Solar cell production device

Solar cell manufacturing device

The present invention refers to a solar cell manufacturing device, and more particularly to a solar cell manufacturing device that integrates a process such as scribing, detection and repair on the same machine.

There are many types of solar cells, and the so-called "solar cells" generally include twin-crystal solar cells, thin-film solar cells, electrochemical solar cells, solar cells fabricated from flexible substrates, and various types of flat panels. The characteristic solar photovoltaic power generation device, wherein the twin crystal solar cell further comprises: a single crystal germanium, a polycrystalline germanium or the like; the thin film solar cell further comprises: an amorphous germanium, a microcrystalline germanium, a CIGS, A single layer or a multilayer structure of different film materials such as CdTe and a multi-component compound; the electrochemical solar cell further includes: an organic material, a polymer material, a nano material, etc.; and a flexible substrate. The solar cell further includes: a metal foil or a compound sheet as a substrate. According to the type of material, it can be divided into single crystal silicon, polycrystalline silicon, amorphous silicon (abbreviated as a-Si), III-V, including: gallium arsenide ( GaAs), Indium Phosphide (InP), InGaP, II-VI, including: CdTe, CuInSe₂Electrochemical materials include: dye sensitization, organic materials, polymer materials, nano materials, and the like.

In the overall process of solar cells, the so-called "component pattern marking process" includes different scribing methods, such as: using lasers, using scrapers, hobs or rollers, or other fine processing. Technology to do component pattern scribe, etc.; and the so-called "different scribe lines caused by various flaws" include: broken wire, material underlayer peeling, coating layer peeling, impurities, burrs, short circuits, line width is too thick, line width is too thin, Inaccurate line spacing, poor size, uneven film thickness, poor gaps, etc., and any product that may be repaired afterwards; the so-called "defect repair" includes: Laser Repair, mechanical stroke Mechanical Scribing Repair, Electronic Loading Repair, etc., as well as other production equipment that can be used for post-repair or heavy engineering.

In the current component patterning process of solar cells, when different scribe lines are used, such as: using a laser, using a scraper, a hob, a roller, or the like, or using other micro-machining techniques, etc. Various defects caused by these methods, such as: wire breakage, material underlayer peeling, coating layer peeling, impurities, burrs, short circuits, excessive line width, excessive line width, inaccurate line spacing, poor size, uneven film thickness, Poor faults, etc., usually through various types of sputum testing equipment or manual visual inspection station, first determine the squatting state, and then send a solar panel with a certain specific state to the corresponding repairing equipment for tampering to improve The yield rate of the production line; or the completion test of the component scribing process by means of electrical measurement, and further application of electrical loading to perform various types of defects.

Nowadays, the well-known process and related production equipment in the industry have no effective detection methods for various defects that may occur in the component pattern marking process; for such defects, there is no effective processing device. Moreover, if the component pattern scribing, the detecting device and the repairing device are each independently a production structure of a workstation, it is bound to cause a huge investment amount and economic benefit of having to purchase a plurality of production equipment at the same time, and also: a large area is required. Production line space, must cooperate with complex logistics and storage systems, increase the possibility of product quality control loopholes, etc., and other major concerns, and move the solar panels from separate component patterns to the inspection device or repair device In addition, the process time is not only extra long, and the solar panel needs to be re-precisely positioned several times after being transported to the detecting device or the repairing device. In the era of miniaturized electronic devices, repositioning is inevitably caused by errors.

In addition to the production equipment required for the production line, in many specific demand situations, such as: diverse elastic production systems, solar cells of various sizes, integrated applications for product research and development, and no two-dimensional on the substrate Bar code product quality monitoring, etc., there will also be a need for integrated devices.

The main disadvantages of the conventional solar cell fabrication apparatus are listed below.

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For the sake of the job, in view of the shortcomings in the prior art, how to develop a more economical and reliable solution to these shortcomings, after the creators devoted themselves to experiments, tests and research, finally conceived the case "solar battery The manufacturing device can greatly overcome the lack of the previous component pattern marking device, the detecting device and the repairing device, and cannot effectively minimize the continuous operation, and can greatly simplify the structural design of the manufacturing device and make The overall production efficiency has been greatly improved. It is hoped that through the development of this creation, we will contribute to the development of the domestic solar cell industry.

