Untitled record

full description

invention background

The present invention relates to a probe assembly for use with a fluid bed reactor (FBR), particularly a pyrolysis fluid bed reactor.

silicon- or germanium- pyrolytic decomposition

<p>5 bearing gas resulting in silicon- or germanium-coated particles, including assembly of a fluidized substrate reactor member probe and pressure tap</p>

tap.

Pyrolytic decomposition of silicon-bearing gas

The fluidized beds are an outstanding process for the production of polysilicon 10 for the photovoltaic and semiconductor industries due to excellent mass and heat transfer, increased surface for deposition, and continuous production.

Compared with a Siemens-type reactor, a fluid bed reactor offers much higher production rates at a fraction of the energy consumption. Fluid substrate reactor can be continuous and highly automatic to significantly reduce labor costs.

<p>15th A common problem in fluid bed reactors is deposition of internal components and reactor warn</p>

Oceanic as silicon deposits on Grandfather Warren, temperature probe, pressure tap, seed nozzle, gas nozzles, and interior support structures. Another common problem is contamination of the fluid bed at high operating temperatures by the materials used to build the reactor and its components. For example, it has

<p>20 It was found that nickel spreads in the silicon layer of a base metal in some nickel alloys. Similar problems arise in fluid bed reactors</p>

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constituent of the pyrolysis of germanium-carrying gas to produce encapsulated germanium particles

.germanium-coated particles.

General description of the invention

Embodiments of an installation for a fluid bed reactor . are disclosed

5 (FBR). It comprises a probe assembly of an FBR fluid bed reactor member and a pressure tap. A fluid bed reactor (FBR) member has an outer surface, maximum dimension D1, outer transverse, distal end, and length L1. The pressure faucet has a wall defining a corridor, the outermost dimension D2 where D1 is smaller than D2, the far end, and length L2.

10 pressure tap wall spaced from the outside of the member

FBR member, to have a space between FBR member and pressure tap wall. The member member of a fluidized bed reactor (FBR) is located within a passage bounded by the wall of the pressure tap.

In some embodiments, the member of a fluid bed reactor (FBR) is a thermocouple 15, a seed tube, a particle sampling line, a gas sampling line, a gas feed line, a heater, or Second pressure faucet. In one embodiment, the length of L1 is greater than the length of L2 such that the maximum end of the FBR member lies under the terminal end of the pressure tap wall when the probe assembly is installed in the FBR with the probe assembly extending downhill into the reaction chamber 20 of the reactor It has FBR fluidized substrate.

In another embodiment, the length of L1 is less than or equal to the length of L2 such that the distal end of a FBR member lies at or above the distal end of the pressure tap wall when the probe assembly is installed in a FBR with the probe extending inclined to The reaction chamber of a fluid bed reactor. In some arrangements, L2 is of sufficient length for the distal end 25 of the pressure tap to extend into the fluidized bed portion within a fluid bed reactor.

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When a pressure tap is positioned so that it extends through an opening in the upper head of a fluid bed reactor and a fluid bed reactor is in operation.

In some embodiments, the sensor assembly includes a more direct support for the distal end of the outer wall of the pressure tap. Support may include an external member with a maximum dimension D3 .

5 External transverse (with a benefit D3 greater than or equal to D2), and a plurality of spaced rods extending internally from the external member. Positions that centrally and mechanically support the balance of the inner tube within the outer wall.

It is desirable that the sensor assembly, or part of it, comprises high-temperature stainless steel, nickel-iron-chromium alloys.

10 chromium, or iron - chromium - nickel - molybdenum

molybdenum, or an alloy of a fine type based on cobalt. In certain arrangements, the exposed outer surfaces of the collector probe include an outer layer consisting of cobalt-chromium alloy, tungsten carbide/cobalt, tungsten carbide/nickel boron, silicon carbide, or silicon carbide, or tungsten carbide/nickel boron.

