Remote maintenance system

Remote maintenance system

[Technical field to which the invention pertains]

The present invention relates to a remote maintenance system for maintaining industrial equipment installed at a remote location.

[Prior Art]

The trouble-solving maintenance work of industrial equipment requiring maintenance (for example, a semiconductor device production device) has been manufactured so that when a failure occurs, the maintenance personnel will give a solution to the operator of the production device (via telephone or fax communication, or Directly visit the factory where the production unit is installed). This method is also applied to periodic maintenance.

Along with the increase in investment in the semiconductor industry in recent years, the number of installed production equipment has also increased, resulting in a lack of long-term maintenance personnel. In order to achieve low cost, the production location has been distributed in remote locations both at home and abroad. In this case, it is difficult to provide countermeasures for troubleshooting and periodic maintenance. The scattered distribution of production locations has caused a distraction in the information about maintaining production facilities. In this way, it is very difficult to centrally manage the implementation of these messages. The processing experience of related faults that have occurred cannot be effectively reapplied.

[Summary of the Invention]

The present invention contemplates the various conditions described above, and its purpose is to perform maintenance on industrial equipment installed at a remote location immediately and efficiently.

In accordance with the present invention, the foregoing objects are achieved by providing a remote maintenance system for maintaining industrial equipment installed at a remote location, the system including monitoring means for monitoring the operational status of one or more industrial equipment, and The management device that manages the maintenance of the industrial device communicates with the monitoring device via the Internet.

According to another phase, a remote maintenance system for maintaining an industrial equipment installed at a remote location is provided by providing a monitoring device arranged on the side of the industrial equipment, the monitoring device comprising an acquisition device for detecting one Or the occurrence of a failure of most industrial equipment and obtaining a situation message representing the status of the failure, and a communication device for notifying a management device via the Internet to implement the information of the industrial equipment obtained by the acquisition device. The central maintenance management, and the notification message transmitted by the management device via the Internet to receive the notification of the response to the situation.

In another aspect of the invention, the foregoing objects can be achieved by providing a management device arranged on the vendor side to form a remote maintenance system for maintenance installation at a remote location, the management device including, a communication Means for communicating with each monitoring device in at least one factory via the Internet (wherein a monitoring device is arranged to monitor an operational state of at least one industrial equipment), and a reaction device for relying on the industrial equipment The fault status message determines the countermeasure for resolving the fault (the message is received by the communication device from the monitoring device), and the monitoring device that causes the communication device to notify the reaction based on the response message caused by the determined countermeasure.

In still another aspect of the present invention, the foregoing objects can be attained by providing a remote maintenance method for maintaining industrial equipment installed at a remote location, comprising the steps of supplying a first industrial equipment a seller, a second seller supplying the second industrial equipment, a first factory installing the first and second industrial equipment, and a second factory installing the first and second industrial equipment, maintaining communication information via the Internet , which may cause the first seller to perform central maintenance management on the first industrial equipment installed in the first and second factories, and cause the second seller to install the second industrial equipment in the first and second factories Implement central maintenance management.

The detailed description of the embodiments of the present invention will be apparent from the accompanying drawings.

[Embodiment]

[First Embodiment of Remote Maintenance System for Industrial Equipment]

1 is a schematic diagram showing a remote maintenance system for use with an industrial equipment in accordance with a preferred embodiment of the present invention. Reference numeral 101 represents an office of a vendor (equipment supply manufacturer) that provides industrial equipment. This embodiment assumes that the semiconductor production apparatus used in the semiconductor manufacturing plant is industrial equipment. Examples of the semiconductor production apparatus are pretreatment equipment (e.g., an exposure apparatus, a coating, developing apparatus, and an annealing apparatus) and post-processing equipment (e.g., a combination apparatus and an inspection apparatus).

Reference numerals 102 to 104 denote production plants of at least one semiconductor manufacturing manufacturer who is a user of industrial equipment. That is, the production plants 102 to 104 may belong to different manufacturers or the same manufacturer (eg, pre-treatment and post-treatment plants).

