Coated article with ir reflecting layer(s)

SUMMARY OF EXEMPLARY EMBODIMENTS

Coated articles are known in the art for use in window applications such as IG windows, vehicle windows (windows), monolithic windows, and / or the like. In certain example cases, the coated article designers often resort to a combination of high visible transmission, substantially neutral color, low emissivity (or emittance), low sheet resistance (Rs), low U values ​​in the context of IG windows, and / or low resistance. proper. High visible transmission and substantially neutral color can allow the use of coated products in applications where features such as architectural or automotive windows are desired, while low emissivity (low E), low sheet resistance,

Consider a typical coated article with the following stack (system) of layers. This coated article is suitable for use in a window (insulating glass) IG. For the coated article given below, the coating includes the layers mentioned from the glass substrate to the outside.

<td>The layer of glass</td><td>Thickness (A)</td>

<td>TiO x</td><td>140 A</td>

<td>SnOx</td><td>100 A</td>

<td>ZnAlO x</td><td>70 A</td>

<td>Ag</td><td>118 A</td>

<td>NiCrO</td><td>20 A</td>

<td>SnOx</td><td>223 A</td>

<td>SiNx</td><td>160 A</td>

The silver layer (Ag) of the above coated article has a thickness of 118 angstroms (A) and a sheet resistance (Rs) of 4.6 ohms / square. This translates into the specific resistance (Rs multiplied by the thickness of the IR reflecting layer) for an IR reflecting silver layer of 5.43 micromolemcm.

While the above specific abstraction (SR) of the IR reflecting layer is adequate in many situations, an improvement would be desirable. For example, if the specific resistance (SR) of the silver layer can be lowered, the coating will be able to perform improved thermal properties (e.g., lower U-value, lower emittance, and / or the like) when giving the IR reflecting layer the same thickness. Thus, the lower specific resistivity of the IR reflecting layer (s) is desirable because it allows improving the thermal properties of the coating.

Document US 2003/0198816 relates to a coated article with a low E coating with double silver. The coating is designed to have approximately the same color when viewed over a wide range of viewing angles.

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Document WO 03/055816 A2 discloses a coated article equipped with an anti-reflective system that enables high transmission in the visible band and / or low reflection in the visible band.

EP 1375445A1 discloses a glazed article provided with a multilayer coating applied by cathodalisation.

In view of the above, it will be appreciated that there is a need in the field of a coated article having a coating that has good thermal properties. Certain embodiments of the present invention pertain to a coated article that allows improving thermal properties.

This problem is solved by a coated article according to claim 1.

In certain example embodiments of the present invention, it has surprisingly been found that providing a layer comprising titanium oxide over an IR reflecting layer (e.g., with silver or the like) surprisingly improves the quality of the reflecting layer lR thereby allowing the coated article to perform improved thermal properties with a given thickness of the reflecting layer IR. In certain embodiments, the titanium oxide layer may be located above the IR reflecting layer, and may be between the first layer comprising NiCrOx and the second layer comprising a metal oxide such as tin oxide. Even if the titanium oxide does not have to be in direct contact with the IR reflecting layer, it still surprisingly improves the quality of the underlying IR reflecting layer, thereby allowing the thermal properties of the coating to be improved.

In certain example embodiments of this invention, providing a titanium oxide layer over an IR reflecting layer surprisingly results in an IR reflecting layer with a lower specific resistance (SR). The lower the SR of the IR reflecting layer, the lower the emittance of the coated article with an IR reflecting layer of a given thickness. Similarly, the lower the SR of the IR reflecting layer, the lower the U-value of the IG glazing containing a similar coating having an IR reflecting layer of a given thickness. Thus, decreasing the SR of the IR reflecting layer allows to improve the thermal properties of the article coated at an IR reflecting layer (s) of similar thickness. Alternatively, decreasing the SR of the IR reflecting layer allows the thermal properties of the coated article to be substantially the same while reducing the thickness of the IR reflecting layer (s),

Thus, it can be seen that lowering the SR of the IR reflecting layer is advantageous. As discussed herein, it has been found that providing a titanium oxide layer over an IR reflecting layer surprisingly results in an IR reflective layer having a lower SR.

