Nova Patents
JPS5028515A

Method of cleaning a glass substrate by ionic bombardment in a wet active gas

Abstract

This record has no abstract on file.

Term

Term ended

Projected expiry passed 15 May 1994, 32.4 years ago.

  1. Priority
  2. Filed
  3. Published
  4. Projected expiry
  5. Today

Every citation, both ways

Citations
DocumentRelationOfficeCited during
US7928052B2Cited byUnited States of AmericaApplicant
JPS5125148ACited byJapanSearch report
EP0269977A2Cited byEuropean Patent Office (EPO)Applicant
JPS6361224ACited byJapanSearch report
US5079154ACited byUnited States of AmericaSearch report
JPS5322515ACited byJapanSearch report
US7033981B2Cited byUnited States of AmericaApplicant