Workpiece with hard coating

Hard-coated workpiece

The present invention relates to a workpiece having a body and a wear-resistant coating system on at least a part of the surface of the body, and also relates to a method of manufacturing this work and a method of manufacturing a device.

Discussion of related skills

TiAlN is a coating widely used for machine hardening steel and is usually applied by a PVD process.

Yu et al. understood that in the physical vapor deposition process (PVD) (a vacuum deposition process), it uses plasma and fills the operating atmosphere with materials from solids. By this, under this term of PVD, such as cathodic arc evaporation, ion plating, sputtering, and even magnetron sputtering, all processes, reactivity, or non-reactivity are all members of the PVD process category.

In contrast, the CVD coating process (chemical vapor deposition) and PECVD (plasma enhanced chemical vapor deposition) provide coatings from the gas phase.

Using TiAlN layer as a single layer or TiAlN layer in a multilayer system with different Ti/Al/N stoichiometric sub-layers, due to the aluminum/titanium ratio, the hardness begins to degrade at temperatures above 800 to 850°C , Can be used for tool installation applications, up to a working temperature of 900 °C.

Therefore, US Patent 2005-0003239 proposes to apply AlCrN coating to the workpiece in order to increase its oxidation resistance. Based on the aluminum/chromium ratio, this coating is known to have good oxidation resistance and hot hardness up to 1100°C. In addition, similar proposals in WO 2006/005217, WO 2006/084404, and US Patent 2006-0222893, etc., try to further improve the oxidation resistance of the coating by using different layers and/or by introducing other elements into the AlCrN matrix. / Or thermal hardness.

US Patent 2006-0269789 discloses a hard multilayer body capable of cutting high-hardness materials at a high speed. The hard multilayer body includes a first layer based on TiAlCrNX, where X represents C or O. The second layer is composed of a mixture of TiAlCrNX and TiAl(SiC)NX or a multilayer of these alternating materials of each layer. The third outermost layer is mainly composed of TiAl(SiC)NX.

Another coating for improving the cutting of hardened steel is disclosed in European Patent 1 690 959. The coating includes a two-layer system based on TiAlSi)N with different Al and Si stoichiometry.

In spite of the methods outlined above, there is still a need to further improve the hard coating system on the workpiece body relative to the wear resistance and oxidation resistance, so as to further improve the performance of the workpiece, especially when used as a hard material for machining The cutting tools are specially machined hardened steel cutting tools.

Therefore, an object of the present invention is to further improve the hard coating with respect to abrasion resistance and oxidation resistance. In order to solve this objective, it is proposed to have a body and a wear-resistant hard coating system on at least a part of the surface of the body of the workpiece, wherein the system includes at least one layer of the following composition: (Al_1-abcCr_aB_bZ_c) X, where X is at least one type: N, C, CN, NO, CO, CNO, and Z are at least one type of W, Mo, Ta, Cb (also known as Nb) and among them, the following inequality holds: 0.2<img file="TW200831706A_D0001.tif" />a<img file="TW200831706A_D0002.tif" />0.5 0.01<img file="TW200831706A_D0003.tif" />b<img file="TW200831706A_D0004.tif" />0.2 0.001<img file="TW200831706A_D0005.tif" />c<img file="TW200831706A_D0006.tif" />0.04.

Surprisingly, the stated purpose is achieved by achieving the stated conditions with respect to stoichiometry, by generically adding boron (B) and at least one so-called Z element to an AlCrX-type matrix. Yu et al. call this layer HL₀。

In a preferred embodiment of the workpiece according to the present invention, the selected element Z is tungsten (W), and it is determined: 0.01<img file="TW200831706A_D0007.tif" />b<img file="TW200831706A_D0008.tif" />0.01 and 0.01<img file="TW200831706A_D0009.tif" />c<img file="TW200831706A_D0010.tif" />More than 0.01, etc. call this layer HL₁。

Throughout the description of the present invention and the scope of the patent application, I will understand that the term "coated system" or "coated subsystem" refers to a system composed of a single layer or multiple layers (ie, more than one layer).