15th Silicon..silicon nitride

A typical upper berth installation includes an upper berth containing at least one hole extending through the upper berth. The probe assembly is positioned so that it extends through the hole. Particles for assembling the probe shown are suitable for use in a fluid bed reactor, such as a fluid bed reactor that includes a vessel, a plurality of seed particles inside a vessel, and a gas source.

.gas source 20

In some embodiments, the gas source is silicon-bearing gas and the reactor is configured to produce coated silicon particles by pyrolysis

deposition of silicon for pyrolytic decomposition

silicon on seed particles, such as silicon seed particles. In some embodiments, member

25 A FBR FBR is a thermocouple that has a length greater than that of the pressure tap.

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The foregoing and other things, features, and merits of the invention will become clearer from the following detailed description, which proceeds with reference to the attached figures.

Brief explanation of the drawings

Figure 1a. An elevated schematic view of a single embodiment of the upper RC assembly of a FB5 reactor.

Figure 1b. Top technical drawing view of the support ring for an upper RC installation of Figure 1a.

Figure 2. Top schematic view of an upper AR assembly of Figure 1 after contamination from silicon deposition.

Figure 3. Top schematic view of an exemplary embodiment of an upper ground assembly including 10 probe assembly of a fluid bed reactor.

Figure 4: Schematic top view of the sensor assembly of Figure 3.

Figure 5: Transverse view of the probe assembly of Figure 4.

Figure 6: Top view of a strut assembly for the sensor assembly of Figure 4.

Figure 7: Top schematic view of a single embodiment of a fluid bed reactor incorporating a 15 probe assembly of Figure 3.

Detailed description:

Described here are embodiments of a probe assembly for use in a fluid bed reactor system, such as a fluid bed reactor system for the formation of polysilicon by pyrolysis of silicon carrier gas and precipitation

20 silicon on fluidized silicon particles or other seed particles (for example, silica, graphite, or quartz particles), or a fluidized substrate reactor system to form germanium-coated particles by hydrolysis

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By thermal decomposition of germanium-bearing gas and precipitation of germanium

germanium onto fluidized germanium particles or other seed particles.

Embodiments of the indicated probe assembly suitable for insertion through the upper or lower beds of a fluid bed reactor, and suitable for use in 5 fluid bed reactors having a non-metallic liner, such as a ceramic liner or

Quartz liner. Probe assembly combining a fluid bed reactor member and a pressure tap.

Although the probe assembly shown is suitable for use in many types of fluid bed reactors, the discussion will continue with focus on fluidized bed reactors 10 comprising a silicon deposit. Manufacture of polycrystalline silicon particles by chemical vapor deposition method that requires the thermal decomposition of a substance containing silicon such as, for example, silane, disilane or halosilanes such as trichlorosilane or tetrachlorosilane in a liquid reactor. Known to a person of the profession 15 is illustrated by numerous publications including patents and the following publications US Patent 2,075,6.2, Patent US 632,.7,02, US patent 5,255,672, US patent

34.,5,210, US patent 5,7.2,137, US patent 762,.5,13, ​​US patent

5,077,022, US patent 4,223,627, US patent 4,262,013, US patent

4,220,527, US patent 13.,4,416, US patent 4,314,525, US patent

<p>20 3,012,262, US Patent 3,012,261, US Patent 0215562/2010, Patent</p>

US patent 0062116/2010, US patent 0047136/2010, US patent

<p>0044342/2010, US .032447/200. US Patent 2002/42..015..25 US Patent 0102250/2002, US Patent 0026530/2002, US Patent</p>

0021250/2002.

