Sensor mounting for vibrating structures.

[Detailed Description of the Invention]

The device [technical field] present invention for attaching a sensor to the vibrating structure relates to providing wearing of the electronic portion to the machinery structure which Shooting, and the lead for the signal transfer between two structures in which at least 1 side is vibrating to another side. Especially as for the present invention, it is Bought that it is effective in the Corio Rika mass flowmeter containing the sensor portion with which the structure which has an electronic drive, and which Shooting, and this vibrating structure were equipped. It is insulated to mutual, the lead of the present invention is arranged so that fatigue and destruction of a lead may not arise by Shooting, and it makes the minimum a mechanical couple of force between the structures equipped with a lead, and attenuation.

[Background of the Invention] In the art of mass style" measurement of fluid, if fluid is passed to the pipeline which rotates or vibrates, it is known that Corio Rika who acts at right angles to both the speed of the mass body which passes the pipeline, and the angular velocity vector of the pipeline which rotates or vibrates will arise. It is also known that such Corio Rika's size relates to both the mass flow rate which passes a pipeline, and the angular velocity of a pipeline. the mass flow rate of the substance which the size of Corio Rika who occurred in one of the main technical problems relevant to the old device which is going to design and manufacture the Corio Rika mass flowmeter is determined, and so flows through a pipeline is calculable -- as It may be said that whether to measure the angular velocity of a pipeline correctly and to control were required. Corio Rika who occurred even if the angular velocity of the pipeline was determined or controlled -- a large -- an affected exact determination is rash at the technical problem of Earl relevant to an old design and manufacture of the Corio Rika Quality best flow gauge. Partially, since this problem has a minute distortion which arises in the pipeline which Corio Rika who occurred is very small, and vibrates or rotates, it arises. A mass flow rate may be accidentally determined by distortion of the pipeline which arises by the pressure serge within the machinery which approaches since Corio Rika is small common, or a fluid channel. Such an error source may bar the effect which arises by occurring Corio Rika completely, cannot use a channel meter, and may carry out it. Especially (avoiding the necessity of measuring or controlling the size of the angular velocity of a> Corio Rika mass flowmeter flow detection pipeline) (b) The sensitivity and accuracy of the effect which arises by Corio Rika who occurred required for measurement are given simultaneously, and the dynamic form and the measurement technique which an error does not produce from Shooting source of (C) exterior easily are indicated by recurrence line U.S. Pat. No. 31450, U.S. Pat. No. 4422338, and 4491025. The dynamic form currently indicated by these patents is provided with the crooked flow detection pipeline which does not have a pressure-sensitive portion like the portion which can change by a bellows or other pressure. the crooked flow detection pipeline sets up the crooked pipeline which adheres to vibration in the shape of a spring around the axis in the position near the adherence portion so that the resonance pitch around the axis in the position near the adherence part may become smaller than the pitch around the axis on which Corio Rika acts, The dynamic regime of as [ whose power which counters occurring Corio Rika is mainly the spring power of alignment - ] arises. Vibration of the crooked pipeline to which it adhered at the time of fluid flowing through a pipeline in this way makes Corio Rika's couple of force generated. This Corio Rika's couple of force occurs into a portion with the velocity component of the fluid which passes along the pipeline of the direction of the portion of 92 pipelines, That is, and Angular velocity vector continuously, and a portion with the fluid velocity component of a direction which separates from an angular velocity vector. A couple of force of Corio Rika who counters linear spring power twists the pipeline crooked around the axis between [ , ] the portions of a continuous pipeline which Corio Rika produces, or gives torque. The size of a twist or torque is a function with the alignment spring power which counters Corio Rika who arose with Corio Rika who arose. In addition to twisting a pipeline by Corio Rika, an oscillating drive is made again. Therefore, the portion of another side on which one portion of a continuous pipeline on which Corio Rika acts is twisted so that it may continue in the direction to which a pipeline moves, and Corio Rika acts again will be twisted so that it may flow through the first pipeline portion. The time which needs the portion which the vibrating pipeline twisted to pass through a predetermined point is an alignment function of the mass flow rate of the fluid which passes a pipeline. The relation between the mass flow rate which passes a pipeline, and the measured time is dependent only on the constant drawn from the dynamic regime of a continuous pipeline and its adherence. This relation is not based on the variable of Earl which must be measured or controlled. The optical sensor for measuring the required time at the time of a mass flow rate being determined is indicated in detail by 4 recurrence line U.S. Pat. No. 31450, and the electromagnetic speed sensor is indicated in detail by U.S. Pat. No. 4422338 and No. 4491025. The example of the double pipeline which has a sensor for measuring required time is indicated in detail by U.S. Pat. No. 4491025. It is indicated by U.S. Pat. No. 4491025 and the form of cage power mass flowmeter is given. It contributes to operation of an alignment fork making the effect of the external force of vibration the minimum. Since the error in measurement of the time which needs this power is made to produce, it is important to make external force of vibration into the minimum. This example makes it possible to determine the mass flow rate of fluid correctly, without being restricted by the power of vibration transmitted through the base material with which the pipeline adheres again. The power of vibration transmitted through the base material which is related here arises by vibration of a pipeline. Increase of the mass of a pipeline will increase similarly the power transmitted to a base material by vibrating a pipeline. since