In this way, the so-called at least one layer of HL_oMay HL₁The layer is applied directly on the surface of the workpiece body. In addition, they can be applied to form the outermost layer of the coating system. Obviously, if the coating system is composed of one layer, the HL type layer is directly present on the surface of the body and is the outermost layer. In addition, the HL_oThe layer of the type may be the outermost layer of the multilayer system. In addition, it can be embedded in a multilayer system, between the first layer subsystem facing the surface of the workpiece body and the second layer subsystem facing the surface of the covering body. In addition, more than one HL with equal or different stoichiometry and/or material composition can be configured in a multilayer system_oType layer. Whereby these HL_oIn the type of layer, one layer may be directly present on another layer with different stoichiometry and/or material composition, or may be separated by respective coating layer subsystems.

In an embodiment of the workpiece according to the present invention, at least one layer of HL_o/HL₁The layer exists on the outermost part of the hard coating system.

According to an embodiment of the workpiece of the present invention, at least one layer of HL_oThe profile layer exists directly on the surface of the workpiece body.

In another embodiment, the system includes at least one interlayer (Ti_dAl_e)N. Accordingly, in another embodiment, at least one so-called boundary layer is inserted on the surface of the body and at least one so-called HL_oType between layers. Yu et al. call this boundary layer IL₁。

In another embodiment of the workpiece, the so-called boundary layer exists directly on the surface of the workpiece and at least one layer of HL_oAt least one of the types.

Therefore, when inserting the boundary layer on the surface of the body and at least one HL_oType or HL₁In the other embodiments, another boundary layer of the so-called type can be additionally provided in the HL_oOr HL₁And the embodiment between the surface of the system. In addition, the so-called intermediate layer does not necessarily have to exist as the body surface and HL₁Or HL_oThe only layer between the surface of the HL, the additional layer can be set in the middle, so that the boundary layer is a layer of the multi-layer subsystem._oOr HL₁between. However, in one embodiment, the so-called intermediate coating is directly present on the surface of the body and the HL_oOr HL₁At least one of them. When applying the at least one boundary layer (Ti_dAl_e) When N is in another embodiment, the following inequality applies: 0.4<img file="TW200831706A_D0011.tif" />d<img file="TW200831706A_D0012.tif" />0.6 and 0.4<img file="TW200831706A_D0013.tif" />1<img file="TW200831706A_D0014.tif" />0.6

In another embodiment of the workpiece according to the present invention, the hard coating system includes at least one boundary layer (Al_fCr_g)N. Yu et al. call this boundary layer IL₂。

Relative to the situation where the at least one boundary layer can be set, relative to (Ti_dAl_e) N layer-IL₁-, remove (Al_fCr_g) Except for the N boundary layer, the same as mentioned above is valid. In another embodiment, the following inequality is selected: 0.4<img file="TW200831706A_D0015.tif" />f<img file="TW200831706A_D0016.tif" />0.7 and 0.3<img file="TW200831706A_D0017.tif" />g<img file="TW200831706A_D0018.tif" />0.6

In addition, the so-called boundary layer IL₁And IL₂The combination of the two is set in the hard coating system.

In another embodiment of the workpiece according to the present invention, the at least one layer, HL₀Or HL₁, The glass-like growth structure of nanocrystals is shown in the SEM cross-sectional view and/or, as in another embodiment, the relatively small fragments of AlN are characterized by a hexagonal crystal structure. In this embodiment, the hexagonal AlN phase is present in the HL at a percentage of at least 70% Al₀Or HL₁Within the metal fragment of the material, this fragment includes all elements, except for X in AlCrBZX or AlCrBWX.

This hexagonal structure can be confirmed by XRD analysis.

In another embodiment of the workpiece according to the present invention, at least -HL₀Or HL₁With 0.1<img file="TW200831706A_D0019.tif" />Q<img file="TW200831706A_D0020.tif" />The crystal structure coefficient Q in the range of 1=I(200)/I(111). The crystal structure coefficient Q can be measured by X-ray diffraction analysis. As stated, the term Q is defined as the ratio of the diffraction intensity I(200) to the diffraction intensity I(111), which is a measurement of the X-ray diffraction of the material described in Figure 4 of the present invention. The (200) plane and (111) plane. Accordingly, in another embodiment, the so-called range of Q is even limited to 0.1<img file="TW200831706A_D0021.tif" />0.4。

Looking back at the so-called level IL₁, IL₂It should be mentioned that in the respective embodiments, these boundary layers can exhibit columnar growth structures, thereby imparting excellent performance to the overall coating system, especially if used on cutting tools.

