Resonator, and optical scanning device, visual confirming device, vibration sensor, and vibration gyro, using this resonator

Description: TECHNICAL FIELD [Detailed description of the invention]

【0001】

[Industrial application field]

The present invention relates to a resonator, an optical scanning device using the resonator, a visual recognition device, a vibration sensor, and a vibration gyro. Specifically, the present invention relates to a resonator using resonance vibration and various devices using the resonator.

【0002】

[Conventional technology]

FIG. 20 is a perspective view showing the conventional resonator T, in which the resonator T is bent in the bending direction (θ) about the axis P._BDirection) and twisting direction (θ) centered on the axis Q_TA vibration input portion 102 is provided at one end of the elastic deformation portion 101 having a resonance vibration mode in the direction), and a movable portion 103 capable of reflecting a light beam is provided at the other end. The resonator T is formed by etching a silicon substrate, a thin metal plate, or the like. Then, the bending direction (θ) is applied to the vibration input unit 102._BDirection) resonance frequency f_BWhen a vibration with a frequency equal to_BRotate in the direction. Therefore, the light beam (not shown) incident on the movable portion 103 is θ._BIt can be scanned in the direction.

[Problems to be Solved by the Invention]

【0003】

When the optical scanning device is configured by using the resonance vibration of the resonator T in this way, the performance of the optical scanning device (for example, optical scanning angle, scanning speed, etc.) determines the resonance characteristics (resonant frequency, resonance vibration) of the resonator used. It depends greatly on the mode, vibration direction, etc.). Therefore, in the process of manufacturing the resonator, for example, silicon etching or metal etching, the shape of the resonator varies in processing, which greatly affects the resonance characteristics of the resonator and the characteristics of the optical scanning device. It was.

【0004】

Further, in order to draw a specific scanning locus, for example, a circular scanning locus in the optical scanning device, resonance vibration is simultaneously performed in two resonance vibration modes in the bending direction and the twisting direction, and the resonance frequencies of the two resonance vibration modes are performed. It was necessary to match, but the adjustment was not easy.

【0005】

The present invention has been made in view of the drawbacks of the above conventional examples, and an object of the present invention is to reduce variations in resonance characteristics of a resonator due to a processing process or the like, and to resonate such as resonance frequency and resonance mode. The purpose is to easily adjust the characteristics.

【0006】

[Means for solving problems]

The resonator of the present invention adjusts the resonance characteristics in a resonator having a vibration input portion, a movable portion, and an elastic deformation portion having at least one resonance vibration mode and connecting the vibration input portion and the movable portion. It is characterized in that it is provided with a resonance characteristic adjusting means for this purpose.

【0007】

Further, the resonator of the present invention can be provided with a plurality of resonance characteristic adjusting means having different effects of adjusting the resonance characteristics.

【0008】

For example, mass may be added to at least one of the movable portion and the elastically deformed portion. Further, the resonance characteristics can be adjusted by providing a removable mass adjusting portion on at least one of the movable portion and the elastically deforming portion, and a plurality of mass adjusting portions may be provided. At this time, it is preferable to melt the mass adjusting unit by thermal means, and it is desirable to generate heat by passing an electric current. Further, the mass adjusting unit may be broken by vibration.

【0009】

The resonance characteristics can also be adjusted by implanting ions into the elastically deformed portion to form a modified layer, or by forming a film on the surface of the elastically deformed portion. Further, the resonance characteristic can be adjusted by removing at least one part of the movable portion and the elastically deformed portion by microfabrication.

【0010】

The optical scanning device of the present invention is an optical scanning device including the resonator according to the present invention and a vibration source that vibrates the vibration input portion of the resonator to resonate the elastically deformed portion. It is characterized in that it has a mirror in a movable portion, and the light beam is scanned by reflecting the light beam by the mirror portion.

【0011】

At this time, it is preferable that the resonator has two resonance vibration modes for scanning the light beam in two orthogonal directions, and the phase difference between the two resonance vibration modes is adjusted to be π / 2.