a pipeline vibrates with an alignment fork-like form, the power which arises in a base material is equal -- a large -- it is affected. This power is direction which mainly counters mutually, so is negated and suits. The base material of a flow instrument can include complex structure as shown in U.S. Pat.4491025issue. In addition to welding a pipeline to the first support structure, or soldering it, a spacer bar like a metal plate is welded or soldered to the portion which the example of a double pipeline approaches at the equal distance mostly from the first support structure. In combination which welds or solders a pipeline to the first support structure and spacer bar, the length of the pipeline which the stress which arises by vibrating a pipeline concentrates will increase. When distortion which a pipeline receives by effective increase of the length of this pipeline carries out in g smallness and so vibrates a pipeline, a form with a crack arising [ little ] is given. If a spacer bar is used, movement from which it separates from the first support structure of the axis at the time of a pipeline Shooting(ing) again will arise. Other problems about manufacture of the exact Corio Rika flow instrument are the necessity of having a lead for the signal transfer between the electric portion with which it is equipped from the pipeline in which the Corio Rika flow instrument vibrates, and the case of the flow instrument not vibrating. Arrangement of the wearing wire for telling an electric signal between the oscillating structures which vibrate continuously is partially restricted by the result of some which arise in vibration. A wire may receive fatigue by operation elongated like change of a wire, for this reason destruction and the king of a wire may arise, and this is joined to periodic operation, reinforces fatigue, and makes a wire destroyed. The result of the others at the time of equipping with a wire from the vibrating structure is being able to combine with the structure in which a braking effort or driving force vibrates. Set the braking effort in friction between for example, the (a) wires, or a certain form. It is generated from friction (the frictional force of these arises, also when the insulating material on a wire is the synthetic resin polymer lubricous material which is marketed with a trademark called Teflon) between a Is wire and the approaching structure, or the internal structure of the (b) material itself. What arises from the approaching mechanism in which it vibrates is contained in the example of driving force. The structure which will vibrate if a braking effort and driving force are combined with the vibrating structure is the result of not being accepted when this should measure the oscillating operation from which a structure does not change, although operation changes. In manufacture of the Corio Rika mass flowmeter with which a pipeline vibrates continuously to a support structure as an example of the trial for processing these problems, It is known that a wire will be twisted around the surroundings of a pipeline to the position on the vibrating pipeline by which a wire is connected with a sensor and other electric portions from the pedestal which a pipeline adheres to a base material and does not vibrate. Junction according [ a wire ] to a tape or adhesion covering [ again ] the full length of a pipeline is made. Since Kinck is kept from arising by the structure which a wire is substantially maintained by the line and is equipped with it when a wire is twisted or attached to the structure which vibrates by a tape or adhesion, Kinck is prevented mostly. If equivalent to the characteristic of the structure in which the kinetic property of a wire vibrates about the problem of fatigue or it is more than it, the kinetic property of a wire will serve as a technical problem equivalent to the vibrating structure. However, it twists, and in these solutions by a tape or adhesion, since the length of a lead increases or a tape or adhesives are added when twisted around a pipeline, mass will be added to a pipeline common. This added mass may change oscillating operation of a structure. Since the influence of the temperature to adhesives or a tape and humidity is not uniform common, the difference of braking to which oscillating operation of a structure may be changed may arise on adhesives and a tape. Probably, it is good to use a structure which makes the minimum the amount of the length or the tape of a lead, or the adhesives used and which vibrates as the device connected mutually electrically, while enabling it to attach a lead certainly in this way. It is a different problem that setting up the problem which makes the minimum a couple of force of a braking effort and driving force to the vibrating structure prevents Kinck and fatigue. When the structure around which a wire is very as light as about 1 Di of 34 Age, and it is twisted is not a thing 2.540 m in diameter which has weight all the time like the pipeline of stainless steel in wall thickness 0.:3cm, in the example of the Corio Rika mass flowmeter, large xi To of a couple of force to an oscillating structure cannot necessarily ignore. Other factors to enlarge produce the problem of a couple of force concerning the structure which vibrates since a couple of force of the braking effort concerning the two portions or driving force is not sometimes the same when a wire is attached to two or more portions of a structure which twist or vibrate by a certain method. So, it requires that a structure twists by the resultant of different power. The gauge of the wire used is decreased, and the insulation of a wire is adjusted so that stiffness and friction may be made into the minimum, Although there is flexibility as much as possible, using the wire which does not have sensitivity in temperature is a view which an engineer can take and which is realized easily, when the problem of transmitting a signal to the lead with which it was equipped between the structures which Shooting is faced. However, just a specific view is not necessarily enough. Therefore, it is one object of the present invention to provide the means for equipping between structures which make the minimum substantially a couple of force of the braking effort and driving force to which the fracture of a wire and operation of the vibrating structure may be changed and which vibrate a wire. while other objects of the present invention attach a lead to the vibrating structure certainly -- the merit of a lead -- now, it is that Rude - enables it to make the amount of a tape and the adhesives used into the minimum.