In a further embodiment of the workpiece according to the present invention, the hard coating system includes at least one so-called boundary layer IL of multiple layers₁, IL₂And at least one HL_oAnd HL₁, So it is better to be (AlCrBW)X, that is, HL₁Of alternating layers.

Except for the surface of the body, the multilayer body, for example, may include the first so-called boundary layer IL₁, And then may include different types of the second so-called boundary layer IL₂And then the first HL, that is, HL₀Or HL₁, And then there is one or more layers of IL₁, IL₂, The second HL of the same or different material₀Or HL₁, The third HL directly on the former₀Or HL₁and many more. Therefore, based on specific applications, use different combinations of HL₀Or HL₁And the so-called middle layer IL₁, IL₂, There are many kinds of special multilayer hard coating systems.

In another embodiment of the workpiece according to the present invention, the system is made of high-speed steel, hardened steel, cemented carbide or three-dimensional boron nitride, or in another embodiment, is made of metal porcelain or ceramic materials become.

In another embodiment, the workpiece according to the present invention is referred to as a cutting tool, whereby in another embodiment, the workpiece is an end mill, a drill, a cutting insert or a gear cutting tool.

The method according to the present invention for manufacturing a workpiece is as so-called, that is, according to the present invention includes: providing the workpiece body in a plasma coating vacuum chamber, and applying the workpiece via a physical vapor deposition process (PVD) during the processing operation time The hard coating system is applied to the body and thereby, during at least the main part of the processing operation period, a temperature of at least 550° C. is applied to the surface of the covered body.

In an embodiment of this process, the so-called temperature is selected to be at least 600°C.

In yet another feature, the present invention relates to a method of manufacturing a device that has at least a part of hard material. The method includes a cutting program for the hard material of the device using the cutting tool according to the present invention. Accordingly, in another embodiment of the so-called manufacturing device method, the hard material has a Rockwell hardness of at least 52 HRC, thereby even having at least 55 HRC. In another embodiment of the manufacturing method just mentioned, the hard material is hardened steel.

The cutting procedure is carried out using the cutting tool according to the present invention, and this cutting procedure shows at least as good or even better results for hard materials as compared to the comparative examples carried out with current art tools.

However, for hardened steel or other high-hardness materials with Rockweel hardness of HRC 50, especially for cutting operations of high-hardness materials with HRC 52 or higher, and even HRC higher than 55, the tool according to the present invention reveals outstanding and good results The performance will be as shown below.

Figure 1 schematically shows a first embodiment of a workpiece 1 according to the invention. The workpiece 1 has a body 3 together with a surface 5. The body is made of one of these materials: high-speed steel, hardened steel, cemented carbide, three-dimensional boron nitride, metal porcelain or ceramic materials.

According to the embodiment in Figure 1, the layers HL₀One, it may be HL₁The system exists directly on the surface 5 of the body 3.

Accordingly, the surface 7 of the generated workpiece is composed of the so-called layer HL₀A surface of is formed, therefore, as a good example, it forms the outermost surface of the workpiece.

In the embodiment shown in Figure 2, the representation shown is similar to that shown in Figure 1. A coating subsystem CSS is provided on the so-called layer HL₀, Which may be HL₁, Between the surface of the body 3. Accordingly, according to the definition of the coating subsystem created above, the coating subsystem CSS may include one layer or more than one layer.

If according to these layers HL₀HL₁The definition of X can be seen in HL₀In the case of Z can also be composed of different elements. According to the embodiment in Figure 3, the outermost layer of the hard coating system is composed of HL in the first material composition₀Formed, marked as HL₀₁Or layer HL₁, Marked as HL in a specific material composition₁₁. Grows towards base 3 and is marked as HL₀₂The second layer of HL is set in the different material composition₀, Or relatively marked as HL₁₂HL is set in the different material composition₁。

It may or may not be followed by HL₀Type and/or HL₁More layers of type up to the surface 5 of the body 3.