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The silicon is deposited onto particles in a reactor by decomposition of the silicon-bearing gas carrier gas selected from a group consisting of silane (SiH4, disilane (Si2H6), higher order silanes (2+higher order silanes (SinH2n), dichlorosilane). dichlorosilane (SiH2Cl2), trichlorosilane (SiHCl3) and tetrachloride

5 silicon tetrachloride (SiCl4), dibromosilane (SiH2Br2, tribromosilane (SiHBr3), silicon tetrabromide

(SiBr4), diiodosilane (SiH2I2, triiodosilane (SiHI3), silicon tetraiodide (SiI4), and mixtures thereof. The silicon-carrying gas may be mixed with gases containing one or more halogens - halogen 10 containing gases, defined as consisting of any of a group of chlorine (Cl2, hydrogen chloride (HCl), bromine) Br2, hydrogen bromide (HBr), iodine (I2, hydrogen iodide (HI), and mixtures thereof. The silicon carrier gas may also be mixed with one or more other gases, including hydrogen (H2) or one or more inert gases.

15th Selected from nitrogen (N2, helium (He, argon (Ar, and neon Ne)). In an embodiment, the silicon carrier gas is silane, and the silane is mixed with hydrogen.

silicon-bearing gases, together with any associated hydrogen, halogen-containing gases and/or 20 inert gases, are fed into a pyrolyzed fluidized bed reactor within

The reactor produces silicon that deposits on seed particles inside the reactor. Contamination may occur while silicon deposits form on the reactor walls and internal reactor components (eg temperature probe, pressure tap, seed nozzle, internal supports, etc.).

25 Figure 1a is a schematic diagram of a typical top 10 ARS assembly for a bottom layer reactor

liquefied Assembly 10 includes upper head 20. FBR member 30 (FBR (eg, thermocouple), pressure tap 40, and seed nozzle 50

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Insert them through cooperative dimensional size orifices 32, 42, 52 in the upper vertical 20, typical FBR members including, but not limited to, the thermocouple, seed tube, particle sampling line, line 5 Gas sampling, gas feed line, heater, second pressure tap, or a combination thereof, may be a second pressure tap used, for example, to determine the pressure at the second height inside a fluid bed reactor (FBR).

Components within a fluid bed reactor are subject to mechanical forces (for example, vibratory forces from collisions with fluidized particles) during reactor operation. Accordingly, in some embodiments, the upper assembly pins 10 also include one or more support rods. 60 and/or support rings 70 to provide stability to the reactor member 10 FBR 30 FBR, pressure tap 40, and seed nozzle 50.

In an illustrated embodiment, a fluidized bed reactor member 30 FBR and a pressure tap 40 each have sufficient length L to extend into a fluid substrate having an upper bound of 20, which represents the average length of the fluidized bed substrate. The lengths of FBR 30 FBR member and pressure tap 40 may be approximately the same, or may differ. It is desirable, at least, a pressure tap 40 15 to be of sufficient length to extend into the fluidized portion of a fluidized substrate.

Figure 1b. It is an enlarged view of Supporting Ring 70 as seen from above. A support ring 70 includes a plurality of spacers 72, which extend outwardly radially towards and may connect to the circumference of the surrounding fluid bed reactor liner (not shown). Spacers 72 facilitate the centering of the support ring 70. Support ring 70 also includes a plurality of 74 rings, individually dimensioned to accommodate and mechanically hold 20 FBR members 30 FBR, pressure tap 40, seed nozzle 50, and support rods 60. Over time, spacer damage 72 may occur from the effect of Reactor lining during reactor operation and/or from the effects of fluidized particles.

Figure 2. 10 is a schematic diagram of the assembly of upper deposits 10 illustrating deposits, such as silicon deposits, that can form over time during a fluid bed reactor process. As the buildup increases, it becomes necessary to periodically stop the reactor process and dismantle

The reactor for cleaning and/or replacement of contaminated components. Delayed maintenance reduces operating efficiency, and more

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product, and incur additional operating costs. Support rods 60, support rings 70, and/or the outer surfaces of a FBR 30 FBR member, pressure tap 40, and seed nozzles 50 also can be sources of product contamination. Accordingly, it is advantageous to reduce the number of components included in a fluidized bed reactor.