【0012】

The visual recognition device of the present invention is characterized by including a light projecting unit that emits a light beam, an optical scanning device of the present invention, and a light receiving element that detects light intensity.

【0013】

Further, the vibration sensor of the present invention is provided with a means for detecting the displacement of the resonator of the present invention and the moving portion of the resonator, and the vibration gyro of the present invention is a means for monitoring the vibration of the resonator. It is characterized by having.

【0014】

[Action]

The resonator of the present invention can easily adjust the resonance characteristics of the resonator by the resonance characteristic adjusting means for adjusting the resonance characteristics such as the resonance frequency, the resonance vibration mode, and the vibration direction, and has a desired resonance characteristic. Can be easily produced.

【0015】

Further, if a plurality of resonance characteristic adjusting means having different effects of resonance characteristic adjusting are provided, it is possible to adjust the resonance characteristic adjusting means according to the purpose and perform various adjustments.

【0016】

For example, the moment of inertia of the resonator can be adjusted by adding mass to at least one of the movable portion and the elastically deformed portion. Further, the moment of inertia can be adjusted by deleting the removable mass adjusting portion provided on at least one of the movable portion and the elastically deforming portion, and by providing a plurality of mass adjusting portions, the mass to be deleted can be adjusted. The amount of adjustment can be controlled by the number of adjustment units.

【0017】

At this time, if the mass adjusting unit is melted by thermal means, the mass adjusting unit can be easily separated by applying heat to the mass adjusting unit or generating heat. If heat can be generated by passing an electric current, heat can be generated and the mass adjusting unit can be separated only by passing an electric current. In particular, it is an effective means when the mass adjusting unit is minute, and the minute mass adjusting portion can be easily separated.

【0018】

Further, if the mass adjusting unit is broken by vibration, the mass adjusting unit can be easily separated by applying vibration to the mass adjusting unit from the outside.

【0019】

Further, by implanting ions into the elastically deformed portion to form a modified layer, the Young's modulus of the elastically deformed portion can be changed and the resonance characteristics can be adjusted.

【0020】

Further, by forming a film on the surface of the elastically deformed portion, the Young's modulus of the elastically deformed portion can be changed and the resonance characteristics can be adjusted.

【0021】

Alternatively, the resonance characteristics can be easily and precisely adjusted by partially removing the movable portion or the elastically deformed portion by microfabrication, for example, laser machining.

【0022】

In the optical scanning apparatus of the present invention, by using the resonator of the present invention, the resonance characteristics of the optical beam can be precisely adjusted, and the scanning locus of the optical beam can be accurately controlled. At this time, if a resonator having two resonance vibration modes for scanning in two orthogonal directions is used and the phase difference between the two resonance vibration modes is adjusted to be π / 2, a circular optical scanning locus can be obtained. Obtainable. Therefore, by using this optical scanning device, it is possible to obtain an optical recognition device capable of detecting the state of the inner wall surface of the cylindrical hole.

【0023】

In addition to this, the resonator of the present invention can be used for a vibration sensor, a vibration gyro, or the like.

【0024】

[Example]

FIG. 1 is a perspective view of the resonator A, which is an embodiment of the present invention, in which the resonator A is bent in the bending direction (θ) about the axis P._BDirection) and twisting direction (θ) centered on the axis Q_TA vibration input unit 2 is provided at one end of the elastically deformed portion 1 having two resonance vibration modes (direction), and a movable portion 3 is provided at the other end. The elastic deformation part 1, the vibration input part 2, and the movable part 3 are integrally formed by etching a silicon substrate, a thin metal plate, or the like, and a mirror surface 4 is formed on the movable part 3 so that a light beam can be reflected. Has been done. A weight portion 5 for adjusting the resonance characteristics of the resonator A is added to the opposite surface of the movable portion 3 on which the mirror surface 4 is formed. The weight portion 5 can be made of, for example, metal or resin, but the material is not limited to these. Then, the bending direction (θ) from the vibration source such as the piezoelectric element to the vibration input unit 2._BDirection) resonance frequency f_BAnd twist direction (θ_TDirection) resonance frequency f_TBy applying vibrations of the same frequency as, the movable part 3 is bent in the bending direction (θ)._BDirection) and twisting direction (θ)_TResonant vibration can be performed in the resonance vibration mode (direction).

