrate from the first major face, the at least one edge which extends between at least a portion of the first major face and a portion of the second major face, the width of the substrate greater than the thickness of the substrate;at least a first nanostructure that selectively extracts electromagnetic energy of a first set of wavelengths from the substrate via at least one of the first major face or the second major face of the substrate;andan input optic oriented and positioned to provide electromagnetic energy into the substrate, the input optic positioned such that an entirety of the input optic is closer to the first end of the substrate than an entirety of the at least a first nanostructure is from the first end of the substrate as measured along the length.