PL1828848T3
Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors
Abstract
Photoresist strippers and cleaning compositions of this invention are provided by non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor polymer having multiple hydroxyl- or amino-functional groups pendant from the polymer backbone.
Term
Term ended
Projected expiry passed 1 February 2025, 1.6 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
8 priority claims, no other members on record
Priority claims8
| Document | Office | Kind | Date |
|---|---|---|---|
| 63494504 | United States of America | P | |
| 63494504 | United States of America | P | |
| 05712395 | European Patent Office (EPO) | A | |
| 2005002940 | United States of America | W | |
| 2005002940 | United States of America | W | |
| EP20050712395 | – | – | – |
| US20040634945P | – | – | – |
| WO2005US02940 | – | – | – |
Numbers
- Publication, DOCDB
- 1828848
- Publication, EPODOC
- PL1828848T
- Application
- 712395
- Application, DOCDB
- 05712395
- Application, EPODOC
- PL20050712395T
Titles2
- English
- NON-AQUEOUS, NON-CORROSIVE MICROELECTRONIC CLEANING COMPOSITIONS CONTAINING POLYMERIC CORROSION INHIBITORS
- Polish
- Niewodne niekorozyjne kompozycje czyszczące dla mikroelektroniki zawierające polimerowe inhibitory korozji
Classification
- CPC, 8
- G03F7/425
- C11D3/30
- G03F7/426
- C11D3/43
- C11D3/0073
- C11D3/3723
- C11D3/3753
- C11D2111/22
- IPC, 4
- G03F7 42
- C11D3 37
- C11D7 32
- C11D11 00