Within each of the plants 102-104, a plurality of industrial equipment 106 are arranged, a LAN (internal network) 109 for connecting the equipment 106, and a monitoring device functioning to monitor the operational status of the individual industrial equipment 106. Main computer 107.

The host computer 107 in each of the factories 102 to 104 is connected to a host computer 108 functioning as a management device on the vendor side 101 via the Internet 105 functioning as a worldwide communication device. The host computer 107 will notify the status side of the operational status of the associated industrial equipment 106 (e.g., the fault status of the associated industrial equipment) from the factory side to the vendor side. At the same time, the host computer 107 receives a response message (for example, an indication of how to solve the problem of the failure, or a countermeasure program or its data) from the seller side. The status message and/or the response message will be interpreted as a maintenance message.

The communication between the factories 102 to 104 and the vendor 101, and the communication of the internal network LAN between each factory, uses the Internet Protocol Data Transfer Protocol (TCP/IP) generally used on the Internet.

Through the Internet 105, on the main computer 108 of the vendor side 101, the operational status of the industrial equipment in the use factories 102 to 104 can be immediately captured. Maintenance messages representing the operational status and maintenance status can be retrieved from the computer by other departments other than the maintenance department of the vendor 101, such as the computer 110 of the production department and the R&D department. This maintenance message can be reported to the production department and R&D department.

Fig. 2 is a flow chart showing the operation of the host computer 107 installed in each factory. The host computer 107 periodically executes the processing represented by the flow table to periodically monitor the operational status of the majority (n) of industrial equipment 106 via the internal network LAN 109. When the failure occurs, the host computer 107 acquires a status message such as a status of the failure, and notifies the seller 101 of the message via the Internet 105.

In the flow chart of FIG. 2, the host computer 107 recognizes and manages a majority of industrial equipment 106 (i.e., the first to nth industrial equipment that are targets for monitoring). The host computer 107 sequentially adds a parameter i (steps S207 and S208), and monitors the operational state of the i-th industrial equipment (step S203). The host computer 107 obtains a status message regarding the operational status of an industrial equipment for the failure (step S204) and notifies the seller of the status message via the Internet 105 (step S205). Based on the report reflecting the status message, the response message transmitted by the vendor side 101, if possible resolved (the fault can be eliminated by the updated software or the like), the host computer 107 can automatically maintain the industrial equipment ( Step S206). In the case where automatic maintenance is not possible to troubleshoot, a message representing this situation is displayed on, for example, a display panel.

Each industrial equipment 106 will have a response to the request from the host computer 107, and notify the associated host computer 107 of the utility of the presence/absence of the fault (related to step S203), and have content and notifications indicating the fault. The host computer 107 represents the function of the status message indicating the faulty content (e.g., an error code representing the content of the fault) (related to step S204).

In step S205, the status message from the host computer 107 to the vendor 101 side includes, for example, the type of the industrial equipment that failed, its serial number, the error code, and the time of occurrence of the failure. The correlation between the error code and the fault content can be naturally updated by the host computer 108 on the vendor 101 side via the Internet 105.

If the content of this fault is not registered in advance, an error code representing this content will be included in the situation message. In this case, the operator can notify the seller side of the detailed information via a telephone, fax or email device.

This function is the main computer 108 of the management device on the vendor 101 side, for example, 24 hours waiting for communication with the host computer 107 in each factory. FIG. 3 shows a flow chart of the operation of the host computer 108 on the vendor 101 side.

The host computer 108 on the vendor 101 side periodically performs the processing represented by this flow chart to monitor the operational status of the industrial equipment within the individual plants 102-104.

First, the host computer 108 monitors whether or not a faulty report exists (step S302). If YES at step S302, the host computer 108 obtains a status message regarding this report (step S303). Based on this information, the host computer 108 searches for a fault database (DB) for managing the maintenance of industrial equipment for each factory. The host computer 108 checks the same industrial equipment for whether or not a failure that is the same as the currently reported fault state has occurred, that is, whether the same fault state has been registered in the fault database (501, detailed later) (step S304).

