Electrical test device to test equipment under test and electric testing method

The present invention comprises a conductor substrate that is electrically coupled to the inspection head via a contact spacing converter, the conductor substrate being mechanically coupled to and thereby reinforced by a first reinforcing device. It relates to an electric inspection device for inspecting an electric subject.

The types of electrical inspection equipment listed at the beginning are known. This electrical inspection device is used for making electrical contact with an electrical subject such as a wafer. This is a contact contact, which connects an electrical circuit to a test device that inspects the electrical operability of the subject. In this way, operational subjects can be distinguished from inoperable subjects. Known electrical inspection devices have a conductor substrate that is electrically coupled to the inspection head via a contact spacing converter. The contact needle of the test head is electrically coupled to the contact spacing converter and is used to contact the subject. The conductor substrate is electrically coupled to the test device described above. Due to the ever-increasing integration density, the contact spacing of the subject is very small, so contact spacing converters have been planned to increase the testable wiring density between the contact head and the conductor substrate. , This contact spacing converter changes the small contact spacing of the contact needles of the inspection head to a larger contact spacing, where the larger contact spacing is the same size contact spacing on the conductor substrate. And the conductor substrate preferably achieves further expansion of the contact spacing, and finally the contacts of the conductor substrate with this larger contact spacing are adequately cable-coupled. Or by an analog thereof, it is combined with the test device. In this case, there is at least one subassembly required for electrical coupling between the conductor substrate and the contact head, so there is not always sufficient alignment of the relevant parts to provide the contact, and therefore. The operability of such an electrical inspection device is uncertain. In this regard, it must be stated that the contact head is exclusively in electrical contact with the contact spacing converter and the contact spacing converter is in contact with the conductor substrate, respectively.

<p> Therefore, the subject of the present invention is to provide an electric inspection apparatus for inspecting an electric subject, which has high contact certainty and operation certainty, whereby the inspection of the electric subject can be carried out without error. That is.</p>