[The outline of an invention] Operation of a flow instrument out of balance may arise according to the necessity of generating an angular velocity vector around the pipeline of the Corio Rika mass flowmeter. If a pipeline will be in an equilibrium state dynamically, the power of both torque and advancing side by side will arise in vibration of a pipeline, but this may excite the mode of vibration of the structure of a flow instrument, or may add vibrational energy to other modes which give the error signal in the determination of a mass flow rate. The power which occurs by vibration of a pipeline is negated by the power of an opposite direction in the position where it is equipped with the pipeline, or must be decreased on an effect target. It may become the design which is not practical in order to measure a mass flow rate, if it does not take into consideration appropriately to such a problem when designing the Corio Rika mass flowmeter and which cannot be used on the whole. The publicly known techniques for manufacturing the Corio Rika mass flowmeter which is in an equilibrium state dynamically are two pipelines, Or it includes that you make it vibrate so that a common 1 Te state may be mostly equipped with the spring structure which balances with one pipeline dynamically and about 180 degrees of phases may separate from them mutually, and two pipelines or one pipeline, and the balancing spring structure make it vibrate like the tooth of an alignment fork. This is good to refer to recurrence line United States patent title No. 31450, U.S. Pat. No. 4192184, No. 4311054, and No. 4491025. The power in which the direction which spreads a phase etc. by such vibration of two structures is opposite may arise in the wearing part of each of a pair of structure. The validity of this technique is shown by the Corio Rika mass flowmeter of marketing especially formed according to U.S. Pat. No. 4491025, and this can measure the accuracy to ±0.4% of a mass flow rate. Measurement of the mass flow rate of the fluid of such accuracy was not able to be attained with the device of pre- marketing rather than the device currently indicated as an invention of recurrence line U.S. Pat. No. 31450 was shown. It is necessary to make it changing the shape of two pipelines into a dynamic equilibrium state ideally have the almost same Indignation moment as the surroundings of the axis at the time of both pipelines having the almost same spring constant, and a pipeline vibrating. This condition is formed with the same material, without taking into consideration in detail the contribution to the moment of inertia of the mechanism attached to the pipeline, and is substantially approximated with the device of the above-mentioned marketing using the pipeline of the almost same shape of the same weight. Such an attached mechanism contains the sensor unit used in order to measure the effect which arises by the drive mechanism for exciting a pipeline to Shooting state, and Corio Rika. Since it was objectively equipped with what was attached until now, the place which what was attached to the pipeline contributes to moment of inertia was not considered to be an inevitable thing. The almost middle position between the portions of a pipeline which Corio Rika produces is equipped with drive mechanism, and the almost symmetrical position is equipped with each of two sensor units to the sensor of another side at each of the portion of a pipeline on which Corio Rika acts. However, like [ which has the first mode of vibration that the mass body attached by positioning of the drive mechanism on a pipeline or a sensor unit will vibrate around a pipeline, and bending of a twist will produce if attachment equips with a thing in this way ], Since the center of gravity which was alike and was displaced from the pipeline arises, it is thought that a final dynamic equilibrium state is not given. So, the error of the grade which is the signal smell measured by vibration of the attached mechanism around a pipeline like a sensor unit in the flow instrument of the above-mentioned marketing may arise. Generating of the uneven power in the bottom of the pipeline which vibrates when the one attached center of gravity in a pipeline is not the same as the center of gravity of the mechanism in which the distance from the axis at the time of a pipeline vibrating was attached to the pipeline of another side is seen. It is known that such uneven power will vibrate the structure of a flow instrument so that many modes of vibration may be excited. The uneven power which arises by wearing of such a sensor and drive mechanism in the case of many commercial uses can be disregarded as compared with the substantial power which arises by vibration of the pipeline which has weight more. It enables accuracy for the present invention to give dynamic equilibrium conditions ideal common in the others which take mass flow rate measurement into consideration more correctly, to be roughly reached with the flow instrument of the same model in this way until now, to depend, and to improve it exact common. The portion of the drive mechanism and the sensor unit with which it is equipped from each pipeline in the present invention is attached to the structure of the shape of a beam of a straight line form. It is equipped with a beam-like structure