NO844985L
Inverted positive vertical flow chemical vapor deposition reactor chamber.
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed and published
- Today
15 members in 11 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 48991983 | United States of America | A | |
| 48991983 | United States of America | A | |
| 489919 | – | – | – |
| US19830489919 | – | – | – |
Members15
| Document | Office | Kind | |
|---|---|---|---|
| WO8404334A1 | World Intellectual Property Organization (WIPO) | A1 | |
| NO844985LThis record | Norway | L | |
| DK620984D0 | Denmark | D0 | |
| KR840009176A | Republic of Korea | A | |
| EP0142495A1 | European Patent Office (EPO) | A1 | |
| JPS60501234A | Japan | A | |
| CA1209330A | Canada | A | |
| EP0142495B1 | European Patent Office (EPO) | B1 | |
| DE3367627D1 | Germany | D1 | |
| IL71376A | Israel | A | |
| US4732110A | United States of America | A | |
| IT1214395B | Italy | B | |
| IT8448099A0 | Italy | A0 | |
| KR900001658B1 | Republic of Korea | B1 | |
| JPH0231490B2 | Japan | B2 |
Numbers
- Publication, DOCDB
- 844985
- Publication, EPODOC
- NO844985L
- Application
- 844985
- Application, DOCDB
- 844985
- Application, EPODOC
- NO19840004985
Titles2
- English
- Inverted reactor chamber for chemical vapor deposition with positive vertical flow
- Norwegian
- INVERTERT REAKTORKAMMER FOR KJEMISK DAMPAVSETNING MED POSITIV VERTIKAL STROEM
Classification
- CPC, 4
- C23C16/45582
- H10D84/01
- C30B25/08
- C30B25/14
- IPC, 7
- H01L21 205
- C23C16 44
- C23C16 455
- C30B25 08
- C30B25 14
- H01L21 31
- H01L21 70