Vacuum sputtering apparatus forming gradient thickness thin-film

Vacuum coating device for forming a gradient film thickness

The present invention relates to a vacuum coating device, and more particularly to a vacuum coating device for forming a gradient film thickness.

Referring to the sixth and seventh diagrams, the conventional continuous vacuum coating apparatus is configured to cause a plurality of substrates (90) to be linearly advanced in a sputtering chamber (70) by using a carrier, the sputtering chamber. (70) is further equipped with a sputtering source (80), so that the object to be plated (90) can face the surface of the sputtering source (80) when it is linearly advanced in the sputtering chamber (70), thereby The molecules of the sputtering source (80) can be plated on the surface of the object to be plated (90), and a film (81) is formed on the surface of the object to be plated (90), as shown in the eighth figure.

However, since the surface of the sputtering source (80) of the conventional vacuum coating apparatus is disposed equidistantly from the surface of the object to be plated (90), the target molecules provided by the sputtering source (80) are plated on the object to be plated (90). When the surface is formed, the film (81) formed on the surface of the object to be plated (90) has a uniform thickness. When the thickness of the film (81) is uniform, the color and light transmittance of the surface of the object to be plated (90) are also uniform without change, and the appearance texture exhibited by the surface of the object (90) is relatively monotonous.

In view of the fact that the appearance of the surface of the object to be coated processed by the existing vacuum coating device is relatively monotonous, the main purpose of the present invention is to provide a vacuum coating device for forming a gradient film thickness, which can cause a gradual change of the surface of the object to be plated. Gloss or light transmission.

In order to achieve the above object, the vacuum coating apparatus for forming a gradient film thickness of the present invention comprises: a sputtering chamber; a transmission system disposed inside the sputtering chamber and including a carrier, the carrier The system can be linearly advanced inside the sputtering cavity, the top surface of the carrier is provided with more than one support member, the one or more support members are provided with a holding portion; and a sputtering source is provided On the inner side of the sputtering chamber, the sputtering source has a target material having a surface, and the surface of the target material is drawn when it is linearly advanced with the holding portion of the one or more support members. The plane system is in an unequal distance configuration.

Preferably, the plane drawn by the holding portion of the one or more support members is perpendicular to the top surface of the carrier, and the surface of the target material is inclined to the top surface of the carrier.

Preferably, the plane drawn by the holding portion of the one or more support members is inclined when the plane is inclined to the top surface of the carrier, and the surface of the target material is perpendicular to the top surface of the carrier.

Preferably, the transmission system further comprises two axle fixing seats, a plurality of axles and a transmission motor, wherein the two axle fixing seats are respectively disposed on two sides of the interior of the sputtering cavity, and the plurality of axles are rotatably spaced The two axle assemblies are disposed on the two axle fixing bases, and the adjacent axles are connected to each other by a coupling member. Each of the two axles is respectively provided with a roller. The transmission motor is coupled with one of the axles to drive the axles to rotate. The system is arranged on the rollers of each axle.

Preferably, the coupling member is a chain or belt.

The invention further comprises a vacuum coating device for forming a gradient film thickness, comprising: a sputtering cavity; a transmission system disposed inside the sputtering cavity and comprising a carrier, the carrier system And a sputtering source is disposed on an inner side of the sputtering cavity, the sputtering source has a target material, and the target material has a surface. The surface of the target material is disposed at an unequal distance from the top surface of the carrier.

Preferably, the surface of the target material is inclined to the top surface of the carrier.

The present invention is configured such that the surface of the target material is unequal to the plane drawn when the surface of the target material is linearly advanced with the holding portion of the one or more support members, or the surface of the target material is directly unequal to the top surface of the carrier. Arranged, so when the holding portion holds a plated object or the object to be plated is directly placed on the top surface of the carrier, the surface of the object to be plated is also disposed at an unequal distance from the surface of the target material, when the object to be plated is When the carrier advances in a straight line in the sputtering chamber to plate the target material molecules, a gradient film having a thickness inconsistent may be formed on the surface of the object to be plated, and the film may have a gradual change effect of gloss and transmittance due to the change of the thickness thereof. Therefore, it is possible to impart a decorative appearance to the surface of the object to be plated, and to improve the appearance of the object to be plated.