on a pipeline so that the distance from the axis at the time of the oscillating drive of the pipeline to the part where a pipeline is equipped with it being carried out may become equal. since the total mass of attachment of each beam-like structure which has a thing is equal, it generates in the bottom of the pipeline which vibrates by combination with the arm of a moment equal to equal mass -- equal -- a large -- an affected reverse mosquito arises. It can be distributed as the center of gravity of the beam-like structure which has the portion attached when the form of an original sensor unit acted to a pipeline as a speaker of the position g2 law of the mass of the portion of drive mechanism and not only a beam-like structure but a sensor unit is on the axis at the time of a pipeline twisting by Corio Rika mostly. If the portion to which a pipeline and drive mechanism relate is made into such shape, as for the twist and attachment of the maximum of a pipeline by Corio Rika who occurs with a sensor unit and its mounting tool in the position of a sensor unit, a twist of pipeline smallness will become certain about a thing. The attachment to the pipeline which has making into the minimum the twist which this error produces on the axis at the time of a pipeline being mostly twisted by raw C It was Corio Rika arises by the center of gravity of a thing. Therefore, the moment which generates the torque which arises by the mass body attached to the vibrating pipeline is not given. It adds to making attachment to a pipeline into the position on the axis at the time of a pipeline being twisted by Corio Rika who generated the center of gravity of the thing, The zero stability of the Corio Rika mass flowmeter has been improved about 10 times by equipping a pipeline with the portion and sensor unit of high Drive mechanism which the resonance pitch around the axis on which Corio Rika who occurred acts stops in this way. It is conquered, without the defect of the method of equipping with a wire the conventional method, especially the Corio Rika mass flowmeter for equipping with a wire between the structures which vibrate by the present invention needing the solution for preventing generating of a couple of force to the structure in which a wire fractures and vibrates. All the wires for drawing the electric signal from the vibrating structure by the device of the present invention are transmitted using the wire by which one side of the structure was equipped with it by one end as the portion of the wire between the ends with which it was equipped was held at the free suspension state, and the structure of another side was equipped with it by the other end. The wire is making half-loop type in the space between wearing things. A wire can be rotated now around an axis almost perpendicular to the line between the positions on the structure equipped with a wire with this half-loop shape. Although Kinck is prevented by the shape of this half-loop, and rotation and crookedness is avoided, these speed up fatigue and a fracture. In order to make any couple of force of the braking kaya driving force to the vibrating structure into the minimum, it is equipped with a wire from the structure which vibrates in the axis determined by Deflection of the structure which vibrates mostly. Especially the axis of Deflection chosen has a wire in the nearest distance from an intersection with the structure of Flexion axis which must be connected with the electric portion on a structure. If it equips with a wire such, the arm of the moment from an axis to a wire will become the minimum, and the effect of a couple of force of the external force to the structure which so vibrates becomes the minimum. Approaching Flexion axis using the shape of the half-loop hung from the wire, and equipping with a wire is indicated about the Corio Rika mass flowmeter. It is good to refer to U.S. Serial Number 770573 the "high temperature Corio Rika mass flowmeter" for which it applied on August 29, 1985 by which transfer of rights is carried out to the applicant of the present invention. It is difficult to maintain the shape of the half-loop of the flexible circuit portion carried out under Suspended. If the shape of a half-loop is not maintained continuously, the portion carried out under Suspended may shift to other shape, such as S type. Kinck and fatigue will arise regularly, when a flexible circuit vibrates by the shift to other shape, or the periodic shift between those shape. It is the object of the present invention to enable it to maintain only the shape of the half-loop of a flexible circuit continuously. The desirable example of the present invention uses the flexible circuit which has many leads. The width of a flexible circuit increases from the width in the field in which a wire is maintained by the shape of a half-loop near each end where it is equipped with a flexible circuit. The shape of a half-loop is maintained with the width which increased, and fatigue and Kinck of the flexible circuit between the ends with which it was equipped in this way are prevented. Other examples are provided with the flexible circuit which has the metal layer or the layer by which metallic coating was carried out of the sheet shaped used for carrying out spot welding of the flexible circuit to the vibrating structure.

