Highly durable hydrophobic coatings and methods

Description of the invention

Field of the Invention

The present invention generally provides coated substrates having a hydrophobic surface coating. The invention provides methods for coating these substrates. In preferred embodiments, the present invention relates to transparent substrates having a hydrophobic (water repellent) coating thereon.

Background and abstract of the invention

Glass is usually made of silicates which melt to form a clear, transparent solid. The basic unit of the molecular structure of conventional glass is the SiO tetrahedron₄. Ordinary flowing glass (named after the manufacturing process in which the molten strip of glass flows over the molten metal to form a smooth surface) contains additional amounts of sodium (Na2O), usually in the form of sodium carbonate or nitrate, lime (CaO) and other oxides ( usually aluminum and magnesium oxides), forming a soda-lime-silica structure known colloquially as soda-lime glass. By incorporating other additives and ingredients, other special glasses can be obtained.

It is sometimes highly desirable that conventional glass intended for a particular end use application, such as automotive glass, should have a hydrophobic (water repellent) surface. Various methods have been proposed for making glass substrates hydrophobic (water repellant). For example, Patent Nos. 4,263,350, 4,274,856, 5,665,424, and 5,723,172 (the entire contents of which are closely incorporated herein by reference) generally disclose that glass surfaces may be coated with a vapor-deposited chloroalkylsilane layer to improve their hydrophobicity and / or anti-adhesive properties. such as dimethyldichlorosilane (DMDCS). There are other proposals whereby a fluorinated alkylchlorosilane (FAS) coating may be used to "cover the backsheet on the glass substrate to improve the durability of the coating". In this regard, see U.S. Patent Nos. 5,328,768, 5,372,851, 5,380,585, and 5,580,605 (the entire contents of which are specifically incorporated herein by reference). Moreover, international application WO 00/25938 (the entire contents of which is specifically incorporated herein by reference) discloses that a silicone layer composed of chains of molecules with siloxane end groups which react with water to form an OH group can be covered by a subsequent reaction. of this OH group with trimethylchlorosilane to form the trimethylsiloxane chain ends.

While various hydrophobic coatings are known, there is still a need to provide such coatings with improved durability. The present invention is directed to meeting such a need.

The present invention relates to a substrate having a hydrophobic surface coating, comprising a substrate, a tie layer, a hydrophobic layer, characterized in that it comprises a silicon oxide bonding layer on the substrate and a hydrophobic coating layer covering the surface of the bonding layer, the surface of the silicon oxide bonding layer having an average square roughness. has an area of ​​less than 6.0 nm and has a haze value of less than 2.0%.

In the substrate, preferably, the tie layer has a mean square surface roughness greater than 4.0 nm.

Preferably in the substrate, the hydrophobic coating additionally comprises a moist vaporized reaction product of at least one alkylchlorosilane, and in particular the alkylchlorosilane being dimethyldichlorosilane or trimethylchlorosilane, applied to the binding layer.

The substrate is preferably characterized in that the hydrophobic coating comprises a layer of wetted vaporized dimethyldichlorosilane reaction product on the silicon oxide binding layer and a layer of wetted vaporized trimethylchlorosilane reaction product applied to the dimethyldichlorosilane layer.

Preferably in the substrate, the hydrophobic coating comprises a polydimethylsiloxane layer chemically bonded to said tie layer.

Preferably, in the substrate, the hydrophobic coating comprises a layer of cross-linked polysiloxane chemically bonded to said binding layer, and in particular, the hydrophobic coating comprises at least one layer which is a wetted vaporized reaction product of dimethyldichlorosilane or trimethylchlorosilane applied to the layer of cross-linked polysiloxane.

PL 200 431 B1

The substrate is preferably characterized in that the tie layer has a haze value of less than 1.5%.

The substrate is preferably characterized in that the tie layer is composed of a wetted silicon tetrachloride reaction product vaporized at a relative humidity of less than 50%, more preferably silicon tetrachloride is vapor-deposited at a relative humidity of less than 45%.

Preferably, silicon tetrachloride is vapor-deposited in the substrate at a relative humidity of less than 40%.

Preferably in the substrate, said hydrophobic coating is composed of a wetted reaction product of said silicon tetrachloride and an alkylchlorosilane, more preferably the alkylchlorosilane comprises trimethylchlorosilane.

Preferably, in the substrate, said silicon tetrachloride and trimethylchlorosilane are vaporized as a mixture, in particular the ratio of silicon tetrachloride to trimethylchlorosilane is comprised in the mixture between 4.0: 0.5 and 4.0: 1.5.

The support is preferably characterized in that in said mixture the ratio of silicon tetrachloride to trimethylchlorosilane is 4.0: 1.0.

In the support, preferably the alkylchlorosilanes include dimethyldichlorosilane and methyltrichlorosilane.

In the support, preferably the alkylchlorosilanes are dimethyldichlorosilane and methyltrichlorosilane and are added in equimolar amounts.

Preferably the ratios of the dimethyldichlorosilane and the methyltrichlorosilane in the medium range from 5 parts per 1 part to 1 part per 3 parts by weight, respectively.

In the substrate, preferably the alkylchlorosilane layer is covered with methyltrichlorosilane.

In the substrate, preferably the alkylchlorosilane layer is covered with CF2FCO (CH2) 3SiCl2CH3.

In the substrate, a preferably hydrophobic coating comprises a layer of wetted vaporized reaction product of dimethyldichlorosilane and methyltrichlorosilane on a silicon oxide binding layer and covering a layer of wetted vaporized reaction product of trimethylchlorosilane applied to a layer of dimethyldichlorosilane (DMDCS) and trimethylsilane (TMCS).

In the support, preferably, silicon tetrachloride is added by reaction in an equimolar amount with at least one alkylchlorosilane selected from the group consisting of dimethyldichlorosilane, methyltrichlorosilane, trimethylchlorosilane and chlorofluoroalkylsilane.

The substrate preferably comprises CF2FCO (CH2) 3 SiCl2 CH3 as cover layer.

In the substrate, preferably, the tie layer has a square average surface roughness of less than 5.0 nm.

In the substrate, preferably, the tie layer has an average square surface roughness of between 4.0 nm to 6.0 nm.