<p> According to the present invention, according to the present invention, after incorporating the above-mentioned features, at least one spacer penetrating the conductor substrate is mechanically coupled to the contact portion spacing converter, and the inclination adjusting means is provided on the first reinforcing device. It is solved by holding by. When the inspection contact density is high, the total contact contact force acting on the conductor substrate can be a large value. A first reinforcing device is assigned to avoid mechanical deformation of the conductor substrate due to this contact force. The present invention provides contacts for error-free electrical contact between the contact head and the conductor substrate, with the intervention of a contact spacing converter and possibly additional electrical coupling means (connectors). It is intended that the partial spacing converter (space converter) is arranged so that it can be tilted and displaced relative to the conductor substrate. For this purpose, an inclination adjusting means for performing an inclination displacement through at least one spacer that penetrates the conductor substrate and is mechanically coupled to the contact part spacing transducer is provided. In particular, an tilting element that is mechanically coupled to the contact spacing transducer via at least one spacer that penetrates the conductor substrate and is held in the first reinforcing device so that it can be tilted and displaced via a tilt adjusting means. Can be provided. For this reason, the reinforcing device and the tilting element form a rigid structure provided by the spacer in them, and a conductor substrate exists between both portions. However, since this conductor substrate is pierced by at least one spacer, the tilting motion of the tilt plate causes the motion corresponding to the contact spacing converter via the spacer. However, the conductor substrate does not change its position. At least one spacer penetrates at least one opening of the conductor plate, preferably without contact. In order for the tilting element to be tilted relative to the conductor substrate, the tilting element is held by a first reinforcing device via tilt adjusting means, which further displaceably couples with the conductor substrate. Has been done. In other words, when the tilting element is tilted relative to the first reinforcing device, this is the contact part spacing transducer (space change). Causes a corresponding tilting motion of the conductor substrate (also called a converter). Whether or not the embodiments of the present invention include tilting elements, the reference plane of the contact spacing converter is tilt-fitted relative to the reference plane of the conductor substrate. This allows the contact spacing transducer and conductor substrate to be aligned relative to each other in a desirable manner, which, on the other hand, allows the contact needle of the inspection head to generate excellent contacts to the electrical subject (wafer). And, on the other hand, it can also ensure good contact with the conductor substrate, optionally with the intervention of electrical coupling means (connectors).</p><p> According to one variant of the invention, it is intended that the spacer penetrates the first reinforcing device. As a result, the spacer reaches the side of the first reinforcing device opposite to the conductor substrate, whereby the inclination adjusting means can be provided on the side opposite to the conductor substrate.</p><p> According to one variant of the invention, it is intended that the conductor substrate has a first contact surface, which is coupled to the opposing contact surface of the contact spacing converter via contact means. ing. The mentioned contact means is the above-mentioned electrical coupling means and is also called a connector. This contact means is in contact contact with the first contact surface of the conductor substrate, and is also in contact contact with the opposite contact surface of the contact portion spacing converter.</p><p> It is advantageous for the contact means to compensate for the angular displacement between the conductor substrate and the contact spacing transducer caused by the tilt adjustment. Therefore, the contact means maintains contact contact with the first contact surface of the conductor substrate and the opposing contact surface of the contact spacing converter during tilt displacement between the reference plane of the conductor substrate and the reference plane of the contact spacing converter. As such, the contact means is flexibly formed.</p><p> A variant of the invention is intended for the contact spacing converter to have a second contact surface, which is electrically with the contact probe / contact needle of the inspection head, especially the flexed needle. I'm in contact. The inspection head preferably has guide plates spaced apart from each other, which guide plate comprises a guide opening, which is penetrated by a contact probe specifically formed as a bending needle. ing. One end of the bending needle is in contact contact with the second contact surface of the contact interval transducer, and the other end of the bending needle is used for contact contact with the electrical contact of the subject. .. Therefore, when the subject is electrically inspected, the inspection device and the subject move toward each other in order to bring about contact contact with the subject. The test device and subject move, or only one of these subassemblies moves. This movement is performed in the longitudinal direction of the contact probe of the contact head. Since a bending needle is preferably used as the contact probe, the contact probe adapts its length by bending with respect to its longitudinal direction.</p><p> A variant of the present invention contemplates the firm (fixed) placement of contact elements for electrical contact of a subject in a contact spacing converter. Therefore, unlike the above-mentioned contact portion spacing transformer having a second contact surface, the second contact surface makes contact contact with the contact probe, and this contact probe further makes electrical contact contact with the subject. It is contemplated that the contact elements used for contact with the subject will be firmly (fixed) placed in the contact spacing converter. In this case, no preferred removable inspection head is provided.</p><p> Further, in an alternative embodiment, there is also an advantage if the contact means is arranged directly and firmly (fixedly) to the contact spacing transducer. Therefore, the contact means is directly assigned to the contact interval converter and is held by the contact interval converter. Alternatively, the contact means may be a separate subassembly element located between the conductor substrate and the contact spacing transducer.</p><p> One variant of the invention provides a second reinforcing device, the first reinforcing device is located on one side of the conductor substrate and the second reinforcing device is located on the other side of the conductor substrate. In this way, the conductor substrate is reinforced from both sides by mechanically coupling both reinforcing devices to the conductor substrate. In particular, it can be attempted that both stiffeners are squeezed towards each other by appropriate tightening means, thereby accommodating the conductor substrate in between, especially while pinching and striking support.</p><p> A preferred embodiment of the present invention preferably contemplates assigning a contact spacing transducer to the second reinforcing device. In particular, the second reinforcing device has an accommodating through hole, and the contact portion spacing converter is at least partially accommodated in the accommodating through hole without contact. This configuration allows the second reinforcing device to be assigned directly to the conductor substrate, and the accommodating through hole allows the contact spacing converter to be assigned closer to the conductor substrate. Occurs. The contact spacing transducer must not be in contact with the second stiffener in order to trigger the tilting motion of the contact spacing transducer induced by the tilting element. Therefore, by accommodating the contact portion interval converter without contacting it in the accommodating through hole of the second reinforcing device, the tilting motion is not hindered.</p><p> For the above-mentioned tilt adjustment, it is preferable that the tilt adjusting means is provided in the form of a screw bolt. This screw bolt can be formed as an adjusting bolt and / or a position fixing bolt. Adjusting bolts are used to provide the proper angular position of the tilting element with respect to the first stiffener, and positioning bolts are used to fix the angular position. For this purpose, the adjusting bolt is adjustablely screwed into the tilting element, and the adjusting bolt is stretched and supported by the first reinforcing device at one end thereof. The position fixing bolt is screwed into the first reinforcing device and is in contact with the tilting element while being pressed by the head. Tilt adjustment can be done in another way. In particular, the bolt can be provided with a gap gauge tape (a special film available in very fine thickness steps) underneath. The special film is preferably made of steel or nickel silver.</p><p> The inclined element is preferably formed as an inclined plate. The conductor substrate is particularly formed as a conductor plate. The first and / or second reinforcing device is preferably formed in a plate shape.</p><p> According to a variant of the invention, it is contemplated that the spacer will include a separating sleeve. The separation sleeve is secured to the contact transducer at one end and to the tilting element at the other end.</p><p> It is preferred that there be an alignment means, which aligns the conductor substrate laterally with respect to the contact spacing transducer and in this way transforms the first contact surface of the conductor substrate into contact spacing conversion. It can be positioned relative to the opposite contact surface of the vessel, which allows the intervening contact means (connectors) to align the assigned first contact surfaces with each other without electrical defects. Allows them to be combined.</p><p> According to one variant of the invention, it may be intended to place the tilt adjusting means in a spacer. This tilt adjusting means cooperates with the first reinforcing device.</p><p> Further, it is preferable to provide a plurality of spacers that are spaced apart from each other.</p><p> Further, the present invention relates to a method for electrical inspection of an electrical subject, and in particular, includes a conductor substrate electrically coupled to an inspection head via a contact part spacing transducer, and the conductor substrate is the first At least one spacer that is mechanically coupled to the reinforcing device and is reinforced by it and penetrates the conductor substrate is mechanically coupled to the contact spacing transducer and tilted on the first reinforcing device. The present invention relates to a method using the above-mentioned inspection apparatus, which is held via an adjusting means.</p><p> A further advantageous embodiment of this method is apparent from the claims.</p><p> The drawings specifically illustrate the invention based on exemplary embodiments.</p>

