Nitride based laser diode and method of manufacturing nitride based laser diode
Abstract
The laser diode comprising crystalline substrate (1) where set of subsequent n-type layers, set of optically active layers (5) and set of p-type layers is deposited. The set of n-type layers comprise at least one buffer layer (2), bottom n-type cladding layer (3) and n-type bottom waveguide layer. The set of p-type layers comprise at least p-type upper waveguide, which comprises electron blocking layer, upper p-type cladding layer (7) and p-type contact layer (8). The electron blocking layer comprises Inx, AlyGa1-x-y, N alloy doped with magnesium where 1≧x>0.001 a 1≧y 0. The way of making this invention is based on the epitaxial deposition of subsequent set of the n-type layers (2, 3, 4), set of optically active layers (5) and set of p-type layers (6, 7, 8) where the p-type waveguide layer (6) and p-type contact layer (7) is deposited with presence of indium in plasma assisted molecular beam epitaxy method.
Term
Term ended
Projected expiry passed 9 August 2025, 1.1 years ago.
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20 members in 11 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 36959704 | Poland | A | |
| 2005000050 | Poland | W |
Members20
| Document | Office | Kind | |
|---|---|---|---|
| PL369597A1 | Poland | A1 | |
| WO2006019326A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006019326A1 | World Intellectual Property Organization (WIPO) | A1 | |
| EP1787366A1 | European Patent Office (EPO) | A1 | |
| CN101036272A | China | A | |
| CN101036272A | China | A | |
| JP2008510298A | Japan | A | |
| HK1108068A1 | Hong Kong, China | A1 | |
| US2008107144A1 | United States of America | A1 | |
| EP1787366B1 | European Patent Office (EPO) | B1 | |
| AT413710T | Austria | T | |
| ATE413710T1 | Austria | T1 | |
| DE602005010878D1 | Germany | D1 | |
| DK1787366T3 | Denmark | T3 | |
| ES2317279T3 | Spain | T3 | |
| PL1787366T3This record | Poland | T3 | |
| CN100578877C | China | C | |
| CN100578877C | China | C | |
| US7936798B2 | United States of America | B2 | |
| PL211286B1 | Poland | B1 |
Numbers
- Application
- 5769150
Titles2
- English
- NITRIDE BASED LASER DIODE AND METHOD OF MANUFACTURING NITRIDE BASED LASER DIODE
- Polish
- Azotkowa dioda laserowa i sposób wytwarzania azotkowej diody laserowej
Classification
- CPC, 6
- B82Y20/00
- H01S5/34333
- H01S5/2009
- H01S5/3063
- H01S5/3216
- H01S2304/02
- IPC, 3
- H01S5 343
- H10P14 694
- H10P95 00