The substrate is preferably characterized in that the surface of the tie layer has a square mean surface roughness greater than 4.0 nm and less than 6.0 nm and wherein the hydrophobic coating layer is wetted with a vaporized reaction product of at least one alkylchlorosilane which is selected from the group consisting of dimethyldichlorosilane, methylchlorosilane and trimethylchlorosilane, more preferably, the hydrophobic coating comprises a layer of wet vaporized dimethyldichlorosilane reaction product on the silicon oxide binding layer and a layer of wet vaporized trimethylchlorosilane reaction product applied to the dimethyldichlorosilane layer.

The substrate is preferably characterized in that the hydrophobic coating comprises a polydimethylsiloxane layer chemically bonded to said tie layer.

In the substrate, preferably the hydrophobic coating comprises a layer of cross-linked polysiloxane chemically bonded to said tie layer, more preferably the hydrophobic coating comprises at least one layer which is a wetted vaporized reaction product of dimethyldichlorosilane or trimethylchlorosilane applied to the layer of cross-linked polysiloxane.

Preferably, in the medium, the alkylchlorosilane comprises dimethyldichlorosilane and methyltrichlorosilane in equimolar amounts.

Preferably in the medium the alkylchlorosilane comprises dimethyldichlorosilane and methyltrichlorosilane, in a ratio between dimethyldichlorosilane and methyltrichlorosilane, ranging from 5 parts to 1 part to 1 part by weight, respectively.

The present invention generally relates to substrates that exhibit increased hydrophobicity and durability. Most preferably, the substrate is glass. The invention provides particularly preferred embodiments of the present invention, and discloses coating methods and coated substrates including SiO_x a tie layer consisting of a controlled treatment

Of moisture, vaporized compound containing a chlorosilyl group (most preferably silicon tetrachloride), and a hydrophobic cover layer chemically bonded to the SiO-containing_x binding layer.

In other particularly preferred embodiments of the invention, extremely durable hydrophobic coatings can be formed by simultaneous water vapor vaporization of the chlorosilyl-containing compounds and chloroalkylsilane to form a tie layer which can then be coated with the hydrophobic coating. For example, simultaneous vacuum evaporation on a glass substrate of silicon tetrachloride and dimethyldichlorosilane produces a hydrophobic coating consisting of polysiloxane chains cross-linked at the branch points with silicon oxide derived from silicon tetrachloride (i.e., an insoluble reaction product) which can then be covered with a fluorosilane or chloro-alkyl chloride. . Optionally, the silicon oxide (SiO x) layer may be vapor-deposited prior to and thus positioned beneath the cross-linked polysiloxane as described above.

In other embodiments, a coated substrate may be formed on glass and such substrate comprises a first tie layer comprised of a controlled wetted vacuum vapor hybrid compound containing an organochlorosilane group, most preferably methyltrichlorosilane (MTCS). In other embodiments, various other combinations of hydrophobic and oleophilic covering layers can be chemically bonded to the hybridized layer.

These and other aspects and advantages will become apparent upon careful reading of the following detailed description of the preferred embodiments of the invention.

Brief description of the attached drawings

Thereafter, reference will be made to the attached drawings, where the same reference numbers in different drawings indicate the same structure elements, and where:

Figure 1 is a schematic illustration of a technique for forming a hydrophobic coating on a substrate according to one embodiment of the present invention;

Figure 2 is a schematic illustration of a technique for forming a hydrophobic coating on a substrate according to another embodiment of the present invention;

Figure 3 is a plot of% haze versus% moisture of a substrate coated with a silicon oxide (SiO x) layer; and

Figures 4A-4F schematically show some examples of coated glass substrates that may be obtained in accordance with the present invention.

Detailed Description of the Invention

According to the invention, practically any substrate can be coated which is self-supporting and has, or can be induced, active surface hydrogen atoms. Thus, in accordance with the present invention, rigid or flexible substrates made of glass, plastics, ceramics, and the like can be coated. Most preferably, the substrate is glass, with conventional soda-lime plate glass being particularly preferred.

In one particularly preferred coating according to the present invention, a silicon oxide (SiO x) binding layer is formed by vaporizing a silicon oxide forming compound on the substrate in a controlled wetted environment. In a particularly preferred embodiment of the invention, the silicon oxide layer can be obtained by reacting a compound having a chlorosilyl group, such as silicon tetrachloride (SiCty). In other embodiments of the invention, the tie layer can be obtained by an organochlorosilyl group wetting reaction to form a hybrid organo-silicon oxide layer. The organochlorosilyl group may be a trichloroalkyl- or trichloroarylsilane such as methyltrichlorosilane (MTCS) or trichlorophenylsilane (TCPS). The compounds react with the glass surface to form a backsheet containing SiOx groups or SiOxRy hybrid groups, where R is an organic group with six or fewer carbon atoms. Optionally or additionally, other silanes forming silicon oxide or oxide-like materials can be used. For example, compounds such as hexachlorodisiloxane, trichloroalkylsilane may be used, in which the alkyl group contains one to six carbon atoms and may be linear, cyclic or branched, or may be an aromatic group containing up to six carbon atoms. When silicon tetrachloride has been used, it has been found particularly effective in obtaining useful coatings to dilute 1 part of silicon tetrachloride with 10 parts of pentane.

The attached figure 1 schematically illustrates a particularly advantageous method of forming the hydrophobic coating according to the present invention. In this case, in a unit hydrophobic coating process, the silicon tetrachloride gas phase is introduced into a closed chamber with controlled humidity conditions, which leads to the bonding of the silicon oxide units directly to the surface of the glass substrate. Hydration of chlorine-terminated silicon oxide units (e.g. by regulating the humidity in the reaction chamber) leads to the replacement of terminal chlorine atoms with hydroxyl groups, so that with additional successive introduction of chloroalkylsilane vapors such as dimethyldichlorosilane (DMDCS), trimethylchlorosilane (TMCS) and methyltrichlorosilane (MTCS) and the like, and the humidification chamber in the meantime , stable hydrophobic coatings of polydimethylsiloxane (PDMSO) or other polysiloxane are obtained. Preferred silanes that can be used in accordance with the present invention are described by the formula C1_xSiRy where x is at least 14 and y is at least 1 and R is an alkyl or aryl group which may also be an oleophilic group, e.g., fluorinated alkyl.