【0025】

In the resonator A, since the weight portion 5 is provided at the upper end corner of the movable portion 3, the movable portion 3 is twisted in the twisting direction (θ)._TA moment of inertia that rotates in the direction (direction) can be generated, and the movable part 3 is bent in the bending direction (θ)._BDirection) and twisting direction (θ)_TResonant vibration can be performed in two resonance vibration modes (direction).

【0026】

Here, the resonance frequency f of the resonator A can be expressed by the following equation. f_B = (K_B/ I_B) / 2π ...... f_T = (K_T/ I_T) / 2π ...... Where K_B, K_TIs the spring constant of the resonator A, I_B, I_TIs the moment of inertia. In the case of the elastically deformed portion 1 having a rectangular cross section, the bending direction (θ)_BDirection) spring constant K_BAnd twist direction (θ_TDirection) spring constant K_TAre expressed by the following equations and equations, respectively. K_B = (E × w × t³) / (4 × l) ...... K_T = (G × a × b³) / l) ...... However, E is the Young's ratio of the material used for the elastically deformed part 1, w is the width of the elastically deformed part 1, t is the thickness of the elastically deformed part 1, l is the length of the elastically deformed part 1, and G. Is the transverse elastic coefficient of the elastically deformed portion 1, a is the length of the long side of the cross section of the elastically deformed portion 1, and b is the length of the short side of the cross section of the elastically deformed portion 1. Therefore, if w t, then a = w and b = t, and if w <t, then a = t and b = w.

【0027】

Also, the moment of inertia I_B, I_TIs expressed by the following equation and equation, where dm is the minute mass of the movable part 3 and the weight part 5, and r is the distance from the rotation center (moment of inertia center axis P or Q) of the minute mass dm.

[Number 1]

<img file="JPH0875475A_D0001.tif" />[Number 2]

<img file="JPH0875475A_D0002.tif" />However, [Number 3]

<img file="JPH0875475A_D0003.tif" />Is the sum of the mass m of the movable portion 3 and the mass M of the weight portion 5.

【0028】

Therefore, in the resonator A, the twisting direction (θ) is due to the addition of the weight portion 5._TDirection) and bending direction (θ)_BDirection) moment of inertia I_B, I_TChanges in each direction, and the twisting direction (θ)_TDirection) resonance frequency f_TAnd bending direction (θ_BDirection) resonance frequency f_BCan be changed.

【0029】

Further, as can be seen from the equation, the equation and the equation, the bending direction (θ) of the resonator A is changed by changing the weight of the weight portion 5 and the number of the weight portions 5, or changing the position where the weight portion 5 is added._BDirection) and twisting direction (θ)_TDirection) moment of inertia I_B, I_TChange, and the bending direction of the resonator A (θ)_BDirection) resonance frequency f_BAnd twist direction (θ_TDirection) resonance frequency f_TCan be adjusted respectively. For example, if the weight portion 5 is added to the point A in FIG. 1, the weight portion 5 is bent in the bending direction (θ) as compared with the case where the weight portion 3 is added to other parts of the movable portion 3._BIt will be located closest to the central axis P of the direction) and the bending direction (θ)._BDirection) moment of inertia I_BThe effect on the bending direction (θ) is the smallest._BDirection) resonance frequency f_BThe change of can be suppressed to the minimum. On the other hand, the twist direction (θ)_TDirection) resonance frequency f_TCan be greatly reduced. Further, if the weight portion 5 is added to the point a, the weight portion 5 is in the twisting direction (θ)._TIt will be located on the central axis Q of the direction) and the twisting direction (θ)._TDirection) moment of inertia I_TThe effect on the twisting direction (θ) is the smallest._TDirection) resonance frequency f_TThe change in the bending direction (θ) can be suppressed to the minimum._BDirection) resonance frequency f_BCan be greatly reduced.