In certain example embodiments of the present invention, the titanium oxide layer above the IR reflecting layer may be oxidatively graded. In certain embodiments, the titanium oxide layer may be more oxidized at a location farther away from the IR reflecting layer than at a location closer to the IR reflecting layer. Surprisingly, it has been found that this improves the adhesion of the titanium oxide layer to a underlying layer such as a layer comprising NiCrOx or silver. In another embodiment of the present invention, the titanium oxide layer may be more oxidized at a location closer to the central portion of the layer than at the corresponding locations closer to the top and bottom surfaces of the layer. Again, it has been found that this improves the adhesion of the layer comprising titanium oxide to the layers below and above the titanium oxide.

In certain example embodiments of the present invention, there is provided a coated article including a coating supported by a glass substrate, the coating includes a dielectric layer; an infrared (IR) reflecting layer comprising silver located on the substrate over the dielectric layer; a layer comprising Ni and / or Cr oxide located above and directly in contact with the IR reflecting layer containing silver; a layer comprising titanium oxide located over and directly in contact with the layer comprising Ni and / or Cr oxide; layer containing oxide

-3EP 1 819 643 a metal located above and immediately in contact with a layer comprising titanium oxide; and a layer comprising silicon nitride located over the layer comprising a metal oxide.

In other embodiments of the present invention, there is provided a coated article including a coating supported by a glass substrate, the coating comprising a layer comprising zinc oxide; an infrared (IR) reflective coating comprising silver deposited on a substrate over and in contact with a layer comprising zinc oxide; a layer comprising titanium oxide located over the IR reflecting layer; a silicon nitride reflecting layer and / or a metal oxide located over the layer comprising titanium oxide; and where the IR reflecting layer has a specific resistance (SR) of no more than 5.0 microns.cm.

In yet further embodiments of the present invention, there is provided a method of making a coated article, the method comprising providing a glass substrate; formation of a dielectric layer on the substrate; forming an IR-reflecting layer comprising silver on the substrate over at least a dielectric layer; embedding a layer comprising titanium oxide on the substrate over the IR reflecting layer in a manner such that the deposited layer comprising titanium oxide is more oxidized at a location further away from the IR reflecting layer than at a location closer to the IR reflecting layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGURE 1 is a cross-sectional view of a coated article according to an embodiment of the present invention.

FIGURE 2 is a cross sectional view of a window portion of an IG (IG) containing the coated article of Fig. 1 (or Fig. 3) in accordance with an embodiment of the present invention.

FIGURE 3 is a cross-sectional view of a coated article according to another embodiment of the present invention.

FIGURE 4 is a cross-sectional illustration illustrating that in accordance with certain embodiments of the present invention, the titanium oxide inclusive layer may be embedded in an oxidatively stepped manner.

FIGURE 5 is a graph of monolithic reflection vs. transmission for the coated article of Example 1. DETAILED DESCRIPTION OF EMBODIMENTS

Referring now to drawings where similar reference numbers indicate similar parts on several views.

Coated articles can be used in applications such as monolithic windows, IG window panes, vehicle windows (glazing), and / or any other suitable application that includes one or more substrates such as glass substrates.

In certain example embodiments of this invention, it has surprisingly been found that providing a layer consisting essentially of or containing titanium oxide (e.g., TiO x, where x can range from about 1.5 to 2.5, more preferably from about 1.65 to 2, even more preferred from about 1.75 to 2, or any other suitable value) on the IR reflecting layer unexpectedly improves the quality of the reflecting layer IR thereby allowing the coated article to realize improved thermal properties at a given thickness of the IR reflecting layer. Another exemplary advantage of providing a titanium oxide layer on an IR reflecting layer is to improve the anti-reflective properties of the coated article, resulting in higher transmission in the visible band in the coating. Thus,

-4EP 1 819 643 a silver-reflecting reflectant without sacrificing transmission in the visible band, in certain example embodiments of this invention.

