TWI569293B

Planar magnetic component and method for manufacturing the same

Abstract

A planar magnetic component and a method for manufacturing the same are provided. The planar magnetic component includes a substrate and a magnetic structure embedded in the substrate; wherein the magnetic structure includes a ferromagnetic material layer and at least one first hard protective layer disposed on a first surface of the ferromagnetic material layer to prevent the ferromagnetic material layer from being breaking in a pressing process.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

15 claims: 2 independent, 13 dependent

  1. 1
    A planar magnetic component comprising:a substrate;a magnetic structure embedded in the substrate, comprising: a ferromagnetic material layer;at least one first hard protective layer disposed on one side of the ferromagnetic material layer;a second hard protective layer on the other side of the ferromagnetic material layer, wherein the ferromagnetic material layer is located between the at least one first hard protective layer and the second hard protective layer;a first conductive layer is disposed on a side of the substrate away from the magnetic structure;and a second conductor layer disposed on an opposite side of the substrate adjacent to the magnetic structure, wherein the first hard protective layer is located on the ferromagnetic material layer and the second conductor Between the layers. 一種平面式磁性元件,包括:一基板;一磁性結構,鑲嵌於該基板中,包括:一鐵磁性材料層;至少一第一硬質保護層,配置於該鐵磁性材料層之一側;以及一第二硬質保護層,位於該鐵磁性材料層之另一側,其中該鐵磁性材料層位於該至少一第一硬質保護層與該第二硬質保護層之間;一第一導體層,配置於遠離該磁性結構之該基板之一側;以及一第二導體層,配置於接近該磁性結構之該基板的相對一側,其中該第一硬質保護層位於該鐵磁性材料層與該第二導體層之間。 一種平面式磁性元件,包括:一基板;一磁性結構,鑲嵌於該基板中,包括:一鐵磁性材料層;至少一第一硬質保護層,配置於該鐵磁性材料層之一側;以及一第二硬質保護層,位於該鐵磁性材料層之另一側,其中該鐵磁性材料層位於該至少一第一硬質保護層與該第二硬質保護層之間;一第一導體層,配置於遠離該磁性結構之該基板之一側;以及一第二導體層,配置於接近該磁性結構之該基板的相對一側,其中該第一硬質保護層位於該鐵磁性材料層與該第二導體層之間。
  2. 8
    A method of forming a planar magnetic component, comprising:providing a substrate having a first surface, a second surface opposite to the first surface, and a first conductor layer, the first conductor layer being located on the second surface;forming a recess in the substrate, the recess penetrating through the first surface;and forming a magnetic structure in the recess, the magnetic structure is formed by: forming a second hard protective layer;forming a ferromagnetic material Laminating on the second hard protective layer;and forming at least one first hard protective layer on the ferromagnetic material layer, wherein the ferromagnetic material layer is located in the at least one first hard protective layer and the second hard protective layer Forming a second conductor layer away from the first hard protective layer and one side of the first surface. 一種平面式磁性元件的形成方法,包括:提供一基板,具有一第一表面、相對該第一表面之一第二表面以及一第一導體層,該第一導體層位於該第二表面;形成一凹槽於該基板中,該凹槽貫穿部分該第一表面;以及形成一磁性結構於該凹槽中,該磁性結構的形成方法包括:形成一第二硬質保護層;形成一鐵磁性材料層於該第二硬質保護層上;以及形成至少一第一硬質保護層於該鐵磁性材料層上,其中該鐵磁性材料層位於該至少一第一硬質保護層與該第二硬質保護層之間;形成一第二導體層於遠離該第一硬質保護層與該第一表面之一側。 一種平面式磁性元件的形成方法,包括:提供一基板,具有一第一表面、相對該第一表面之一第二表面以及一第一導體層,該第一導體層位於該第二表面;形成一凹槽於該基板中,該凹槽貫穿部分該第一表面;以及形成一磁性結構於該凹槽中,該磁性結構的形成方法包括:形成一第二硬質保護層;形成一鐵磁性材料層於該第二硬質保護層上;以及形成至少一第一硬質保護層於該鐵磁性材料層上,其中該鐵磁性材料層位於該至少一第一硬質保護層與該第二硬質保護層之間;形成一第二導體層於遠離該第一硬質保護層與該第一表面之一側。