Moving device and its producing method and positioning device and table device using them

Description: TECHNICAL FIELD [Detailed description of the invention]

【0001】

[Industrial application field]

The present invention includes a movable device including a movable portion that can be displaced in a predetermined direction and a fixed portion that supports the movable portion, a method for manufacturing the movable device, and a positioning device for driving the movable portion of the movable device in a predetermined direction. The present invention relates to an inspection device such as a mask or a reticle used for manufacturing a semiconductor device, an exposure device, or a table device used for a microscope or various machine tools that require minute positioning.

【0002】

[Conventional technology]

Here, a known technique of a table device used for an inspection device such as a mask or a reticle used for manufacturing a semiconductor device, an exposure device, or the like will be mainly described.

【0003】

A semiconductor device such as an LSI is generally manufactured by transferring a pattern drawn on a mask, a reticle, or the like to a silicon wafer or the like, and creating the pattern by using a process such as etching.

【0004】

Substrates such as masks, reticles, and wafers used at this time have several sizes such as 5 inches, 6 inches, and 7 inches, and their shapes are also circular and square. Therefore, there are suitable holding methods for holding each type of substrate, and it is difficult to realize a holding portion common to all types of substrates.

【0005】

Therefore, in many exposure devices and the like, the shapes and sizes of the corresponding substrates are limited. On the other hand, in a device for inspecting defects of a substrate, the target substrate is a wide variety and a small amount. Therefore, considering the utilization efficiency of the inspection device, limiting the corresponding substrate reduces productivity. It is not preferable. Therefore, it is desirable that the inspection device has a table on the stage that can hold a plurality of types of substrates in common.

【0006】

However, when trying to configure a common table on the stage, the structure becomes complicated and the entire device becomes large. Further, when the structure becomes complicated, it becomes difficult to maintain the accuracy, so that there is a problem that a large cost increase is required to maintain the accuracy.

【0007】

Therefore, several types of tables suitable for each shape are prepared for multiple types of boards, and each time the type of board changes, it is replaced with a dedicated table to respond to changes in the board type. became. As a result, it is possible to handle a plurality of types of boards without complicating the table on the stage, and it is easy to maintain the position accuracy of the boards.

【0008】

On the other hand, in a substrate inspection device or the like, it is necessary to substantially align the focal position of the optical system with the inspection surface of the substrate to be inspected. However, the depth of focus is shallow due to the high inspection capability of the board inspection device, and the distance between the board and the optical system must be measured to keep it in focus because of the deflection and dimensional accuracy of the board. It is necessary to perform so-called autofocus that displaces the substrate side or the optical system side so that the distance is constant.

【0009】

Therefore, specifically, the entire objective lens system, which is an optical system, is driven by using an actuator such as a piezoelectric element, and is automatically displaced in the optical axis direction according to the output of the substrate position detection device or the focus signal of the optical system. One method is to focus, and the other is to fix the optical system, displace the stage on which the table is placed in the optical axis direction using a piezoelectric element, etc., and perform autofocus according to the focus signal. .. However, at present, due to the complexity of the mechanism and the like, it is common for the optical system to perform autofocus when dealing with a plurality of substrate types.

【0010】

However, in recent years, as the degree of integration of LSIs has increased significantly, the patterns on the substrate have become finer, and even higher inspection resolution has been required. In order to improve the inspection resolution, it is conceivable to increase the numerical aperture of the lens of the optical system or shorten the wavelength of the light used. However, shortening the wavelength of light has many problems in terms of the material of glass and the like, and generally, the resolution is often improved by increasing the numerical aperture. However, when the numerical aperture is increased, the depth of focus becomes shallower. Therefore, it becomes sensitive to the deflection on the substrate and the minute displacement of the stage, and it is necessary to improve the displacement resolution and response characteristics of the autofocus mechanism. However, when the entire objective lens system of the optical system is displaced as in the conventional case, the weight of the movable portion is large and it is difficult to improve the response characteristics. Further, as the numerical aperture increases, the weight of the lens increases, so that further improvement in response characteristics cannot be expected.

【0011】

Therefore, it is necessary to provide a minute displacement mechanism on the substrate side to enable autofocus. When the substrate side is displaced, it is conceivable to incorporate a displacement mechanism into the stage on which the table is mounted to displace the entire table. However, even with this, it is still difficult to reduce the weight of the moving part, and there is a problem that the response characteristics of the autofocus mechanism cannot be improved and the stage becomes larger.

【0012】

From the above requirements, it is desired to provide an apparatus in which the table itself is provided with a minute displacement mechanism.

【0013】

The above-mentioned problems can be similarly applied to fields such as microscopes and various machine tools that require minute displacement of samples having different sizes or shapes in a predetermined direction.

【0014】

[Problems to be Solved by the Invention]

As described above, in a table device corresponding to a plurality of types of samples, when a minute displacement such as autofocus is performed on the sample side, it is movable if the stage on which the sample holding table is mounted is displaced. Since the weight of the portion cannot be reduced, it is difficult to improve the response characteristics of the displacement, and there is a problem that the entire stage becomes large.

【0015】

Therefore, in the present invention, it is possible to improve the response characteristics of displacement in autofocus or the like by reducing the movable weight at the time of minute displacement, and at the same time, a movable device having a compact minute displacement mechanism and a method for manufacturing the same. Another object of the present invention is to provide a positioning device for driving the movable device and a table device using the positioning device.

【0016】

[Means for solving problems]

In order to achieve the above object, the present invention provides the means as shown below.

【0017】

First, a support mechanism consisting of a movable portion that can be displaced in a predetermined direction and a thin-walled portion that is provided so as to elastically support the movable portion in a direction that substantially coincides with the displacement direction of the movable portion. A movable device including a fixed portion that supports the movable portion via the support mechanism, the movable portion, the support mechanism, and the fixed portion are integrally molded from a single member, and the above-mentioned movable device. The movable device is characterized by having a damping member in which a gel-like body in which solid fine particles are dispersed is filled in a gap where the movable portion and the fixed portion face each other and cured.

【0018】

Second, a thin-walled portion forming step in which a recess is provided so as to form a thin-walled portion facing each other in the single member, and a movable portion capable of displace the single member in a direction substantially matching the direction in which the thin-walled portion faces. A method for manufacturing the movable device, which comprises a separation step of separating the movable portion into a fixed portion elastically supported by the thin-walled portion.

【0019】

Thirdly, the sample holding portion that can be displaced in a predetermined direction while holding the sample and the sample holding portion are provided so as to be opposed to each other in a direction substantially coincide with the displacement direction of the sample holding portion in order to elastically support the sample holding portion. A table device comprising a support mechanism composed of a thin-walled portion, a fixing portion for supporting the sample holding portion via the support mechanism, and a driving means for displace the sample holding portion in a predetermined direction. The present invention is characterized by having a damping member formed by filling a gap in which the sample holding portion and the fixing portion supporting the sample holding portion face each other with a gel-like body in which solid fine particles are dispersed and curing the sample. Table device.

【0020】

Fourth, a movable member that can be displaced in a predetermined direction, at least a pair of displacement generating members that can be displaced in a direction substantially perpendicular to the displacement direction of the movable member, and the displacement of the displacement generating member are transmitted to the movable member. The positioning device and the lever member are characterized in that they are composed of at least a pair of lever members, a movable member, and a fixing member that integrally supports the movable member and the lever member. The positioning device, characterized in that the displacement amount of the displacement generating means is enlarged or reduced and transmitted to the movable member.

【0021】

Fifth, a movable means consisting of a sample holding portion for holding a sample, a movable portion for holding the sample holding portion in a displaceable manner in a predetermined direction, and a fixed portion for elastically supporting the movable portion via a support mechanism. The movable member of the positioning device according to claim 6 is connected to the movable portion of the movable means, and the fixing member of the positioning device is connected to the fixed portion of the movable means. A plurality of table devices, a sample holding portion for holding a sample, a movable portion for holding the sample holding portion in a predetermined direction and a fixed portion for elastically supporting the movable portion via a support mechanism. A table formed by connecting the movable member of the positioning device according to claim 6 to the movable portion and connecting the fixing member of the positioning device to each of the fixed portions of the movable means and each of the plurality of movable means. A table device which is a device and has a control means capable of independently adjusting the displacement amount of the movable member of the positioning device.

【0022】

[Action]

According to the movable device according to the present invention, a movable portion that can be displaced in a predetermined direction, a support mechanism that elastically supports the movable portion, and a fixed portion that supports the movable portion via the support mechanism are simply provided. Since it is integrally molded from one member, it is possible to construct a movable device that does not require assembly by mechanical fastening and can easily maintain minute displacements of the movable portion with high accuracy. Further, since there are very few resonance points, hysteresiss, rattlings, etc. of the mechanical system derived from the mechanical fastening portion of the support mechanism or the like, there is almost no non-linearity of the mechanical system, and the response characteristics of the displacement of the moving portion are improved.

【0023】

Further, by using the movable device according to the present invention, a table device having a minute displacement mechanism can be configured, and the weight of the movable part including the sample can be significantly reduced as compared with the case where the displacement mechanism is provided on the stage. Displacement response characteristics are significantly improved. Further, since the size of the displacement mechanism can be made smaller than that in the case where the displacement mechanism is provided on the stage, a compact table device can be obtained.