<figref num="1">It is a schematic vertical cross-sectional view of an electrical inspection device for inspection of an electrical subject, but does not show all the parts of the inspection device.</figref><figref num="2">It is a vertical cross-sectional perspective view of the inspection apparatus of FIG. 1 in which the contact head is not displayed.</figref><figref num="3">It is a perspective view of the contact part spacing converter and the inclination element of an inspection apparatus.</figref><figref num="4">It is a perspective view of the configuration of FIG. 3, but is a view seen from another viewing angle.</figref><figref num="5">It is a vertical sectional view of one area of an electric inspection apparatus which does not display a contact head.</figref><figref num="6">It is a vertical sectional perspective view of one area of an electric inspection apparatus based on a further exemplary embodiment.</figref><figref num="7">It is a detailed view of the inspection apparatus of FIG.</figref><figref num="8">It is a further detailed view of the inspection apparatus of FIG.</figref>

Figure 1 shows inspection equipment 1, but does not show all parts of inspection equipment. The inspection device 1 has a contact head 2 (also referred to as an inspection head 2), and the contact head 2 includes a contact probe 4 displaceably supported in the guide drilling portion 3, and the contact probe 4 is provided. 4 is preferably formed as a bending needle. The contact probe 4 includes a free end 5, which can make contact contact with a contact portion of an electrical subject (not shown). To this end, the test device 1 is lowered onto the subject, or the subject is brought closer to the test device 1, or both parts are moved toward each other. The other end 6 of the contact probe 4 is in contact contact with the contact spacing transducer 7, which provides a support 8 and an electrical contact spacing converter 9. Have. The support portion 8 is preferably formed as a metal support portion. The contact portion spacing conversion circuit 9 is firmly (fixedly) coupled to the ceramic support portion 8. The support portion 8 includes an accommodating portion 10, and a contact portion spacing conversion circuit 9 is embedded and accommodated in the accommodating portion 10. The contact portion spacing converter 7 includes a reference surface 11 on the side facing the contact head 2. In particular, the conductor substrate 12 in the form of the conductor plate 13 is arranged with a slight distance from the contact portion interval converter 7. The conductor plate 13 has a first contact surface 14, which is electrically coupled to the surface contact portion 15, and the first contact surface 14 is on one side 16 of the conductor substrate 12. And the surface contact portion 15 is arranged on the other side 17. An electrical contact means 18 is arranged between the contact portion spacing converter 7 and the conductor substrate 12, and the contact means 18 includes an electrical contact portion 20 on the insulating support portion 19. The contact portion spacing converter 7 is located on the side 21 facing the conductor substrate 12 and has an opposed contact within the region of the contact portion spacing conversion circuit 9 of the contact portion spacing converter 7. A surface 22 is provided, and the facing contact surface 22 is electrically coupled to the first contact surface 14 via the contact portion 20. The contact portion spacing converter 7 has a second contact surface 23 within the region of the contact portion spacing conversion circuit 9, and the second contact surface 23 is electrically coupled to the facing contact surface 22. There is. The end portion 6 of the contact probe 4 is in contact with the second contact surface 23 in contact with the second contact surface 23.