In certain embodiments, the titanium oxide layer may be located above the IR reflecting layer, and may be between (a) a first layer comprising Ni and / or Cr oxide, and (b) a second layer comprising a metal oxide such as tin oxide or alternatively a layer containing silicon oxides and / or silicon nitride. In certain example embodiments of this invention, providing a titanium oxide layer over an IR reflecting layer surprisingly results in an IR reflecting layer with a lower specific resistance (SR). The lower the SR of the IR reflecting layer, the lower the emittance of the coated article with an IR reflecting layer of a given thickness. Similarly, the lower the SR of the IR reflecting layer, the lower the U-value of the IG glazing containing a similar coating having an IR reflecting layer of a given thickness. Thus, the reduction in SR of the IR reflecting layer allows to improve the thermal properties of the coated article at an IR reflecting layer (s) of similar thickness. Alternatively, the reduction in SR of the IR reflecting layer allows the thermal properties of the coated article to be substantially the same while reducing the thickness of the IR reflecting layer (s), which may be desirable to increase transmission in the visible or similar in certain situations.

In certain example embodiments of the present invention, the coating is designed such that the IR reflecting layer 9 (e.g., silver layer) has a specific resistance (SR) of no greater than 5.0, more preferably no greater than 4.8, and even more preferably no greater than than 4.6 microohms.cm. Such low values ​​of SR allow to reduce the U-value and emissivity of the coating of a given thickness for the IR reflecting layer (s).

Fig. 1 is a cross-sectional view of a coated article according to an embodiment of the present invention. The coated article comprises a glass substrate 1 (e.g., a transparent, green, brown, or blue-green glass substrate with a thickness of about 1.0 to 10.0 mm, more preferably from about 1.0 mm to 6.0 mm), and a multi-layer coating (or layer system) on the ground, directly or indirectly. As shown in Fig. 1, the coating 25 comprises a dielectric layer 3, a dielectric layer 5, a layer comprising zinc oxide 7, a layer comprising IR 9 comprising or of silver, gold, or the like, an upper contact layer 11 with or containing nickel and chromium oxide. (e.g., NiCrOx), a layer 12 consisting of or containing titanium oxide (TiOx), a layer comprising a metal oxide 13, and a dielectric layer with or comprising a material such as silicon nitride and / or silicon oxynitride, which may in some cases be a protective overcoat. Other layers and / or materials may also be provided in certain example embodiments of the present invention, and it is also possible that certain layers may be removed or separated in some cases.

In monolithic cases, the coated article contains only one substrate such as glass substrate 1 (see Fig. 1). However, a monolithic coated article may be used in devices such IG glazing units, for example. Typically, as shown in Fig. 2, the glazing IG unit window may comprise two separated substrates 1 and 2, with a gap 4 defined therebetween. Exemplary IG glazing units are illustrated and described, for example, in US Patent Nos. 5,770,321, 5,800,933, 6,524,714, 6,541,084 and US 2003/0150711, the disclosures of which are all incorporated herein by reference. An exemplary IG IG window unit as shown in Fig. 2 can include, for example, a coated glass substrate 1 shown in Fig. 1 connected to another glass substrate 2 via a spacer (i), a seal (a) or the like with a gap 4 defined therebetween. This gap 4 between the substrates in the embodiments of the IG glazing may in some cases be filled with a gas such as argon (Ar). An exemplary IG pane may include a pair of substantially separated transparent glass substrates each approximately 4 mm thick, one of which is coated with the present coating in some cases where the gap 4 between substrates may be from about 5 to 30 mm, more preferably from about 10 to 20 mm,

-5 EP 1 819 643 and most preferably about 16 mm. In some cases, the coating 25 may be on the side of the inner glass substrate 1 facing the gap (although the coating may be on the second substrate in certain alternative embodiments).