【0024】

Further, in the movable device according to the present invention, the gel-like body is formed when the movable portion is displaced by filling and curing the gel-like body in which the solid fine particles are dispersed in the gap where the movable portion and the fixed portion face each other. By deforming and the solid fine particles contained therein come into contact with each other and rub against each other, the vibrational energy of the moving part is attenuated, and as a result, sufficient damping is given to the movement of the moving part. Since energy is absorbed by the friction of a solid, the amount of energy absorbed increases as the speed of friction increases. That is, the higher the frequency of motion, the greater the damping effect, so the damping effect becomes smaller for low-frequency motion with a large displacement. Therefore, the peak of the mechanical resonance point in the high frequency region can be significantly reduced while suppressing the overall stroke reduction.

【0025】

Further, in a table device configured by using a movable device filled with a gel-like body in which solid fine particles are dispersed and cured, the resonance frequency constant is also measured when the position of the movable part is controlled by a closed loop. -Since the time constant of the integrator to be put in the control system can be made small because the key is small, the decrease in gain in the high frequency range is small. Therefore, the response frequency of the displacement in the autophocus or the like can be increased.

【0026】

On the other hand, according to the positioning device according to the present invention, since the displacement direction of the displacement generating means and the predetermined displacement direction of the movable member are different, positioning is performed even when the length of the displacement generating means is increased in order to realize a large displacement. The dimensions of the device in the predetermined displacement direction are not too large. Therefore, it is possible to make a compact positioning device in a predetermined displacement direction of the movable member.

【0027】

Further, by providing at least a pair of displacement generating means and lever member, it is possible to increase or decrease the displacement amount of the displacement generating means when transmitting the displacement force of the displacement generating means to the movable member, and to push. Pull drive can be performed. As a result, the responsiveness of the displacement can be improved, and at the same time, the non-linearity of the displacement can be improved.

【0028】

Further, by using the positioning device according to the present invention, it is possible to construct a table device capable of high-speed response and improved non-linearity of displacement. Further, in a table device using a plurality of positioning devices, by adopting a control method that independently changes the displacement amount of the movable portion of each positioning device, not only the displacement portion of the table device in a predetermined direction but also the displacement in a predetermined direction is adopted. The posture can also be controlled.

【0029】

[Example]

Examples of the present invention will be described in detail with reference to the drawings.

【0030】

FIG. 1 shows an outline of an example in which the movable device and the table device according to the present invention are applied to an optical device for inspecting a substrate such as a mask or a reticle used when manufacturing a semiconductor device such as an LSI. It is an exploded perspective view.

【0031】

In this embodiment, the substrate holding portion 3 that holds the substrate 5 in a displaceable manner in the direction 17 (Z direction) of the optical axis 9 of the optical system 10 and the substrate holding portion 3 are elastically supported so as to be displaceable. Positioning for displacement of the substrate holding portion 3 in the Z direction on a movable device 2 including a supporting mechanism 11 provided for the purpose of carrying the substrate and a fixing portion 15 for supporting the substrate holding portion 3 via the supporting mechanism 11. A table device connected to the devices 4a and 4b is mounted on the stage 1 in a detachable and replaceable state via a vacuum chuck 6. Here, the stage 1 is illustrated so that it can be two-dimensionally moved in the direction 18 (X direction) and the direction 19 (Y direction) perpendicular to the optical axis 9 of the optical system 10 while mounting the table device. The guide and drive system are configured so that the inspection surface of the substrate 5 can be inspected all over. Further, when a transmissive type optical system 10 is used, a middle hole 7 is provided in the stage 1. In addition to the vacuum chuck 6, a mechanical clamp mechanism, an electromagnet, or the like may be used to connect the table device to the stage 1. Further, as the position detecting device, in addition to the optical focus sensors 13a and 13b, a capacitance type gap sensor or the like may be used.

【0032】

Positioning of the substrate 5 in the Z direction is performed via the positioning device 4a via the control device 51 based on the signals of the optical focus sensors 13a and 13b that observe the focus state of the optical system 10 with respect to the substrate 5 and detect the position. , 4b is driven and controlled. That is, the control device 51 detects the observation surface position of the substrate 5 by the focus sensors 13a and 13b, and based on the output signal 52, sets a drive command value that substantially matches the observation surface of the substrate 5 with the focal position of the optical system 10. The actuators 12a and 12b of the positioning devices 4a and 4b are driven via the lead wires 53a and 53b to displace the substrate holding portion 3 of the movable device 2 in the Z direction. Here, positioning devices 4a and 4b that displace the substrate holding portion 3 are attached to both side surfaces of the movable device 2. The actuators 12a and 12b of the positioning devices 4a and 4b are connected to the substrate holding portion 3 which is a movable portion of the movable device 2. Therefore, the two actuators 12a and 12b are displaced in synchronization with the drive command of the control device 51, so that the substrate 5 held on the substrate holding portion 3 is kept substantially perpendicular to the optical axis 9. Displace in the Z direction.

【0033】

As for the above-mentioned movable device 2, a plurality of types dedicated to each board 5 are prepared so as to be compatible with a plurality of types of boards 5, and when the type of the board 5 to be inspected is changed, this movable device 2 is used. You may try to replace 2 with a suitable one.

【0034】

The above description has been given mainly by taking as an example an optical device such as a substrate inspection device, but the same applies to a microscope, an exposure device, a drawing device, and the like. Further, although the optical system here is premised on a general optical system using a glass lens or the like, it can also be applied to an electron optical system using an electronic lens or the like. Further, it can be similarly applied to an X-ray optical system that does not require imaging. The same applies to the following description, and it should be noted that the table device of the present invention is not limited by the type of the optical system.

【0035】

FIG. 2 is a perspective view showing details of the movable device according to the present invention shown in FIG. Here, FIG. 2 shows a state in which the movable device 2 is fixed to the stage 1. The substrate 5 is fixed to the substrate holding portion 3 (hatched portion) by a plurality of substrate fixing devices 16 such as a vacuum chuck. The substrate holding portion 3 is elastically supported by the fixing portion 15 of the movable device 2 by the support mechanism 11. The fixing portion 15 is fixed on the stage 1 at a connecting portion (not shown) provided on the stage 1. The support mechanism 11 has a parallel link structure in which the substrate holding portion 3 is displaced in a specific direction 17 without changing its posture. With such a structure, the substrate 5 can be displaced in the direction 17 with respect to the stage 1 to hold the observation surface of the substrate 5 within the depth of focus of an optical system (not shown). There is. Here, the fixing portion 15, the substrate holding portion 3, and the supporting mechanism 11 of the movable device 2 are integrally molded from a single member.

【0036】

The support mechanism 11 is composed of a parallel link mechanism including links 21, 22 and elastic hinges 23, 24, 25, and 26 by providing a recess 20 on the side surface of the movable device 2. Since this parallel link mechanism is connected to the substrate holding portion 3 and the fixing portion 15 without using the mechanical fastening means, hysteresis does not occur although it is derived from the mechanical fastening means. Moreover, since the movable device 2 and the like are composed of a single member, there is no need to assemble. Therefore, since the accuracy at the time of manufacturing is maintained without being lowered, the manufacturing accuracy and the positioning accuracy of the movable device 2 and the like can be easily kept high.

【0037】

FIG. 3 is a perspective view showing details of a modified example of the support mechanism of the movable device according to the present invention shown in FIG. The support mechanism 30 is a parallel leaf spring mechanism composed of thin plate-shaped leaf springs 31 and 32. In this case as well, the support mechanism 30 has an integral structure with the substrate holding portion 3 and the fixing portion 15 of the movable device. Other structures, operations, features, etc. are the same as those of the movable device shown in FIG. 2 described above.

【0038】

FIG. 4 is a plan view showing the movable devices shown in FIGS. 2 and 3. Here, a method of manufacturing the movable device 2 will be described. First, the inner hole 14 for mounting the substrate 5 is machined by wire-cut electric discharge machining. In this embodiment, the substrate 5 is assumed to be square, but even if the substrate 5 is circular, it can be easily handled by making the inner hole 14 of the substrate holding portion 3 circular. Further, when the sample is not in the form of a substrate and only needs to be placed on the substrate holding portion 3, it is not necessary to provide an intermediate hole 14, and the substrate holding portion 3 can be used as a sample holding base. good. Next, in order to form a thin-walled portion constituting the support mechanism 41 such as the parallel link mechanism and the leaf spring mechanism, the recesses 20 and 33 as shown in FIGS. 2 and 3 are machined by cutting. Finally, the movable device 2 is manufactured by processing the groove 45 that separates the substrate holding portion 3 and the fixing portion 15 by wire-cut electric discharge machining. By the above method, the movable device 2 including the substrate holding portion 3, the support mechanism 41, and the fixing portion 15 is integrally molded from a single member.

【0039】

FIG. 5 is an exploded perspective view showing the details of the table device according to the present invention shown in FIG. The positioning device 4a is attached to the movable device 2 by connecting the connecting portions 83a near both ends thereof and the side surface 82a of one of the fixing portions 15 of the movable device 2. Similarly, the other positioning device 4b is also attached by connecting the side surface 82b of the fixing portion 15 of the movable device 2 opposite to the positioning device 4a and the connecting portion 83b of the positioning device 4b.

【0040】

The positioning devices 4a and 4b are provided with actuators 12a and 12b in the center, respectively. The details of the actuators 12a and 12b will be described later. Here, the actuator 12a of the positioning device 4a is connected to one side surface 81a of the substrate holding portion 3. Similarly, the actuator 12b of the positioning device 4b is connected to the other side surface 81b of the substrate holding portion 3. With such a configuration, since the positioning devices 4a and 4b are attached to the side surfaces of the movable device 2, a compact table device can be provided without increasing the height of the movable device 2, and a substrate can be provided. The drive characteristics of the holding unit 3 can be adjusted for each movable device 2. Therefore, if the drive characteristics of the substrate holding portion 3 of each movable device 2 are adjusted in the same manner, the movable device 2 can be driven by a common driving method even when the movable device 2 is replaced. As a result, different types of movable devices 2 can be easily controlled by switching only the lead wires in common with the drive circuit, the control device, and the like.

