PL1787366T3

Nitride based laser diode and method of manufacturing nitride based laser diode

Abstract

The laser diode comprising crystalline substrate (1) where set of subsequent n-type layers, set of optically active layers (5) and set of p-type layers is deposited. The set of n-type layers comprise at least one buffer layer (2), bottom n-type cladding layer (3) and n-type bottom waveguide layer. The set of p-type layers comprise at least p-type upper waveguide, which comprises electron blocking layer, upper p-type cladding layer (7) and p-type contact layer (8). The electron blocking layer comprises Inx, AlyGa1-x-y, N alloy doped with magnesium where 1≧x>0.001 a 1≧y 0. The way of making this invention is based on the epitaxial deposition of subsequent set of the n-type layers (2, 3, 4), set of optically active layers (5) and set of p-type layers (6, 7, 8) where the p-type waveguide layer (6) and p-type contact layer (7) is deposited with presence of indium in plasma assisted molecular beam epitaxy method.

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Projected expiry passed 9 August 2025, 1.1 years ago.

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20 members in 11 offices

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DocumentOfficeKindDate
36959704PolandA
2005000050PolandW

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PL369597A1PolandA1
WO2006019326A1World Intellectual Property Organization (WIPO)A1
WO2006019326A1World Intellectual Property Organization (WIPO)A1
EP1787366A1European Patent Office (EPO)A1
CN101036272AChinaA
CN101036272AChinaA
JP2008510298AJapanA
HK1108068A1Hong Kong, ChinaA1
US2008107144A1United States of AmericaA1
EP1787366B1European Patent Office (EPO)B1
AT413710TAustriaT
ATE413710T1AustriaT1
DE602005010878D1GermanyD1
DK1787366T3DenmarkT3
ES2317279T3SpainT3
PL1787366T3This recordPolandT3
CN100578877CChinaC
CN100578877CChinaC
US7936798B2United States of AmericaB2
PL211286B1PolandB1