The problem to be solved by this creation is how to overcome the many production efficiency and efficiency problems of the component pattern marking device, the detecting device and the repairing device of the solar cell, so as to improve the yield and manufacturing cost of the solar cell, and how to overcome the problem. The technical problem of automatic detection of component pattern scribing process synchronization, how to overcome the problem of immediate repair after automatic detection, and how to overcome the problem that may still exist after repairing, and improve the yield of the solar cell.

Therefore, the author proposes to integrate the component pattern marking, component detection and component repair in the solar cell process into three different processes that should be separated on different machines, and integrate them into the same machine.

According to a first design of the present invention, a solar cell manufacturing apparatus is provided, comprising: a first cap, disposed on a base; and a scribing device, a detecting device and a repairing device, respectively disposed on the first A susceptor in which a scribing device is scribed on a flat plate member of a solar cell, the detecting device detecting the scribed plate member to find a smear caused by scribing, and the repairing device repairs the cymbal.

Preferably, the solar cell manufacturing apparatus provided by the present invention further includes a second cap disposed on the base, and the second cap is used to carry the solar cell.

Preferably, the solar cell manufacturing apparatus provided by the present invention further comprises a driving power source disposed on a fixing device, wherein the fixing device is used for firmly positioning the solar cell, and the fixing device is a jig.

Preferably, the solar cell manufacturing apparatus provided by the present invention comprises: a quick plug connector, a connector, a probe device and a planar electrical load connection material, wherein the fixture The planar electrical load connecting material is one of a contact spring and an anisotropic conductive film (ACF).

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the first cap is disposed on the base and disposed under the base.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the first and the second caps respectively comprise a moving device for moving the scribing device, the detecting device, and the repairing device And one of the solar cells.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the mobile device is fixed in an X/Y axis, an X/Y biaxial mutual load, a gantry structure and a combination thereof one of them.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the base comprises a basic mesa and a frame.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the scribing apparatus is scribing with one of a laser, a scraper, a hob and a roller, preferably the present invention provides The solar cell manufacturing device, wherein the detecting device is further configured to automatically input one of an electrical load and a test information to the solar cell, wherein the test information is a voltage, a current, a test signal, and a test light source. One.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the detecting device is a detection module for obtaining a voltage, a current, a presentation image and a numerical data of the test signal. One.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the detecting device is one of a charge coupled device (CCD) camera and an electrical detecting device having a probe for the flat component Test.

Preferably, the device for manufacturing the solar cell of the present invention further includes a feature highlighting device, which is one of a light source generating device and a detecting device, wherein the detecting device is one One of an optical interference fringe processing device, an electrical detecting device and a physical characteristic measuring device, wherein the physical characteristic measuring device is one of a film thickness meter, a potentiometer, a resistance meter and an altimeter.

Preferably, the manufacturing device of the solar cell provided by the present invention further includes an analysis and calculation module, which is one of a computer and an electronic computing device for analyzing a rendered image or A quantity is measured and automatically identified as one of the types or a classification item and a repair method is determined.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the classification item comprises one of a number, a name and a detection parameter, wherein the name comprises a broken line, a material bottom layer peeling, and a coating film. Layer peeling, one impurity, one burr, one short circuit, one line width is too thick, one line width is too thin, one line spacing is not accurate, one size is bad, one film thickness is uneven, and one gap is poor.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the repairing device is a tampering device, is disposed on one of the first pedestal, the X axis, the Y axis, and a mutually negative X/ One of the Y-axis device, a separate mounting position, and a lower portion of a workpiece.