[Brief explanation of the drawings] Drawing 1 is a perspective diagram of the Corio Rika mass flowmeter by the present invention. Drawing 2 is a perspective diagram of the Corio Rika mass flowmeter by conventional technology. Drawing 3 is a sectional view of the speed sensor by the present invention. Drawing 4 is a front side top view of the Corio Rika mass flowmeter shown in Drawing 1. Drawing 5 is a side top view of the Corio Rika mass flowmeter shown in Drawing 1. Drawing 6 is a perspective diagram of the Corio Rika mass flowmeter by the present invention which shows the desirable example of the flexible circuit of the present invention in detail. Drawing 7 is a front figure of the flexible circuit of the present invention shown in Drawing 6. Drawing 8 is a sectional view taken on straight line 8-8 of the flexible circuit of the present invention shown in Drawing 7. Drawing 9 is a sectional side elevation of the Corio Rika mass flowmeter shown in Drawing 6. Straight line 10 of the flexible circuit where i10 figure is shown in Drawing 7 - The portion corresponding in a different figure is shown by the same quotation number.

[The best form of implementation of an invention] On the whole, reference of drawings shows the Corio Rika mass flowmeter by the present invention in Drawing 1 by number 10. mass flowmeter 10 -- two -- it was crooked. Pipeline 14 and 14' contain pipe 12 with which it is mostly equipped in the shape of a cantilever in the parallel state. Both pipe 14 and 14' are continuously formed from a barrel, and it does not have a pressure-sensitive joined part. Base material 16 which combines with pipe 12 and equips both pipeline 1.4 and 14' with pipeline 14 and the shape of a cantilever of 14' adheres. It is chosen and is equipped with pipeline 14 and 14' so that it may have the same spring constant as the almost same moment of inertia as the surroundings of oscillating axis W-w which is in the surrounding position of base material 16 mostly, and w'-w'. Pipeline. Since 14 and 14' has a free end section, and it is equipped with it in the shape of a cantilever almost in parallel and it has the almost same moment of inertia as the surroundings and the same spring constant of each oscillating axis w-w and w'-W', These pipeline]4 and 14' drives to an opposite direction mutually around these oscillating axis w-w and w'-w' with the almost same resonance pitch so that it may act as a tooth of an alignment fork. the effect which arises by Corio Rika - measurement -- the mechanism for driving the sensor unit for carrying out, pipeline 14, and 14' in the oscillating state is required because of operation of the Corio Rika mass flowmeter. Both drive mechanism and a sensor unit, preferably a speed sensor can be made into the form using the permanent magnet arranged by approaching the coil of a wire (see U.S. Pat. No. 4422338 and No. 4491025). The publicly known form for equipping with drive mechanism 18 and a series of speed sensors 20 is shown in Drawing 2. As for speed sensor 20 shown in Drawing 2, including coil 22 and horseshoe magnet 24, they serve as a form over mutual [ which coil 22 moves in the uniform magnetic field generated in the two-poles side of magnet 24 ], when the oscillating drive of pipeline 14 and 14' is carried out by drive mechanism 18. Speed sensor 20 and drive mechanism 18 are attached to pipeline 14 and 14' by equipping beam shaped object 26 and 26' with various portions, and attaching beam shaped object 26 and 26' to pipeline 14 and 14'. beam shaped object 26 and 26' -- Each oscillating axis w-w and w' - although equipped on pipeline 14 and 14' from W' at the equal distance horseshoe magnet 24 of speed sensor 20 -- coil 22 -- oscillating axis w' -- since it is closely alike to -w' and is equipped -- the center of gravity of horseshoe magnet 24 and coil 22 -- only a distance equal to oscillating axis W-W of them and W'-W' is displaced. The moment of inertia of speed sensor 20 arises according to the peculiar mass difference between displacement and horseshoe magnet 24 of this center of gravity, and coil 22, and the moment of inertia from which pipeline 14 which changes pipeline 14 and 14' dynamically into a state out of balance by this, and 14' differ arises. Drive mechanism 18 which has magnet 24, coil 22, magnet 28, and coil 30, beam shaped object 26, and the overall difference of the moment of inertia of 26' set up almost equally to the beam shaped object 26' mass which has magnets 24 and 28 the mass of beam shaped object 26 which has the mass of coils 22 and 30. It can decrease a little with this form. however -- speed -- a sensor -- 20 -- wearing -- a form -- a coil -- 22 -- and -- 30 -- attaching -- having had -- a beam shaped object -- 26 -- ' -- the center of gravity -- vibration -- an axis -- W-W -- from -- a magnet -- 24 -- and -- 28 -- having attached -- a beam shaped object -- 26 -- ' -- the center of gravity -- vibration -- an axis -- w -- ' - w -- ' -- from -- being displaced -- Listen -- it is displaced greatly. If mass is equal and the distance from the axis of vibration differs, the difference of moment of inertia is between