Although in the embodiment of Fig. 3, the covering system is composed of HL_0xLayer composition, but at least part of it may be HL_1xLayer; In the embodiment according to Figure 4, there is a hard coating system including a coating subsystem CSS. The coating subsystem may or may not include further HL₀Type layer, but includes at least one layer, which is not HL₀type.

In all the embodiments in Figures 1 to 4, the outermost layer of the surface 7 is marked by a layer labeled HL₀The type layer is formed. This is a good way to form the said outermost surface of the workpiece.

However, for example, looking at Figure 4, for some equipment, it may be recommended to provide (not shown) an additional coating subsystem at the outermost HL₀The top of the profiled layer so that the outermost surface 7 is formed by the outermost subsystem.

In the embodiment according to Figure 5, HL₀The layers of the type alternate with the coating subsystem CSS. By this, the HL applied alternately₀The type layer may be the same or different from the material composition.

The alternating coating subsystems can be composed of one layer or more than one layer, at least one of which is not HL₀type.

As illustrated by the embodiment according to Fig. 1 to Fig. 5, HL is applied according to the specific needs of the workpiece₀The body 3 from the layer to the workpiece can be formed into many types. Especially, if the workpiece is a tool, especially a cutting tool, it is recommended to choose HL₀The profile layer serves as the outermost layer of the covering system.

In the preface of this note, Yu et al. have mentioned (Ti_dAl_e) The first boundary layer of N, especially where d and have values in a specific range as IL₁, And the second type of boundary layer (Al_fCr_g)N, where f and g have values in a specific range as IL₂。

Focusing on the embodiments in Figures 1 to 5, the so-called coating subsystem CSS may include IL₁Or IL₂Or by IL₁Or IL₂Composition, or may include IL₁And IL₂The combination/or by IL₁And IL₂, And can include another layer of HL₀Type or with HL₀Different types of layers and IL₁, IL₂。

In addition, a skilled craftsman claims to be based on the embodiment shown in Fig. 1 to Fig. 5, and the boundary layer IL is merged.₁And/or IL₂, According to their needs or find more combinations.

The following will illustrate some specific embodiments of the work piece according to the present invention. The cutting performance of the workpiece (such as cutting tool) according to the present invention is compared with the tools according to the development level of modern technology. For the purpose of effective comparison, the same cutting operation and cutting parameters are respectively applied to the tool according to the present invention and the tool according to the present invention. A comparative tool for the development level of modern technology.

If not specifically and differently specified, the hard coating system applied to the samples in the following examples is deposited under the following conditions, thereby applying the method for manufacturing the workpiece according to the present invention.

Deposition technology: cathodic arc evaporation

Total working pressure: 5.5Pa of N2

Bias voltage of coated body: to HL₀The type layer is -85V to ground potential, and to IL₁And IL₂Equal level is -100V to ground potential

The surface temperature of the body being coated: 600°C

Evaporation current: 200A per evaporation target.

The hard coating system is deposited in the Balzers RCS coating machine as an arc evaporation form. During the PVD deposition, the cutting tool body is mounted on a three-fold rotating bracket.

All hard coating systems deposited on the body of the cutting tool have a total depth between 2 and 2.5 μm, which is measured on the cylinder of the cutting tool.

Example 1

Compare the single-layer hard coating system of the first series with the modern technology development level single-layer system of TiAlN and AlCrN.

Table 1 shows the hard coating system examined under this embodiment. In order to apply each of the described single-layer hard coating systems, the coating machine is equipped with four identical arc evaporation cathodes, also called targets. The composition of each of these targets is also listed in Table 1. The main elements Al, Cr, and Ti of the composition producing the coating material are within 10% of the target composition, and the elements B, W, Mo and Ta are within about 20% of the target composition.

<tables><img file="TW200831706A_D0022.tif" /></tables>

The performance of the hard coating system is evaluated by the wear resistance meter in the metal cutting operation. The amount of wear on the side surface, Vbmax, is measured as a function of the cutting length. The cutting test is a milling test under the finishing condition of the hardened cold-worked tool steel. The cutting conditions are as follows: Cutting tool: ball end milling cutter with 2 flutes, 5mm ball radius, micro-grain carbide grade material

Workpiece: 1.2379 60 HRC

Spindle rotation rate: 7996 rev/min

Axial depth of cutting: 0.4 mm

Radial depth of cutting: 0.2 mm

Feeding rate: 0.1 mm/tooth

Cutting rate: 98 m/min

Feeding: 1600 mm/min

Coolant: Air

Milling direction: milling down

Length of 1 pass: 43.8 m

End of tool life: At the end of the pass, V_bmax&gt;0.15 mm

The results of the cutting test are listed in Table 2.