In certain embodiments of IG glazing according to the present invention, the coating 25 is designed such that the resulting IG pane (e.g., z, for reference purposes, a pair of 4 mm transparent glass substrates separated by 16 mm with Ar gas in the gap) has a U value of no greater than 1.25 W / (m²K), more preferably no more than 1.20 W / (m²K), even more preferably no more than 1.15 W / (m²K), and most preferably no more than 1.10 W / (m²K). The U value is measured in accordance with EN 673, the disclosure of which is hereby incorporated herein by reference.

The lower dielectric layer 3 may be with or include titanium oxide in certain example embodiments of this invention. The titanium oxide layer 3 may in some cases be represented by TiO x, where x is from 1.5 to 2.5, most preferably about 2.0. The titanium oxide may be deposited by sputtering or the like in various embodiments. In some cases, the dielectric layer 3 may have a refractive index (n) at 550 nm, at least 2.0, more preferably at least 2.1, and possibly from about 2.3 to 2.6 when the layer is of or contains titanium oxide. In certain example embodiments of the present invention, the thickness of the layer comprising titanium oxide 3 is controlled to allow the color values ​​a * and / or b * (e.g., transmission, reflective on the film side, and / or reflective on the glass side) to be quite neutral ( ie., close to zero) and / or desirable. Other materials can be used in addition to or instead of titanium oxide in some cases. In certain alternative embodiments, Ti in the oxide layer 3 may be replaced with another metal.

The dielectric layer 5 comprises a metal oxide such as tin oxide in all embodiments of the present invention. The metal oxide layer 5 may be provided to improve adhesion between the titanium oxide layer 3 and the zinc oxide layer 7 in certain embodiments. The tin oxide layer 5 may be doped with other materials such as nitrogen in certain example embodiments of this invention. In some cases, a layer comprising tin tin 5 may be advantageous in that it may increase the coating coater productivity or save costs compared to when the coating portion is titanium oxide or silicon nitride, which are slower to sputter and / or more expensive. (although these materials are also possible).

The lower contact layer 7 in certain example embodiments of the present invention is with or comprises zinc oxide (e.g., ZnO). The zinc oxide layer (s) 7 may contain other materials such as Al (e.g., to form ZnAlOx) in certain embodiments. For example, in certain example embodiments of this invention, the zinc oxide layer 7 may be doped with from about 1 to 10% Al (or B), more preferably from about 1 to 5% Al (or B), and most preferably about 2 to 4. % Al (or B). The use of zinc oxide 7 under the silver in the layer 9 allows obtaining an excellent quality of silver.

The infrared (IR) reflecting layer 9 is preferably substantially or entirely metallic and / or conductive, and may comprise or consist essentially of silver (Ag), gold, or any other suitable IR reflecting material. The IR reflecting layer 9 allows the coating to have low E and / or good solar control features such as low emittance, low sheet resistance, and so on. The IR reflecting layer may, however, be slightly oxidized in certain example embodiments of this invention.

In certain example embodiments of the present invention, the target distance of the silver target (e.g., planar target of silver) used to spray the reflecting layer IR 9 is reduced compared to conventional practice. Surprisingly and unexpectedly, it has been found that the properties of the IR reflecting layer 9 can be improved by reducing the distance between the substrate 1 and the sputter target (s) used (i) in the formation of the reflecting layer (s).

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IR 9. For example, it has been found that reducing the target substrate distance for the target (s) used to sputter the IR reflecting layer (s) 9 results in an IR reflecting layer having one or more of: (a) reduced resistance a sheet (Rs), (b) reduced emittance or emissivity, (c) improved crystallinity, and / or (d) a higher and thus improved disappearance coefficient (k). Accordingly, in certain example embodiments of this invention, the reflecting layer (s) IR 9 is (are) formed by spraying a target that is closer to the substrate 1 than conventionally. In certain example embodiments of this invention, the reflecting layer (s) IR 9 is / are formed by sputtering where the sputtering target Ag is at a target substrate distance of less than or equal to about 110 mm, more preferably less than or equal to about 100 mm, more preferably less than or equal to about 95 mm, even more preferably less than or equal to about 90 mm, even more preferably less than or equal to about 80 mm. Further detail of the target-substrate distance for the silver target used in forming the IR reflecting layer 9 is discussed in US Patent Application No. 60 / 619,687.