【0030】

In this way, the resonance frequency and amplitude of each mode of the vibrator A can be adjusted by changing the weight, number, position, and the like of the weight portions 5 added to the movable portion 3. Further, the mass of the weight portion 5 can be adjusted by scraping off the added weight portion 5 little by little, and the resonance frequency of the vibrator A can be finely adjusted.

【0031】

FIG. 2 is a perspective view showing a resonator B, which is another embodiment of the present invention, and a rectangular shape is formed on the tip side portion of the movable portion 3 of the resonator B via a connecting portion 7. The removable mass adjusting unit 6 is provided, and the mass adjusting unit 6 can be removed by cutting the connecting portion 7. The mass adjusting portion 6 and the connecting portion 7 can be formed integrally with the movable portion 3, and the material is not limited to the same material as the movable portion 3, and is not particularly limited to metal, resin, or the like.

【0032】

The connection portion 7 is manufactured in a narrow shape as shown in FIG. 2, and the resonance frequency f of the elastic deformation portion 1 f._BAnd f_TResonance frequency f different from_MHas a resonance vibration mode of. The resonance frequency f at this connection 7._MWhen a vibration of the same frequency as is applied from the vibration input unit 2, the connection unit 7 has a resonance frequency f._MResonates at a frequency equal to. At this time, if the magnitude of the applied vibration is adjusted and the vibration is applied so that the resonance vibration of the connecting portion 7 greatly exceeds the spring limit of the connecting portion 7, elastic failure occurs in the connecting portion 7. Therefore, the mass adjusting unit 6 is removed from the moving unit 3, and the resonance frequency f of the resonator B is removed._BAnd f_TResonance characteristics such as can be adjusted.

【0033】

Further, if the connecting portion 7 is made of a material that is easily soluble in heat, for example, a resin or a low melting point metal, the mass adjusting portion 6 can be easily cut off by applying heat. In particular, if the connecting portion 7 is made of a conductive resin or metal that generates a large amount of heat generated by an electric current, as in the resonator C shown in FIG. 3, the electrodes 8 provided in the movable portion 3 and the mass adjusting portion 6, respectively. By passing a current i between the 8 and 8, a large amount of heat is generated in the connecting portion 7, and the connecting portion 7 can be easily melted to remove the mass adjusting portion 6. In this way, if the connection portion 7 is blown by generating heat by passing an electric current, the mass adjusting portion 6 can be easily deleted even if the mass adjusting portion 6 is formed small, and the small mass adjusting portion 6 can be easily removed. The part 6 can be provided to slightly adjust the resonance frequency.

【0034】

Further, the shape of the mass adjusting unit 6 that can be deleted is not particularly limited, and may be formed in a substantially T shape as in the resonator D shown in FIG. 4, for example, if the shape of the mass adjusting unit 6 is different. The magnitude of the resonance frequency to be adjusted can be freely changed. Further, although not shown, the mass adjusting portion 6 may be formed in the elastically deformed portion 1.

【0035】

FIG. 5 is a perspective view showing the resonator E, which is still another embodiment of the present invention (thickness is omitted. The same applies to FIGS. 6 and 8), and the mass adjusting unit 6 is long. It is formed by combining a plurality of adjusting members 6a having different characteristics, and has a structure that can be deleted for each adjusting member 6a. In such a mass adjusting unit 6, the adjustment amount of the resonance frequency can be controlled by gradually changing the mass to be adjusted and the like by changing the position and the number of the adjusting members 6a to be deleted. Therefore, even if a variation occurs during processing of the resonator, the variation in the resonance frequency can be absorbed by the adjusting member 6a, and a resonator having a stable resonance frequency can be manufactured.

