PL2790205T3
A power supply device for plasma processing
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority and filed
- Published
- Today
18 members in 3 offices
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 09405031 | European Patent Office (EPO) | A | |
| 14167841 | European Patent Office (EPO) | A | |
| 141678417 | – | – | – |
| EP20090405031 | – | – | – |
| EP20140167841 | – | – | – |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| EP2219205A1 | European Patent Office (EPO) | A1 | |
| US2010211230A1 | United States of America | A1 | |
| US2013221850A1 | United States of America | A1 | |
| US8542471B2 | United States of America | B2 | |
| EP2648209A1 | European Patent Office (EPO) | A1 | |
| US2013271885A1 | United States of America | A1 | |
| EP2219205B1 | European Patent Office (EPO) | B1 | |
| US2014254054A1 | United States of America | A1 | |
| US8837100B2 | United States of America | B2 | |
| US8854781B2 | United States of America | B2 | |
| EP2790205A1 | European Patent Office (EPO) | A1 | |
| US9214801B2 | United States of America | B2 | |
| US2016064923A1 | United States of America | A1 | |
| EP2648209B1 | European Patent Office (EPO) | B1 | |
| EP2790205B1 | European Patent Office (EPO) | B1 | |
| US9997903B2 | United States of America | B2 | |
| PL2648209T3 | Poland | T3 | |
| PL2790205T3This record | Poland | T3 |
Numbers
- Publication
- 2790205
- Publication, DOCDB
- 2790205
- Publication, EPODOC
- PL2790205T
- Application
- 14167841
- Application, DOCDB
- 14167841
- Application, EPODOC
- PL14167841T
Titles2
- English
- A power supply device for plasma processing
- Polish
- Urządzenie zasilające do obróbki plazmowej
Classification
- CPC, 4
- H02H3/38
- H01J37/32045
- H01J37/3444
- H02H1/06
- IPC, 2
- H01J37 32
- H01J37 34