【0041】

Next, the operation of the positioning device will be described. For the sake of simplicity, the subscripts of the symbols indicating each part of the device shall be omitted. The actuator 12 of the positioning device 4 is driven by a control device (not shown) via the conductors 85 and 86, and is displaced in the direction 17 with respect to the connection portion 83 of the positioning device 4. At this time, since the actuator 12 is connected to the board holding portion 3 and the connecting portion 83 is connected to the fixing portion 15 of the movable device 2, the board holding portion 3 is eventually connected to the fixing portion 15 of the movable device 2 in the direction 17 Displace to. Here, by synchronizing the displacements of the actuators 12a and 12b, the substrate holding portion 3 on which the substrate 5 is mounted can be displaced in the direction 17 without changing the posture.

【0042】

FIG. 6 is a diagram showing details of the actuator of the positioning device of the table device shown in FIG. A movable portion 93 is integrally molded in the intermediate portion of the positioning device, and is connected to the fixed portion 92 of the positioning device by a leaf spring 97. At the same time, one end of the piezoelectric element 91 is connected to the movable portion 93, and the other end is connected to the fixed portion 92 of the positioning device. Here, by driving the piezoelectric element 91 via the conducting wires 95 and 96, the movable portion 93 is displaced in the direction 99 with respect to the fixed portion 92. The movable portion 93 is connected to a substrate holding portion (not shown) by a connecting portion 98. Since this actuator is integrally molded without using mechanical fastening means, it is possible to perform highly accurate displacement with almost no hysteresis in operation.

【0043】

In this example, it is premised that a laminated piezoelectric element is used, but a bulk piezoelectric element may be used as long as the displacement amount is satisfactory. Further, another solid-state deforming element such as a magnetostrictive element may be used instead of the piezoelectric element. This also applies to the following description.

【0044】

FIG. 7 is a perspective view showing a table device provided with another positioning device. The movable device 2 shown in FIG. 7 has a configuration in which positioning devices 50a and 50b for driving the substrate holding portion 3 are attached to a thinned portion of the movable device 2 shown in FIG. The reason why a part of the movable device 2 is thinned is to avoid an increase in the thickness of the movable device 2 due to the attachment of the positioning devices 50a and 50b. In such a configuration, by driving the positioning devices 50a and 50b in synchronization, the substrate holding portion 3 can be displaced in the direction 17 without changing the posture. Other features are the same as those of the movable device shown in FIG.

【0045】

FIG. 8 is a diagram showing details of the positioning device of the table device shown in FIG. 7. A piezoelectric element 61 is used in the positioning device 60, and the piezoelectric element 61 expands and contracts in the longitudinal direction by applying a voltage to the conducting wires 65 and 66. One end of the piezoelectric element 61 is connected to the fixed portion 62 connected to the fixed portion 15 of the movable device 2, and the other end is connected to the movable lever portion 64. The movable lever portion 64 operates with the elastic hinge 63 as a fulcrum, displaces the connecting portion 67 connected to the substrate holding portion 3, and drives the substrate holding portion 3 in the direction 69. By using such a lever mechanism, even when the displacement amount of the piezoelectric element 61 is small, the displacement can be expanded and transmitted so as to secure a desired displacement amount.

【0046】

Further, since the positioning device 60 is composed of a single member without using mechanical fastening means, it is possible to perform highly accurate displacement without causing rattling or hysteresis in operation.

【0047】

FIG. 9 is a diagram showing details of different examples of the positioning device of the table device shown in FIG. 7. The positioning device 70 has a structure in which the displacement direction of the piezoelectric element 71 and the displacement direction 79 of the substrate holding portion 3 are the same. Further, in such a configuration, since the positioning device 70 can be easily embedded in the fixed portion 15 of the movable device 2, it is possible to reduce the increase in thickness due to the attachment of the drive means 70. The operation and features of the drive means 70 are almost the same as those of the positioning device shown in FIG. 8 except for the matters described here.

【0048】

FIG. 10 is a perspective view showing a table device in which the positioning device is provided on the stage.

【0049】

The movable device 2 is fixed on the stage 1 by a vacuum chuck 6 which is a connection portion provided on the stage 1 by itself. Displacement transmission units 102a and 102b are attached to the side surface of the substrate holding portion 3 of the movable device 2, and positioning devices 101a and 101b are provided on the stage 1 at positions that can be connected to the displacement transmission units 102a and 102b. There is. When the movable device 2 is set on the stage 1, the displacement transmission units 102a and 102b come into contact with the support portions (not shown) of the positioning devices 101a and 101b, and transmit the displacement of the positioning device to the substrate holding unit 3. Here, by driving the positioning devices 101a and 101b in the direction 109 in synchronization with each other, the substrate holding portion 3 can be displaced in the direction 109 without changing the posture.

【0050】

FIG. 11 is a diagram showing details of the positioning device shown in FIG. In the positioning device 110 (structure other than the shaded portion), the fixing portion 111 is connected to the stage 1. Further, one end of the piezoelectric element 113 is connected to the fixed portion 111, and the other end is connected to the movable lever portion 114. A support portion 115 is provided at the tip of the movable lever portion 114, and when the movable device 2 is connected to the stage 1, the displacement transmission portion 112 provided on the side surface of the substrate holding portion 3 is clamped. The displacement transmission portion 112 of the substrate holding portion is set by a path such as 118. By driving the piezoelectric element 113 via the conducting wires 117 and 118, the movable lever portion 114 operates with the elastic hinge 116 as a fulcrum, expands the displacement of the piezoelectric element 113, and directs the support portion 115 of the movable lever portion 114 in the direction 119. Displace to. Then, the substrate holding portion 3 is displaced in the direction 119 via the displacement transmitting portion 112.

【0051】

FIG. 12 is a perspective view showing a table device driven by a non-contact type positioning device. The movable device 2 is fixed on the stage 1 by a vacuum chuck 6 which is a connection portion provided on the stage 1 without a positioning device. Electromagnets 121a and 121b are installed on the stage 1 at positions where the magnetic pole surface faces the bottom surface of the substrate holding portion 3. At this time, if the substrate holding portion 3 is made of a ferromagnetic material, the substrate holding portion 3 can be driven in a non-contact manner by changing the exciting currents of the electromagnets 121a and 121b. In this way, since there is no part that comes into contact with the moving part, there is almost no dust generation, and the operation with less rattling is possible.

【0052】

FIG. 13 is a diagram showing details of the positioning device of the table device shown in FIG. An electromagnet composed of a joint iron 131 and a winding 135 is embedded in the stage 1 so that the magnetic pole surface 133 faces the bottom surface 132 of the substrate holding portion 3. The substrate holding portion 3 of the movable device has a gap 134 between the bottom surface 132 and the magnetic pole surface 133 in a set state, and is supported by the leaf spring 136. Here, by energizing the lead wires 137 and 138 and exciting the winding 135, a magnetic flux 130 is formed in the substrate holding portion 3 and the joint iron 131, and magnetism is formed between the bottom surface 132 and the magnetic pole surface 133 of the substrate holding portion 3. Suction power is generated. Then, the substrate holding portion 3 is displaced in the direction 129 to a position where the bias force of the leaf spring 137 and the attractive force of the electromagnet are balanced. Therefore, the displacement amount of the substrate holding portion 3 can be controlled by changing the exciting current.

【0053】

The movable device according to the present invention, the manufacturing method thereof, and the table device to which the movable device is applied have been described above.

【0054】

Next, the positioning device for the table device according to the present invention will be examined in more detail.

【0055】

In the table device according to the present invention, a positioning device having an actuator using a piezoelectric element and an elastic support mechanism such as a leaf spring as described in FIG. 6 is mainly adopted. However, the piezoelectric element has problems such as non-linear displacement characteristics and a single direction of force that can be generated, so that the piezoelectric element itself always requires preload. Further, since the displacement amount of the substrate holding portion, which is a movable portion, is limited by the length of the piezoelectric element, when a relatively large displacement amount is required, the dimension in the longitudinal direction of the piezoelectric element must be increased. However, there is a risk that the device will become large. Therefore, the present invention provides a compact positioning device that can be further improved to improve high-speed response and displacement linearity, can increase the amount of displacement, and is suitable for miniaturization of the device.

【0056】

FIG. 14 is a plan view showing a first embodiment of the positioning device of the present invention.

【0057】

In this positioning device 141, the groove portions 140a and 140b are machined on the plate-shaped fixed portion 142 by wire-cut electric discharge machining or the like to form a movable portion 143, a set of lever portions 144a and 144b, and a set of piezoelectric element portions. (The portion where the piezoelectric elements 145a and 145b are arranged in FIG. 1) is formed.

【0058】

The two levers 144a and 144b are connected to the fixing 142 by elastic hinges 147a and 147b, respectively. Further, piezoelectric element connecting portions 149a and 149b are formed at one ends (power points) of the lever portions 144a and 144b via elastic hinges 146a and 146b, respectively. The piezoelectric element connecting portions 149a and 149b are provided so as not to apply a shear force or a bending moment to the piezoelectric elements 145a and 145b during operation. For example, a spherical surface is provided at the tip of the piezoelectric elements 145a and 145b. The same effect can be obtained with a configuration in which the spherical surface and the lever portion are brought into contact with each other to drive the lever portion.

【0059】

On the other hand, one ends (points of action) of the lever portions 144a and 144b are also connected to the movable portion 143 via elastic hinges 148a and 148b, respectively, and the movable portion 143 is a driven body (for example, not shown). It is connected to the board holding part) and positions the driven body.