5 Figure 3. A schematic diagram of a top-seat assembly of 100 including a sensor assembly 110 inlet through slot 112 at topmost 120. Hole 112 may be centrally positioned at topmost 120, or it may be center-balanced. Sensor assembly 110 includes FBR member 130FBR and pressure tap 140. Typical FBR members, including but not limited to, thermocouple, seed tube, particle sampling line, gas sampling line 10, gas feed line , heater, second pressure faucet, or a combination thereof. In some embodiments,

The FBR 130 FBR member is thermal duplex. In certain arrangements, another FBR 150 FBR reactor member, such as the seed nozzle, is inserted through another orifice 152 in the upper head 120. In the alternate embodiment (not shown), the probe assembly 110 is inserted through an orifice in the The bottom gear of a fluidized bed reactor.

15th Figure 4 and 5. They are a schematic diagram and a cross-sectional view, respectively, of the 110 probe assembly.

Figure 6. Top view of the support structure 160 from the 110 probe assembly.

Figure 7. This is a schematic diagram of a single embodiment of a reactor with a fluidized bed reactor 200 including an upper bed installation 100 of FIG. 3. The reactor includes 200 an outer wall 220 defining the reaction chamber 230. The reactor 200 also includes an orifice 240 for introducing the reaction gas (for example, gas 20 A silicon-bearing carrier or a germanium-bearing carrier (and one or more 250 fluidization nozzles). The reaction chamber 230 includes the bottom of 260 particles, for example, silicon or germanium particles.

During reactor operation, at least part of the bottom is fluidized. The limit 220 represents the mean height of a fluidized substrate.

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FBR 130 FBR member has an outer surface 132 and a distal end 134. Pressure tap 140 has a wall 142, which defines the passage. Fluid substrate reactor member 130 FBR shall be located within a passage. Wall 142 spaced away from the outside surface 132 to locate a blank 144 has a width W. Wall 142 has an open far end 146. 5 Pressure spouts 140 are practical to measure the pressure inside an empty hole 144.

In some embodiments, purge gas flows down through the void 144 to prevent obstruction of bottom particles from entering the void. In some examples, the purge gas is hydrogen or inert gas as previously described. Fluid substrate reactor member 130 FBR has a maximum external cross-sectional dimension D1, pressure tap 140 has a maximum external cross-sectional dimension D2, where 10 D1 is smaller than D2. In some embodiments, the FBR 130 fluidized bed reactor member is concentrated within a wall bound passage 142.

Although pressure tap 140 and FBR member 130FBR are shown in the figure. 4-5 With circular cross-sections, one lay expert in the field will understand that other shapes can be used. For example, both a fluid bed reactor member 15 130FBR and a wall 142 may have a square shape, a rectangular shape, an elliptical shape, a hexagonal shape, an octagonal shape, or any other desired cross-section. Alternatively, the FBR member 130FBR and FBR 142 may have different cross-sectional shapes as long as the FBR member 130FBR can be inserted into a specific pass by wall 142.

20 Fluid bed reactor member 130FBR has a length of L1 and a pressure tap of 140

It has a length of L2. In some embodiments, both the FBR 130 FBR member and the pressure tap 140 are long enough to extend into the FBR, namely below the limits 120, 220 (representing the mean length of FBR), and when the 110 probe assembly is inserted through the pins upper 120. In certain arrangements, such as the embodiment shown in Figures 3, 4, and 7, the length of L1 is 25 greater than the length of L2 such that a FBR member 130FBR extends beyond the distal end 146 of the pressure tap 140. For example, when be a layer reactor member

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Fluid substrate 130FBR thermocouple, the length of L2 is usually greater than the length of L1 so that the thermocouple will be more accurate for measuring the temperature in the fluidized substrate. In some embodiments, a fluidized bed reactor member 130FBR has a distal end 134 distal end that extends 100-5 cm beyond the distal end 146 of a pressure tap 140, such as 5-50 cm, 10-50 cm, 5 or 20-40 cm and beyond distal end 146 In one example, distal end 134 is 25-30 cm behind distal end 146.