<tables><img file="TW200831706A_D0023.tif" /></tables>

It can be seen from Table 2 that the incorporation of B and W, Mo and Ta in AlCrN results in improved wear protection compared to the wear protection of AlCrN and TiAlN according to Comparative Samples 1 to 3.

Example 2

Prepare a series of double-layer hard coating systems. Table 3 lists the hard coating system studied, which was coated on the tool body of the same material as in Example 1. In this way, the interface layer IL1 is directly applied to the surface of the tool body, and the layer of HL₁The type is directly applied to the boundary layer. The machine is configured with two identical targets for deposition of boundary layers and four identical targets for deposition of HL₁Type of outer layer. The composition of each target material is also listed in Table 3.

<tables><img file="TW200831706A_D0024.tif" /></tables>

The performance of the tool according to this second series was studied using the same cutting test as applied to the tool of Example 1. The results are listed in Table 4.

With this, the boundary layer IK of sample No.9₁Shows that the stoichiometric system is completely at the boundary level IL₁(TidAle)N within the range of the following inequalities: 0.4<img file="TW200831706A_D0025.tif" />d<img file="TW200831706A_D0026.tif" />0.6 0.4&lt;e<img file="TW200831706A_D0027.tif" />0.6 and the boundary layer applied in Example No. 8 is just outside the so-called stoichiometric range.

<tables><img file="TW200831706A_D0028.tif" /></tables>

When IL is applied₁The boundary layer to the HL type layer provided by the present invention, specially made HL with X=N₁Supplying the boundary layer improves the wear resistance most significantly when molding the layer, and if it reaches the so-called stoichiometric range of aluminum and titanium compounds, it can be even greater.

Example 3

To prepare another series of workpieces, namely, a tool with a coating system according to the present invention consisting of two layers, namely, a boundary layer TiAlN, IL₁The composition is directly based on the tool body that has been used in Examples 1 and 2 and the HL with X=N that has been set in Samples 8 and 9 in Table 3₁Type between layers. Accordingly, the temperature of the coated surface is changed between 450°C and 600°C by changing the heating time and/or power.

Regarding the following samples 10, 11, and 12, the same boundary layer and outermost target as specified in sample No. 9 were used.

Table 5 shows the layers of the so-called coating system on one side and the deposition temperature on the other side.

<tables><img file="TW200831706A_D0029.tif" /></tables>

The properties of these samples were studied using the same cutting conditions as in Example 1. The results are listed in Table 6 below.

<tables><img file="TW200831706A_D0030.tif" /></tables>

These results on the one hand show that sample No. 12 is coated in the same manner as sample No. 9 of Example 2, and shows the same abrasion resistance compared with the so-called sample 9. In addition, sample No. 10 reveals that even at a relatively low temperature of 450°C, the coating system according to the present invention is significantly better than the similar two-layer coating system as sample No. 7 is coated at 600°C.

In addition, it is obvious from the comparison of samples 10 to 12 that the wear resistance increases significantly with increasing deposition temperature, and the best performance is obtained at the maximum deposition temperature of 600°C or greater as studied, such as sample No. 12.

Example 4

Intermediate IL₁And HL with X=N specific embodiment₁The fourth series of double-layer hard coating system.

The prior art single-layer system of TiAlN and AlCrN was selected as a comparative sample. Table 7 below lists the respective coating materials and target composition.