Preferably, the solar cell manufacturing apparatus provided by the present invention comprises: a broken wire, a material bottom layer peeling, a coating layer peeling, an impurity, a burr, a short circuit, a line width too thick, a line The width is too thin, the line spacing is not accurate, one size is poor, one film thickness is uneven, and one of the defects is poor.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the repairing apparatus utilizes one of an automatic and a manual mode to repair the crucible.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the manual mode is an interface using a non-specific repair operation, through the interface to move the solar cell and the repairing device to control a light source and One of the detecting devices displays one of an image and a result and controls the repairing device.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the repairing apparatus is further used for proposing an automatic repairing suggestion, the automatic repairing proposal includes an automatic repairing location, an automatic repairing path, and an automatic repairing. Energy adjustment, an automatic patch height adjustment, a patch mode suggestion, and a patching data record. The automatic patching proposal is used in conjunction with a learnable system, which is an expert system or a neural network, and the automatic patching proposal is accelerated. The speed of patching this manual mode.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the automatic repairing of the repairing position may include using a result matching positioning, a spatial geometric parameter and a position correcting parameter of the detecting device to calculate a repairing position. And quickly moving to the defect to perform a repairing action, the automatic patching energy adjustment comprising performing an optimal patching energy adjustment according to one of the types or a classification of the automatic repairing height adjustment, including rapid movement to the most Good repair height, and using the principle of auto focus and a laser ranging, the patch mode suggestion includes automatically listing an optimal repair method, and manually or automatically repairing the defect, and the repair data record includes A patched result data is recorded for use in a query or a follow-up analysis and is recorded in the Whole Plant Integrated Information System (MES).

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the scribing device, the detecting device and the repairing device are respectively an automatic device.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the scribing device and the repairing device are the same device.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the solar cell is a twin crystal solar cell, a thin film solar cell, an electrochemical solar cell, and a solar energy made of a flexible substrate. One of a battery, a flat type solar cell, and a solar power generation device having a flat panel type.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the flat panel component is a photoelectric conversion component.

According to a second design of the present invention, a solar cell manufacturing apparatus is provided, which includes a first stage disposed on a base, and a scribing device and a detecting device respectively disposed on the first cap. Wherein the scribing device is scribed on a flat panel component of a solar cell, the detecting device detecting the scribed panel element to find a defect caused by the scribe line.

Preferably, the solar cell manufacturing apparatus provided by the present invention further comprises an additional data acquisition module, which is a camera with different magnification or color.

According to a third design of the present invention, a solar cell manufacturing apparatus includes a first cap; and a scribing detecting device is disposed on the first cap, wherein the scribing detecting device is in a solar cell A plate member is scribed and the scribed plate member is examined to find a smear caused by the scribe line.

Preferably, the solar cell manufacturing apparatus provided by the present invention, wherein the scribing detecting device performs scribing with one of a laser, a scraper, a hob and a roller, and the scribing detecting device is a A charge coupled device (CCD) camera and an electrical detection device having a probe detect the plate member.

Through the above-mentioned conception, the present invention can be seen that the solar cell manufacturing apparatus used can complete the integration of the flat component pattern scribing device, the detecting device and the repairing device, and has automatic repairing, and Manual patching is used to overcome the flaws that still exist after automatic patching. For ease of description, the present invention will be better understood by the following preferred embodiments and illustrations.

The present invention will be fully understood by the following examples, which can be accomplished by those skilled in the art, and the implementation of the present invention may not be limited by the following embodiments.

Please refer to the first figure, which is a schematic diagram of the solar cell manufacturing apparatus proposed by the present invention. The solar cell manufacturing apparatus shown in the first figure includes a component pattern scribing module 1, a detecting module 2, a cleaning module 3, a photoelectric conversion element 4, a moving unit 5, a moving unit 6, a repairing device 7, and an operation The unit 8, the light source module 12, the second platform 13, the first platform 14, and the scribing platform 15. The mobile unit 5 and the mobile unit 6 are respectively an X/Y axial fixed structure, an X/Y two-axis mutual negative structure, a gantry structure or a combination of the above various structures, and are used for moving component pattern scribing modes. Group 1, detection module 2 and repair device 7.

The photoelectric conversion element 4 is a plate material including a semiconductor material, which is used as a photoelectric conversion element for converting light energy into electrical energy in a solar cell, wherein the solar cell can be a twin crystal solar cell, a thin film solar cell, or an electrochemical solar energy. a battery, a solar cell fabricated from a flexible substrate, a flat type solar cell, or a solar power generation device having a flat type; the first stage 14 includes a moving unit 5 and a scribing platform 15, and the moving unit 5 is a photoelectric conversion The component 4 is movable in the direction of the Y-axis, and the scribing platform 15 provides the correctness of the scribe line and the height of the detection. It is a precision surface-treated seismic material, and may further include more than one opening on the scribing platform 15 The susceptor needs to detect the required light source or other scribing necessary; the second pedestal 13 is disposed on the first pedestal 14, the erection direction is mainly determined according to the optimal scribe line, and the second pedestal 13 includes the movement The unit 6 and the mobile unit 6 enable the detection module 2 and the repairing device 7 to move along the X-axis direction, and the second platform 13 can be erected with the component pattern scribing module 1 3 module, the detection module 2, module repair apparatus, a light source module 712 or a combination of each of the modules, and the like.