If the same fault state has been registered in the fault database ( in step S304), it can be determined whether or not a countermeasure for excluding such a fault state has been registered (step S306). If YES at step S306, the host computer 108 will have a response message (eg, a code message, or a message representing a countermeasure, a countermeasure program, or its data) regarding the registration countermeasure, via the Internet 105. The main computer 107 located in the factory reporting the failure is notified (step S307).

Upon receiving the response message, the main computer 107 on the factory side automatically restores the faulty industrial equipment to a normal state if possible. When such automatic recovery is impossible, the host computer 107 outputs a The message is, for example, on a display for the operator of the faulty industrial equipment to know.

The host computer 108 reports the fact that the failure occurred, the content of the failure (the situation message), the presence/absence of the notification (response message), the current status, and any other related information to the seller 101 side. principal. This report is displayed on the display of the computer 110 and automatically sends an email from the host computer 108 to the email address of the person in charge at the seller's side.

If it is determined in step S304 that the fault state identical to the currently reported fault state is not registered in the fault database, the fault state is registered in the fault database (step S305), and then step S308 is performed.

When the report to the operator is completed (step S308), the host computer 108 updates the fault database (step S309). In this update, the presence/absence of the transmission of the countermeasure (reaction message), the time of receipt of the failure report, and other related information are registered in the database.

FIG. 4 shows a flow chart of a flow program that can be executed by the person in charge of the maintenance department after receiving the report of step S308. First, the person in charge searches the fault database to grab a faulty content and decide whether a countermeasure is needed (step S402). If, in step S402 (for example, a suitable countermeasure has been notified to the relevant factory in step S307), the operating state of the failed industrial equipment 106, it is monitored via the Internet 105 whether, for example, the fault is It will happen again in the future.

However, if a countermeasure is required (i.e., "NO" in step snot), the person in charge selects an appropriate countermeasure by searching for the stored message in the fault database (step S403).

After a countermeasure policy is applied to the Internet via the Internet 105, the failure can be eliminated (step S407). As an example, this failure may also be caused by a software error. In this case, the parameters and programs in the memory of the faulty industrial equipment can be corrected via the uplink of the Internet 105 and the host computer 107 on the factory side.

In another countermeasure policy, a method for eliminating a malfunction is instructed to an operator via an e-mail, a facsimile, a telephone, or a device-like device (step S406).

For some serious fault conditions that cannot be eliminated by the methods in steps S406 and S407, the person in charge must visit the factory to troubleshoot (step S405).

When the countermeasure is completed, the person in charge operates the host computer 108 or the computer 110 to update the fault database according to the message of the failure (step S408).

The fault database in the host computer 108 on the vendor 101 side will be detailed below. A special or general purpose browser software is installed in each computer 110 connected to the host computer 108 via the LAN 109, and the industrial equipment 106 of each factory is connected via the Internet, thereby constituting, for example, The user interface window in Figure 5.

The operator on the seller or the factory side can input, for example, the type of industrial equipment (401), the serial number (402), the case of failure (403), the date of occurrence of the failure (404), the degree of urgency (405), faulty State (406), countermeasure (407) and progress (408). The message as described above can also be automatically entered into the fault database by the host computer 108.

The browser software of the window shown in Figure 5 has a hyperlink function (410 to 412) to allow workers in each department of the vendor, and each operator in each factory to enter each item. In the detailed database, a new version of the software is revised from the software library, or a navigation guide (auxiliary message) is used as a reference for the operator in the factory.

As described above, workers in each department on the seller 101 side, such as the maintenance department, the production department, and the R&D department, can access the fault database by using the computer 110 (which is connected to the host computer 108 via the LAN 109). . External maintenance personnel can also access the fault database as a portable terminal by using the Internet 105. Therefore, the information of the individual department of the seller can be centrally managed and each department can always get the latest information.

The information that is part of the fault database can be revealed to the user (factory), and each user can enter a variety of past maintenance messages via the Internet and use a suitable countermeasure to solve him. Your own fault. As described above, in this embodiment, the seller and the majority of users can share the maintenance message, and the maintenance efficiency can be significantly improved.

The embodiment also includes a communication security system to prevent a third party from entering the confidential information from the faulty database via the Internet.