<tables><img file="TW200831706A_D0031.tif" /></tables>

The performance of the tool obtained is evaluated by the wear resistance during metal cutting applications. The amount of wear on the side surface V_bmaxThe measurement is a function of the length of the cut. These cutting tests were carried out under the conditions of semi-finishing milling operations during heat treatment of tool steel. The cutting conditions are as follows: Cutting tool: end mill with 3 flutes, 8mm diameter, microcrystalline carbide grade

Workpiece: 1.2344 36 HRC

Spindle rotation rate: 4775 rev/min

Axial depth of cutting: 10 mm

Radial depth of cutting: 0.5 mm

Feeding rate: 0.05 mm/tooth

Cutting rate: 120 m/min

Feeding material: 716 mm/min

Coolant: 6% mineral oil based emulsion, external cooling

Milling direction: milling down

Length of 1 pass: 10 m

End of tool life: At the end of the pass, V_bmax&gt;0.15mm

Table 8 shows the results of the cutting test.

<tables><img file="TW200831706A_D0032.tif" /></tables>

Example 5

Prepare a series of tools with a double-layer coating system, that is, by an IL₁Layer and HL with X=N₁Type layer composition. Compare them with the tools coated with a two-layer coating system using modern technology development, that is, TiN as the inner layer and TiAlN as the outer layer, or those coated with AlCrN as the inner layer and TiSiN as the outer layer.

Table 9 shows the composition of the respective layer materials and target materials.

<tables><img file="TW200831706A_D0033.tif" /></tables>

The performance of each coated tool was evaluated by drilling operations on heat-treated steel. Use the amount of wear V on the side surface of the main cutting edge_bmaxTo assess the quality of anti-wear. The test conditions are as follows: Cutting tool: drill bit with 2 flutes, 6.8mm diameter, fine-grained carbide grade

Workpiece: 1.7225, Rm=1000N/mm², Annealed to a Brinell hardness of 240HB

Spindle rotation rate: 4684 rev/min

Maximum cutting rate: 100 m/min

Feeding rate: 0.18 mm/rev

Feeding: 843 mm/min

Coolant: 6% mineral oil based emulsion, external cooling

End of tool life: V_bmax&gt;0.2 mm

Table 10 below shows the drilling results.

<tables><img file="TW200831706A_D0034.tif" /></tables>

This example clearly shows that the tool according to the invention may not be the best choice for highly annealed steel and soft materials.

In the following examples, the No. 6 to 8 hard coating systems are deposited again as described in the previous examples, but the total working pressure is N₂Decrease from 5.5 Pa to 3.5 Pa, and increase the substrate bias voltage to ground from -85V to -100V to deposit the outermost layer of AlCrBWN according to HL1 (with X=N).

Implementation 6

Prepare the sixth series of tools to determine the IL of the AlCrN inner layer₂Replace TiAlN inner layer IL₁Effect.

<tables><img file="TW200831706A_D0035.tif" /></tables>

Using the tool coated as described in the operation, apply a cutting test with the following parameters.

Cutting tool: ball end milling cutter with 2 flutes, 5 mm ball radius, micro-grain carbide grade material

Workpiece: 1.2379 60 HRC

Spindle rotation rate: 6370 rev/min

Axial depth of cutting: 0.3 mm

Radial depth of cutting: 0.5 mm

Feeding rate: 0.15 mm/tooth

Cutting rate: 200 m/min

Feeding material: 1911 mm/min

Coolant: Air

Milling direction: milling down

Length of 1 pass: 30 m

End of tool life: At the end of the pass, V_bmax&gt;0.10 mm

The results are shown in Table 12 below.

<tables><img file="TW200831706A_D0036.tif" /></tables>

Since the results are visible, IL is provided₁Or IL₂The inner layer generally leads to the same good results.

Example 7

Through the seventh series of samples, the purpose is to determine the HL with X=N₁On the type layer, the effect of different B and W content. Table 13 below lists the materials of the inner layer and the outer layer, and the composition of each target material.

<tables><img file="TW200831706A_D0037.tif" /></tables>

Using these tools, a cutting test with the same parameters as in Example 6 was performed.

The results are shown in Table 14.

<tables><img file="TW200831706A_D0038.tif" /></tables>

Example 8

In the eighth series of samples, it is covered with the double-layer coating system as described in Table 15. In order to adjust the state comparable to the initial uniform wear, before the cutting test, the method according to DE GM 20 2006 000 The brushing machine of 654.1 applies brushing treatment to ensure the uniform development of wear during the subsequent cutting and application period.