【0036】

FIG. 6 is a perspective view showing a resonator F, which is still another embodiment of the present invention. In the mass adjusting unit 6, a plurality of adjusting members 6a having the same length are formed in a comb shape parallel to the axis Q. It is formed. By sequentially deleting the adjusting member 6a, the bending direction (θ) is shown in FIG._BDirection) resonance frequency f_BTwisting direction (θ) with almost no change in_TDirection) resonance frequency f_TCan be gradually increased. Further, by adding the weight portion 5 to the movable portion 3, the weight portion 5 adjusts the rough resonance characteristics, and then the adjusting member 6a adjusts the fine resonance characteristics to adjust the resonance characteristics over a wide range. It also becomes possible.

【0037】

FIG. 8 shows a perspective view of the resonator G, which is still another embodiment of the present invention. For the resonator G, the twisting direction (θ)_TA mass adjusting portion 6 composed of a plurality of symmetrical adjusting members 6a is provided on the axis Q of the direction), and a mass adjusting portion 6 composed of a plurality of vertically symmetrical adjusting members 6a is also provided on the side portion of the movable portion 3. Part 6 is provided. In this resonator G, the twisting direction (θ) is obtained by deleting the pair of adjusting members 6a that are symmetrical on the axis Q._TDirection) resonance frequency f_TBending direction (θ) without significantly affecting_BDirection) resonance frequency f_BCan be changed. The bending direction (θ) can also be obtained by removing the adjusting member 6a on the side of the movable portion 3._BDirection) resonance frequency f_BTwisting direction (θ) without significantly changing_TDirection) resonance frequency f_TCan be changed. By providing the plurality of mass adjusting portions 6 in this way, the bending direction (θ)_BDirection) or twisting direction (θ)_TDirection) resonance frequency f_BAnd f_TCan be changed, various resonance characteristics can be adjusted, and a resonator having the desired resonance characteristics can be easily manufactured.

【0038】

FIG. 9 is a perspective view in which the resonator H, which is still another embodiment of the present invention, is partially broken. The resonator H is made of a semiconductor substrate such as a silicon substrate, and a modified layer 9 in which ions such as boron and phosphorus are injected is provided on the upper and lower surfaces of the elastically deformed portion 1. When ions such as boron and phosphorus are injected into the semiconductor substrate in this way, the Young's modulus E (or transverse elastic modulus G) of the semiconductor substrate changes, and the resonance characteristics of the resonator H can be changed. Further, since the Young's modulus E (or the transverse elastic modulus G) of the semiconductor substrate changes depending on the type of ion to be injected and the amount of injection, the resonator H having a desired resonance characteristic can be easily obtained.

【0039】

Further, in the resonator I shown in FIG. 10, a thin film 10 made of a material having a Young's modulus E different from that of the material of the resonator I, for example, gold, platinum, polysilicon, etc., is formed on the upper and lower surfaces thereof by sputtering or the like. .. If thin films 10 having different Young's moduli are formed on the surface of the resonator I, at least the elastically deformed portion 1, the Young's modulus E (or the transverse elastic modulus G) of the elastically deformed portion 1 as a whole changes, and the resonator I The resonance characteristics of can be changed.

【0040】

FIG. 11 is a perspective view in which the resonator J, which is another embodiment of the present invention, is partially broken, and the movable portion 3 of the resonator J is notched by fine processing such as laser processing. A hole 12 and the like are provided, and a part of the movable part 3 is deleted. By deleting a part of the movable part 3 in this way, the bending direction (θ)_BDirection) or twisting direction (θ)_TThe moment of inertia I in the direction) changes, and the resonance frequency f of the resonator J_BAnd f_TCan be changed respectively. Further, the surface of the elastically deformed portion 1 is machined to change the width w (or b) and the thickness t (or a) of the elastically deformed portion 1, or a notch 14 is provided in the connecting portion 13 with the movable portion 3. By changing the length l of the elastically deformed part 1, the spring constant K of the elastically deformed part 1_BAnd K_TChanges and the bending direction (θ)_BDirection) and twisting direction (θ)_TDirection) resonance frequency f_BAnd f_TCan also be changed.