pipeline]4 to which beam shaped object 26 was attached, and pipeline 26' to which beam shaped object 26' was attached. In order to give electric energy to coil 30 of drive mechanism 18 and to tell a signal to it from coil 22 of speed sensor 20, attaching wire 323 to pipeline 14 eventually makes pipeline 14 of a flow instrument and the dynamic balance of 14' which are shown in Drawing 2 fall. When wire 32 is attached to pipeline 14, the dynamic regime of pipeline 14 is eventually made to change regularly so that it may differ from pipeline 14'. The attachment to drive mechanism 36 by the present invention, original speed sensors 34, those pipelines 14, and 14' is shown in Drawing 1. The dynamic fault of the example in Drawing 2 is conquered by new speed sensor 34 and its wearing, the moment of inertia of of is both almost equal in pipeline 14 and 14' to axial W-W of vibration, and w'-w', and, so, the dynamic regime of pipeline 14 and 14' becomes equivalent substantially. In order to ensure the dynamic equilibrium state of the Corio Rika mass flowmeter 10 shown in Drawing 1, speed sensor 34 is, Axial w-w of vibration, and w' - axial B-B at the time of being in the almost same distance from w', and Corio Rika's acting, and position To death on B'-8' -- when equipped like, the mass of magnet 38 and coil 40 is a form which has the center of gravity of magnet 38 and the whole coil 40 almost equally. The form of speed sensor 34 is shown in Drawing 3. Speed sensor 34 of the desirable example of the present invention uses the bar magnet with which it was equipped so that the magnetic field of only one pole might intersect coil 40 instead of using a horseshoe magnet. In order to ensure intersecting only the uniform magnetic field which occurs with coil 38 substantially when pipeline 14 and 14' vibrate so that it may be needed for the speed sensor of the Corio Rika mass flowmeter of the present invention, It is preferred that can set up so that diameter d of magnet 38 may become 1/2 or less [ of Diameter of an inner side with open coil 40 ], and this ratio becomes smaller than one half. It can set up so that relative movement to coil 40 of magnet 38 which arises common by vibration of pipeline 14 and 14' and distortion which arises in Corio Rika may become 1/2 of the range X of the lengthwise direction of winding portion 41 of coil 40, or less than it. With the above-mentioned form of speed sensor 34, it can be made bar magnet 38 of speed sensor 34 and one to which beam shaped object 42 was attached at each of that end. The third bar magnet 44 of drive mechanism 36 is attached to the center of beam shaped object 42. At this time, beam shaped object 42 is attached to the first pipeline 14 so that the distance to the portion of pipeline 14 by which beam shaped object 42 is attached to pipeline 14 from axial W-W of vibration may become almost equal. It is used in order that U form Sling 48 which has base material 46 and the screw part of a semi-circle may attach beam shaped object 42 to pipeline 14. Combination of vibration of pipeline 14 around axial W-W of again vibration, and the flow of the substance which the shape where semi-circle base material 46 set beam shaped object 42 and attached magnets 38 and 44 is arranged along with axial A-A of the center of drive mechanism 36, and passes along pipeline 14 it <is reference about Drawing 1> on axis B-8 at the time of the occurring Co 1 cage power acting -- it is the shape which maintains the distance of beam shaped object 42 from pipeline 14 like. Torque which gives an error to measurement of Corio Rika who acts on pipeline 14 by combination of the moment of inertia which arises in vibration of pipeline 14 which has a thing ceases to generate beam shaped object 42 attached now and its attachment. the second beam shaped object 50 is formed for coil 40 of speed sensor 34 again of the above-mentioned form of each end attachment Being done speed sensor 34 of beam shaped object 50. The third coil 52 of drive mechanism 36 is attached to the center of beam shaped object 50. and beam shaped object 50 -- Axis [ of vibration ] w' - the distance to the portion of pipeline 14' by which beam shaped object 50 is attached to pipeline 14' from w' becomes almost equal -- as -- second pipeline 14' -- attachment To. It is used in order that U form Sling 48' which has base material of semi-circle 46' and a screw part may attach beam shaped object 50 to pipeline 14'. Base material 46' of a semi-circle should cling with beam shaped object 50. Combination with the flow of the substance in which overall shape with It was coils 40 and 52 is in the position in alignment with axial A-A of the center of drive mechanism 36, and passes along vibration of pipeline 14' around axis w'-w' of vibration, and pipeline 14' again It is the shape which is also on -B'-B' (refer to the 1st figure) at the time of arising Corio Rika acting. Torque which gives an error to measurement of Corio Rika who acts on pipeline 14' by the moment of inertia which arises from vibration of pipeline 14' about a thing ceases to produce beam shaped object 50 and its attachment now. The