【0060】

The levers 144a and 144b have an L-shaped structure that is bent 90 ° at the elastic hinges 147a and 147b, which are fulcrums. As a result, the displacement directions of the piezoelectric elements 145a and 145b are changed by 90 °. In FIG. 14, the lever portions 144a and 144b are L-shaped, but the shape of the lever portions may be arbitrary as long as they are functionally the same.

【0061】

The piezoelectric elements 145a and 145b are premised on a laminated piezoelectric element (electrostrictive element), but the same effect can be obtained with a bulk piezoelectric element or another solid deformation element such as a magnetostrictive element.

【0062】

Next, the operation of this positioning device will be described in detail with reference to a schematic diagram. FIG. 15 is a diagram schematically showing the mechanism of the positioning device shown in FIG. In the figure, the parts having the same function as the parts shown in FIG. 14 are numbered the same to omit duplicate explanations. FIG. 16 is an enlarged view showing the displacement of each member when a minute displacement occurs in the schematic view shown in FIG.

【0063】

In FIG. 15, 146a, 146b, 147a, 147b, 148a, and 148b each represent a rotary bearing using an elastic hinge, and this portion is free to rotate around an axis perpendicular to the paper surface.

【0064】

The displacement of the piezoelectric element 145a (direction 152) is transmitted to the lever portion 144a via the elastic hinge 146a. In this case, the elastic hinge 146a becomes the point of effort of the lever portion 144a. The lever portion 144a is connected to the fixing portion 142 via the elastic hinge 147a, and the elastic hinge 147a serves as a fulcrum of the lever portion 144a. The lever portion 144a is connected to the movable portion 143 via an elastic hinge 148a, and this elastic hinge 148a serves as an action point and displaces the movable portion 143 in the direction 153.

【0065】

Here, the displacement enlargement ratio of the lever portion 144a is represented by l2 / l1 using the distance l1 between the force point and the fulcrum of the lever portion and the distance l2 between the action point and the fulcrum, and the positioning device 141 by changing l2. The maximum displacement amount of the movable portion 143 in the 21 direction can be changed without changing the dimension of the direction 153. That is, by appropriately selecting l1 and l2, even if the length of the piezoelectric element 145a to be used is fixed, the maximum size of the piezoelectric element 145a is not increased in the predetermined displacement direction of the movable portion 143 of the positioning device 141. Since the displacement amount exceeding the displacement amount can be generated in the movable portion 143, a very compact positioning device can be realized.

【0066】

The other piezoelectric element 145b is installed at a position symmetrical with respect to the center 151 of the movable portion 143 with respect to the piezoelectric element 145a. The lever portion 144b connected to the piezoelectric element 145b is also formed at a position symmetrical with respect to the center 151 of the movable portion 143 with respect to the lever portion 144a, and is an elastic hinge 148a which is a connection portion of the movable portion 143 with the lever portion 144a. And, it is connected to the movable part 143 by an elastic hinge 148b located at a point-symmetrical position with respect to the center 151 of the movable part. With such a configuration, the driving force applied to the movable portion 143 always passes through the center 151 of the movable portion 143, so that a rotational moment acts on the movable portion 143 to minimize the rotation of the movable portion 143. ..

【0067】

In the initial state shown in FIG. 15, a set of piezoelectric elements 145a and 145b are both in a state of being pressed against each other because a voltage is applied so as to displace about half of the maximum displacement amount.

【0068】

Next, the actual operation will be described with reference to FIG. Here, a case where the movable portion 143 is displaced in the direction 162 will be described.

【0069】

First, the piezoelectric element 145b extends by a certain amount in the direction 161. This is done by increasing the applied voltage from the initial state shown in FIG. This displacement is transmitted to the lever 144b via the elastic hinge 146b. As a result, the lever portion 144b rotates with the elastic hinge 147b as a fulcrum, the position of the elastic hinge 148b is displaced in the direction 162 by the lever ratio (l2 / l1) times the displacement amount of the piezoelectric element 145b, and the movable portion 143 is displaced in the direction 162. Displace to. At the same time, the piezoelectric element 145a contracts by approximately the same amount as the elongation of the piezoelectric element 145b. This is done by lowering the applied voltage from the initial state shown in FIG. As a result, the elastic hinge 146a is displaced in the direction 160, and the displacement is transmitted to the lever 144a. Then, the lever portion 144a rotates around the elastic hinge 147a as a fulcrum, the elastic hinge 148a is displaced in the direction 162 by the lever ratio (l2 / l1) of the displacement amount of the piezoelectric element 145a, and the displacement of the movable portion 143 is displaced by the piezoelectric element 145b. Displace so that it is almost the same as the displacement caused by.

【0070】

By driving in this way, when the movable portion 143 is displaced in the direction 162, the piezoelectric element 145b is extended to generate a driving force, and when the movable portion 143 is displaced in the direction opposite to the direction 162, It is a push-pull drive in which the piezoelectric element 145a extends to generate a driving force, and even if the displacement frequency of the movable part 143 is high, it does not become impossible to follow, and at the same time, a set of piezoelectric elements have non-linear displacement with each other. Is canceled to some extent, so that the non-linearity of the displacement characteristic of the movable part 143 is improved.

【0071】

In the above embodiment, the piezoelectric elements 145a and 145b are directly fixed to the fixing portion 142, but in order to drive the piezoelectric elements 145a and 145b in a state where a compressive force is applied and a preload is applied, a preload adjusting means is used. The configuration may be provided between the fixed portion 142 and the piezoelectric elements 145a and 145b. At this time, by making each preload adjusting means independently adjustable, the position of the movable portion 3 in the initial state can be finely adjusted. Although not shown here, the preload adjusting means may include one that adjusts the distance between the piezoelectric element and the fixed portion using an eccentric shaft, and one that adjusts the distance between the piezoelectric element and the fixed portion using a set screw. ..

【0072】

FIG. 17 is a schematic view showing the state of displacement of each member when the displacement of the movable portion is close to the maximum in the positioning device shown in FIG.

【0073】

In this state, since the amount of rotation of the lever portions 144a and 144b is large, the displacement of the elastic hinges 148a and 148b, which are the connecting portions with the movable portion 143, in the direction 152 becomes a size that cannot be ignored and rotates to the movable portion 143. Displacement in the direction 170 occurs. In order to prevent this as much as possible, in the second embodiment of the positioning device of the present invention shown in FIG. 18, the movable portion 143 is supported by the parallel leaf springs 180a, 180b, 181a, 181b to rotate the movable portion 143. I keep it to a minimum. The leaf springs 180a, 180b, 181a, 181b can be easily formed by forming a groove in the fixing portion 142 as in the case of other members. Further, the operation of the positioning device 141 shown in FIG. 18 is exactly the same as that of the first embodiment shown in FIG.

【0074】

FIG. 19 is an exploded perspective view showing a third embodiment of the positioning device of the present invention.

【0075】

This positioning device is a positioning device configured by connecting two positioning devices 141 shown in FIG. As described above, in the positioning device shown in FIG. 14, when a large displacement is performed, the rotational displacement of the movable portion 143 cannot be ignored. Therefore, another positioning device 191 having the same structure is used, and the two positioning devices 141 and 191 are connected so that the directions of the rotational displacements of the movable parts 143 and 193 of the respective positioning devices are opposite to each other.

【0076】

The positioning device 191 has exactly the same structure as the positioning device 141, but is set so that the positioning device 141 is just turned inside out. Here, the fixed portion 142 and the fixed portion 192 are connected, the movable portion 143 and the movable portion 193 are connected, and the movable portions 143 and 193 are displaced by the same amount in the same direction, so that the movable portions 143 and 193 are displaced in the predetermined displacement direction. ..

【0077】

Here, when the positioning device is largely displaced in the direction 199, the movable portion 143 of the positioning device 141 is rotationally displaced in the direction 197, but at the same time, the movable portion 193 of the positioning device 191 is rotationally displaced in the direction 198. Therefore, the rotational displacements of the movable portion 143 and the movable portion 193 cancel each other out, and the rotational displacement of the movable portion after connection hardly occurs.

【0078】

In FIG. 19, the piezoelectric elements 195a and 195b are also incorporated in the positioning device 191. However, if the purpose of canceling the rotational displacement of the moving portion is emphasized, the piezoelectric elements 145a and 145b are not incorporated and the lever portion 144a, The same effect can be obtained only with 144b and the movable part 143.

【0079】

Hereinafter, a table device using the positioning device according to the present invention described so far will be described. The table device described here is mainly used for an autofocus table or the like of a device used for manufacturing, inspection, or the like of a semiconductor device such as an LSI.

【0080】

FIG. 20 is an exploded perspective view showing a first embodiment of a table device using the positioning device according to the present invention. This table device is composed of a positioning device 141, a movable device 201, and a sample table 205. Parallel link mechanisms 204a and 204b using elastic hinges are integrally formed in the movable device 201, and the fixed portions 202a and 202b and the displacement portions 203 are connected via these parallel link mechanisms 204a and 204b. The fixed portions 202a and 202b are fixed to a base portion (not shown), and the displacement portion 203 is guided by the parallel link mechanism 204a and 204b so that it can be translated in the direction 209 with respect to the base portion. The sample table 205 is fixed to the displacement portion 203 and displaces a sample (not shown) in the direction 209.

【0081】

The positioning device 141 is an application of the positioning device shown in FIG. 14 described above. The positioning device 141 fixes the fixing portion 142 to the side surfaces of the fixing portions 202a and 202b of the movable device 201, and fixes the movable portion 143 to the displacement portion 203 of the movable device 201. In the drawings, the same parts as the parts of the positioning device shown in FIG. 14 are given the same numbers, so that duplicate description will be omitted.