In order to obtain the desired end result of a durable hydrophobic coating on the substrate, the humidity during the vapor deposition of the silicon oxide binding layer is important. Controlled humidity during the vaporization of the silicon oxide layer is also important to obtain a coating with low haze. Thus, as generally shown in accompanying Figure 2, the moisture content of the silicon tetrachloride silicon oxide binding layer vaporization should be less than about 50% relative humidity, and preferably less than about 45%. Preferably, the relative humidity in the chamber is controlled to be about 40% or less. Thus, the silicon oxide layer or hybridized organic silicon oxide layer will most preferably exhibit a haze (non-specular light scattering) of less than about 3.0%, and typically less than about 2.0%. Preferably, the haze of the silicon oxide layer will be less than approximately 1.5%, in particular less than approximately 0.8%.

It is believed that the lower limit of the relative humidity and hence the haze value of the silicon oxide binding layer is determined by the desired surface roughness. In this regard, it has been found that the higher the humidity, the greater the surface roughness of the resulting silicon oxide binding layer, and vice versa. While not wishing to be bound by any particular theory, it is believed that the surface roughness of the silicon oxide layer contributes to the durability of the hydrophobic coatings obtained as set forth in the invention since the peaks and valleys of the "rough bonding layer create physical pockets of various sizes and shapes in which to the chloroalkylsilane used later is deposited. Moreover, "a rough silicon oxide or hybrid organic silicon oxide binding layer may result in a higher surface area, which results in a higher density of chloroalkyl silane per unit surface area of ​​the substrate, and thus the durability of the resulting coating may be improved.

In accordance with the present invention, it has therefore been found that the silicon oxide or hybrid organo-silicon oxide binding layer preferably has a surface roughness rms value less than about 6.0 nm, and preferably less than about 5.0 nm. However, the RMS surface roughness of the silicon oxide layer is preferably greater than about 4.0 nm. Hence, the RMS surface roughness of the silicon oxide layer is preferably between about 4.0 nm and about 6.0 nm, and more preferably between about 4.0 nm and about 5.0 nm. Too high RMS surface area is disadvantageous because relatively large area peaks, widely distributed, begin to limit the desired increase in surface area. On the other hand, too little RMS of the surface makes the surface too smooth, which means insufficient increase in surface area and / or insufficient height difference between peaks and valleys on the surface.

As used herein and in the appended claims, the terms "mean surface area" and "RMS surface area" and the like refer to a measure of the deviation of a surface from a flat, smooth surface as determined by atomic force microscopy (AFM).

The PDMSO layer may optionally be additionally coated (or covered with) an alkyl silane cover layer. In this sense, virtually any suitable alkylsilane, such as those described in US Patent Nos. 5,328,768, 5,372,851, 5,380,585, and 5,580,605, and 5,580,605, may be used to form the lidding layer in accordance with the present invention. For example, a cover layer may be formed by vaporization of at least one fluoroalkylchlorosilane selected from the group consisting of CF3 (CF2)₅(CH2) 2SiCl (CH3) 2 and (CF3) 2FC-O (CH2) 3SiCl2CH3.

Another particularly preferred embodiment of the present invention is the simultaneous vaporization of a compound containing a chlorosilyl group and an alkylchlorosilane compound to obtain a substantially cross-linked PMDSO. This layer of cross-linked PMDSO can be formed directly on the surface of the substrate or on a previously applied one as previously described,

A silicon oxide binder layer or a hybridized organic silicon oxide binder layer. The cross-linked PMDSO layer is most preferably covered with one or more layers formed by a single vaporization of alkylchlorosilanes and / or alkylchlorofluorosilane (i.e., "alkylfluorosilane) compounds. For example, particularly desirable properties in terms of hydrophobicity and durability have been achieved by the simultaneous vaporization of silicon tetrachloride and DMDCS to provide a backing layer on the substrate, then covered with a layer of an alkyl fluoro silane compound.

Most preferably, the volume ratio of the simultaneously vaporized chlorosilyl compound and alkylchlorosilane compound is between about 1: 1 to about 1:30, even more preferably between about 1: 5 to about 1:15. A particularly preferred ratio (especially with simultaneous evaporation of silicon tetrachloride and DMDCS) is about 1:10.

According to another particular embodiment of the present invention, silicon tetrachloride (SiCl) is simultaneously vaporized on the glass surface in order to obtain a useful hydrophobic coating.₄) and trimethylchlorosilane (TMCS) or methyltrichlorosilane (MTCS). Most preferably SiCl₄ and the TMCS is vaporized as a mixture with a SiCL to TMCS ratio ranging between about 4.0: 0.5 to about 4.0: 1.5, and more preferably about 4.0: 1.0 (e.g., between about 4.0 : 0.9 to about 4.0: 1.1). As briefly mentioned above, alkylchlorosilanes other than TMCS can be used in admixture with SiCR, for example dimethyldichlorosilane and methyltrichlorosilane.

Moreover, the layers formed by the simultaneous vaporization of SiCR and the alkylchlorosilane may, if desired, be covered in the manner described above with the alkylchlorosilane. In that case, where the SiCR and TMCS are vapor-deposited simultaneously, a suitable cover layer may be a vapor-deposited layer of triethylchlorosilane (TECS) (ie, such that it forms a cover layer containing triethylsilane).

The attached figure 2 shows schematically a preferred method for forming a cross-linked PMDSO layer according to the present invention. In this case, the silicon tetrachloride and DMDCS are simultaneously vaporized in a closed humidity controlled chamber to form a layer of cross-linked PMDSO on the glass substrate. Then, the chamber can be re-humidified and TMCS vapors introduced into it, which is used to cover the layer of cross-linked PMDSO.