According to the so-called literature, the treatment of coated tools is carried out using rotating brushes. The second figure of this German model No. 20 2006 000 64.1 and the description corresponding to the end of the first paragraph on pages 5 to 6, have been specifically incorporated as reference materials for the brushing technology mentioned in the description of the present invention. The brush angle is about 30° relative to the tool axis, and the selected rotation rate is 650 turns/min. The brush material is nylon impregnated with SiC, the size of the SiC particles is 400 mesh, the diameter of the brush is 0.45 mm, and the length of the brush is 35 mm. The rotation of the tool satellite is 9 turns/min, and the rotation of the table supporting the satellite is about 0.3 turs/min. By using impregnated Al₂O₃The brush can achieve a similar effect as cutting a few micrometers along the cutting edge of the workpiece material. However, for this latter brushing, if the same parameters as described above are used, the time must be tripled. This may be achieved, for example, by rotating the support table at about 0.1 turns/min.

Alternatively or even in addition, as a pre-treatment before the coating process, a similar honing process through operations such as brushing, spraying, grinding, or the like may be applied.

Use the tools coated according to Table 15 to implement cutting tests, with the following cutting parameters:<tables><img file="TW200831706A_D0039.tif" /></tables>

Cutting tool: ball end milling cutter with 2 flutes, 5 mm ball radius, micro-grain carbide grade material

Workpiece: 1.2379 62 HRC

Spindle rotation rate: 6000 rev/min

Axial depth of cutting: 0.4 mm

Radial depth of cutting: 0.05 mm

Feeding rate: 0.10 mm/tooth

Cutting rate: 184 m/min

Feeding: 600 mm/min

Coolant: Air

Milling direction: milling down into a cavity (56 mm X 26 mm)

Length of a single pass: 1 hole

End of tool life: At the end of the hole, V_bmax&gt;0.10 mm

<tables><img file="TW200831706A_D0040.tif" /></tables>

From the example shown above, it can be clearly found that the hard coating system in the tool includes, for example, a single-layer system, or in particular with the so-called IL₁And/or IL₂HL with X=N in the inner layer₁Specific form of HL₀Compared with the coating system of modern technological development level, such as the coating system with TiASlN or AlCrN outermost layer, the wear resistance provided is surprisingly increased.

Although the so-called HL with X=N₁The coating is applied throughout all the examples as the outermost layer of the coating system, but it is easy for a skilled technician to find that for some applications, additional layers can be provided on the so-called layer, as for example a lubricating layer.

In addition, after traversing these embodiments, considering the orientation of the tool body, the so-called HL₁The layer is applied directly on the tool body, or via IL₁Or IL₂The inner layer is separated from it.

However, with regard to certain applications, it is obvious to skilled technicians that the multi-layer system with the HL type and IL type layers proposed by the present invention can be transformed into many types based on specific needs.

Moreover, the above embodiments are implemented in HL₁On the layer, its X=N. However, for skilled technicians, it is fully understood that replacing N with C, CN, NO, CO or CNO can result in a layer HL with similar wear resistance qualities.₁。

If in HL₁In the type layer, the element W is replaced by Mo, Ta, Cb (Nb), and the same situation holds.

Furthermore, the tools on which these embodiments are implemented have a tungsten carbide tool body.

However, as for the material of the tool body or the more general workpiece body, skilled technicians are fully aware that through the coating system according to the present invention, the goal of increasing wear resistance can also be high-speed steel, cemented carbide or three-dimensional boron nitride. Or it can be realized on the workpiece body of metal porcelain or ceramic material. The so-called improvement in wear resistance may not only be extremely necessary for tools like cutting tools, such as end mills, drills, cutting inserts, and gear cutting tools, but also for other workpieces other than tools.

By manufacturing a device in which at least part of it is a hard material (especially having a hardness of at least HRC 52), including: using the cutting tool according to the present invention to perform a cutting procedure on the so-called hard material, the device manufacturing becomes faster, so The output is higher and the manufacturing cost is reduced.

Figure 6 shows the SEM cross-section of the AlCrN coating. This is consistent with the scanning electron micrograph (SEM) of the cross section of the single-layer hard coating system of Sample 3 according to Example No. 1. The hard coat layer exhibits a very fine columnar growth structure with columns with a width of the order of 200 nm.