The upper contact layer 11 can be with or include Ni and / or Cr oxide. In certain embodiments, the top contact layer 11 may be with or include nickel (Ni) oxide, chromium oxide (Cr), or a nickel alloy oxide such as nickel and chromium (NiCrOx) oxide, or other (suitable) material (s). The use of, for example, NiCrOx in this layer allows for improved durability. The NiCrO x 11 layer can be fully oxidized in certain example embodiments of the present invention (i.e., fully stoichiometric), or alternatively it can only be partially oxidized. In some cases, the NiCrO x 11 layer may be at least about 50% oxidized. The contact layer 11 (e.g., with or containing Ni and / or Cr oxide) may or may not be oxidatively oxidized in various embodiments of the present invention. Gradual oxidation (oxidation) means that the degree of oxidation in the layer varies over the thickness of the layer such that, for example, the contact layer can be graduated to be less oxidized on the contact surface with the immediately adjacent IR reflecting layer than in the part of the contact layer (s) or more / most distant from the adjacent IR reflecting layer. Descriptions of various types of oxidation graded contact layers are given in US Patent No. 6,576,349. The contact layer 11 (e.g., with or containing Ni and / or Cr oxide) may or may not be continuous in various embodiments of the present invention over the entire IR reflecting layer. for example, the contact layer may be stepped to be less oxidized on the contact surface with the immediately adjacent IR reflecting layer than in the part of the contact layer (s) less or more / farthest away from the immediately adjacent IR reflecting layer. Descriptions of various types of oxidation graded contact layers are given in US Patent No. 6,576,349. The contact layer 11 (e.g., with or containing Ni and / or Cr oxide) may or may not be continuous in various embodiments of the present invention over the entire IR reflecting layer. for example, the contact layer may be stepped to be less oxidized on the contact surface with the immediately adjacent IR reflecting layer than in the part of the contact layer (s) less or more / farthest away from the immediately adjacent IR reflecting layer. Descriptions of various types of oxidation graded contact layers are given in US Patent No. 6,576,349. The contact layer 11 (e.g., with or containing Ni and / or Cr oxide) may or may not be continuous in various embodiments of the present invention over the entire IR reflecting layer.

The titanium oxide layer 12 is located on and over the IR reflecting layer, and directly on and contacts the contact layer 11 of the embodiment of Fig. 1. As explained here, it has surprisingly been found that providing a layer 12 consisting essentially of or containing titanium oxide. over the IR reflecting layer, it surprisingly improves the quality of the IR reflecting layer thereby allowing the coated article to realize improved thermal and / or optical properties. The titanium oxide layer 12 may be stoichiometric (TiO2) or non-stoichiometric in various embodiments of the present invention.

The dielectric layer 13 may be with or include a metal oxide such as tin oxide in certain example embodiments of this invention. The layer comprising metal oxide 13 is for anti-reflexive purposes, and also improves the emissivity of the coated article and the stability and efficiency of the production process. In addition, tin oxide in layer 13 provides good adhesion to titanium oxide in layer 12, and provides good durability in this regard. The tin oxide layer 13 may be doped with other materials such as nitrogen in certain example embodiments of this invention. In some cases, the tin oxide coating layer may be advantageous because it may increase the performance of the coating coating coating machine or save costs compared to if this portion of the coating was of titanium oxide or silicon nitride,

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The dielectric layer 15, which may be the top layer in some cases, may be with or include silicon nitride (e.g., Si₃N4) or any other suitable material in certain example embodiments of this invention such as silicon oxynitride. Optionally, other layers may be above the layer 15. The layer 15 is for durability purposes and for the protection of the underlying layers. In certain embodiments, the layer 15 may have a refractive index (n) of from about 1.9 to 2.2, more preferably from about 1.95 to 2.05.