Referring to the first, second and third figures, a preferred embodiment of the present invention includes a sputtering chamber (10), a transmission system disposed in the sputtering chamber (10) ( 20) and a sputtering source (30) disposed in the sputtering cavity (10), wherein the sputtering cavity (10) is respectively provided with an opening at the front and the rear ends, and the object is allowed to pass the splash a plating chamber (10); the transmission system (20) is capable of carrying animal products to advance through the interior of the sputtering chamber (10), which may include two axle mountings (21), two rails (22), and multiple axles (23), a transmission motor (24) and a carrier (25), the two axle fixing seats (21) are respectively disposed on two sides of the inside of the sputtering cavity (10), the two rails (22) Provided close to the outer sides of the two axle fixing seats (21), the plurality of axles (23) are rotatably spaced apart from the two axle fixing seats (21), and the adjacent axles (23) are combined Parts such as chains or belts are connected to each other, and when an axle (23) is rotated, the adjacent axles (23) can be rotated, and a roller (231) is respectively disposed at each end of each axle (23). The transmission motor (24) And one round (231) combined to drive the rotation of each axle (23), the carrier (25) is disposed on the roller (231) of each axle (23), and the carrier (25) can be driven to rotate the carrier (25) Straight forward, the top surface (251) of the carrier (25) is provided with more than one support member (252), and the one or more support members (252) are provided with a holding portion (253) for clamping and fixing one The object to be plated (40), in the preferred embodiment, the plane drawn by the holding portion (253) of the one or more support members (252) linearly advancing perpendicular to the top surface of the carrier (25) (251); the sputtering source (30) is disposed on one side of the sputtering cavity (10), the sputtering source (30) has a target material (31), and the target material (31) is Having a surface (311), the surface (31) of the target material (31) and the holding portion (253) of the one or more support members (252) are linearly advanced, and the planes drawn are arranged at an unequal distance. In the preferred embodiment, the surface (31) of the target material (31) is inclined to the top surface (251) of the carrier (25).

When the vacuum coating operation is performed by using the apparatus of the preferred embodiment, the object to be plated (40) is clamped on the holding portion of the one or more support members (252), and the transmission system (20) can drive the substrate. The object to be plated (40) linearly advances inside the sputtering chamber (10), and when the object to be plated (40) faces the surface (311) of the target material (31) through the sputtering source (20) The surface (41) of the object to be plated (40) and the surface of the target material (30) are arranged at an unequal distance, and the extending direction of the unequal distance arrangement is perpendicular to the advancing direction of the object to be plated (40). Further, referring to the third figure, when the molecule of the target material (30) is plated on the surface (41) of the object to be plated (40), the surface (41) of the object to be plated (40) is attached to the target. The surface (31) of the material (30) is maintained at an unequal distance, so that the surface (41) of the object to be plated (40) forms a film (312) having an inconsistent thickness, and the film (312) having a larger distance is thicker. small. Since various metal target materials or target materials having optical characteristics may have a gradation change effect on color or light transmittance when forming a film having inconsistent thickness, the device of the preferred embodiment can be applied to manufacture many electrons. The appearance of the device shell is gradually coated with a coating, even a non-conductive layered film.

Referring to the fourth and fifth figures, in another preferred embodiment, the plane drawn by the holding portion (253A) of the one or more support members (252A) is inclined obliquely to the load. With the top surface (251A) of (25A), the surface (311A) of the target material (31A) is perpendicular to the top surface (251A) of the carrier (25A), thereby also allowing the surface of the object to be plated (40A) (41A) is disposed at an unequal distance from the surface (311A) of the target material (31A), and further forms a gradation film having a thickness inconsistent on the surface (41A) of the object to be plated (40A).

Another preferred embodiment of the present invention is such that the top surface of the carrier is not provided with a support member, and the object to be plated is placed directly on the top surface of the carrier, and the surface of the target material and the carrier are The plane is in an unequal distance configuration, for example, the surface of the target material is inclined to the top surface of the carrier. Therefore, after the object to be coated is placed on the top surface of the carrier, the surface of the object to be coated and the surface of the target material still appear not. Equidistant configuration, so that the surface of the object to be plated can be coated with a gradient film of inconsistent thickness.

<p>(10)Sputter chamber</p><p>(20)Transmission system</p><p>(21)·Axle mount</p><p>(22) Guide rails</p><p>(23)Axle</p><p>(231)Rollers</p><p>(24)Drive motor</p><p>(25) Vehicles</p><p>(25A) Vehicles</p><p>(251) top surface</p><p>(251A) top</p><p>(252)Support</p><p>(252A) Support</p><p>(253) Holding Department</p><p>(253A) Holding Department</p><p>(30)Sputter source</p><p>(30A)Sputter source</p><p>(31) target materials</p><p>(31A) Target material</p><p>(311) surface</p><p>(311A) Surface</p><p>(312) Film</p><p>(40)The object to be plated</p><p>(40A)The object to be plated</p><p>(41) surface</p><p>(41A) Surface</p><p>(70)Sputter chamber</p><p>(80)Sputter source</p><p>(81) film</p><p>(90)The object to be plated</p>

The first figure is a side view of a preferred embodiment of the present invention.

The second drawing is a top view of a preferred embodiment of the present invention.

The third figure is a schematic cross-sectional view of the surface of the object to be plated after forming a film using the preferred embodiment of the present invention.

The fourth drawing is a side view of another preferred embodiment of the present invention.

The fifth drawing is a top view of another preferred embodiment of the present invention.

The sixth drawing is a side view of the prior art vacuum coating apparatus.

The seventh figure is a top view of the prior art vacuum coating apparatus.

The eighth figure is a schematic cross-sectional view of the surface of the object to be plated after forming a film using an existing vacuum coating device.