Figures 4A-4F show some example of coated glass substrates that may be made in accordance with the present invention. Here, for ease of understanding, each of the layers shown in Figures 4A-4F relates to the precursor pairs and not to the reaction products of these pairs. It is also understood that prior to vaporization of the other compound, moisture is restored to the chamber as necessary. Thus, for example, when viewed out from the surface of the glass substrate, the attached figure 4A shows a vapor-deposited silicon tetrachloride layer as a bonding layer followed by vapor-deposited DMDCS and TMCS layers. Figure 4B shows a bottom layer of simultaneously vaporized silicon tetrachloride and DMDCS followed by a separately vaporized TMCS layer. Figure 4C is similar to the coating of Figure 4B, but includes a cover layer of fluoroalkylchlorosilane (FAS). Figure 4D is similar to Figure 4A, but has a layer of co-vaporized silicon tetrachloride and DMDCS interposed between a vapor-deposited silicon tetrachloride bonding layer and a vaporized TMCS layer. Figure 4E is similar to figure 4D but comprises the layers of DMDCS and TMCS sequentially vaporized onto the simultaneously vapor-deposited layer of silicon tetrachloride and DMDCS. Figure 4F is similar to figure 4D but includes a hydrophobic layer formed by the simultaneous vaporization of silicon tetrachloride and TMCS. Figure 4F also shows an optional cover layer that is a vapor-deposited triethylchlorosilane (TECS) layer, but such cover layer may, if desired, be omitted.

In other preferred embodiments, the substrate may have a first hydrophobic coating of vapor-deposited organosilicon material on its surface that will provide a hydrophobic surface of the hybrid organosilicon oxide layer such as that derived from silicon tetrachloride. In yet other preferred embodiments having a first hydrophobic coating on the surface, additional vapor-deposited layers of silicon tetrachloride, dimethyldichlorosilane, and chlorotrimethylsilane, or mixtures thereof, may be used. When mixtures of these materials are used to produce vapor-deposited coatings, the ratios of the various components may be different. For example, the ratios of binary and ternary silane mixtures may range, depending on the desired properties, from equimolar amounts fed to the reactor to fractions of each.

PL 200 431 B1

The thicknesses of the various layers obtained in accordance with the present invention are not particularly critical assuming the desired hydrophobicity and durability are achieved. Thus, a layer thickness ranging between about 1 nm to about 1000 nm (10 to about 10,000 Angstroms) can be achieved, and typically between about 2 nm to about 500 nm (20 to about 5000 Angstroms).

The coated substrates of the present invention will exhibit a tilt angle (30 µ wielkość droplet size) of 35 ° or less, and typically 30 ° or less. For some embodiments of the present invention, extremely low tilt angles of about 20 ° or less, or even 10 ° or less are obtainable. The coatings according to the present invention are also very durable. Thus, the coated substrates of the present invention after 300 Taber abrasion cycles will exhibit a contact angle greater than 65 °, and typically greater than about 70 °. Even after 1000 Taber Cycles, the coated surfaces of the present invention will exhibit a contact angle greater than about 60 °, typically between (or from) about 65 ° to about 75 °.

The coated substrates of the present invention may conveniently be manufactured using a closed reaction chamber constructed to have a chemical vapor inlet and an evacuation port to allow the chamber to be evacuated. The substrates are thoroughly cleaned and washed before entering the reaction chamber. The humidity in the chamber is regulated by introducing water vapor depending on the chemical vapors applied. Thus, the reaction chamber typically uses a humidity greater than about 10% and less than about 80%. Ambient temperature (20 ° C-25 ° C) and atmospheric pressure (about 1013.25 hPa - 1.0 atmosphere pressure) are most preferably maintained in the reaction chamber during vaporization of the bottom layer and cover layer (s).

The present invention will be better understood by reference to the following non-limiting examples.

Examples

The substrates used for evaluation in the examples below were clean annealed 3 mm flat glass. Only coatings applied to the exposed side of the substrate were assessed. The substrates were coated in a polypropylene reaction chamber approximately 406.4 mm x 355.6 mm x 203.2 mm (W 16 in x H 14 in x 8 in D). The chamber had a glass cover allowing visual observation of the process. Dry air, moist air, or dry air saturated with coating precursor vapors was introduced at one end of the chamber and discharged at the other.

The glass substrates were cleaned and then placed into the reaction chamber parallel to the gas flow. Moist air was produced by bubbling the air with water at a substantially constant temperature of 40 ° C. Chamber humidity was kept substantially constant by adding dry air. Reaction precursors were similarly introduced, i.e., prior to introduction into the chamber by passing dry air over the liquid precursor. After completion of each process step, unreacted vapors were withdrawn from the reaction chamber for at least 5 minutes before the coated substrates were removed.

Some of the substrates under review underwent additional surface treatment by applying liquid chlorofluoroalkyl silane (FAS) to the surface. FAS compounds are designated FAS (A) compound of formula CF₃(CF₂) 5 (CH₂)₂SiCl (CH3)₂ and FAS (B) a compound of formula (CF3)₂FC-O (CH₂) 3SiCl₂CH3.

Unreacted material was removed by washing the surface with n-butanol followed by hand polishing with a clean cloth or paper towel.

The substrates were assessed using the following test methods and techniques:

Contact angle: The advancing contact angle was measured at various points on the coated substrate. Recorded value represents the average of all readings. Abrasion Resistance: Abrasion resistance was assessed by changing the contact angle at the point of abrasion. The coating was Taber abraded using a CS-10F abrasive wheel and a 500 g load. Prior to each abrasion test, the CS-10F wheels were surface refreshed (25 cycles with refreshing stone). After 300 cycles, the substrate was removed from the abrasive device and cleaned. The Taber track was cleaned by immersing the substrate for 5-10 seconds in warm distilled water (40-45 ° C). The Taber trace was wiped with clean Preference brand paper towels. The substrate was then washed with distilled water at room temperature. The test surface was dried with compressed air. After the contact angle was measured, the substrate was abraded for an additional 700 cycles. The substrates were cleaned as before and the contact angle was again measured.

Tilt angle: The coated substrate was placed on a device that could tilt the substrate and record the angle of the tilt. A 30 microliter drop of distilled water was gently placed on the test surface at an initial tilt angle of 0 °. The angle at which the surface was sloped 8

The amount of water was increased periodically by an increment of 1 ° until a drop of water ran off the surface. The surface angle at this point was recorded as the tilt angle.

