PL1828848T3

Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors

Abstract

Photoresist strippers and cleaning compositions of this invention are provided by non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor polymer having multiple hydroxyl- or amino-functional groups pendant from the polymer backbone.

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Term ended

Projected expiry passed 1 February 2025, 1.6 years ago.

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8 priority claims, no other members on record

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Priority claims8

Priority claims
DocumentOfficeKindDate
63494504United States of AmericaP
63494504United States of AmericaP
05712395European Patent Office (EPO)A
2005002940United States of AmericaW
2005002940United States of AmericaW
EP20050712395
US20040634945P
WO2005US02940