Other layer (s) below or above the illustrated coating may also be provided (e). Thus, while the layer system or coating is "on" or "supported by" the substrate 1 (directly or indirectly), another layer (s) may be located between them. Thus, for example, the coating of Fig. 1 can be considered as "on" and "supported by" the substrate 1 even if the other layer (s) is located between the layer 3 and the substrate 1. Furthermore, some layers the illustrated coating can be removed in some embodiments, whereas others may be between different layers or the different layer (s) may be separated by a different layer (s) added between the divided sections in other embodiments of the present invention without departing from the whole spirit of certain embodiments of the present invention. For example, and without limitation, layer 5 and / or layer 13 can be removed in certain example situations.

While different thicknesses may be used in various embodiments of the present invention, exemplary thicknesses and materials for suitable layers on the glass substrate 1 in the embodiment of Fig. 1 are as follows from the glass substrate outwardly (e.g., the Al content in the zinc oxide layer 7 can range from about 1-10%, more preferably from about 1-3% in certain example instances):

Table 1 (Exemplary materials / thicknesses; Embodiment of Fig. 1)

<td>Layer</td><td>Preferred range (A)</td><td>More preferred (A)</td><td>Example (A)</td>

<td>TiOx (layer 3)</td><td>30-400 A</td><td>80-250 A</td><td>180 A</td>

<td>SnO2 (layer 5)</td><td>10-300 A</td><td>10-100 A</td><td>20 A</td>

<td>ZnAlOx (layer 7)</td><td>10-300 A</td><td>60-120 A</td><td>50 A</td>

<td>Ag (layer 9)</td><td>50-250 A</td><td>80-150 A</td><td>130 A</td>

<td>NiCrOx (layer 11)</td><td>10-80 A</td><td>20-70 A</td><td>30 A</td>

<td>TiOx (layer 12)</td><td>10-300 A</td><td>20-100 A</td><td>40 A</td>

<td>SnO2 (layer 13)</td><td>40-400 A</td><td>100-200 A</td><td>160 A</td>

<td>Si3N4 (layer 15)</td><td>50-750 A</td><td>150-350 A</td><td>210 A</td>

In certain example embodiments of the present invention, the present coated articles may have the following low E (low emissivity), solar and / or optical features reported in Table 2 when measured monolithically. Specific resistance (SR) is the silver IR 9 reflecting layer.

Table 2: Low E / Solar features (Monolithic, no HT)

<td>Feature</td><td>General</td><td>More preferred</td><td>Most preferred</td>

<td>Rs (ohms / kw):</td><td>&lt;= 6.0</td><td>&lt;= 4.5</td><td>&lt;= 3.5</td>

<td>Ag SR (mikroohms.cm):</td><td>&lt;= 5.0</td><td>&lt;= 4.8</td><td>&lt;= 4.6</td>

<td>en:</td><td>&lt;= 0.10</td><td>&lt;= 0.06</td><td>&lt;= 0.040</td>

<td>Tvis (%):</td><td>&gt; = 70</td><td>&gt; = 80</td><td>&gt; = 85</td>

It can be seen that the coated article has a reduced (i.e., better) SR for the silver IR reflecting layer compared to the 5.43 microHm.cm mentioned above when no titanium oxide layer 12 is present. Thus, it can be seen that the presence The titanium oxide layer 12 surprisingly results in an improved specific resistance of the IR reflecting layer and therefore improved thermal properties.

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In addition, coated articles comprising coatings according to the invention have the following optical characteristics (e.g., when the coating (s) is located on a transparent glass of soy-calcium silicate 1 with a thickness of 1 to 10 mm, preferably around 4 mm). In Table 3, all parameters are measured monolithically.