Example I (comparative)

The glass substrate was cleaned using the following procedure: The substrate was rinsed first with tap water. BON AMI ™ cleaner was applied to the wet sponge and the surface was sponge cleaned using a pressure of about 1.36 to 2.27 kg (3 to 5 pounds) and the substrate was rinsed again with tap water. LIQUINOX ™ soap which was diluted 1 part soap to 100 parts distilled water was used to moisten the surface. The surface was cleaned with soap and a soft brush also with a pressure of 1.36 to 2.27 kg (3 to 5 pounds). After sufficient cleaning, the surfaces were rinsed first with tap water and then with distilled water. The wetting of the glass surface after cleaning was used to assess the cleanliness of the glass surface. The substrate was placed in the holder and blown dry with dry compressed air.

The cleaned substrate was then placed into the reaction chamber parallel to the gas flow. The reaction chamber humidity was adjusted to 78%, and then held at that humidity for 5 minutes. After a stabilization period of 30 seconds, dimethyldichlorosilane (DMDCS) was introduced into the reaction chamber for an additional 5 minutes. After an additional 30-second stabilization period, the gases were evacuated from the reaction chamber for 10 minutes, followed by the removal of the substrate from the chamber. Excess material was removed with n-butanol and the surface polished with a clean paper towel.

Example II (comparative)

The glass substrate was cleaned as in Example I. The substrate was placed in the holder and dried with compressed air dry. The cleaned substrate was placed in the reaction chamber parallel to the gas flow. The chamber humidity was adjusted to 78%, and then held at that elevated humidity for 5 minutes. After a stabilization period of 30 seconds, dimethyldichlorosilane (DMDCS) was introduced into the reaction chamber for 5 minutes. The chamber was then purged, and after a second stabilization period, the reaction chamber was brought to 81% humidity. The humidity was held for 5 minutes after which the substrate was removed from the chamber. A thin layer of FAS (A) was manually applied to the substrate immediately after removal from the chamber and after removing excess silane with a paper towel. The substrate was left for 30 to 90 seconds. The excess material was then removed with n-butanol and the surface polished with a clean paper towel.

Example III (comparative)

The glass substrate was cleaned as per Example I. The substrate was placed in the holder and dried with dried compressed air. The cleaned substrate was placed in the reaction chamber parallel to the gas flow. The chamber humidity was adjusted to 14%, and then held at this elevated humidity for 5 minutes. After a stabilization period of 30 seconds, silicon tetrachloride was added to the reaction chamber over 5 minutes. The chamber was then purged, and after a second stabilization period, the reaction chamber was brought to 80% humidity. The humidity was held for 5 minutes and the substrate was then removed from the chamber. A thin layer of FAS (A) was manually applied to the substrate immediately after removal from the chamber and after removing excess silane with a paper towel. The substrate was left for 30 to 90 seconds. Then excess material was removed with n-butanol; and the surface was polished with a clean paper towel.

Example IV (invention)

The glass substrate was cleaned using the following procedure. WINDEK ™ cleaner with ammonia was applied to the surface on both sides. The wet surface was wiped with a paper towel. The substrate was then polished with a clean paper towel, removing all excess cleaning agent. The cleaned substrate was then placed in the reaction chamber parallel to the gas flow. The chamber humidity was adjusted to 14% and then kept there for 5 minutes. After a stabilization period of 30 seconds, silicon tetrachloride was introduced into the reaction chamber for an additional 5 minutes. The chamber was then purged and after a second stabilization period, the reaction chamber was re-wetted to 38%. After another 30-second stabilization period, dimethyldichlorosilane (DMDCS) was introduced into the chamber for a total of 5 minutes. After a final 30-second stabilization period, gases were purged from the chamber for 10 minutes, after which the substrate was removed therefrom. Excess material was removed with n-butanol and the surface polished with a clean paper towel.

Example V (invention)

The glass substrate was cleaned using the following procedure. The substrate was washed with tap water. The wet surface was treated with LIQUINOX ™ soap which was diluted one part soap to 100 parts distilled water and the substrate was washed with soap and a soft brush applying a pressure of 1.36 to 2.27 kg (3 to 5 lb). After an appropriate washing period, the substrate was washed first with tap water and then with distilled water. To determine the cleanliness of the glass surface, the wetting of the substrate surface after cleaning was used. The substrate was placed in a holder and blown dry with dried compressed air. The cleaned substrate was placed in the reaction chamber parallel to the gas flow. The chamber humidity was adjusted to 14%, and then held at that humidity for 5 minutes. After a 30-second stabilization period, a mixture of 5 parts of dimethyldichlorosilane (DMDCS) and one part of silicon tetrachloride was introduced into the reaction chamber for 5 minutes. After an additional 30-second stabilization period, gases were exhausted from the chamber for 10 minutes, after which the substrate was removed from the chamber. FAS (B) was added and after 60-90 seconds the glass substrate was washed with n-butanol.

Example VI (invention)

The glass substrate was cleaned according to Example I. The cleaned substrate was placed into the reaction chamber parallel to the gas flow. The chamber humidity was adjusted to 14%, and then held at that humidity for 5 minutes. After a stabilization period of 30 seconds, silicon tetrachloride was introduced into the reaction chamber for an additional 5 minutes. The chamber was then purged, and after a second stabilization period, the reaction chamber was rehumidified to 14% and held for 5 minutes. After a 30-second stabilization period, a mixture of 5 parts of dimethyldichlorosilane and one part of silicon tetrachloride was introduced into the reaction chamber for 5 minutes. The chamber was purged again and allowed to stabilize for an additional 30 seconds and the chamber humidity was adjusted to 77%. After 5 minutes at 77% humidity, the substrate was removed from the chamber. Immediately after removal from the chamber, a thin layer of FAS (A) was applied by hand to the excess silane on the substrate using a paper towel. The substrate was left for 30 to 90 seconds. The excess material was then removed with n-butanol and the surface polished with a clean paper towel.

Example VII (invention)

The glass substrate was cleaned according to Example I. The cleaned substrate was placed into the reaction chamber parallel to the gas flow. The chamber humidity was adjusted to 14%, and then held at that humidity for 5 minutes. After a stabilization period of 30 seconds, silicon tetrachloride was introduced into the reaction chamber for an additional 5 minutes. The chamber was then purged, and after an approximately 30-second stabilization period, the reaction chamber was re-humidified to 14% and held for 5 minutes. After another 30-second stabilization period, a mixture of 5 parts of dimethyldichlorosilane and one part of silicon tetrachloride was introduced into the reaction chamber for 5 minutes. The chamber was vented and again brought to 59% humidity and held for 5 minutes, followed by the addition of DMDCS vapors for 5 minutes. Thereafter, the chamber was vented and allowed to stabilize again for 30 seconds and the chamber humidity was adjusted to 77%. After 5 minutes at 77% humidity, the substrate was removed from the chamber. Immediately after removal from the chamber, a thin layer of FAS (B) was applied by hand to the excess silane on the substrate using a paper towel. The substrate was left for 30 to 90 seconds. The excess material was then removed with n-butanol and the surface polished with a clean paper towel.