This system has an insulating wall, and the computer that performs confirmation by using a password and is allowed to enter the database must be registered in advance in the main computer 108 of the vendor 101 to prevent entry of the unregistered computer.

Figure 6 is a diagram showing a communication security system device in accordance with this embodiment. The communication into the fault database 501 of the host computer 108 on the seller 101 side by using a browser 500 is performed using a password. The host computers 107 and 108 include encoder decoders 502 and 504 and communication controllers 503 and 505. An encoder decoder calculus is provided in each factory (user) (the encoder decoder on the vendor side can be overcome by most calculus). The encoder decoder calculus is periodically changed to increase security.

In the system of this embodiment, as described above, as an existing Internet infrastructure, the communication protocol and the Internet access software can be used to communicate with the maintenance information of the industrial equipment. For this reason, the burden of installing communication lines can be reduced, and the burden of developing new software can be reduced, and a high-speed, low-cost remote maintenance system can be constructed.

Most of the factories that install industrial equipment are connected to the vendor's management system via a communication device to implement centralized management of maintenance messages and to share the information. Past failure experience can be used outside of the production plant, so that those failures can be overcome immediately. In particular, when different companies (such as users) share the maintenance message, they can improve the efficiency of the entire industry.

[Second Embodiment of Remote Maintenance System for Industrial Equipment]

Fig. 7 is a conceptual view showing a maintenance system for industrial equipment according to a second embodiment of the present invention. In the first embodiment, a majority of user factories each having industrial equipment are connected to a management system for sellers of industrial equipment via a communication device, and communicate with each other in each factory in the factory via the communication device. Maintenance information for the equipment. However, in the second embodiment, a factory having a majority of the seller's industrial equipment is connected to the management system of the seller of most industrial equipment via the communication device of the Internet, thereby communicating each industry via the communication device. Maintenance information for the equipment.

Referring to Fig. 7, reference numeral 201 denotes a production plant of an industrial equipment user (semiconductor device manufacturer) having an exposure device 201, a coating/developing device 203, and an annealing device 204, all of which function as semiconductor devices. The production equipment is installed in the production line of the plant. Only one production plant 201 is shown in Figure 7, but most of the plants have similar actual production structures. The aforementioned devices are connected via a LAN (internal network) 206, and the operation of the production line is managed by a production management host computer 205. The main management systems 211, 221 and 231 for performing remote maintenance of the supplied equipment are provided in the vendor's office (equipment supply manufacturer), such as an exposure device manufacturer 210, coating/developing device manufacturer 220 And annealing device manufacturer 230. A host computer 205 for managing each device in the user's production plant is connected to the management systems 211, 221 and 231 of the vendor for the individual device via the Internet 20O. As described with reference to Figure 1, each vendor 210, 220, and 230 can perform centralized maintenance management of the devices that are themselves supplied by the majority of the users' factories.

In this system, when one of the series of production equipment on the production line fails, the operation of the production line is stopped. Via the Internet 20O, remote maintenance from vendors of faulty equipment can be received so that faults can be immediately overcome while reducing the stopping time of the line to a minimum. Each vendor's master management system has a fault database as described in the first embodiment. Maintenance messages are stored in this fault database. Use a different communication security system between the production plant and the different vendors to prevent the disclosure of information. The detailed maintenance contents and methods are the same as those of the first embodiment, and thus this detailed description will be omitted herein.

As previously mentioned, in the system of the present embodiment, a factory having a majority or one of a plurality of users has industrial equipment of a majority of the sellers on the production line and is connected to the management system of the individual sellers to communicate maintenance messages. Even if the equipment given fails in production, immediate maintenance can be received from the relevant vendor. The stop time of the production line can be minimized to improve production efficiency. In particular, when the maintenance message is shared with different users, different companies, or different vendors, the efficiency of the entire industry can be improved.

[Embodiment of Semiconductor Device Production Method]

One of the semiconductor device production methods assisted by the aforementioned remote maintenance system will be described in detail below.