Table 3: Examples of optical characteristics (Monolithic)

<td>Feature</td><td>Generally</td><td>More preferred</td>

<td>Tvis (or TY) (Ill. C, 2 deg.):</td><td>&gt; = 70%</td><td>&gt; = 80% (or&gt; = 85%)</td>

<td>a * t (Ill. C, 2 °):</td><td>-2.5 to +1.0</td><td>-2.0 to 0.0</td>

<td>b * t (Ill. C, 2 °):</td><td>-1.0 to +4.0</td><td>0.0 to 2.5</td>

<td>L * t:</td><td>&gt; = 90</td><td>&gt; = 93</td>

<td>RfY (Ill. C, 2 deg.):</td><td>1 to 7%</td><td>1 to 6%</td>

<td>a * f (Ill. C, 2 °):</td><td>-5.0 to + 4.0</td><td>-1.5 to +3.0</td>

<td>b * f (Ill. C, 2 °):</td><td>-14.0 to +10.0</td><td>-10.0 to 0</td>

<td>L * f:</td><td>22-30</td><td>24-27</td>

<td>RgY (Ill. C, 2 deg.):</td><td>1 to 10%</td><td>1 to 9%</td>

<td>a * g (Ill. C, 2 °):</td><td>-5.0 to +4.0</td><td>-1.5 to +3.0</td>

<td>b * g (Ill. C, 2 °):</td><td>-14.0 to +10.0</td><td>-10.0 to 0</td>

<td>L * g:</td><td>27-36</td><td>30-35</td>

In addition, coated articles containing coatings in accordance with certain example embodiments of the present invention have the following optical characteristics when the article is coated with IG glass in certain embodiments (e.g., for reference purposes when the coating is on a transparent glass of soda-lime-silica glass 1) with a thickness of 1 to 10 mm, preferably about 4 mm) on the surface # 3 of IG IG. It is noted that the U value is measured in accordance with EN 673.

<td>Feature</td><td>Table 4: Examples of general characteristics</td><td>birds (IG pane) More preferred</td>

<td>Tvis (or TY) (Ill. C, 2 deg.):</td><td>&gt; = 70%</td><td>&gt; = 78%</td>

<td>a * t (Ill. C, 2 °):</td><td>-4.0 to +1.0</td><td>-3.0 to 0.0</td>

<td>b * t (Ill. C, 2 °):</td><td>-1.0 to +4.0</td><td>0.0 to 3.0</td>

<td>RoutsideY (Ill. C, 2 deg.):</td><td>&lt;= 14%</td><td>&lt;= 12%</td>

<td>a * out (Ill. C, 2 °):</td><td>-3.0 to +3.0</td><td>-2 to +2.0</td>

<td>b * out (Ill. C, 2 °):</td><td>-10.0 to +10.0</td><td>-6.0 to 0</td>

<td>RinsideY (Ill. C, 2 deg.):</td><td>&lt;= 14%</td><td>&lt;= 12%</td>

<td>a * inside (Ill. C, 2 °):</td><td>-5.0 to +4.0</td><td>-1.5 to +3.0</td>

<td>b * inside (Ill. C, 2 °):</td><td>-14.0 to +10.0</td><td>-10.0 to 0</td>

<td>U (IG) value (W / (m²K))</td><td>: &lt;= 1.25</td><td>&lt;= 1.15 (or &lt;= 1.10)</td>

Fig. 3 is a cross section of another embodiment of the present invention. In Fig. 3, the titanium oxide layer 12 is over and in contact with the IR reflecting layer 9 (i.e., the contact layer 11 of the embodiment of Fig. 1 is removed). The features listed above in Tables 1-4 may also be applied to the embodiment of Fig. 3 (in addition to the embodiment of Fig. 1, and other embodiments of the present invention).

In certain example embodiments of the present invention, the titanium oxide layer above the IR reflecting layer may be oxidatively graded (see the stepped titanium oxide layer 12 'in Fig. 4). Fig. 4 illustrates an exemplary oxidatively graded titanium oxide layer 12 'that can be used as layer 12 in any of the embodiments of Figs. 1-3 of the present invention. In certain embodiments, as shown in Fig. 4, for example, the titanium oxide layer 12 'may be more oxidized at a location further from the IR reflecting layer 9 than at a closer location.

