Coaxial resonator of dielectric and its manufacture

[Detailed Description of the Invention]

[Industrial Application] a dielectric coaxial resonator which has an electrode for frequency adjustments which the present invention relates to a dielectric coaxial resonator used as a filter of a microwave region, etc., and a manufacturing method for the same, and is formed in the open face of a dielectric in detail, and a manufacturing method for the same -- Seki -- it carries out. [Description of the Prior Art] The dielectric coaxial resonator is used abundantly for the reasons of having small and high selectivity in apparatus using microwave, such as a personal walkie-talkie and a car telephone machine, conventionally. As this dielectric coaxial resonator, as shown in Drawing 4 (a), inner conductor 43 of metal, such as $12 (Ag) and copper (Cu), and outside conductor 45 were formed and constituted by dielectric 41 of the ceramics which have penetration hole 42 by press molding etc. As for inner conductor 43, outside conductor 45 was formed in the inside of penetration hole 42 again by printing and Metsuki(ing) above-mentioned metal on the dielectric external surface except open face 44 in which penetration hole 42 was formed. In order to determine resonance frequency fr of such a dielectric coaxial resonator, the length of the resonator was set as the predetermined value which suited resonance frequency fr at the time of press molding of a dielectric. However, if it is difficult to set up the length of a resonator with uniformly sufficient accuracy, for example, is in the dielectric coaxial resonator of resonance frequency f r 900MHz, between each resonator, about 10-MHz variation arises and fine tuning is needed. By grinding open face 44, this fine tuning was driving the length of the resonator into resonance frequency fr. As mentioned above, be shown in Drawing 4 (b) in view of the difficulty of the polishing work of the dielectric which consists of ceramics, The dielectric coaxial resonator in which this inner conductor 43 or outside conductor 45, and flowing electrode 46 for frequency adjustments were formed to open face 44 of dielectric 41 was already proposed (refer to JP,61-43286,Y). After this dielectric coaxial resonator formed inner conductor 43 and outside conductor 45 in dielectric 41 which balanced resonance frequency roughly, it printed and calcinated inner conductor 43 or outside conductor 45, and flowing electrode 46 for frequency adjustments, and formed them in open face 44. And trimming of this electrode 46 for frequency adjustments was carried out to the predetermined size by the sandblast etc., and detailed frequency adjustment was performed. Thereby, the polishing work of difficult dielectric ceramics was canceled greatly. [Description of the Prior Art] However, in order that electrode 46 for frequency adjustments may form inner conductor 43 and outside conductor 45 in dielectric 41, After forming a metal layer all over dielectric 1 and removing the unnecessary metal layer of open face top 44, it formed by the printing method, the applying method, etc. so that it might flow to inner conductor 43 and outside conductor 45. That is, the process of newly forming an electrode adds and it has become a cost overrun of complicated-izing of a manufacturing method, and the cost of materials. When the silver paste etc. were printed and electrode 36 for frequency adjustments was formed, concerning frequency adjustment, the minute pattern was difficult by whom of the silver paste. For this reason, variation which originates in each resonator at length control of a resonator (if it is in the dielectric coaxial resonator of resonance frequency f r 900MHz as mentioned above) Around 10 MHz and the variation (it is around 5 MHz in - husks) resulting from the accuracy of electrode 36 for frequency adjustments arise, For example, resonance frequency fr900M (if it was in the dielectric coaxial resonator of z, about 15-MHz variation arose between each resonator, the range of fine tuning was expanded conversely, and there was a problem that the time which adjustment takes became long.) [Objects of the Invention] It forms in specified shape with sufficient accuracy, without adding the electrode for frequency adjustments which the present invention is thought out in view of an above-mentioned problem, and is formed in the open face of a dielectric to a manufacturing process, The time which frequency adjustment takes is shortened and it is in providing a cheap and reliable dielectric coaxial resonator and a manufacturing method for the same. YAG laser irradiates the electrode for