【0082】

With such a configuration, the displacement of the movable portion 143 of the positioning device 141 is transmitted to the displacement portion 203 of the movable device 201, and the sample table 205 can be displaced in the direction 209 with high accuracy and high speed and with good linearity. It becomes. Further, since the positioning device 141 is fixed to the side surface of the movable device 201 and the positioning device 141 is very compact in the predetermined displacement direction 209, it is possible to construct a compact table device in which the dimensions of the predetermined displacement direction 209 of the table device are small. It becomes. Therefore, by using this table device as a table device such as an autofocus mechanism, it is possible to construct an autofocus mechanism that is extremely compact and capable of high-precision and high-speed response.

【0083】

FIG. 21 is an exploded perspective view showing a second embodiment of the table device using the positioning device according to the present invention.

【0084】

This table device has a configuration in which two table devices of the first embodiment shown in FIG. 20 are combined.

【0085】

The movable devices 210 and 211 have the same structure as the movable device 201 shown in FIG. 19, and the respective fixing portions 212a, 212b, 215a, 215b are fixed on a stage (not shown), and the positioning device 141 is mounted on the side surface thereof. Each is fixed. Each positioning device 141 is set so that each member is in exactly the same state as the other positioning device. The sample base 219 and the movable portion 143 of the positioning device are fixed to the displacement portion 213 of the movable device 210 and the displacement portion 218 of the movable device 211.

【0086】

According to such a configuration, the sample table 219 can be moved in the direction 209 by making the displacement amount of the movable portion 143 of the two positioning devices 141 the same.

【0087】

In such a table device, it is easier to keep the posture of the sample table 219 constant as compared with the table device shown in FIG. 20, and a sample having a larger area can be displaced with high accuracy. Other effects and operations are exactly the same as those of the table device shown in FIG.

【0088】

FIG. 22 is an exploded perspective view showing a third embodiment of the table device using the positioning device according to the present invention.

【0089】

This table device has a configuration in which three table devices of the first embodiment shown in FIG. 20 are combined.

【0090】

The movable devices 221, 226 and 231 have the same structure as the movable device 201 shown in FIG. 20, and the respective fixing portions 222a, 222b, 227a, 227b, 232a, 232b are fixed on a stage (not shown). A positioning device 141 is fixed to each side surface. The sample table 160 and the movable portion 143 of each positioning device 141 are fixed to the displacement portion 223 of the movable device 221, the displacement portion 228 of the movable device 226, and the displacement portion 233 of the movable device 231.

【0091】

In such a configuration, the sample table 220 can be moved in the direction 209 by making the displacement amounts of the movable portions 143 of the three positioning devices 141 the same.

【0092】

Compared to the table devices shown in FIGS. 20 and 21, such a table device supports the sample table at three points, so that it is easier and more stable to keep the posture of the sample table constant. Can be supported by. Therefore, a sample having a larger area can be displaced with high accuracy. Other effects and operations are exactly the same as those of the table device shown in FIG.

【0093】

FIG. 23 is an exploded perspective view showing an embodiment of the movable device according to the present invention and the table device to which the positioning device according to the present invention is applied.

【0094】

Two positioning devices 141 are fixed to the side surface of the fixing portion 15a of the movable device 2, and the movable portion 143 of each positioning device 141 is fixed to the side surface of the substrate holding portion 3 which is a displacement portion of the movable device 2.

【0095】

By using the movable device 2 according to the present invention, the number of parts of the table device is reduced, the accuracy of the movable device can be easily controlled because there are no mechanical parts that need to be assembled, and the rigidity is reduced by fastening the members. It is possible to prevent the occurrence of hysteresis. Further, since the movable device has an integrated structure, the table device can be easily attached to and detached from the stage. Other effects and operations are the same as those of the table device shown in FIG.

【0096】

FIG. 24 is an exploded perspective view showing a modified example of the table device shown in FIG. 23.

【0097】

In this table device, the movable device 2 has exactly the same structure as that of the table device shown in FIG. 23, but the mounting states of the positioning devices 141 and 241 are different.

【0098】

The positioning device 141 and the positioning device 241 have exactly the same basic structure, but there are two mounting states of the piezoelectric elements 145a, 145b and 245a, 245b, the levers 144a, 144b and 244a, 244b, and the movable parts 143,243. It differs between the positioning devices 141 and 241. Simply put, the positioning device 241 is arranged so that the positioning device 141 is installed upside down. Even in this case, the operation of the table device is almost the same as that of the table device shown in FIG. 23, and the four piezoelectric elements 145a, 145b, so as to displace the movable parts 143, 243 of the two positioning devices 141, 241 in the same direction by the same amount. A voltage may be applied to 245a and 245b.

【0099】

With such a configuration, as described in the description of the positioning device shown in FIG. 19, the slight rotational movement generated in the movable part is changed to the rotational movement direction of the movable parts 143 and 243 of the two positioning devices. The directions 248 and 249 are set in opposite directions to cancel each other out, and the rotational displacement of the substrate holding portion 3 which is a displacement portion can be minimized.

【0100】

In the embodiment of the table device using the positioning device according to the present invention described above, the positioning device shown in FIG. 14 is used, but the same applies to the positioning device shown in FIG. 18 or FIG. Needless to say, the effect can be obtained.

【0101】

Next, the control method of the positioning device and the table device described so far will be described mainly with respect to the table device shown in FIG. 24.

【0102】

FIG. 25 is a block diagram showing a configuration of a control system of the table device of the present invention.

【0103】

The portions 141 and 241 shown by the broken lines in FIG. 25 indicate the two positioning devices 141 and 241 of the table device shown in FIG. 24. Similarly, the piezoelectric element corresponds to the piezoelectric element having the same number in FIG.

【0104】

In this control device, the displacement command 250 is first input to the push-pull signal generating means 251. The push-pull signal generating means 251 generates a voltage command 255 having the same phase as the input signal 254 and a voltage command 256 having the opposite phase to the input signal 254. These two voltage commands 255 and 256 are input to the voltage amplification means 252, respectively, and the voltage is amplified independently of each other. At this time, in order to generate a displacement of about half of the maximum displacement of the piezoelectric element in the initial state, the bias generating means 253 applies the same bias voltage 259 to the inputs 255 and 256 of the voltage amplifying means 252. Then, after applying the bias voltage 259, the amplified piezoelectric element drive voltage 257,258 is output to drive two sets of piezoelectric elements 145a, 145b and 245a, 245b. In this case, the displacement amounts of the piezoelectric elements are almost the same in the two positioning devices 141 and 241, and the sample table of the table device moves in parallel. The same effect can be obtained with a configuration in which the bias generating means 253 is included inside the voltage amplifying means 252.

【0105】

FIG. 26 is a block diagram showing the configurations of different control systems of the table device of the present invention.

【0106】

In this control system, the displacement amounts of the movable parts of the two positioning devices 141 and 241 can take different values. In this case, not only the positioning of the sample table of the table device in a predetermined displacement direction but also the inclination of the sample table in a specific direction can be controlled.

【0107】

As command inputs for this control system, a predetermined direction displacement amount (parallel movement amount) 254 and sample table tilt information 261 are input to the command distribution determining means 260. The command distribution determining means 260 determines the distribution of the displacement amount of the two positioning devices 1,91 based on the displacement amount 254 in the predetermined direction and the tilt information 261 and pushes and pulls the displacement commands 262a and 262b of the respective positioning devices. Output to signal generating means 251a and 251b. After that, the same applies to the control system shown in FIG. 25.

【0108】

Here, a table device using two positioning devices as shown in FIG. 24 is assumed, but a table device using three positioning devices as shown in FIG. 22 also has a control system in the same manner. If configured, not only the predetermined displacement direction of the sample table but also the inclination around the two axes can be controlled.

【0109】

The positioning device according to the present invention and the table device using the positioning device have been described above.

【0110】

Next, a means for solving the problem of vibration generated in the table device according to the present invention will be described.

【0111】

For example, in the table device using the movable device 2 according to the present invention shown in FIG. 2, the substrate holding portion 3 and the fixed portion 15 are connected only by an elastic body such as an elastic hinge, so that this system is simple. It is a spring-mass system, and there are almost no elements that attenuate the movement of the substrate holding portion 3. Therefore, the frequency response when the substrate holding portion 3 is driven has a large peak 271 as shown by the solid line 270 shown in FIG. 27. This peak 271 indicates the resonance frequency determined by the mass of the substrate holding portion 3 and the spring constant of the displacement mechanism 11, and this magnitude indicates the degree of attenuation. In such a system with little attenuation, the peak 271 of the resonance frequency becomes very large, and the vibration of the resonance frequency is likely to occur in the movement of the substrate holding portion 3. Further, when the position of the substrate 5 is detected by using the substrate position detecting means and the closed loop control for adjusting the driving amount of the substrate holding portion 3 is performed based on the information, the system oscillates and fails. It tends to be stable. Therefore, in order to drive stably, an integrator with a large time constant is inserted into the control system to make the characteristics as shown by the solid line 280 in FIG. 28, and the gain of the peak 281 is lowered. However, with such characteristics, the responsiveness of the system may be significantly impaired because the gain decreases from a considerably low frequency. In order to avoid this, measures such as inserting various control compensation elements into the control system have been taken, but at the same time the effect is limited, it is not easy to design the optimum control system. Therefore, by devising the structure of the mechanical system, improvements are made to reduce the peak of the resonance point.