-9EP 1 819 643 of the IR reflecting layer 9. Surprisingly, it has been found that this improves the adhesion of the titanium oxide layer 12 'to the underlying layer such as a layer comprising NiCrOx 11 or silver 9. In other embodiments of the present invention, the titanium oxide layer 12' can be more oxidized at a location closer to the middle of the layer than at the corresponding locations closer to the upper and lower surfaces of the layer 12 '. Again, it has been found that this improves the adhesion of the layer 12 'comprising titanium oxide to the layers below (9 or 11) and above (13) the titanium oxide layer 12'.

In one embodiment of the present invention, the oxidation gradation of the deposited titanium oxide layer 12 'can be made by spraying the layer 12 onto the substrate using 3 CMAG Ti (or TiOx) targets, or any other suitable number of Ti-containing targets. The second and third target may have oxygen introduced into their respective sputtering atmospheres. However, oxygen is not intentionally introduced into the atmosphere of the first target containing Ti, or alternatively is only introduced deliberately downstream of the first stream containing Ti but not upstream. This causes the first portion of the deposited titanium oxide layer 12 'to be more metallic than the further parts of the titanium oxide layer 12' that are sprayed to form the entire layer 12 '.

EXAMPLE

The following example is for illustrative purposes only, not limiting. The following Example was made by spraying to obtain approximately the stack (arrangement) of layers given below from the transparent glass substrate to the outside. The given thicknesses are approximate:

Table 5: Stack (layout) of layers for the Example

<td>Layer</td><td>Thickness</td>

<td>Glass substrate</td><td>4 mm</td>

<td>TiO x</td><td>180 A</td>

<td>SnO2</td><td>20 A</td>

<td>ZnAlO x</td><td>50 A</td>

<td>Ag</td><td>135 A</td>

<td>NiCrO</td><td>30 A</td>

<td>TiO x</td><td>40 A</td>

<td>SnO2</td><td>160 A</td>

<td>si₃N4 -</td><td>210 A</td>

The silver layer was sprayed with two silver planar targets, and using gas flows including Ar and Kr, where much more Ar than Kr was used. After depositing by sputtering on a glass substrate, the coated article of the Example had the following characteristics, measured monolithically. Fig. 5 also illustrates certain features of this Example in a graphical form.

Table 6: Features of the Example (Monolithic)

Feature Example

Transm. in the visible band (Tvis or TY) (Ill. C 2 deg.): 86.53% a * -1.84 b * 2.15

L * 94.54

Co-reflection of the glass side (RY) (Ill C, 2 deg.): 6.67% a * 1.05 b * -8.03

L * 31.05

4.96

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The reflective side of filn (FY) (Ill. C, 2 deg.):

<td>and*</td><td>2.11</td>

<td>b *</td><td>-8.01</td>

<td>L *</td><td>26.61</td>

<td>Rs (ohms / square):</td><td>3.4</td>

<td>en:</td><td>0.034</td>

<td>Ag SR (microhmohms):</td><td>4.56</td>

Compared to the coated article above in the prior art section, it can be seen that the addition of the titanium oxide layer 12 over the silver IR reflecting layer surprisingly caused a reduction in the specific resistance (SR) of the IR reflecting layer 9, thereby improving the thermal properties of the coating (pores. SR of an IR reflecting layer 9 of 4.56 micro -hm.cm in said Example to a higher value of 5.43 for a coating without the titanium oxide layer 12 discussed in the prior art section). This confirms the unexpected results.

Furthermore, with regard to the IR reflecting layer 9 deposited by sputtering with the Ar and Kr gas mixtures, it has surprisingly been found that the use of Kr gas during the vacuum sputtering process for a reflecting layer with or containing Ag results in improved k values ​​for the reflecting layer IR comprising Ag and thus improved resistance and / or emittance.

When said monolithic Example was used in a IG IG window pane, the IG pane had a U value of about 1.1 W / (m²K).

Whilst the invention has been referred to what is considered the most practical and preferred embodiment, it should be understood that the invention should not be limited to the disclosed embodiment, but rather it is intended to cover various modifications and equivalents falling within the scope of the appended claims.

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