frequency adjustments with the another object, and there is in providing a dielectric coaxial resonator which performs frequency adjustment according to non-contact, and a manufacturing method for the same. [The concrete means for achieving the object] It is the present invention in order to achieve the object of the above-mentioned present invention, In the dielectric coaxial resonator which provided the inner conductor in the penetration hole inside of the dielectric, provided the outside conductor in the dielectric external surface except the open face in which the penetration hole was formed, and formed this inner conductor or the outside conductor, and the flowing electrode for frequency adjustments in the open face, The process of the surface of the above-mentioned electrode for frequency adjustments being having formed in the part which becomes below in an open face, and forming further the dielectric which has a dent part in the part in which a penetration hole and the electrode for frequency adjustments are formed, It is a manufacturing method of a dielectric coaxial resonator including the process of forming a conductor in the surface outside all of the dielectric, the process of grinding the open face of a dielectric so that a conductor may remain in the above-mentioned dent part as an electrode for frequency adjustments, and the process of adjusting the electrode for frequency adjustments to predetermined frequency by trimming. The manufacturing method of the dielectric coaxial resonator to which the above-mentioned frequency adjustment carries out trimming of the electrode for frequency adjustments by YAG laser is provided. [Example] Hereinafter, a dielectric coaxial resonator of the present invention and a manufacturing method for the same are explained in full detail based on a drawing. Drawing 1 (a) is a sectional view of the dielectric coaxial resonator concerning the present invention. In the example, two elements explain using the resonator which was carrying out the electrostatic bond within one dielectric. Inner conductors 3a and 3b are formed in penetration hole 2a of dielectric 1 of the present invention, and 2b inside, Outside conductor 5 is formed in the dielectric 1 external surface except open face 4 in which the penetration holes 2a and 2b were formed, these inner conductors 3a and 3b or outside conductor 4, and flowing electrode 6 for frequency adjustments are formed in part 7 which becomes further in the open face 4, the - plane, or below an open face, and it is constituted. Dielectric 1 consists of ceramics of Bad-Tie, a system, a ZrO2-5nOz A i0□ system, a BaO-Smz03-TiOx system, BaO-Nd 2O, a -TiO□ system, or a Ca0-TiO□-5iO□ system, and each ceramics of a predetermined dielectric constant are chosen according to resonance frequency. Penetration holes 2a and 2b are formed in the inside of the above-mentioned dielectric 1. The penetration holes 2a and 2b are formed simultaneously with press molding of the above-mentioned dielectric 1 etc. One field of dielectric 1 in which penetration holes 2a and 2b were formed turns into open face 4, and it is a hole diameter of penetration holes 2a and 2b by the side of open face 4, It becomes large so that input-and-output joint capacity ingredient 8a and 8b, for example, the capacitor elements which made the metal tunic both sides of the ceramic substrate, can be laid underground, and crevices 9a and 9b are formed with a sectional view. The depth of crevices 9a and 9b turns into a prescribed depth, for example, 1~4IIIIm, with the relation between the resonance frequency of a resonator, and the fall of a no-load Q value. Inner conductors 3a and 3b or outside conductor 5 is 8, respectively! It is formed of (Ag) or a copper (Cu) metal tunic. As for inner conductors 3a and 3b, the crevices 9a and 9b were formed for while, and outside conductor 4 is formed in the penetration hole [ of the above-mentioned dielectric 1 ]a [ 2 ] and 2b, and inside side of crevices 9a and 9b at the external surface of dielectric 1 except open face 4. This flows in a field opposite to open face 4 in these inner conductors 3a and 3b and outside conductor 5. Electrode 6 for frequency adjustments consists of the same metal as inner conductors 3a and 3b or outside conductor 5, flows with inner conductors 3a and 3b, and is formed in part 7 which the surface of electrode 6 for frequency adjustments becomes below in an open face. Drawing 1 (b) is an expanded sectional view of open face 4 portion by the side of penetration hole 2a. A level difference is formed in a part or all of a circumference [ crevice 9a ] portion to which crevice 9a