The scribing module 1 is used for scribing on the photoelectric conversion element 4, which is a laser that can selectively output a wavelength, a transmission frequency, and an energy range, and is concentrated by the optical element to act on the photoelectric conversion element 4, using a ray In the method of emitting light and melting, a ditch is formed on the photoelectric conversion element 4 to perform scribing, but the embodiment is not limited to laser, such as a mechanical scribing method of a scraper, a hob or a roller, or other fine processing is used. Technology is a possible implementation.

The cleaning module 3 is used for cleaning after scribing to remove the material debris generated after the scribing, and the embodiment is vacuum adsorption elimination or positive pressure air removal, but can also be achieved by using water washing and drying. For the same function, the cleaning module 3 can be selectively mounted on the second platform 13 or the first platform 14 according to actual needs.

The detecting module 2 is configured to detect flaws generated by the photoelectric conversion element 4 during the scribing process, and the detecting module 2 uses the high-precision camera or the charge coupled device (CCD) to cooperate with the light source module 12 to image the photoelectric conversion element 4. The captured image includes the area where the scribing is completed, and the specific algorithm is used to determine the flaw generated in the scribing process. The implementation of the detecting module 2 is not limited to the image capturing method. A detection module that uses electrical characteristics as a detection method can be used, for example, an electrical detection component having a probe can be integrated to integrate the creation as a detection module 2, and the electrical detection component with the probe will apply test information. Receiving the test information to the solar cell, the test information is an electrical load, a voltage, a current, a test signal or a test light source; the above image or test obtained by the CCD or the electrical detecting component with the probe The information is further processed by the electronic computing device to analyze the image or the test information to discover the flaw of the tablet component, and to perform the division according to the information Class and decide how to fix it.

Generally, the state of the flat member 4 includes wire breakage, peeling of the material underlayer, peeling of the coating layer, impurities, burrs, short circuits, excessive line width, excessive line width, inaccurate line spacing, poor size, uneven film thickness or breakage. Bad difference, etc.

The repairing device 7 is used for performing the necessary repairing of the photoelectric conversion element 4 according to the result of the detection after the scribing and detecting, and the repairing device 7 may be a combination of more than one repairing device, wherein a preferred embodiment is The scribing module 1 has a more functional laser repairing device, and the module will appropriately adjust corresponding parameters according to the detection result, such as: output wavelength and mixing mode, power, working height, transmitting frequency, and laser spot shape. The parameters are used to repair the flaws generated in the scribing process on the photoelectric conversion element 4. Since most of the functions of this module can be achieved by the scribing module 1, it is usually selectively combined according to factors such as (a) module price, (b) necessary repair method, (c) necessary repair accuracy, and the like. The wire module 1 and the repairing device 7 or the scribing module 1 are directly used as the repairing device 7. If the scribing module 1 is directly used for repairing, the overall action must be modified. It should be emphasized again that the repairing device 7 can be a combination of various repairing or scribing methods described above. For example, the scribing module 1 can be a device with laser light as a scribing method and a scraper or a hob. A combination of devices that are patched. It is to be noted that the repairing device 7 is an optional module, and the repairing device 7 may be selected or not used depending on the actual situation. Usually, the repairing device 7 is disposed on the X-axis, the Y-axis of the first cap 14, the X/Y-axis device that is opposite to each other, the independent mounting position or the lower side of the flat member 4. The repairing device 7 is available for the user to select and use automatically. Or manually repairing the flaw on the plate member 4, wherein the manual mode is an interface using a non-specific repair operation, through which the repair device 7 is moved, the repair device 7 can further propose an automatic repair suggestion, and the automatic repair suggestion Including automatic verification of repair location, automatic calculation of repair path, automatic repair energy adjustment, automatic repair height adjustment, patch mode suggestion and repair data record, etc. This automatic repair proposal can be combined with a learning system, which is an expert system or neural network. Road, and this automatic patching proposal can speed up the manual mode patching.