【0041】

FIG. 12 is a configuration diagram showing the optical scanning device K according to the present invention, and the vibration input unit 22 of the resonator 21 of the present invention is a small shape that generates minute vibrations such as a piezoelectric resonator and a magnetostrictive resonator. Vibration source 23 is provided. Further, a mirror portion 25 is provided on the movable portion of the resonator 21 so that light emitted from a light source (not shown) can be reflected. Further, the resonator 21 is provided with a mass adjusting portion 27 in the movable portion 24, and is provided in a bending direction (θ)._BDirection) resonance frequency f_BAnd twist direction (θ_TDirection) resonance frequency f_TIs adjusted so that the following predetermined relationships can be obtained.

【0042】

Bending direction (θ_BDirection) resonance frequency f_BAnd twist direction (θ_TDirection) resonance frequency f_TBy adjusting the frequencies equally_B= f_TBy applying the sinusoidal vibration of the above to the vibration input unit 22, vibrations in two resonance vibration modes can be obtained at the same time. However, in this method, the resonator 21 is in two directions (θ)._BDirection and θ_TSince it vibrates in the same phase in the direction), only the vibration in the direction corresponding to the vector sum of the two directions can be obtained.

【0043】

Therefore, in this optical scanning device K, as shown in FIG. 13A, the bending direction (θB direction) and the twisting direction (θ)_TThe two resonance frequency characteristics of (direction) are adjusted to intersect, and a certain frequency f where the intersection position, that is, the optical scanning angle is equal._CIn the bending direction (θ_BVibration and twisting direction (θ)_TFor example, as shown in FIG. 13 (b), the twist direction (θ) so that the phase difference from the vibration in the direction) is 1 / 2π._TPhase delay in direction) is 1 / 4π, bending direction (θ)_BTwo resonance frequencies f so that the phase lag in the direction) is 3 / 4π._BAnd f_TAre adjusted respectively. Then, the bending direction (θ)_BDirection) and twisting direction (θ)_TFrequency f so that the vibration amplitudes in the direction) are equal._cWhen vibration of the same frequency as is applied from the vibration source 23, the bending direction (θ)_BVibration phase and twist direction (θ)_TThe phase of the vibration in the direction) vibrates with a phase difference of 1 / 2π, and the light beam γ emitted from the light source is reflected by the mirror unit 25 and scanned in a circular shape as shown in FIG. Therefore, by using this optical scanning device K, the light beam γ can be scanned in a circular shape along the inner wall of the cylindrical object 26.

【0044】

FIG. 14 is a block diagram showing an embodiment of the visual recognition device L of the present invention. The visual recognition device L is composed of the optical scanning device 31 of the present invention capable of scanning the light beam γ in a circular shape like the optical scanning device K, the light emitting element 32 such as a semiconductor laser element, and the optical element 33 such as a lens. A light receiving element 34 such as a light emitting unit, a light emitting element 32, a drive circuit 35 for driving a light emitting element 32 to emit a light beam γ, an oscillator 36 for driving a resonator of an optical scanning device 31, and a light receiving signal from the light receiving element 34. It is composed of a signal processing circuit 37 and a drive circuit 35 for electrically processing the light, and a control unit 38 for controlling the oscillator 36 and the signal processing circuit 37. In the visual recognition device L, the light beam γ emitted from the light emitting element 32 is directed by the light scanning device 31 toward the detection region of the inner wall of the cylindrical object 39 (for example, an object such as 26 in FIG. 12). Is reflected and scanned in a circular shape within the detection area. The scanned light beam γ is scattered on the inner wall of the object 39, and the scattered light beam γ is detected by the light receiving element 34. Then, the state of the inner wall of the object 39 in the detection region can be grasped by signal processing and signal analysis of the light receiving signal output from the light receiving element 34 that has received the light beam γ by the signal processing circuit 37, and the state of the inner wall of the inner wall can be grasped. It is possible to inspect the shape, adhesion of foreign matter, damage, etc.