The coated flat glass substrates of Examples 1 to 7 were tested for abrasion resistance and tilt angle. The data is shown in Table A below.

Table A.

<td rowspan="2">Example no</td><td colspan="3">Contact angle after Taber cycles</td><td rowspan="2">Tilt angle (30 μΙ drop)</td>

<td> 0</td><td> 300</td><td> 1000</td>

<td> 1</td><td> 2</td><td> 3</td><td> 4</td><td> 5</td>

<td>AND</td><td> 101°</td><td> 56°</td><td> 43°</td><td> 26°</td>

<td>II</td><td> 117°</td><td> 52°</td><td> 43°</td><td> 33°</td>

<td>III</td><td> 106°</td><td> 50°</td><td> 45°</td><td> 24°</td>

<td>IV</td><td> 100°</td><td> 70°</td><td> 67°</td><td> 27°</td>

<td>V</td><td> 107°</td><td> 74°</td><td> 66°</td><td> 33°</td>

PL 200 431 B1 cont. table

<td> 1</td><td> 2</td><td> 3</td><td> 4</td><td> 5</td>

<td>VI</td><td> 108°</td><td> 74°</td><td> 67°</td><td> 19°</td>

<td>VII</td><td> 98°</td><td> 84°</td><td> 67°</td><td> 10°</td>

As can be seen from the above data, the comparison of Examples 1 and 4 shows that the initial vaporization of the silica layer followed by the DMDCS top layer leads to an increase in durability compared to the DMDCS layer alone. Moreover, simultaneous vaporization of DMDCS and SiCl₄ (leading to the formation of a backsheet of a cross-linked polydimethylsiloxane (PDMSO)) that is coated with a liquid-applied FAS layer, results in increased durability compared to the vapor-deposited layer of DMDCS alone. (Compare examples V and I). The data of Examples VI and VII show that the simultaneous vaporization of DMDCS and SiCL covered by the applied FAS liquid results in unexpectedly smaller tilt angles.

Example VIII and IX (comparative)

Examples I and II were repeated, respectively, except that in Example 9, TMCS was used as a cover layer instead of FAS (A). The results of the Taber abrasion test and the measurement of the tilt angle are shown in Table B below.

Example X (invention)

The glass substrate was covered in a closed chamber into which the vapor phase precursor compounds were introduced. Specifically, the following formulation was used in the order shown below to obtain a coated glass substrate with the structure shown in Figure 4A. After the vaporization of each compound, the chamber was allowed to stabilize for approximately 5 minutes. In addition, before introducing new vapors, the chamber was purged under vacuum each time, so that the specified humidity in the chamber could be determined.

(1) 20% WW, SiCl4 in pentane (2) 60% WW, DMDCS (3) 60% WW, TMCS.

Taber abrasion and tilt angle test results are shown in Table B below.

Example XI (invention)

To obtain the coated glass substrate generally shown in Figure 4B, Example X was repeated using the following sequence of preparation:

(1) 40% WW, DMDCS and SiCL simultaneously (2) 60% WW, TMCS

Taber abrasion and tilt angle test results are shown in Table B below.

Example XII (invention)

Example 11 was repeated except that to obtain the coated substrate generally shown in Figure 4C, FAS (A) was manually applied instead of using vapor-deposited TMCS. Taber abrasion and tilt angle test results are shown in Table B below.

Example XIII (invention)

To obtain the coated glass substrate generally shown in Figure 4D, Example X was repeated using the following sequence of preparation:

(1) 20% WW, SiCl4 in pentane (2) 40% WW, simultaneously DMDCS and SiCL (3) 60% WW, TMCS.

Taber abrasion and tilt angle test results are shown in Table B below.

Example XIV (invention)

To obtain the coated glass substrate generally shown in Figure 4E, Example X was repeated using the following sequence of preparation:

(1) 20% WW, SiCl4 in pentane (2) 40% WW, simultaneously DMDCS and SiCL (3) 60% WW, DMDCS (4) 60% WW, TMCS

PL 200 431 B1

Taber abrasion and tilt angle test results are shown in Table B below. Table B.

<td rowspan="2">Example no</td><td colspan="3">Contact angle after Taber cycles</td><td rowspan="2">Tilt angle (30 μΙ drop)</td>

<td> 0</td><td> 300</td><td> 1000</td>

<td>VIII</td><td> 115°</td><td> 54°</td><td> 46°</td><td> 38°</td>

<td>IX</td><td> 118°</td><td> 61°</td><td> 55°</td><td> 28°</td>

<td>X</td><td> 106°</td><td> 91°</td><td> 74°</td><td> 10°</td>

<td>XI</td><td> 117°</td><td> 71°</td><td> 68°</td><td> 29°</td>

<td>XII</td><td> 118°</td><td> 70°</td><td> 69°</td><td> 10°</td>

<td>XIII</td><td> 120°</td><td> 71°</td><td> 74°</td><td> 40°</td>

<td>XIV</td><td> 107°</td><td> 86°</td><td> 75°</td><td> 12°</td>

The data in Table B also indicates that the coatings according to the present invention provide improved hydrophobicity and durability.

Example XV (invention)

Green car window glass consisting of a 0.76 mm thick laminated PVB layer between a pair of 2.1 mm thick glass layers was coated in the same way as in Example 10, using 20% ​​RH and a SiCl mixture in the chamber₄ with TMCS in a ratio of 4: 1, respectively, using pentane as the carrier. Specifically, a mixture of 100 ml of pentane, 5 ml of SiCL and 1.25 ml of TMCS was used for vaporization onto the top layer of the automotive glass laminate. The resulting coated glass substrate was found to have the following optical properties: transmittance of approximately 79.9% and haze of approximately 0.24%, and color properties: L * = 90.8, a * = - 6.8, and b * = 1.6. The coated glass substrate was taber-tested for wear and tilt angle was measured, and the results are shown in Table C below.