under which capacitor element 8a was laid touches open face 4, and part 7 in which electrode 6 for frequency adjustments is formed turns into part 7 in which electrode 6 for frequency adjustments is formed for this level difference part. Depth D of this level difference part 7 is set up more deeply than film thickness d of electrode 6 for frequency adjustments. That is, the surface of electrode 6 for frequency adjustments is not projected from open face 4. Although not illustrated, it is stored by metal casing, and an input/output terminal is formed in the above-mentioned capacitor elements 8a and 8b, and the resonator which constituted more than outputs only a specific frequency component for the voltage signal of high frequency inputted into one terminal from the terminal of another side according to predetermined resonance frequency. Drawing 2 is a flow chart explaining the main manufacturing processes of the dielectric coaxial resonator concerning the present invention. First, 21 is the process of molding dielectric 1. Dielectric l is conventionally formed by well-known press molding or extrusion molding in the ceramic powder object chosen from each above-mentioned prefecture the shape of a rectangle, and by fabricating cylindrical and calcinating this after an appropriate time. Level difference part 7 in which crevices 9a and 9b and electrode 6 for frequency adjustments which penetration holes 2a and 2b and capacitor elements 8a and 8b lay underground simultaneously with molding of dielectric 1 at this process are formed is molded simultaneously. In consideration of predetermined resonance frequency, the height of dielectric 1, the depth of crevices 9a and 9b, etc. are set as a predetermined value at this process. 22 is a process of electrode attachment of dielectric 1. Although the electrodes of dielectric 1 are inner conductors 3a and 3b, outside conductor 5, and electrode 6 for frequency adjustments, after they immerse and apply a metal paste to dielectric 1, they are calcinated or are formed by unelectrolyzed Metsuki etc. The following 23 is an open face polishing process. The inside-and-outside peripheral surface in which dielectric 1 includes open face 4 is covered with the metal tunic. For this reason, it is necessary to remove the metal membrane by which the tunic is carried out on open face 4. Specifically, polish is performed by a sandblast, whetstone polish, etc. Here, rather than open face 4, level difference part 7 of a prescribed depth is not ground, but a metal tunic remains, and this residual metal serves as electrode 6 for frequency adjustments. That is, it can hold down with the variation in the resonance frequency which originates in length control of dielectric 1 only by grinding a ceramic body substantially as mentioned above, for example, the dielectric coaxial resonator of a 900 MHz belt, in 10 MHz. In order that the shape may be regulated by level difference part 7 and electrode 6 for frequency adjustments may not form by screen-stencil of a back process like before, the no less than 15 MHz variation which are whom of a paste and the variation of the resonance frequency resulting from a blot does not occur. 24 is a frequency adjustment process. Trimming processing of the electrode 6 for frequency adjustments is carried out, and it narrows down to the object resonance frequency. The surface circumference of electrode 6 for frequency adjustments becomes difficult [ it / to carry out machinery cutting removal in contact with electrode 6 for direct frequency adjustments ], in order not to project from open face 4. For this reason, tuning finely even to setting resonance frequency is desirable by irradiating some electrodes 6 for frequency adjustments with YAG laser, and vanishing it as trimming processing. Since frequency adjustment electrode 6 is formed simultaneously with inner conductor 3a~3b and outside conductor 5 in the present invention, Trimming processing may be carried out from a part for rose Tight of the resonance frequency resulting from the length of dielectric 1 (smaller than a part for rose Tight of the resonance frequency of frequency adjustment electrode 36 formed at the back process like before), and the time which trimming processing takes is shortened. As conditions for concrete YAG laser, it is a wavelength output. Q switch Spot diameter Scan speed It was alike and set up. In particular, by trimming processing by laser radiation, since irradiation can be stopped at narrowing down of a spot diameter, or the point ending [ trimming ], the adjustment accuracy of frequency improves, and vibration and cutting waste arise, there are