In an alternate embodiment (not shown), the FBR member 130FBR is shorter than the pressure tap 140 and does not extend past the far end of the pressure tap. This arrangement may reduce or prevent product contamination from the FBR member. In one such arrangement This embodiment, FBR 130FBR member is a thermocouple, and thermocouple measures the temperature inside the vacuum between the thermocouple and the wall of the pressure tap, such as the temperature of the purge gas flowing through the vacuum. In some cases, the temperature inside the void may actually be the same as the temperature of the bottom within a moderate distance above the bottom. In another embodiment, a 130FBR fluid bed reactor member is a gas feed line.

15th In another embodiment (not shown), the pressure tap also includes an inner pipe

Defines the central passage and an outer wall spaced away from the internal tube to define the void. In such an arrangement, a FBR member is inserted into the central passage defined by the inner tube of the pressure tap. The inner tube may have a length greater than, less than or equal to the length of the outer wall. In one arrangement, the inner tube has a closed distal end.

20 In some arrangements, a 160 . support structure is provided, useful at or near the 146 . far end

of wall 142. In one embodiment, support 160 is secured by any means suitable to the distal end 146 of wall 142. The support 160 shown in Figure 4 comprises a 162 outer member, a plurality of spacers, like support rods, 164 extending inwardly from the outer member 162 An optional inner member 166. Support 160 has a maximum external dimension of width D3. in a

25 In certain embodiments, the D3 dimension is less than or equal to the D2 dimension, and it is recommended that the D3 dimension closely resembles the D2 dimension. There are at least two support bars 164. In some arrangements, there are three

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to five support bars 164, such as four support bars 164 in the embodiment shown. In some embodiments, the support rods 164 have sufficient height to extend upwards to the pressure tap 140 when the support 160 is secured to the far end 146 of the pressure tap. Support 160 facilitates the location of the FBR member 130FBR within the wall 142, and provides mechanical support 5 for the FBR member 130FBR.

When internal member 166 is present, internal member 166 has a maximum outer transverse dimension D4 where the dimension D4 is less than or equal to the dimension D1 and the dimension of D4 is greater than the dimension D2. Although Figure 4. The external organ 162 and the internal organ 166 have circular shapes, one ordinary skilled in the art would understand that the internal organ could take any shape.

10 It is capable of receiving and fixing a fluidized bed reactor member 130FBR, and the outer member may take any shape, usually a shape similar to the shape of the outer transverse of a pressure tap. When an internal member 166 is present, the support rods 164 are rigidly secured to only one of the external members 162 and internal members 164 to accommodate the differential thermal expansion of the components.

15th In this ideal arrangement, a pressure faucet 140 has an outer transverse dimension D2 greater than the dimension

The external tangential of a conventional pressure tap, such as the 40 pressure tap in Figure 1. In some embodiments, the dimension D2 is 2.5-6.0 cm, such as 3.0-5.0 cm. In one example, dimension D2 is 3.5- 4.0 cm. This larger cross-sectional dimension provides the 110 probe assembly with better mechanical stability within the reactor, reducing or eliminating the need for support rods and rings in some embodiments. reduce

20 The number of components within a fluid bed reactor has many advantages. for example. There are fewer surfaces that could contaminate the product and/or become contaminated during reactor operation, thus reducing overall maintenance requirements. In addition, reactor maintenance is simplified since there are fewer components that require cleaning, disassembly, and/or replacement during maintenance operations.

The 110 probe assembly parts that extend into a fluidized substrate reactor are constructed from 25 materials capable of withstanding the pressure, temperature, and chemical conditions inside the reactor. Usually, 110 probe assembly components, eg 130FBR fluid bed reactor member, pressure tap

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140, and support 160 (if any), which extends to a reactor with a fluidized substrate consisting of metal or metals suitable for pressure vessel service at the operating temperature of the reactor under ASTM

American Society of Mechanical Engineers (ASME) symbol for mechanical engineers

and pressure vessel. It is recommended that minerals that cause little or no pollution to the product be selected.