Table C

<td colspan="6">Contact angle after Taber cycles</td><td colspan="2">Tilt angle</td>

<td> 0</td><td> 300</td><td> 1000</td><td> 2000</td><td> 3000</td><td> 4000</td><td>(10 μΙ drop)</td><td>(Drop of 30 μΙ)</td>

<td> 88,8°</td><td> 78,1°</td><td> 70,1°</td><td> 68,5°</td><td> 67,0°</td><td> 64,5°</td><td> 40°</td><td> 38°</td>

As shown by the data in Table C, the coating is optically satisfactory and exhibits extremely durable hydrophobicity (as evidenced by the contact angle values ​​after many thousands of Taber cycles).

Example XVI (invention)

Vehicle green glass was prepared as in Example XV (invention) with an additional layer of a vapor-deposited mixture of DMDCS and SiCL and sequentially added layers of DMDCS and TMCS, respectively. The contact angles after Taber cycles and tilt angles are summarized in Table D below.

Table D

<td colspan="6">Contact angle after Taber cycles</td><td colspan="2">Tilt angle</td>

<td> 0</td><td> 300</td><td> 1000</td><td> 2000</td><td> 3000</td><td> 4000</td><td>(10 μΙ drop)</td><td>(30 μ drop)</td>

<td> 107°</td><td> 83,2°</td><td> 76,9°</td><td> 72,5°</td><td> 70,4°</td><td> 68,3°</td><td> 18°</td><td> 13°</td>

Example XVI (invention)

The glass substrate is first washed with tap water and LIQUINOX ™ soap diluted one part soap to 100 parts distilled water. The solution is applied to a damp substrate surface and washed with a soft brush using a pressure of 1.36 to 2.27 kg (3 to 5 pounds). The surface is rinsed first with tap water and then with distilled water. The surface of the substrate is considered clean when distilled water flows freely. The cleaned substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After the period of 12

In order to ensure that the humidity in the reaction chamber is stable, about 30 seconds, silicon tetrachloride (SiCl) is introduced into the reaction chamber for about 5 minutes.₄) to form the first silicon oxide layer, the SiO layer_x with a RMS surface roughness of at least 4 µm, and preferably less than about 6 µm. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS-SiCl) is introduced into the chamber for a total of 5 minutes in equimolar amounts (one part per part).₂Me2) and methyltrichlorosilane (MTCS). The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. The initial advancing contact angle is greater than 60 ° and greater than 45 ° after 300 Taber Cycles.

Example XVII (invention)

The glass substrate is cleaned using the procedure in Example XVI. The cleaned substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, silicon tetrachloride (SiCl) is introduced into the reaction chamber for about 5 minutes to form a first silicon oxide layer, SiO x, with an RMS surface roughness of at least 4 µm, and preferably less than about about about 5. 6 am. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS - SiCl₂Me₂) and methyltrichlorosilane in a ratio of DMDCS to MTCS of about 9 parts to 1 part. The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. The reaction chamber is then evacuated and the coated substrate is removed therefrom. The initial advancing contact angle is greater than 70 ° and greater than 55 ° after 300 Taber Cycles.

Example XVIII (invention)

The glass substrate is cleaned using the procedure in Example XVI. The cleaned substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, silicon tetrachloride (SiCU) is introduced into the reaction chamber for about 5 minutes to form the first silicon oxide layer, SiO._x, having an RMS surface roughness of at least 4 nm, and preferably less than about 6 nm. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS SiChMe2) and methyltrichlorosilane (MTCS - SiCl2CH) in a DMDCS to MTCS ratio of about 3 parts to 1 part by weight are introduced into the chamber for a total of 5 minutes. The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. The reaction chamber is then evacuated and the coated substrate is removed therefrom. The initial advancing contact angle is greater than 70 ° and greater than 55 ° after 300 Taber Cycles.

Example XIX (invention)

The glass substrate is cleaned using the procedure in Example XVI. The cleaned substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, silicon tetrachloride (SiClU) is introduced into the reaction chamber for about 5 minutes to form a first SiO x layer having an RMS surface roughness of at least 4 nm, and preferably less than about 6 nm. The chamber is then purged and rehumidified to at least about 14%. After a stabilization period of 30 seconds, dimethyldichlorosilane (DMDCS-SiCl2 Me2) and methyltrichlorosilane (MTCS-SiClaCHa) in a DMDCS to MTCS ratio of about 1 to 3 parts by weight are introduced into the chamber for a total of 5 minutes. The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. After an additional stabilization period of at least 30 seconds, additional methyltrichlorosilane (DMDCS) is introduced into the reaction chamber for an additional five minutes to provide a final cover layer. After the final coating is applied, the reaction chamber is evacuated and the coated substrate is removed therefrom. The initial advancing contact angle is greater than 105 ° and greater than 65 ° after 300 Taber Cycles.

PL 200 431 B1

Example XX (invention)

The glass substrate is cleaned using the procedure in Example XVI. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, silicon tetrachloride (SiCl) is introduced into the reaction chamber for about 5 minutes.₄) to form the first SiO layer_x with an RMS surface roughness of at least 4 µm, and preferably less than about 6 µίΓ. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS - SiO2Meg) and methyltrichlorosilane (MTCS - SiCkC—) and silicon tetrachloride (SiCty) are introduced into the chamber for a total of 5 minutes in equimolar amounts. The reaction chamber humidity is adjusted to about 14%, and then held at a relatively constant humidity for about 5 minutes. After the final coating is applied, the reaction chamber is evacuated. the substrate is then removed from the chamber. The initial advancing contact angle is greater than 60 ° and greater than 45 ° after 300 Taber Cycles.