【0112】

FIG. 29 is a schematic view showing the main vibration modes of the movable device according to the present invention shown in FIG. In this figure, the movable portion 290 corresponding to the substrate holding portion 3 can be expanded and contracted only in the fixed portion 291 and the Z direction 295, and is supported by the springs 292a, 292b, 292c, 292d having substantially the same spring constant. The springs 292a, 292b, 292c, and 292d correspond to the support mechanism 11 of the movable device 2 in FIG.

【0113】

Here, since the springs 292a, 292b, 292c, and 292d can be expanded and contracted only in the Z direction 295, the movable portion 290 cannot be translated in a direction other than the Z direction 295, which is a predetermined displacement direction. However, it is possible to rotate around the X-axis 293 and the Y-axis 294. The vibration modes generated when the movable portion 290 is driven are mainly the three modes shown in FIG. 29. Of these, the mode with the largest vibration amplitude is the mode shown in Fig. 29 (a). In this mode, all four springs 292a, 292b, 292c, and 292d are displaced in the same direction by approximately the same amount, and the movable part 290 translates in the Z direction 295. Figure 29 (b) shows a mode in which two of the four springs, 292a and 292d, are displaced by approximately the same amount, and the remaining springs 292b and 292c are also displaced by the same amount, thereby rotating around the X-axis 293. .. FIG. 29 (c) shows a mode in which 292a and 292b of the four springs are displaced by the same amount, and 292c and 292d are also displaced by the same amount and rotate around the Y-axis 294.

【0114】

When the movable part 290 is displaced, vibration occurs in which these three modes are superimposed. At this time, the amplitude of the vibration mode in FIGS. 29 (b) and 29 (c) is often smaller than that in the mode in FIG. 29 (a). Since there is a part where displacement occurs, there is a risk that an error will occur when the object to be inspected is placed on this movable part 290 and inspected. Therefore, it is necessary to reduce not only the vibration in the predetermined displacement direction but also other rotational vibrations in some way. As a countermeasure, it is conceivable to increase the damping of the movable part in the predetermined displacement direction, thereby reducing the vibration in the rotation direction at the same time. There is also a problem that the stroke of the movable portion in the predetermined displacement direction is unnecessarily reduced.

【0115】

FIG. 30 is a plan view showing an embodiment in which the movable device according to the present invention has been improved. Here, a gel-like body 300 in which solid fine particles are dispersed is poured into the gap 45 between the substrate holding portion 3 and the fixing portion 15 and cured. The range in which the gel-like body 300 in which the solid fine particles are dispersed is not particularly limited, but considering the vibration suppressing effect, the groove portion having a large relative displacement between the substrate holding portion 3 and the fixing portion 15 can be filled. preferable. However, for example, if the filling range is asymmetric with respect to the target axis of the substrate holding portion 3 parallel to the Y axis 294 in the figure, the balance of the damping amount is lost, so that the movement of the substrate holding portion 3 is a pure translation. Deviating from the motion, a rotational motion component may occur around the Y-axis 294. In that case, a portion that partially displaces in the Y-axis 294 direction is formed on the substrate holding portion 3, and the motion accuracy of the substrate holding portion 3 is lowered. Therefore, it is desirable that the filling range exists symmetrically with respect to the target axis in the direction parallel to the Y axis 294 of the substrate holding portion 3.

【0116】

The filling amount is determined in consideration of the degree of suppressing vibration and the reduction amount of the total displacement amount. This is because the gel-like body 300 in which the solid fine particles are dispersed has a low damping ability in the low frequency range, but the total displacement amount is slightly reduced even in the low frequency range. Therefore, after controlling the total displacement amount within the specified value, the gel-like body 300 in which the solid fine particles are dispersed is filled. Further, when filling in a plurality of places as in the case of FIG. 30, basically, the amounts to be filled in each place are substantially the same. As a result, the amount of damping at each location is the same, and it is possible to prevent the displacement of the substrate holding portion 3 from causing a rotational motion around the X-axis 293 in the drawing. However, if there are variations in the characteristics of the elastic hinge portion of the support mechanism 11 and there is an error in the motion accuracy of the substrate holding portion 3 without filling the gel-like body 300 in which solid fine particles are dispersed, the filling amount It is also possible to correct this error in motion accuracy by changing.

【0117】

FIG. 31 is a cross-sectional view showing the AA cross section of the movable device shown in FIG. This figure shows in detail how the gel-like body 300 in which solid fine particles are dispersed is filled in the gap between the substrate holding portion 3 and the fixing portion 15. Here, the fixing portion 15 of the movable device 2 is fixed on the stage 1. The substrate holding portion 3 is displaced in the Z direction 310 by a displacement mechanism (not shown). At this time, the gap between the fixing portion 15 and the substrate holding portion 3 is filled with the gel-like body 300 of solid fine particles, which are in close contact with each other. As a result, when the substrate holding portion 3 is displaced, the gel-like body 300 in which the solid fine particles are dispersed is deformed as a whole, and the energy loss at that time attenuates the vibration component in the vibration damping frequency range. To. Therefore, if the resonance frequency is in the vibration damping frequency range, the peak can be reduced.

【0118】

Although the effect of increasing the damping of the motion of the substrate holding portion 3 in the predetermined displacement direction (Z direction 310) is mainly described here, the energy absorption effect of the gel-like body in which the solid fine particles are dispersed is in the displacement direction. It is obtained by the whole deformation regardless. For this reason, the effect of attenuating minute vibrations other than the predetermined displacement direction of the substrate holding portion 3 is also generated at the same time. Although the amplitude is slightly reduced, it helps to improve the motion accuracy of the substrate holding portion 3.

【0119】

Next, the principle of energy loss will be described with reference to the drawings. FIG. 32 is a diagram schematically showing the internal structure of a gel-like body in which solid fine particles are dispersed. The gel-like body 300 in which solid fine particles are dispersed is a state in which fine solid particles 321 are contained in a gel-like state in a medium 320 having a low viscosity. In the figure, the abundance density of solid particles is shown to be small, but in reality, the size of the particles is very small and the abundance density is also very high. Generally, about 80% or more of the volume of the gel-like body is occupied by solid fine particles. With such a configuration, when the gel-like body 300 in which the solid fine particles are dispersed is deformed, the contained solid fine particles 321 move while being in contact with each other, and friction is generated on the particle surface. Therefore, the kinetic energy is converted into heat energy or the like by friction and reduced, and a damping effect is generated. Therefore, it is mainly the solid fine particles 321 that contribute to the damping effect, and the damping effect of the viscous body itself of the medium 320 is slight.

【0120】

Here, as the medium 320, a medium that is fluid and has a certain degree of viscosity even after curing is used. Further, it is preferable that the material has adhesiveness in consideration of the adhesiveness after filling. However, if the viscosity or hardness after curing is large, the stroke will decrease significantly, so it is preferable that the viscosity or hardness is low even after curing. Silicone rubber, urethane rubber, and the like are mainly used as specific materials, but other materials can be used as long as they have similar characteristics.

【0121】

On the other hand, the solid fine particles 321 may be of any type as long as they are solid and have a particle size small enough to form a gel. Actually, ceramic or resin powder is mainly used.

【0122】

In addition, it is also conceivable to use iron-based metal ferromagnet powder as the solid fine particles 321. In this case, the degree of contact between the fine particles can be changed by applying a magnetic field from the outside, so that the damping amount can be changed. In addition, an ion exchange resin is used as the solid fine particles 321 and a highly insulating oil and fat is used as the medium 320, an electric field is applied to the gel-like body, the viscosity of the gel-like body is changed by the Windslo effect, and the damping amount is adjusted. It is also possible.

【0123】

Next, the effect of increasing damping by the gel-like body 300 in which the solid fine particles are dispersed will be described.

【0124】

The figure showing the frequency characteristics when the substrate holding portion 3 of the movable device 2 according to the present invention shown in FIG. 27 above is open-loop driven will be re-explained. The solid line 270 is a characteristic when nothing is filled, and a large peak 271 is generated at the resonance frequency. On the other hand, when a viscoelastic material such as silicone rubber is first filled in the gap 45 between the substrate holding portion 3 and the fixing portion 15, the characteristics shown by the broken line 272 are obtained. In this characteristic, the gain is lowered over the entire range and the resonance frequency is slightly raised. That is, in a viscoelastic body such as silicon rubber, the spring constant is equivalently increased due to the elasticity, the gain is reduced even in the low frequency range, and the overall stroke is also significantly reduced. .. On the other hand, if the gel-like body 300 in which the solid fine particles are dispersed according to the present invention is filled in the gap 45, the gain characteristic is as shown by the alternate long and short dash line 274 in FIG. In this characteristic, the decrease in gain is small in the low frequency range, the gain is significantly reduced in the high frequency range, and the damping effect is significantly larger than that in the case of filling with a viscous material such as silicon rubber. Therefore, a very large damping effect can be obtained while suppressing the overall stroke reduction. At the same time, the frequency of the resonance point 275 is significantly increased, but in this case, the decrease in gain in the steady state is small because it is not due to the increase in the spring constant.

【0125】

Further, the figure showing the frequency characteristics when the substrate holding portion 3 of the movable device 2 according to the present invention shown in FIG. 28 described above is open-loop driven by using an integrating element will be re-explained. When a moving part with frequency characteristics like the solid line 270 in Fig. 27 is closed-loop controlled, it will oscillate if it is driven without using a compensation element, so an integrator with a large time constant is used in the high frequency range. By lowering the gain, it must be driven with the characteristics shown by the solid line 280 in FIG. In this case, if there is a peak 281 having a large resonance frequency, as shown in the figure, the gain decreases from a considerably low frequency, so that the response frequency of the substrate holding unit 3 decreases and the high-speed response is significantly deteriorated. However, according to the present invention, the peak gain is significantly reduced and the frequency is also increased (peak 283). Therefore, the time constant of the integrator can be significantly reduced, and the gain can be maintained up to a considerably high frequency as shown by the broken line 282 in the figure. Therefore, the response frequency of the substrate holding unit 3 is increased, and high-speed response is possible.