【0045】

FIG. 15 shows another example of the visual recognition device M of the present invention, which includes an amplifier 40 capable of increasing or decreasing the drive signal output from the oscillator 36 that drives the resonator of the optical scanning device 31. Then, when the drive signal is increased or decreased by the amplifier 40 to change the vibration amplitude of the optical scanning device 31, the scanning angle of the optical beam γ becomes θ as shown in FIG.₁, Θ₂, Θ₃And the scanning position d along the central axis R of the cylindrical object 39₁, D₂, D₃The scanning position can be changed sequentially, and the inner wall of the object 39 can be scanned three-dimensionally. By using the optical scanning device 31 that can scan the light beam γ in a circular shape like the visual recognition devices L and M, it is possible to easily inspect the inner wall of a cylindrical object, which was difficult in the past. it can.

【0046】

Further, FIG. 17 shows a schematic configuration diagram of the vibration sensor N of the present invention. The vibration sensor N is composed of the resonator 41 of the present invention and an optical displacement sensor 43 that detects the displacement of the movable portion 42 of the resonator 41. The vibration input portion of the resonator 41 is fixed to the object 44, and when vibration of a frequency equal to the resonance frequency of the resonator 41 is applied from the object 44, the movable portion 42 rotates at a constant angle. Therefore, the vibration applied to the object 44 can be detected by detecting the rotation state of the movable portion 42 by the displacement sensor 43 and analyzing the detected detection signal by the signal processing circuit 45. In particular, in the case of the resonator 41 provided with the mass adjusting unit 6 composed of a plurality of adjusting members 6a, the resonance frequency can be changed little by little by removing the adjusting member 6a, so that the resonance frequency can be changed according to various frequencies. It is desirable because the vibration sensor N can be easily manufactured. Further, although not shown, the vibration of the resonator 41 is vibrated by detecting the change in the value of the capacitance between the movable electrode formed on the movable portion 42 of the resonator 41 and the fixed electrode arranged opposite to the movable electrode. May be detected to capture the vibration of the object 44.

【0047】

FIG. 18 is a block diagram of the vibration gyro S of the present invention, in which the vibration gyro S drives the resonator 51 of the present invention, the vibration source 52 that gives vibration to the resonator 51, and the vibration source 51. A detection monitor 54 that detects the moving state of a moving part of a resonator 51 such as an oscillator 53, for example, an optical displacement sensor, a signal processing circuit 55 that electrically processes a detection signal from the detection monitor 54, an oscillator 53, and a signal processing circuit. It is composed of a control unit 56 that controls 55. In this vibration gyro S, the vibration source 52 is driven by the oscillator 53, and vibration having a frequency equal to the resonance frequency of the resonator 51 is applied from the vibration source 52 to the resonator 51. Further, the vibration of the moving part of the resonator 51 is detected by the detection monitor 54. As shown in FIG. 19, when the resonator 51 is driven by the excitation source 52, for example, at the resonance frequency f in the bending direction (Y-axis direction), the electrical signal from the detection monitor 54 is transmitted by the signal processing circuit 55. It is detected as a sine wave with frequency f. Then, when a rotational motion around the Z axis is applied to the resonator 51, a Coriolis force is generated in the resonator 51 in the X-axis direction, the resonance vibration in the Y-axis direction is hindered, and a sine wave having a frequency f f. The detection signal is disturbed. Therefore, by detecting the disturbance of the detection signal by the signal processing circuit 55, it is possible to know the direction of the motion applied to the vibration gyro S and the magnitude of the motion, for example, the magnitude of the angular acceleration due to the rotational motion. Of course, the detection monitor 54 is not limited to the optical displacement sensor, but the movable part can be changed by changing the capacitance between the movable electrode provided in the movable part of the resonator 51 and the fixed electrode arranged opposite to the movable electrode. The movable state may be grasped, or the movable state of the movable portion of the resonator 51 may be grasped by the piezoelectric method, and the grasped movable state may be detected and analyzed by the signal processing circuit 55.