nothings, and automation Tin -- - layer floor to floor time is shortened -- becomes easy. 25 is an assembly process. Finally at this process, slit groove 10 is formed between each penetration hole 2a and 2b, Two dielectric resonators are constituted from one dielectric 1, it is considered as a dielectric filter, or When also carries out the solder price of the capacitor elements 8a and 8b to crevices 9a and 9b also with burial and an input/output terminal, and a storage assembly is carried out to above-mentioned metal casing. Drawing 3 (a) ~ (c) is a sectional view showing other examples of the present invention. the same portion as Drawing 1 is the same -- 1.06 micrometers 1~5W 10~20kHz 10~100Il+m 10~100 mob/sec numerals are attached. In Drawing 3 (a), electrode 60 for frequency adjustments has flowed with inner conductor 3a. And electrode 60 for frequency adjustments is provided in taper part 70 formed in a part of circumference or the all circumference of crevice 9a which crevice 9a and open face 4 touch. In Drawing 3 (b), electrode 61 for frequency adjustments has flowed with outside conductor 5. And electrode 61 for frequency adjustments is provided in level difference part 71 formed in the part or the all circumference of a corner of dielectric 1 which outside conductor 5 and open face 4 touch. In Drawing 3 (c), electrode 62 for frequency adjustments has flowed with outside conductor 5. And electrode 62 for frequency adjustments is provided in the Taber part 72 formed in the part or the all circumference of a corner of dielectric 1 which outside conductor 5 and open face 4 touch. Drawing 3 (a) Which surface or end of electrode 60~62 for frequency adjustments of ~ (c) does not project rather than open face 4, and is a formation method of electrode 60~62 for frequency adjustments, It is formed at the same process as inner conductors 3a and 3b and outside conductor 5, and is attained by removing the unnecessary metal layer on open face 4. Minimized electrode 60~62 for frequency adjustments under frequency adjustment is obtained, without obtaining by this inner conductors 3a and 3b and outside conductor 5, and electrode 60~62 for frequency adjustments that flowed completely, and increasing the conventional manufacturing process. Although the above-mentioned example explained using the dielectric coaxial resonator which produced two elements from dielectric 1, dielectrics 1-1 or three elements or more may be produced. [Effect of the Invention] As mentioned above, as explained in full detail, according to a dielectric coaxial resonator of the present invention, and a manufacturing method for the same, it is, Since the electrode for frequency adjustments, an inner conductor or an outside conductor, and a joining section enter inside a dielectric when the inner conductor of a dielectric or an outside conductor, and the surface of the electrode for frequency adjustments through which it flows formed in the part which becomes in an open face, the - plane, or below an open face, a reliable dielectric coaxial resonator can be attained. The electrode for frequency adjustments is formed simultaneously with the metal tunic process of an inner conductor or an outside conductor, it is attained by removing the unnecessary metal layer on an open face, the exclusive process of forming the electrode for frequency adjustments becomes unnecessary, and it can attain simplification of a process, and mitigation-ization of the material of the electrode for frequency adjustments. Since trimming processing of the electrode for frequency adjustments with easy resonance frequency @ adjustment can be performed from comparatively little variation of the predetermined resonance frequency by length control of the resonator by molding of a dielectric, it can do by shortening fine-tuning time.

[Brief Description of the Drawings]

Drawing 1 (a) is a sectional view of the dielectric coaxial resonator concerning the present invention. Drawing 1 (b) is an expanded sectional view of the open face portion of the dielectric coaxial resonator concerning the present invention. Drawing 2 is a flow chart explaining the main manufacturing processes of the dielectric coaxial resonator concerning the present invention. Drawing 3 (a) ~ (c) is a sectional view showing other examples of the present invention. It is a sectional view showing the structure of a serious-condition coaxial resonator. ■ ----- - 2a and 2b -- 3a and 3b -- 4 ----- - 5 ----- - 6.60~62 7.71 -- - 70.72 - - Dielectric Penetration hole Inner conductor Open face Outside conductor The electrode for frequency adjustments Level difference part Taper part