Figure 7 shows the scanning electron micrograph of the cross section of the AlCrBWN single-layer hard coating system of Sample 4 according to Example 1. This hard coat layer did not show a columnar growth structure. During the deposition, the strong renucleation process resulted in the appearance of a glassy nanocrystalline coating structure in the SEM cross-section at 25,000 times.

Figure 8 shows a scanning electron micrograph (SEM) of the cross section of the TiAlN/AlCrBWN double-layer hard coating system of Sample 9 according to Example 2. The IL₁The inner layer shows a columnar growth structure, and the column has a width of the order of 400 nm.

The HL₁The type outer layer showed the same glass-like growth structure as the sample 4 of Example 1 (see Figure 7). The columnar growth structure is obviously interrupted at the interface between the inner layer and the outer layer.

Figure 9 shows the AlCrN single-layer hard coating system of sample 3 according to embodiment No. 1 and the AlCrBWN type HL of sample 4 according to embodiment 1₁XRD spectrum of a single-layer hard coating system. These spectra use Bruker AXS equipment, using Cu_KαThe incident beam (λ=1.5406 nm) and a glancing incidence angle of 2° are recorded, and the output is the spectrum of the nanocrystalline coating with a perceptible quality. This configuration allows measuring even thin films without interference effects via the substrate and/or via the inner layer. The XRD spectrum of AlCrN showed sharp peaks at about 37.5°, 43.7° and 63.7°, which were later designated as the &lt;111&gt;, &lt;200&gt; and &lt;220&gt; planes of the fcc (face-centered lattice cubic) AlCrN crystal structure.

For example with X<img file="TW200831706A_D0041.tif" />0.7 of Al_xCr_1-xAs expected by the N hard coat, there is no hexagonal AlN phase in the hard coat. The diffraction peaks displayed by the AlCrBWN hard coating are also designated as the planes &lt;111&gt;, &lt;200&gt; and &lt;220&gt; of AlCrN. However, Al with the same X of 0.7_xThe CrBWN hard coating shows a significant contribution of hcp-(hexagonal dense lattice) AlN. The sharp peaks at about 33.1°, 49.5° and 58.9° indicate the signal representing the phase. The sharp peaks at about 31.5°, 35.7°, 48.3°, 64.1° and 65.9° are derived from the WC-Co body of the carbide matrix.

Figure 10 shows the XRD spectrum of the AlCrBWN coating including the TiAlN inner layer. The measurement system is implemented using the configuration described in Figure 9 for the occasion. The upper spectrum represents the AlCrBWN coating deposited under the deposition conditions of Examples 6-8. As shown in the lower spectrum of Figure 10, reducing the substrate bias voltage from -100 to -85V to ground potential produces a significant change with respect to the Q value, however, apparently, the induced spike broadening. The latter can be referred to as further particle refining.

<p>1Workpiece</p><p>3Ontology</p><p>5,7Surface</p><p>HL₀, HL₁Floor</p><p>5Matrix</p><p>7Outermost surface</p><p>IL₁, IL₂Boundary</p><p>CSSCoating Subsystem</p>

The present invention will now be further described through embodiments assisted by the drawings. The drawings show: Figure 1 schematically shows a part of the first embodiment of the workpiece according to the present invention; Figure 2 is a representation similar to Figure 1, which is the second embodiment of the workpiece according to the present invention; Figure 3 It is similar to the representation in Figures 1 and 2, which is based on another embodiment of the work piece of the present invention; Figure 4 is a representation similar to Figures 1 to 3, which is based on another implementation of the work piece in the present invention Example; Figure 5 is a representation similar to Figures 1 to 4, which is another embodiment of the workpiece according to the present invention; Figure 6 is an SEM cross-sectional view of AlCrN hard coating; Figure 7 is in accordance with the present invention The SEM cross-sectional view of the AlCrBWN hard coating on the workpiece; Figure 8 is the SEM cross-sectional view of the TiAlN/AlCrBWN hard coating on the workpiece according to the present invention; Figure 9 is the XRS spectrum of the AlCrN and AlCrBWN hard coating, the latter in accordance with the present invention The work is provided on; Figure 10 is the XRD spectrum of the AlCrBWN hard coating of the workpiece according to the present invention.