【0048】

In a visual recognition device or a vibration gyro using the resonator of the present invention, the resonance characteristics of the resonator can be easily adjusted, so that the drive circuit and drive mechanism required to drive the resonator can be simplified. , These devices can be miniaturized and the cost can be kept low.

【0049】

[Effect of the invention]

Since the resonator of the present invention has one or a plurality of resonance characteristic adjusting means, various adjustments can be made by adjusting the resonance characteristic adjusting means according to the purpose.

【0050】

For example, a mass can be added, a removable mass adjustment part is provided to adjust the moment of inertia, ions are injected into the elastically deformed part, or a film is provided on the surface of the elastically deformed part to adjust the Young's modulus of the elastically deformed part. Alternatively, the resonance characteristics can be adjusted by finely processing the movable portion and the elastically deformed portion to remove a part of the movable portion and the elastically deformed portion.

【0051】

In the optical scanning apparatus using the resonator of the present invention, the resonance characteristics of the optical beam can be precisely adjusted, and the scanning locus of the optical beam can be obtained. Moreover, if the light beams are scanned in two directions orthogonal to each other with a phase difference of π / 2, a circular light scanning locus can be easily obtained. Can detect the state of the inner wall surface of the cylindrical hole.

【0052】

Further, in the vibration sensor and the vibration gyro using the resonator of the present invention, the vibration and the rotation of a specific frequency can be detected with high accuracy.

[Simple explanation of drawings]

[Figure 1]

It is a perspective view which shows the resonator which is one Example of this invention.

[Figure 2]

It is a perspective view which shows the resonator which is another Example of this invention.

[Fig. 3]

It is an enlarged perspective view which partially broke the resonator which is still another Example of this invention.

[Fig. 4]

It is a partially cutaway perspective view which shows the resonator which is still another Example of this invention.

[Fig. 5]

It is a perspective view which shows the resonator which is still another Example of this invention.

[Fig. 6]

It is a perspective view which shows the resonator which is still another Example of this invention.

[Fig. 7]

It is a figure which shows the relationship between the number of adjustment members to be deleted in the same resonator and the resonance frequency.

[Fig. 8]

It is a perspective view which shows the resonator which is still another Example of this invention.

[Fig. 9]

It is a partially cutaway perspective view which shows the resonator which is still another Example of this invention.

[Fig. 10]

It is a partially cutaway perspective view which shows the resonator which is still another Example of this invention.

[Fig. 11]

It is a partially cutaway perspective view which shows the resonator which is still another Example of this invention.

[Fig. 12]

It is a block diagram which shows the optical scanning apparatus of this invention.

[Fig. 13]

(a) is a diagram showing the resonance frequency characteristics of the bending mode and the twisting mode of the resonator of the optical scanning device of the same as above, and (b) is the phase of the vibration of the bending mode and the vibration of the twisting mode.

[Fig. 14]

It is a block diagram which shows the visual recognition apparatus of this invention.

[Fig. 15]

It is a block diagram which shows another example of the visual recognition apparatus of this invention.

[Fig. 16]

It is explanatory drawing of the optical scanning situation in the same visual recognition apparatus.

[Fig. 17]

It is a schematic block diagram which shows the vibration sensor of this invention.

[Fig. 18]

It is a block diagram which shows the vibration gyro of this invention.

[Fig. 19]

It is explanatory drawing which shows the movable state of the resonator in the vibration gyro of the same above.

[Fig. 20]

It is a perspective view which shows the resonator which is a conventional example.

[Explanation of symbols]

1 Elastic deformation part 3 Moving parts 5 Weight part 6 Deleteable mass adjustment unit 6a Adjusting member 7 Joint 10 thin film 21,41,51 Resonator according to the present invention