Fig. 8 shows a production flow chart of a micro device (for example, a semiconductor wafer of -IC or LSI, a liquid crystal panel, -CCD, a thin film magnetic head, and a minute machine). In step 1 (circuit design), a circuit design for a semiconductor device is implemented. In step 2 (formation of the cover), a cover for the circuit design model is formed. In step 3 (pre-processing of the wafer), a wafer such as a germanium material is prepared. Step 4 (wafer processing), referred to as pre-processing, in which the circuit is actually formed on the wafer by using a prepared mask and wafer, using a lithographic brushing technique. Step 5 (combination), referred to as post-processing, forms a semiconductor wafer via the wafer processing used in step 4, and includes a combination step (cut forming and drying) and a packaging step (wafer sealing). In the step 6 (inspection), the semiconductor device produced in the step 5 is subjected to, for example, an operation inspection test and a durability test. Through these steps, the semiconductor device has been completed. After the semiconductor device is shipped (step 7), the pre-treatment and post-treatment are carried out in different factories, and maintenance is performed for each factory in the remote maintenance system described above.

Figure 9 shows a detailed wafer processing flow chart. In step 11 (oxidation), the surface of the wafer is oxidized. In step 12 (CVD), an insulating film is formed on the surface of the wafer. In step 13 (electrode formation), an electrode is formed on the wafer via deposition. In step 14 (ion implant), ions are implanted in the wafer. In step 15 (resist treatment), the wafer is coated with a sensitizer. In step 16 (exposure), the circuit model of the cover is printed and exposed via an exposure device. At step 17 (development), the exposed wafer is developed. In step 18 (etching), the unexposed portions other than the removed developed resist image are etched. In step 19 (resist removal), the unwanted resist during etching is removed. These steps are repeated to form a majority of the circuit model on the wafer. The production equipment used in the individual steps is monitored via the aforementioned remote maintenance system. Precautions can be taken to prevent malfunctions. Even if a failure occurs, immediate restoration can be performed, and thus the productivity of the semiconductor device can be improved as compared with the conventional case.

As described above, according to the present invention, a worldwide network is used as a remote maintenance communication system for industrial equipment, and an effective and less capital investment maintenance can be constructed regardless of the location where the equipment is installed. system.

The user's factory installed in the industrial equipment is connected to the seller's management system via the communication device, and the fault can be immediately overcome. In addition, when sharing the maintenance message, it is expected that the ability to maintain can be improved.

The present invention is not limited to the foregoing embodiments, and various changes and modifications can be made within the spirit and scope of the invention. Therefore, the public is informed of the scope of the patent described in the following patent application.

<p>101: Seller</p><p>102; factory</p><p>103: Factory</p><p>104: Factory</p><p>105: Internet</p><p>106: Industrial equipment</p><p>107: main computer</p><p>108: main computer</p><p>109: Internal network</p><p>110: Computer</p><p>200: Internet</p><p>201: Factory</p><p>203: coating/developing device</p><p>204: annealing device</p><p>205: main computer</p><p>206: Internal network</p><p>210: Seller</p><p>211: Management System</p><p>220: coating/developing device</p><p>221: Management System</p><p>230: Manufacturer</p><p>231: Management System</p><p>500: Browser</p><p>501: Fault database</p><p>502: codec</p><p>503: Communication controller</p><p>504: codec</p><p>505: Communication controller</p>

Figure 1 is a schematic illustration of a remote maintenance system for use with an industrial equipment in accordance with a first embodiment of the present invention;

Figure 2 is a flow chart of the operation of the host computer installed as a monitoring device on the user (factory) side;

Figure 3 is a flow chart of the operation of the host computer installed as a monitoring device on the seller side;

Figure 4 shows the flow chart that should be completed by the person in charge of the maintenance department;

Figure 5 is a diagram showing an example of an input window of a user interface functioning as a fault database;

Figure 6 is a diagram showing a device for communicating a security system;

Figure 7 is a schematic illustration of a remote maintenance system for use with an industrial equipment in accordance with a second embodiment of the present invention;

Figure 8 is a flow chart showing a production process of a semiconductor device;

Figure 9 is a flow chart showing a wafer process.