5 For fluid bed reactors for the manufacture of silicon, suitable metals include, but are not limited to, high-temperature steels eg stainless steels 304H or 304L, and certain nickel alloys, eg Incoloy H200 ® 800H, certain iron-chromium-nickel-molybdenum alloys, or cobalt-based premium alloys

10 superalloys , up to 2% by weight of manganese, up to 0.045% by weight of phosphorus, up to 0.03% by weight of sulfur, up to 0.75% by weight silicon 12-20%, silicon by weight 15, chromium 10.5-2, chromium % by weight of nickel, up to 0.1% by weight of nitrogen,

With the balance being iron. L304 stainless steel includes up to 0.03% of carbon, up to 2% of manganese, up to 0.045% of the weight of phosphorus, up to 0.03% of the weight of sulfur, up to 0.75% of the weight of silicon 20 wt% silicon, chromium, 12–20 wt. chromium, wt. nickel, up to 0.1% 20 wt. nitrogen, with equilibrium being iron.

Incoloy® 800H is a nickel-iron-chromium alloy comprising by weight of 30-35% nickel/cobalt (up to 2% cobalt), up to 1–23% by weight of chromium, up to by weight of 2% cobalt. 1% silicon, up to 1.5% by weight of manganese, 0.1-0.05 manganese, % by weight carbon, 0.6-0.15 by weight aluminum, 25-weight aluminum, 0.15-0.6 by titanium , up to the weight of 0.015% sulfur, with the balance being iron.

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In some embodiments, the outer surfaces of the 110 probe assembly are coated to greatly reduce or prevent product contamination and/or to limit or prevent external wear from contacting the fluidized particles. For example, the exposed outer surfaces of a 110 probe assembly (eg, the outer surfaces that are inside a fluidized substrate reactor) may be coated with a stellate alloy

5 Stellite (a non-magnetic, chromium-cobalt corrosion-resistant alloy that includes cobalt, chromium, carbon, and optionally tungsten, molybdenum, nickel, iron, aluminum, boron, manganese phosphorus, sulfur, silicon, and/or titanium (or tungsten/cobalt carbide

10 carbide/cobalt (eg, 22% tungsten carbide 12% / tungsten carbide WC, 23% Carbon dioxide Co, 23% Tungsten carbide, 17% WC Carbon dioxide, 26% Carbon dioxide Co, tungsten carbide 10% / WC Carbon dioxide Co /4 % chromium . Chromium Cr

In some examples, the outer surfaces of the 110 probe assembly are coated with a stellate alloy

15th 12 Stellite®, comprising 3–26–33% (w/w) chromium, 5–7 chromium, .3% (w/w)

tungsten 0.1 – 1.5% (w/w) molybdenum, tungsten (w/w) ≥ 2% (w/w) silicon 0.5–1.5% (w/w) manganese 1,1 -1,., manganese, % (w/w) carbon, greater than or equal to 2.5% (w/w) iron, greater than or equal to 7% (w/w) nickel, greater than or equal to 1 % (w/w) boron,

20 greater than or equal to 0.03% (w/w) sulfur, greater than or equal to 0.03% (w/w) phosphorus, with the balance being cobalt. One embodiment comprises of Stellite® 12 Kennametal Stellite®. ( 5,.2% (w/w) chromium

chromium, 2.5% (w/w) tungsten, 1.5% (w/w) silicon, tungsten, 1% (w/w) manganese, 1% (w/w) manganese, 1.25-1.4 percent (w/w) carbon carbon, greater than

25 or equal to 2.5% (weight / weight) iron and greater than or equal to 3% (weight / weight) nickel,

cobalt. With the budget being cobalt

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embodiments of a FBR probe assembly including an FBR member having an outer surface, outermost outer transverse dimension D1, distal end, and length L1; The pressure tap includes a lane setting wall, the outermost transverse dimension D2 where the D2 dimension is smaller than the D1 dimension, the far end, and the length of L2, in which a fluidized substrate reactor member is located.