speed sensor arranged around the horseshoe magnet in which a two-poles side is used, a magnet -- and -- a coil -- mass -- equal -- these -- attachment -- a thing -- having -- the -- two -- a beam shaped object -- 50 -- and -- The - power -- a beam shaped object -- 42 -- both -- being related -- the center of gravity -- having generated -- Corio -- Rika -- acting -- each -- an axis -- B -eight -- and -- B -- ' - B -- ' -- a top -- it is -- if it becomes, it may be equipped according to the present invention. In the attachment to pipeline 14 and 14', the attachment to pipeline 14 and 14' is [ the distance to coil 40 and magnet 38 of speed sensor 34 with which beam shaped objects 42 and 50 were equipped from axial B-B at the time of Corio Rika who occurred acting, and B'-B' / the moment of inertia of a thing ] the resonance pitch of a thing. Although maintained to a value higher than axial W-W of vibration, and the resonance pitch around w'-w', it is chosen so that there may be nothing in a harmonic relation. In the case of the harmonic relation of these two pitch, it becomes the synchronous sampling with error which gives a zero shift, and in the case of non-harmonic's relation, it becomes a random sampling and, so, cancellation of an error signal is made over the sampling of a certain number. Other requests to coil 4andO with which it was equipped on beam shaped object 50, and 52 are that it is required to give current to coil 52 of drive mechanism 36, and to tell an electric signal to it from coil 40 of speed sensor 34. Flat flexible ribbon 54 which has many leads conventionally known as one example is used. Flat flexible ribbon 54 is supported with beam shaped object 56 so that it may be attached to beam shaped object 50 in the position of coil 52 of drive mechanism 36. Flat flexible ribbon 54 has become in the direction to the beam shaped object that the power in which flat flexible ribbon 54 pulls pipeline 14' becomes the minimum, if pipeline 14' vibrates. When making power to pull into the minimum considers it as flexible paste Bon with flat shape of the semi-circle which can vibrate freely with pipeline 14' as it is not equipped in the shape of [ from beam shaped object 56 to drive mechanism 36 ] a straight line but is shown in Drawing 5, it is made certainly. The axis of flexible paste Bon's 54 flat center by attaching flat flexible paste Bon 54 to beam shaped object 50 in the position of central coil 52, It comes to be mostly in agreement with axis B-8 (Drawing 4) of pipeline 14' on which Corio Rika acts so that contribution of the torque from flat flexible ribbon 54 may become the minimum. Using only for the Corio Rika mass flowmeter the flat flexible ribbon which has a semi-circle should not understand it as the only directions of such a flat flexible ribbon. an electric signal is transmitted between the structures which vibrate as the flexible ribbon of half-loop type is actually understood with this art -- I -- it is used also for an electric appliance structure. Other desirable examples of the flexible ribbon with flat half-loop type are shown in the Corio Rika mass flowmeter 58 in Drawing 6. in order to understand the present invention, with drive mechanism 36, it is made for the Corio Rika mass flowmeter 58 to contain two continuous pipelines 14 and 14' by which an oscillating drive is carried out, and it comes out. The portion of drive mechanism 36 is connected with pipeline 14 and 14' with beam shaped objects 42 and 50. Beam shaped objects 42 and 5o are equipped with the portion of two speed sensors 34. The braking effort to pipeline 14 and 14' and a couple of force of driving force must be made into the minimum as mentioned above. The flat flexible ribbon used in Drawing 6 is flexible circuit 60 (refer to the 7th figure) formed from synthetic insulation reinforcement layer 62 (refer to the 8th figure) which is marketed with a trademark called Kapton which piled up lead 64 of the copper rolled by carrying out glow raw on reinforcement layer 62. At this time, other synthetic insulation enveloping layers 66 can be piled up on copper lead 64. A reinforcement layer and an enveloping layer (62 and 68) are a henchman's thinness (a henchman's o, "+2cm, and about 2.5 cm) so that it may become flexibility. Therefore, copper lead 64 is very thin with 3 or 50 m of a henchman again. The Corio Rika mass flowmeter 58 can be equipped with flexible circuit 60 using publicly known external pressure sensitive adhesive 70, These adhesives are given on reinforcement layer 62 on the field of flexible circuit 60 which contacts the structure of the Corio Rika mass flowmeter 58 along with base material 72 top with which flexible circuit 60 stood it still, or beam shaped objects 42 and 50. In order to protect this before Wear @ Carrying out flexible circuit 60 publicly known, Release liner 74 is given on external pressure sensitive adhesive 70 (Drawing 10). Other means for attaching a flexible circuit to beam shaped objects 42 and 50 will adhere to beam shaped objects 42 and 50 by This or soldering provided with the layer which layer 70 of adhesives boiled instead or carried