SE545420C2

A method to determine thickness and wave height of a thin substrate

Abstract

A method to measure thickness and wave height of a thin substrate (3), wherein that the method comprising the steps of a) placing a first electrode (2a) against a first side (3a) of the substrate (3) and a second electrode (2b) against a second side (3b) of the substrate (3) r b) removing the substrate (3) from the electrodes (2a, 2b), c) measuring the electrical capacitance between the electrodes, using the electrical capacitance value from step (c) to determine the distance, dAcz between the first electrode (2a) and the second electrode (2b) , i. e. the distance between the substrate's wave tops, measuring the thickness, dwECH/ of the substrate with a micrometer (7), and combining the results from step (d) and step (e) to calculate the wave height of the substrate.

SE545420C2, drawing sheet 1
Sheet 1 of 4

Term

No projected expiry on record.

  1. Priority and filed
  2. Granted
  3. Today

10 claims: 1 independent, 9 dependent

  1. 1
    A method to measure thickness and wave height, i.e. thickness variations, of a thin substrate (3), wherein that the method comprising the steps of:a) placing a first electrode (2a) against a first side (3a) of the substrate (3) and a second electrode (2b) against a second side (3b) of the substrate (3), b) fixing the position of the electrode and removing the substrate (3) from the electrodes (2a, 2b), c) measuring the electrical capacitance between the electrodes, d) using the electrical capacitance value from step (c) to determine the distance, dAc z between the first electrode (2a) and the second electrode (2b), i.e., the distance between the substrate's wave tops, e) measuring the thickness, dwECH/ of the substrate with a micrometer (7), and f) combining the results from step (d) and step (e) to calculate the wave height of the substrate.