Seen from a subject not shown, test device 1 has the following electrical pathways: Here, for the sake of simplicity, only one route will be described. Another route corresponds to this described route. When inspecting an electrical subject, the contact portion of the subject is brought into contact contact with the end 5 of the contact probe 4, and the other end 6 of the contact probe 4 is in contact contact with the second contact surface 23. The second contact surface 23 is connected to one of the facing contact surfaces 22 by a conducting wire in the contact portion spacing conversion circuit 9, and one of the contact portions 20 is connected to the facing contact surface 22. One end is in contact contact, at which time the other end of the contact portion 20 is in contact contact with one of the first contact surfaces 14, which is in contact with the first contact surface 14. In the conductor substrate 12, it is connected to one of the surface contact portions 15 by a conducting wire. The surface contact portion 15 is coupled to the test device via a transmission line (not shown). Overall, it becomes clear that an electrical test flow path can be created between the test device and the subject to test the subject for error-free electrical operation. The contact portion spacing of the contact probe 4 corresponds to the contact portion density of the subject. The contact spacing converter 7 is used to convert this narrow contact spacing to a non-narrower contact spacing. This can be read from FIG. 1, because in FIG. 1, the opposing contact surfaces 22 have a greater distance from each other than the second contact surface 23. By making the contact portion spacing of the surface contact portion 15 larger than the contact portion spacing of the first contact surface 14, the contact portion spacing of the first contact surface 14 is expanded again by the conductor substrate 12.

An tilting device 25 (FIG. 2) is provided to be able to align the tilt of the reference plane 11 of the contact spacing converter 7 with respect to the reference plane 24 of the conductor substrate 12. The reference surface 24 of the conductor substrate 12 corresponds to the surface 16 of this component.

FIG. 2 shows the configuration of FIG. 1 again, but the contact head 2 and the contact means 18 are not drawn, and the area of the inspection device 1 facing downward in FIG. 1 is shown in FIG. Now it's looking up. From FIG. 2, it is further clear that the first reinforcing device 26 and the second reinforcing device 27 are assigned to the conductor substrate 12. The first reinforcing device 26 is in contact with the surface 17 of the conductor substrate 12. The second reinforcing device 27 is arranged on the surface 16 of the conductor substrate 12. The two reinforcing devices 26 and 27 are fixed to each other via a tightening means 28, whereby the reinforcing device accommodates and thus reinforces the conductor substrate 12 while sandwiching it.

The second reinforcing device 27 is provided with an accommodating through hole 29, and the contact portion spacing converter 7 is accommodated in the accommodating through hole 29 without contact. The contact spacing converter 7 is then held by a plurality of spacers 30, which penetrate the opening 31 of the conductor substrate 12 without contact and lead to the tilting element 32. The inclined element 32 is particularly formed as an inclined plate 33. The tilting element 32 is tiltably coupled to the first reinforcing device 26 via a tilt adjusting means 34. The spacer 30 penetrates the opening 35 of the first reinforcing device 26 without contacting it.

From FIG. 5, the structure of the inclination adjusting means 34 can be clearly recognized. The inclination adjusting means 34 has bolts 36 and 37, the bolt 36 is formed as an adjusting bolt 38, and the bolt 37 is formed as a position fixing bolt 39. From FIGS. 3 and 4, it is clear that the tilting element 32 has a plurality of adjusting bolts 38 and positioning bolts 39 spaced apart from each other, one adjusting bolt 38 and one positioning bolt 39, respectively. Position fixing bolts 39 are adjacent to each other. In the exemplary embodiments of FIGS. 3 and 4, the tilting element 32 is formed as a rectangular tilting plate 33, the tilting plate 33 having an overhang 40 in each of its four side regions. One adjusting bolt 38 and one position fixing bolt 39 are assigned to each of the overhanging portions 40.

