Sheet-feeder type processing device

[Detailed Description of the Invention]

[Industrial Application] The present invention is sputtering to electronic parts. It processes by supplying a treating part for every sheet automatically from the cassette which stored especially electronic parts about the device which processes exposure, development, etc., and is related with the device of the method which stores the electronic parts which ended processing to the cassette placed on the stowage. [Description of the Prior Art] The batch-processing method which processes by packing the same partly finished product, and the sheet processing method which processes a partly finished product for every sheet are one of the processing methods of membrane formation processing 1 grade in the inside of a chemical treatment and a vacuum. After the device of this inner sheet processing method sets the cassette which stored the product which processes to a feed section, picks out a product from an one-sheet one-sheet cassette and processes by conveying to a treating part, it is stored to another cassette set to the stowage. Therefore, there is a problem that the cassettes which store a partly finished product differ a processing front and after processing. It is the former as a method of managing the product name of the partly finished product, processing conditions, a processing history, etc. in the processing unit of such a method, The punch card which recorded the product name is attached to the cassette, and it attaches to the product, without changing the recording medium on the way to the last manufacturing process of a product, There are a method which a worker equips a punch card reader with the punch card, and reads a product name, a method which uses a magnetic card or an IC card instead of the above-mentioned punch card, a method which gives a stamp etc. directly to the cassette which stored the partly finished product, and reads it automatically, etc. [Problem(s) to be Solved by the Invention] However, the method which manages information using the above-mentioned punch card, a magnetic card, and an IC card, The recording medium same from the first manufacturing process to the last manufacturing process is attached to the partly finished product, without changing these recording media at an intermediate process, Generally, with a single wafer processing system, a processing front and after processing, since the cassettes which store a product differ, a worker extracts the recording medium attached to the cassette, and equips the card reader of a processing unit, After making information read and carrying out predetermined processing, it records on the recording medium equipped with required information by the card reader, and uses the method of attaching a recording medium to a cassette again. However, by this method, when a worker attaches a recording medium to a cassette, it puts in and changes and there is a problem of being easy to commit a mistake. This mistake is directly linked with the situation where all the products in a cassette turn into inferior goods. Although the method stamped on Cassette and A on the other hand has information automatically read and written in a processing unit, there is a problem of etc which all the processing units in a manufacturing process need to be connected to the computer of the higher rank which manages a manufacturing process, and needs to build a vast quantity of systems. [Difference to the conventional technology of an invention] The recording medium same to the final process of the conventional product mentioned above is used, To the processing unit of the method with which a worker equips a card reader with a recording medium, the present invention adopts the method which fixes a recording medium to a cassette, and has difference at the point which is a processing unit which performs automatically the reading and writing to these recording media. [Means for solving problem] The present invention fixes an IC card to the cassette which stored the partly finished product, and is a product name (product number) to the IC card, The above-mentioned information which records the processing conditions in each process, etc. beforehand, and was recorded on the IC card by the feed section of the processing unit, and the processing history of a before [ the process concerned ] are read, and it processes with this processing unit based on the information, and is S to a stowage about all these pieces of information. Management of information is enabled only by preventing the situation of committing an exchange mistake with a cassette and a recording medium, by adopting the method recorded on the IC card of the A(ed) cassette, and building a comparatively small-scale system. [Example] Next, the present invention is explained with reference to drawings. The figure where the schematic diagram where Drawing 1 expressed the composition of the 1st example of the present invention, and Drawing 2 expressed the place which fixed the IC card to the cassette in the 1st example that stores a partly finished product, and Drawing 3 are figures showing the place to which the IC card and the probe which reads and writes the information were contacted. IC card 5 which records a product name, the processing conditions in each processing process, the processed history, etc. is being fixed to the side of cassette 1 which stores a product. On the other hand, a processing unit has feed section 3 which takes out one product before processing at a time to the both ends of treating part 2 which performs development, Engineering, Ting, etc. automatically, and is supplied to them at treating part 2, and stowage 4 which stores the processed product in cassette 1. Probe 7 which carries out terminal 6 and electric interengagement of IC card 5 fixed to cassette 1 is attached to each of this feed section 3 and stowage 4. Probe 7 attached to method stowage 4 of - at reading section 8 in which probe 7 attached to feed section 3 reads the information on an IC card is respectively connected to write-in part lO which writes information in an IC card. Reading unit 8 and write-in part 10 are connected via control part 9 which controls these. One partly finished product [ one ] stored by the cassette is automatically picked out from a cassette by a feed section, it is sent to a treating part, and processing is performed. On the other hand, the empty cassette is set to the stowage, and the product which processing completed is automatically stored to a cassette. When an empty cassette is set to a stowage, the reading unit is [ the cassette in which the method of controlling information by this processing unit stored the product to the feed section ] S to a feed section. Reading the information currently recorded from the IC card of the cassette A(ed), a write-in part eliminates the information on the IC card of the cassette set to the stowage. The read information is written in the IC card of the cassette which is transmitted to a control part, and also is transmitted to a write-in part, and is set to the stowage. It records on the IC card of the cassette which transmits to required write-in information parts, such as conditions processed when the control part controlled each part, and processed the product and processing was completed based on this read information, and is set to the stowage. Drawing 4 and Drawing 5 explain the 2nd example by the present invention. The figure showing the state where Drawing 4 fixed to the bottom of a cassette the IC card which records information, and Drawing 5 are figures showing the portion which reads and writes the IC card. IC card 5 which records information is being fixed to the bottom of cassette 1 where terminal area 6 is projected from the bottom of cassette 1. Socket 11 is attached to the portion which, on the other hand, reads and writes the information on an IC card in supply and a stowage instead of probe 7 of the 1st example (not shown). When IC card 5 fixed to cassette 1 sets cassette 1 to a feed section and a stowage, it inserts terminal area 6 of IC card 5 in socket 11. It is electrically connected now with an IC card, a reading section, and a write-in part, and a product and information are processed by the same method as the 1st example. [Effect of the Invention] As explained above, in the method by the present invention, the cassette and the IC card are being fixed and committing an exchange mistake with the cassette and information recording medium which had become a problem by the conventional method is lost. The recorded information is reading at the key point of the manufacturing process of a product, If the information currently recorded is transmitted to the computer of a higher rank here and the information on subsequent manufacturing processes is newly recorded when progress management of a product, management of a track record, etc. can be performed and the storage capacities of an IC card run short, a manufacturing process with very much amount of information is also usable. Therefore, even if it is necessary to connect no processing units of a manufacturing process to the computer of a higher rank and does not build a huge information management system, it is possible to manage information easily.

[Brief Description of the Drawings]

It is a figure in which Drawing 1 shows the schematic diagram of the composition of the present invention, and Drawing 2 shows the fixed position of a cassette and an IC card, The figure showing the state where Drawing 3 is contacting the probe to the IC card, the figure showing the 2nd example Drawing 4 indicates the fixing method of a cassette and an IC card to be, and Drawing 5 are figures showing the state where the IC card of Drawing 4 was inserted in the socket. l [ ...... A stowage, 5 / ...... An IC card, 7 / ...... A probe, 8 / ...... A reading section, 9 / ...... A control part, 10 / ...... Write-in part representative / Patent attorney The Uchihara sound, Kaya 2 m ] ...... A cassette, 2 ...... A treating part, 3 ...... A feed section, 4 Kaya 3 bacillus Doo 4 r!lJ Kaya S U