The light source module 12 is associated with the detecting unit, and is a combination of one or more light sources. If the image detecting means is not used, the light source module 12 can be selected. The nature of the light source of the light source module 12 is determined by the characteristics of the scribe layer of the planar element. In a preferred embodiment, a light source is disposed between the detecting unit 2 and the planar member 4 to positively illuminate the planar member 4 in a falling manner, and at the same time, a light source is disposed on the other side of the planar member 4 to provide backlight. The light source included in the group can simultaneously or selectively switch and adjust the brightness.

In the overall flow, the moving unit 6 of the second platform 13 moves in the X direction and is positioned at the starting position of the scribing, and the moving unit 5 of the first cap 14 starts to transport the planar element 4 in the Y direction. The scribing module 1 starts to perform scribing work on the photoelectric conversion element 4, and the area marked on the photoelectric conversion element 4 is cleaned by the moving cleaning module 3, and the cleaned area is moved through the detecting module 2 The detection data is sent to the arithmetic unit 8 for analysis to obtain a detection result, and the detection result is sent to the control unit to immediately control the repairing device 7 to perform necessary repair on the photoelectric conversion element 4, thus completing the X. A series of scribing repair actions in the Y direction at the direction position. After the series of actions is completed, the second cap will move to the next position to be crossed in the X direction. At this time, repeat one of the series of scribing repair actions described above until all the lines of the planar substrate are to be marked. carry out.

When the repairing device 7 is merged with the component pattern scribing module 1, the instant patching action is changed to the instant recording action, and after each Y-axis moving scribing is completed, the movement is again moved to the position to be repaired, and then the component pattern is used. The scribing module 1 is repaired.

In order to cause a large-sized photoelectric conversion element 4 in response to the development of a large-sized solar cell, the first stage 14 can be disposed above or below the scribing platform 15, in principle, disposed above the scribing platform 15, if photoelectric conversion The size of the component 4 is too large, and another first stage 14 can be disposed under the scribing platform 15. The solar cell manufacturing device of the present invention is disposed on the two first caps 14, and the two first bearings are The stage 14 can simultaneously operate on both sides of the large-sized photoelectric conversion element 4 without reversing the large-sized photoelectric conversion element 4.

In particular, the component pattern scribing module 1, the detecting module 2, and the repairing device 7 may each be an automated device, and in some particular embodiments, the component pattern scribing module 1 and the repairing device 7 may be the same. The device, because under some relatively simple armpits, the repair device 7 merely recuts the plate member 4.

Compared with the conventional solar cell fabrication apparatus, the present creation has the advantages listed in the following table.

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In summary, the present invention can be used in an innovative design, by integrating the component pattern marking device, the detecting device and the repairing device, thereby greatly improving the yield of the solar cell, and applying the manual repair. In order to overcome the flaws that still exist after the automatic repair, the maximum effect of the manual assisted semi-automatic repair project can be obtained.

This case is a rare sight, and it is rare to cherish the creation. However, the above is only the best embodiment of this creation. It cannot limit the scope of this creation. Therefore, those who are familiar with the craftsmanship can be modified by the genius of the craftsmanship, but they are all protected by the scope of the patent application, that is, the equal changes and modifications made by the applicants in accordance with the scope of the patent application for this creation should still be Belonging to the scope covered by this creation patent, I would like to ask your review committee to give a clear understanding and pray for it. It is the prayer.

<p>1. . . Component pattern scribe module</p><p>2. . . Detection module</p><p>3. . . Cleaning module</p><p>4. . . Photoelectric conversion element</p><p>5. . . Mobile unit</p><p>6. . . Mobile unit</p><p>7. . . Repair device</p><p>8. . . Arithmetic unit</p><p>12. . . Light source module</p><p>13. . . Second cap</p><p>14. . . First cap</p><p>15. . . Scribing platform</p>

The first figure is a schematic diagram of the manufacturing device of the solar cell proposed by the present invention.