5 FBR in the passage and wall of the pressure tap is moved away from the outer surface of the FBR member to define the clearance between the FBR member and the wall of the pressure tap. The member of the FBR FBR may be a thermocouple, seed tube, partial sampling line, gas sampling line, gas feed line, heater, second pressure tap, or a combination thereof.

10 In some embodiments, length L1 is smaller than length L2 such that the distal end of a member

FBR located under the far end of the pressure tap wall when a probe assembly is installed in a FBR with a probe assembly that extends down into the reaction chamber of a FBR. In some of these particular embodiments, the member of an FBR fluid bed reactor is a seed tube, a thermocouple, a micro sampling line, a gas sampling line, a

15th Gas feed, heater, second pressure tap, or a combination thereof

In some embodiments, length L1 is less than or equal to length L2 so that the distal end of an FBR member lies at or above the distal end of the pressure tap wall when a probe assembly is installed in a FBR with the probe assembly extending down to The reaction chamber of a fluid bed reactor. In some of these particular embodiments, a reactant member

20 The FBR is a seed tube, gas feed line, heater, or a combination thereof.

In any or all of the above embodiments, the sensor assembly may also include the direct support of the distal end of the pressure hydrant wall, and a strut comprising an external member having a maximum transverse external dimension D3, wherein the dimension D3 is greater than or equal to dimension D; And a plurality of spaced rods extending internally from the external member.

25 In any or all of the above embodiments, the sensor assembly or part thereof may include steel

High-temperature stainless steel, nickel-iron alloy

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Chromium is a nickel-iron-chromium alloy, an iron-chromium-nickel-molybdenum alloy, or an excellent cobalt-based superalloy. In any or all of the foregoing embodiments , the outer surface subjected to probe assembly may include a coating consisting of cobalt-chromium alloy, carbide

5 tungsten/cobalt tungsten carbide/cobalt, tungsten nickel/boron tungsten carbide

carbide/nickel boron, silicon carbide, or silicon nitride.

Embodiments of the upper head installation of a fluid bed reactor comprising upper beds including at least one orifice through it, and a probe assembly in accordance with any or both of the above embodiments, wherein an orifice-type probe assembly is to be placed.

10 Embodiments of a fluid bed reactor include probe assembly according to a mechanism or both

The aforementioned embodiments. In some embodiments, a fluidized substrate reactor also includes a vessel, which is known as the reaction chamber, a plurality of particles within the reaction chamber; A gas source is in contact with the reaction chamber, where the probe assembly extends into the reaction chamber.

In any or both embodiments of a fluid bed reactor mentioned above, a source may be

15th silicon-bearing gas A reactor is configured to produce silicon-coated particles by pyrolysis of silicon-carrying gas and precipitation of silicon in particles. In any or both embodiments of a fluid bed reactor mentioned above, the particles may be silicon particles, and a reactor may be configured to produce polysilicon.

.polysilicon

20 In any or all of the embodiments of a fluid bed reactor mentioned above, it may include

The fluid bed reactor is also on an upper bed that has at least one orifice through it, and a probe assembly of the extend-through type is placed. In some embodiments, the wall of a pressure tap has a sufficient length L2 that when operating a fluidized substrate reactor such that the fluidized particles are present in the fluidized substrate portion of the reaction chamber, finally

25 The distal wall of the pressure faucet extends to the fluidized portion.

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In any or both embodiments of a fluid bed reactor mentioned above, a thermocouple FBR reactor member of length L1 may be smaller than that of L2.

Considering the many possible embodiments in which disclosure principles may be applied, it should be recognized that the embodiments shown are only preferred examples and should not be taken as limiting the scope of disclosure.

<p>5 Instead, the detection range is defined by the following items.</p>

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