Example XXI (invention)

The glass substrate is cleaned using the procedure in Example XVI. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, silicon tetrachloride (SiCty) is introduced into the reaction chamber for about 5 minutes to form a first layer with an RMS surface roughness of at least 4 µm, and preferably less than about 6 µm. The chamber is then purged and re-humidified to at least about 14%. After a 30-second stabilization period. dimethyldichlorosilane (DMDCS - SiCl2 Meg) and methyltrichlorosilane (MTCS - SiCl3C-3) and silicon tetrachloride (SiCty) are introduced into the chamber for a total of 5 minutes. The reaction chamber humidity is adjusted to about 14%, and then held at a relatively constant humidity for about 5 minutes. After an additional stabilization period of at least 30 seconds to ensure correct and stable humidity, additional methyltrichlorosilane (DMDCS) is introduced into the reaction chamber for an additional five minutes to form a cover layer. After the final coating is applied, the reaction chamber is evacuated and the coated substrate is removed therefrom. The initial advancing contact angle is greater than 60 ° and greater than 45 ° after 300 Taber Cycles.

Example XXII (invention)

The glass substrate is cleaned using the procedure in Example XVI. The substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, silicon tetrachloride (SiCty) is introduced into the reaction chamber for about 5 minutes to form a first layer with an RMS surface roughness of at least 4 µm, and preferably less than about 6 µm. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS - SiCl2 Meg) and methyltrichlorosilane (MTCS - SiChC-3) and silicon tetrachloride (SiCty) are introduced into the chamber for a total of 5 minutes, with the amounts of all reagents in a weight ratio of 1 part DMDCS, 1 part MTCS and 2 parts SiCty The reaction chamber humidity is adjusted to about 14% and then kept at a relatively constant humidity for about 5 minutes. After an additional stabilization period of at least 30 seconds to stabilize the humidity, methyltrichlorosilane is introduced into the reaction chamber for an additional five minutes to form a cover layer. After the final coating is applied, the reaction chamber is evacuated and the coated substrate is removed therefrom. The initial advancing contact angle is greater than 60 ° and greater than 45 ° after 300 Taber Cycles.

Example XXIII (invention)

The glass substrate is cleaned using the procedure in Example XVI. The substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. Chamber humidity is adjusted to 14% and held at this level for 5 minutes. After a stabilization period of 30 seconds, a mixture of 5 parts of dimethyldichlorosilane (DMDCS) and one part of trichloromethylsilane is introduced into the reaction chamber for 5 minutes. After an additional 30-second stabilization period, gases are purged from the chamber for 10 minutes and the substrate is then removed from the chamber. FAS (B) is added and after 60-90 seconds of treatment, the glass substrate is washed with n-butanol. The initial advancing contact angle is greater than 100 ° and greater than 65 ° after 300 Taber Cycles.

PL 200 431 B1

Example XXIV (invention)

The glass substrate is cleaned using the procedure in Example XVI. The substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. Chamber humidity is adjusted to 14% and held at that level for 5 minutes. After a 30-second stabilization period, trichloromethylsilane (TCMS) is introduced into the reaction chamber for 5 minutes to form a surface layer with an RMS surface roughness of about 1 to 6 nm and a greater hydrophobicity than that of a pure SiCL surface as measured by the contact angle . After an additional 30-second stabilization period, gases are purged from the chamber for 10 minutes and the substrate is then removed from the chamber. FAS (B) is added and after 60-90 seconds the glass substrate is washed with n-butanol. The initial advancing contact angle is greater than 100 ° and greater than 65 ° after 300 Taber Cycles.

Example XXV (invention)

The glass substrate is cleaned using the procedure in Example XVI. The substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds for the humidity in the reaction chamber to stabilize, trichloromethylsilane is introduced into the reaction chamber for about 5 minutes to form a first SiO layer._xMey with an RMS surface roughness of about 1 µm, and preferably less than about 6 µm. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS-SiCl₂Me2) and methyltrichlorosilane (MTCS - SiClC4). The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. After an additional stabilization period of at least 30 seconds, methyltrichlorosilane is optionally introduced into the reaction chamber for an additional 5 minutes to form a cover layer. After the final coating is applied, the reaction chamber is evacuated and the coated substrate is removed from the chamber. The initial advancing contact angle is greater than 70 ° and greater than 50 ° after 300 Taber Cycles.

Example XXVI (invention)

The glass substrate is cleaned using the procedure in Example XVI. The substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, trichloromethylsilane is introduced into the reaction chamber for about 5 minutes to form a first SiOxMey layer having an RMS surface roughness of about 1 µm, and preferably less than about 6 µm. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS-SiCLMe2) and silicon tetrachloride (SiCU) are introduced into the chamber for a total of 5 minutes. The amount of each reagent is about 1 to about 3 (e.g., 1 DMDCS to 3 SiCR), depending on the degree of stability or hydrophobicity desired, or both. The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. After the final coating is applied, the reaction chamber is evacuated and the coated substrate is removed from the chamber. The initial advancing contact angle is greater than 60 ° and greater than 45 ° after 300 Taber Cycles.

Example XXVII (invention)

The glass substrate is cleaned using the procedure in Example XVI. The substrate is placed in the holder and blown dry using dried compressed air. The cleaned substrate is placed in the reaction chamber parallel to the gas flow. After a period of about 30 seconds to stabilize the humidity in the reaction chamber, trichloromethylsilane is introduced into the reaction chamber for about 5 minutes to form a first SiOxMey layer with an RMS surface roughness of about 1 nm, and preferably less than about 6 nm. The chamber is then purged and rehumidified to at least about 14%. After a 30-second stabilization period, dimethyldichlorosilane (DMDCS - SiCLMe2) and silicon tetrachloride (SiCU) are introduced into the chamber for a total of 5 minutes. The amount of each reagent is suitably about 5 parts to 1 part (e.g. 5 DMDCS to 1 SiClU) depending on the degree of stability or hydrophobicity or both desired. The reaction chamber humidity is adjusted to about 14% and then held relatively constant humidity for about 5 minutes until a cross-linked layer is formed during this time. After an additional stabilization period of at least 30 seconds, methyltrichlorosilane (DMDCS) is introduced into the reaction chamber for an additional 5 minutes to form a cover layer. The reaction chamber is then evacuated and the coated substrate is removed from the chamber. The initial advancing contact angle is greater than 100 ° and greater than 65 ° after 300 Taber Cycles.

Although the invention has been described in connection with what is presently believed to be the most practical and preferred embodiment, it should be understood that the invention should not be limited to the embodiments shown, but on the contrary may include various modifications and equivalent arrangements in accordance with the spirit and scope of the invention. the attached reservations.