【0126】

Next, an embodiment when the above-mentioned vibration prevention means is applied to a table device having another movable device will be described.

【0127】

FIG. 33 is a perspective view showing an embodiment of a table device using the vibration prevention means according to the present invention. In this table device 330, two movable devices 332 are fixed to the upper surface of the stage 331, and a substrate holding portion 334 is connected to the movable portion 333 of the two movable devices 332.

【0128】

Further, on the stage 331, two connecting members 335 having surfaces facing the side surfaces of the substrate holding portion 334 are fixed so as to maintain a constant gap with both side surfaces of the substrate holding portion 334, and are relative to the substrate holding portion 334. A gel-like body 300 in which solid fine particles are dispersed is filled between the surface to be formed and the side surface of the connecting member 335.

【0129】

The damping action and its effect in this example are the same as in the above-mentioned example, but the filling method of the gel-like body 300 in which the solid fine particles are dispersed is different.

【0130】

In the movable device 2 according to the present invention shown in FIG. 30, a gap 45 is already set at the end of assembly, and a method of pouring and hardening a gel-like body 300 in which highly fluid solid fine particles are dispersed after assembly is performed. However, if the gap 45 to be filled is small, filling may not be easy or the filled state may not be uniform.

【0131】

On the other hand, in the table device 330 shown in FIG. 33, after the movable device 332 is fixed on the stage 331 and the substrate holding portion 334 is connected to the movable portion 333 of the movable device 332, both sides of the substrate holding portion 334 are connected. A connecting member 335 coated with a gel-like body 300 in which solid fine particles are dispersed is placed on the stage 331 on the surface facing the surface, and the solid fine particles are dispersed between the side surfaces of the substrate holding portion 334. The gel-like body 300 is positioned and fixed so as to maintain a predetermined gap in a filled state.

【0132】

By doing so, it becomes easy to fill the gel-like body 300 in which the solid fine particles are dispersed, and it becomes easy to make the packed state uniform. Further, since the connecting member 335 can be removed, it is easy to correct the filling state.

【0133】

Next, the adjustment of the gap between the connecting portion 335 and the substrate holding portion 334 will be described.

【0134】

In order to set a predetermined gap before curing the gel-like body 300 in which solid fine particles are dispersed, the connecting member 335 is displaced in the filled state to adjust the gap, but the gap should be adjusted even after curing. Is possible. Since the gel-like body 300 in which the solid fine particles are dispersed has a certain degree of viscosity even after curing, the position of the connecting member 335 can be slightly changed even after curing.

【0135】

The damping effect of the gel-like body 300 in which the solid fine particles are dispersed is affected by the size of the gap. When the gap becomes smaller, the damping effect increases, and when the gap becomes larger, the damping effect decreases. Therefore, by making the connecting member 335 displaceable with respect to the stage 331, the damping effect of the gel-like body 300 in which the cured solid fine particles are dispersed can be adjusted. That is, according to such a configuration, it is possible to adjust the damping effect of the substrate holding portion 334 of the table device 330 after the assembly is completed without changing the filling amount.

【0136】

FIG. 34 is a perspective view showing another embodiment of the table device provided with the vibration prevention means according to the present invention.

【0137】

In this table device 340, three movable devices 342 are fixed on the stage 341, and a movable portion 343 is provided for each of the three movable devices 342. A sample holding table 344 is connected to these movable parts 343. Further, on the stage 341, three connecting members 345 are installed so as to face the side surface of the sample holding table 344 of each movable device 342. The gap between each connecting member 345 and the side surface of the sample holding table 344 is filled with a gel-like body 300 in which solid fine particles are dispersed.

【0138】

Also in this table device 340, the filling method, the adjusting method, the damping action, and the effect thereof of the gel-like body 300 in which the solid fine particles are dispersed are the same as those described in the above-mentioned Examples.

【0139】

However, in this table device 340, since the sample holding table 344 is supported by three movable devices 342, the translational motion in the Z-axis 348 direction, the rotational motion around the X-axis 346, and the rotational motion around the Y-axis 347 in the figure. It is a table device that can control the three degrees of freedom. That is, by attaching a positioning device (not shown) to each movable device 332, it is possible to obtain a table device capable of controlling the three degrees of freedom described above in FIG. 22.

【0140】

In this case, by filling the gap between the three connecting members 345 and the sample holding table 344 with the gel-like body 300 in which solid fine particles are dispersed, not only the damping of the translational motion in the Z-axis 348 direction can be increased, but also the damping of the translational motion in the Z-axis 348 direction can be increased. Since the damping of the rotational movement around the X-axis 346 and the rotational movement around the Y-axis 347 can be increased at the same time, it is possible to make a table device capable of stable and highly accurate movement not only for translational movement but also for rotational movement. ..

【0141】

Hereinafter, the filling location of the gel-like body in which the solid fine particles are dispersed will be described with reference to an example of a table device using the movable device according to the present invention shown in FIG. The following effects also apply to the embodiment shown in FIG. 33, and the same can be said for the embodiment shown in FIG. 34, although there are some changes in the vibration mode.

【0142】

FIG. 35 is a plan view showing an example of a table device using the movable device according to the present invention. Here, the gel-like body 350 in which the solid fine particles are dispersed is divided and filled in four of the gaps 45 in which the substrate holding portion 3 and the fixing portion 15 face each other. This location is near the maximum amplitude portion 351 of the vibration mode having the maximum vibration amplitude other than the vibration mode in the predetermined displacement direction (direction perpendicular to the paper surface) of the substrate holding portion 3. In this case, the main vibration modes other than the vibration mode in the predetermined displacement direction are the rotational vibration around the X-axis 293 and the rotational vibration around the Y-axis 294. Since the vibration amplitude changes depending on the shape of the substrate holding portion 3, the position of the support mechanism 11, etc., it cannot be unconditionally determined, but in the case of the movable device 2 shown in FIG. 35, the four corners of the substrate holding portion 3 are It is the maximum amplitude part in both rotational vibration modes. Therefore, by filling the gap in the vicinity with the gel-like body 350 in which the solid fine particles are dispersed, the solid fine particles are dispersed when the rotational vibration around the X-axis 293 or the Y-axis 294 occurs. Since the amount of deformation of the gel-like body 350 is larger than that in the case of filling the gel-like body 350 in which the solid fine particles are dispersed in other parts, the damping of the gel-like body 350 in which the solid fine particles are dispersed is more effective. It is possible to reduce rotational vibration. That is, even if the total filling amount of the gel-like body 350 in which the solid fine particles are dispersed is the same, the rotational vibration effect can be increased as compared with the case where the gel-like body 350 is filled in another place.

【0143】

The amount of the gel-like body 350 in which the solid fine particles to be filled are dispersed is set to an appropriate value in consideration of the damping amount and the stroke reduction amount in the predetermined displacement direction of the substrate holding portion 3. At this time, after grasping the state of the rotational vibration in the state where the gel-like body 350 in which the solid fine particles are dispersed is not filled, the motion accuracy of the substrate holding portion 3 is maximized at four locations. By adjusting the filling amount, it is possible to prevent a rotational motion component from being generated when the substrate holding portion 3 moves in a predetermined displacement direction and reducing the motion accuracy of the substrate holding portion 3.

【0144】

The means for solving the problem of vibration generated in the table device according to the present invention has been described above.

【0145】

Next, in the table device having the movable device according to the present invention shown in FIG. 2, a method of supplying vacuum to the vacuum chuck 16 for fixing the substrate 5 will be examined. When the substrate holding portion is not movable as in the conventional case, a hole for passing a vacuum is provided inside the fixed portion to guide the vacuum to the vacuum chuck, so that the vacuum can be guided to the vacuum chuck without exposing the vacuum system piping to the outside of the table device. However, in the table device having the movable device 2 as shown in FIG. 2, the substrate holding portion 3 and the fixing portion 15 are separated, so that the vacuum can be transmitted from the fixing portion 15 to the substrate holding portion 3. , It is not easy to use the holes provided inside the substrate holding portion 3. Therefore, as shown in FIG. 36, a flexible pipe 360 is installed outside the movable device 2, one of which is fixed to the fixing portion 15, and the other is fixed to the substrate holding portion 3 to be inside the substrate holding portion 3. A method of connecting to a vacuum hole leading to the vacuum chuck 16 and guiding the vacuum to the vacuum chuck 16 can be considered. By doing so, the vacuum system of the substrate holding portion 3 and the vacuum system of the fixing portion 15 are connected by a flexible pipe, so that the vacuum can be guided to the substrate holding portion 3 without impairing the operation of the substrate holding portion 3. .. However, in this case, as is clear from FIG. 36, it is necessary to install the flexible pipe 90 and its pipe fixing portions 361 and 362 outside the movable device 2, and the height of the movable device 2 is large. Therefore, the compactness of the table device is impaired. In particular, when this table device is used as a table device for a substrate inspection device, an optical system is present in close proximity to the upper part of the table device. Further, since there is also work such as carrying in a substrate to be inspected by utilizing the gap between the optical system and the table device, it is preferable that the height of the table device is as low as possible.