out metallic coating together with this, or the layer of a thin metal sheet. When both the layer of adhesives and the layer by which metallic coating was carried out are used, spot welding or soldering of the layer of adhesives is The end. It will be used in order to position flexible circuit 60 until it completes. Or it is a screw to the portion of flexible circuit 60 which met beam shaped objects 42 and 50, In a held part by which spot welding was carried out, a tab, or the desirable example of the present invention which the part was inserted and used other conventional attachment for beam shaped object 42 and the Corio Rika mass flowmeter 58, It is transmitted via flexible circuit 60 between pipeline 14 and 14' in which the electric signal from drive mechanism 36 and speed sensor 34 of the Corio Rika mass flowmeter 58 vibrates, and stillness base material 72 with which bottom 76 of the Corio Rika mass flowmeter 58 was equipped. It is equipped with flexible circuit 60 so that throat part 78 of flexible circuit 60 made into the interval to which lead 64 of a required number of copper has been arranged almost in parallel with mutual, and approached mutually as for convenience as possible may be arranged in the space between beam shaped object 50 and stillness base material 72 or it may be carried out under Suspended. Long Rough of throat part 78 of flexible circuit 60 is larger than the distance in a straight line between beam shaped object 5o and stillness base material 72. So, throat 8578 is making half-loop type between beam shaped object 50 and stillness base material 72 as first form (refer to the 9th figure). It will be formed in other forms, such as S form. However, not all other shape of half-loop type is preferred. In other shape of half-loop type, it must take into consideration that it is made not to shift between the forms where the forms of throat part 78 differ. For example, the portion of S form will shift between half-loop type and S form. Grinding which vibrates repetitively common by relative movement between stillness base material 72 and beam shaped object 50 is not allowed to form a sharp flection in fatigue destruction of copper lead 64, reinforcement layer 62, or its both for a sharp flection covering the full length of throat part 78 of flexible circuit 6'0 by that of From * To. When beam shaped object 50 moves to stillness base material 72 with the half-loop shape of throat part 78, rolling thru/or wavelike movement of flexible and a sex circuit arises. In order to prevent formation of the sharp flection in the field close to the position which maintains the shape of a half-loop continuously and where it is equipped with flexible circuit 60, width F and G of the portion of flexible circuit 60 carried out under Suspended is increasing from width H of throat part 78 in front of two positions where flexible circuit 60 adheres. The stiffness of flexible circuit 60 increases rather than throat part 78 by this. Maintenance of the half-loop shape in the field of throat part 78 is certainly made by increase of this stiffness, and the sharp flection near the fixing point of flexible circuit 60 is prevented. Shift to width F from width H and the shift to width G from width H are flexible circuits 60, as it should not be made rapid but is shown in Drawing 7. It should make the method of the outside gradually smooth on a target along each transverse direction edge with the field which became tapered shape. As for the field which became tapered shape to the way outside these, it is preferred that it is almost symmetrical along with center line L-L of a lengthwise direction. If there is rapid shift in the part of attachment, flexible circuit 60 will Deflection attachment in the shape of a hinge in a part, in the direction of a part, the stress concentration in a very local field will produce attachment, and lead 64 will get fatigued. However, a couple of force to pipeline 14' does not increase by increase of stiffness. The ingredient of the power which arises from increase of stiffness is turned to maintenance of the shape of the half-loop which makes the minimum prevention of sharp crookedness which gives the fold of flexible circuit 60 close to the fixed wearing thing, and a couple of force to pipeline 14'. When a braking effort or driving force is parallel to axial L-L (refer to the 7th figure) of the lengthwise direction of flexible circuit 60, a couple of force to pipeline 14' is most effectively obtained by flexible circuit 60. This will draw flexible circuit 60 on a straight line, or will push it. However, power of flexible circuit 60 is prevented from corresponding with axial L-L of the lengthwise direction for the shape of the semi-circle in the field of throat part 78. It is clear that a detailed description of the invention and the related figure can transform many to the place meant mainly in the actual condition of explanation of the Good, and it will be understood that it can make without such modification deviating from the range of the present invention. PRIORART Il Te 5 I I F5i7 F Deposit PostcodeB 15 PostcodeE International search report