【0146】

As a method of suppressing the height, it is conceivable to process the fixing portion 15 and the substrate holding portion 3 from the outside to embed a flexible pipe for vacuum and the pipe fixing part. In this case, the height is significantly reduced from the outside. It is necessary to scrape the fixing portion 15 and the substrate holding portion 3, and there is a problem that the rigidity of the fixing portion 15 and the substrate holding portion 3 is significantly lowered, which adversely affects the inspection accuracy. Further, in order to suppress the increase in the height direction, it is conceivable to install similar pipes and pipe fixing parts by using the side surface of the movable device 2, but as shown in FIG. 5, this side surface is covered. Since a positioning device for displacing the substrate holding portion 3 is attached, it is not easy to arrange the vacuum system piping on this surface. Further, when the side surface is used, there is a problem that it becomes difficult to machine a hole leading to the vacuum chuck 16 after connecting the vacuum to the substrate holding portion 3.

【0147】

Therefore, a means for supplying a vacuum to the vacuum chuck for fixing the substrate will be described below.

【0148】

FIG. 37 is a plan view showing an embodiment of the movable device of the present invention shown in FIG. First, a hole 370 that guides a vacuum to a vacuum chuck 16 is machined in the substrate holding portion 3. This processing is performed by drilling a hole from the side surface direction of the substrate holding portion 3 and then closing one end of the hole (hatched portion 371 in the drawing). The vacuum chuck 16 is attached to the bottom surface of the substrate holding portion 3, and a hole portion 372 connected to the hole portion 370 of the substrate holding portion 3 shown above is formed inside the vacuum chuck 16. An opening 373 is provided. The substrate 5 is placed on the vacuum chuck 16 and the substrate 5 is fixed to the substrate holding portion 3 by suctioning from the opening 373 of the vacuum chuck 16. The fixed portion 15 has a vacuum hole 374 opened from the side surface, and this hole 374 is opened through the gap 45 to the substrate holding portion 3 at the time of processing, and has been processed first. It is connected to the hole 370 of the board holding part. After that, a rod-shaped body that just fits into the hole 374 is inserted, and the rod is inserted up to the hole 340 of the substrate holding portion 3. Then, a gel-like body in which solid fine particles as shown in FIG. 30 are dispersed is poured into the gap 45 in the vicinity of the rod-shaped body and cured to form a connecting portion 375. At that time, the rod-shaped body prevents the gel-like body in which solid fine particles are dispersed from flowing into the hole portion 374 and blocking the hole portion 374, and also ensures that the hole portion 376 can be secured in the connecting portion 375. ing. Further, by doing so, it is possible to prevent the substrate holding portion 3 from being displaced and the initial position of the substrate holding portion 3 from being deviated when the gel-like body in which the solid fine particles are dispersed is poured into the gap 45. Then, after the connecting portion 375 is cured, the rod-shaped body is pulled out to connect the hole portion 374 of the fixing portion 15 and the hole portion 370 of the substrate holding portion. A vacuum system connecting portion 377 is provided at one end of the fixed portion 15 facing the outside of the hole portion 374, and is connected to the vacuum source by the vacuum system connecting means 378 provided on the stage 1. Therefore, by operating the vacuum source, the vacuum is guided to the opening 27 of the vacuum chuck 16 of the substrate holding portion 3.

【0149】

FIG. 38 is a cross-sectional view showing the AA cross section of the movable device shown in FIG. 37. This cross section shows the state of the gap 45 between the substrate holding portion 3 and the fixing portion 15, and a connecting portion 375 made of a gel-like body in which solid fine particles are dispersed is formed, and the fixing portion 15 is formed inside the connecting portion 375. A hole 376 is formed to connect the hole 374 of the above and the hole 370 of the substrate holding portion 3.

【0150】

FIG. 39 is a cross-sectional view showing a BB cross section of the movable device shown in FIG. The fixing portion 15 is fixed on the stage 1, and the substrate holding portion 3 is connected to the fixing portion 15 in a displaceable state by the connecting portion 375. The hole 374 of the fixing portion 15 is connected to the hole 370 of the board holding portion 3 via the hole 376 of the connecting portion 375 so that the vacuum can be transmitted to the opening 373 through the hole 372 inside the vacuum chuck 16. It has become. The vacuum source is connected to the vacuum system connecting means 378 on the stage 1 by the vacuum system connecting portion 377.

【0151】

FIG. 40 is a plan view showing a modified example of the movable device shown in FIG. 36. In this case, only one vacuum system is supplied to the substrate holding unit 3. Therefore, there is only one hole 374 in the fixing portion 15, and the vacuum in the substrate holding portion 3 is supplied by the hole 370 inside the substrate holding portion 3 and the external piping 400. At this time, the pipe 400 is installed outside the movable device, but since it is near the end of the substrate holding portion 3, the compactness is not impaired. As a result, the vacuum system connecting portion 377 and the vacuum system connecting means 378 need only be provided at one place, and the vacuum system device can be simplified.

【0152】

The method of supplying vacuum to the vacuum chuck that fixes the substrate in the table device having the movable device according to the present invention has been described above.

【0153】

[Effect of the invention]

As described above, according to the present invention, it is possible to improve the response characteristics of displacement in autofocus or the like by reducing the movable weight at the time of minute displacement, and at the same time, it is possible to realize a compact minute displacement mechanism. It is possible to provide an apparatus, a method for manufacturing the apparatus, a positioning apparatus, and a table apparatus using the apparatus.

[Simple explanation of drawings]

[Figure 1]

The exploded perspective view which shows the Example of this invention.

[Figure 2]

The perspective view which showed the details of the movable device of this invention shown in FIG.

[Fig. 3]

The perspective view which showed the modification of the movable device of this invention shown in FIG.

[Fig. 4]

The plan view which showed the movable device shown in FIG. 2 and FIG.

[Fig. 5]

The perspective view which shows the detail of the positioning device of the movable device of this invention shown in FIG.

[Fig. 6]

The figure which showed the detail of the positioning device of the movable device shown in FIG.

[Fig. 7]

The perspective view which shows the movable device provided with the positioning device.

[Fig. 8]

The figure which showed the detail of the positioning apparatus shown in FIG.

[Fig. 9]

The figure which showed the detail of the modification of the positioning apparatus shown in FIG.

[Fig. 10]

The perspective view which shows the movable device which provided the positioning device on a stage.

[Fig. 11]

The figure which shows the detail of the positioning apparatus shown in FIG.

[Fig. 12]

FIG. 3 is a perspective view showing a movable device driven by a non-contact positioning device.

[Fig. 13]

The figure which shows the detail of the positioning apparatus shown in FIG.

[Fig. 14]

The plan view which shows 1st Example of the positioning apparatus of this invention.

[Fig. 15]

FIG. 6 is a diagram schematically showing the mechanism of the positioning device shown in FIG.

[Fig. 16]

The schematic diagram shown in FIG. 15 is an enlarged view showing the displacement of each member when a minute displacement occurs.

[Fig. 17]

FIG. 6 is a schematic view showing a state of displacement of each member when the displacement of a movable part is close to the maximum in the positioning device shown in FIG.

[Fig. 18]

The plan view which shows the 2nd Example of the positioning apparatus of this invention.

[Fig. 19]

An exploded perspective view showing a third embodiment of the positioning device of the present invention. [Fig. 20]

The exploded perspective view which shows the 1st Example of the table apparatus which used the positioning apparatus which concerns on this invention.

[Fig. 21]

The exploded perspective view which shows the 2nd Example of the table apparatus which used the positioning apparatus which concerns on this invention.

[Fig. 22]

The exploded perspective view which shows the 3rd Example of the table apparatus which used the positioning apparatus which concerns on this invention.

[Fig. 23]

An exploded perspective view showing an embodiment of a movable device according to the present invention and a table device to which the positioning device according to the present invention is applied.

[Fig. 24]

The exploded perspective view which shows the modification of the table apparatus shown in FIG. 23.

[Fig. 25]

The block diagram which shows the structure of the control system of the table apparatus of this invention.

[Fig. 26]

A block diagram showing the configurations of different control systems of the table device of the present invention. [Fig. 27]

The figure which showed the frequency characteristic when the substrate holding part of the movable device which concerns on this invention is open-loop driven.

[Fig. 28]

The figure which showed the frequency characteristic when the substrate holding part of the movable device which concerns on this invention was open-loop driven by using the integrating element.

[Fig. 29]

The schematic diagram which showed the main vibration mode of the movable device which concerns on this invention.

[Fig. 30]

The plan view which shows the Example which improved the movable device which concerns on this invention.

[Fig. 31]

FIG. 5 is a cross-sectional view showing an AA cross section of the movable device shown in FIG.

[Fig. 32]

A diagram schematically showing the internal structure of a gel-like body in which solid fine particles are dispersed. [Fig. 33]

The perspective view which showed the Example of the table apparatus which used the vibration prevention means which concerns on this invention.

[Fig. 34]

The perspective view which shows the other Example of the table apparatus provided with the vibration prevention means which concerns on this invention.

[Fig. 35]

The plan view which showed the Example of the table apparatus which used the movable apparatus which concerns on this invention.

[Fig. 36]

The perspective view which shows the Example about the movable device of this invention.

[Fig. 37]

The plan view which shows the Example about the movable device of this invention.

[Fig. 38]

FIG. 3 is a cross-sectional view showing an AA cross section of the movable device shown in FIG. 37.

[Fig. 39]

FIG. 6 is a cross-sectional view showing a BB cross section of the movable device shown in FIG.

[Fig. 40]

A plan view showing a modified example of the movable device shown in FIG. 36. [Explanation of symbols]

1 stage 2 Movable device 3 Board holder 4a, 4b Positioning device 5 board 10 Optical system 11 Support mechanism 12a, 12b actuator 13a, 13b Position detector 15 Fixed part 16 Vacuum chuck 300,350 Gel-like body with solid fine particles dispersed