According to FIG. 5, in this configuration, each of the adjusting bolts 38 is adjustably screwed into the screw hole 41 of the tilting element 32 by its threads, and at one end 42 of the adjusting bolt. , It can be said that it is supported by the outer surface 43 of the first reinforcing device 26. The assigned position fixing bolt 39 is screwed into the screw hole 44 of the first reinforcing device 26, and is in contact with the inclined element 32 while being pressed by the head 45 of the position fixing bolt. Therefore, the position fixing bolt 39 pulls the inclined element 32 toward the first reinforcing device 26, whereby the end portion 42 of the adjusting bolt 38 is pressed against the outer surface 43 of the first reinforcing device 26. From all of these, it is clear that the spacing position of the tilting element 32 with respect to the first reinforcing device 26 can be adjusted according to the protruding length of the adjusting bolt 38, that is, the screwing depth. Since a plurality of pairs of adjusting bolt 38 and positioning bolt 39 are provided, the tilt adjusting means 34 can adjust the tilt position of the tilt element 32 relative to the first reinforcing device 26 to a desired position. .. Since the tilt element 32 is rigidly connected to the contact interval converter 7 via the spacer 30, when the tilt of the tilt element 32 is adjusted, the position of the contact spacing converter 7 and particularly the tilt position are the same. Is changed to. From this, it is clear that the tilt adjusting means 34 can adjust the reference surface 11 of the contact portion spacing converter 7 relative to the reference surface 24 of the conductor substrate 12.

From FIGS. 2 to 5, the alignment means 46 in the form of the alignment pin 47 is further clarified, and the alignment means 46 is used for the lateral alignment of the conductor substrate 12 with respect to the contact portion spacing converter 7. Used. This alignment, also referred to as registration, aligns the first contact surface 14 with respect to the opposing contact surface 22 in the plane direction of the conductor plate 13 in a preferred manner. For this reason, a rod-shaped, preferably non-rounded, particularly elliptical, aligning means 46 provides a corresponding guide opening 48 in the conductor substrate 12 and a guide opening 49 in the contact spacing converter 7. It penetrates. The alignment means 46 is fixed to the tilting element 32 by the fixing bolt 50. The guide openings 48 and 49 are shaped to fit snugly into the pin-shaped alignment means 46. The positioning means 46 penetrates the opening 51 of the first reinforcing device 26 without contacting the opening 51.

From all this, it is clear that a defined spacing between the contact spacing transducer 7 and the tilting element 32 is guaranteed, preferably based on the spacer 30 formed as a separation sleeve. The contact spacing conversion circuit 9 is preferably irremovably coupled and preferably adhered to the support 8. In particular, the four adjusting bolts 38, at their ends 42, exert pressure on the first reinforcing device 26, also known as the back stiffener. Therefore, the distance between the tilting element 32 and the first reinforcing device 26 can be adjusted by the four adjusting bolts 38. Since the first reinforcing device 26 is firmly (fixedly) coupled to the conductor substrate 12 and the tilting element 32 is fixed to the contact spacing converter 7, after all, the adjusting bolt 38 Therefore, the angle between the reference surface 11 of the contact portion spacing converter 7 and the reference surface 24 of the conductor substrate 12 can be displaced / adjusted. After such an angle adjustment between the reference planes 11 and 24 described above, this process is terminated by tightening the position fixing bolt 39. This fixes the reference planes 11 and 24 adapted to each other.

6-8 relate to further exemplary embodiments of the inspection device. As for this further exemplary embodiment, the embodiments for the exemplary embodiments of FIGS. 1-5 have been applied accordingly, and therefore only the differences will be discussed below. Unlike the exemplary embodiments described so far, the exemplary embodiments of FIGS. 6-8 do not have a tilting element. According to FIG. 6, which shows a cross section of the inspection apparatus 1 based on a further exemplary embodiment, the appearance of FIG. 6 is rotated 180 ° with respect to the appearance of FIG. 2 of another exemplary embodiment. However, it is clear that a plurality of spaced spacers 30 in the form of bolts 60 are fixed to the contact spacing converter 7. The bolt 60 has a head 61, which is firmly (fixed) in the accommodating portion 62 of the contact spacing transducer 7 by screwing the bolt 60 into the screw hole 63 of the contact spacing transducer 7. Is included. The shaft 64 of the bolt 60 penetrates the guide opening 48 of the conductor substrate 12 with a gap, and bites into the accommodating portion 65 of the first reinforcing device 26.

According to FIG. 7, each housing 65 has a large diameter section 66 with female threads, a relatively small diameter unthreaded section 67 connected to it, and a smaller diameter and similarly threaded section. It has a section 68 and not. Section 68 has play with respect to the shaft 64 of the assigned bolt 60. A nut 69 is screwed to the thread of the screw bolt 60, and the nut 69 is supported by a flange 70 in a step 71'. Step 71'is formed between sections 66 and 67. On the other side of the flange 70 is a screw ring 71, which has a male screw 72, which is screwed into the female screw of section 66. The inside of the screw ring 71 covers the short tube 73 of the nut 69. The screw ring 71 presses the nut 69 against the step 71'in a screwed state.

From all this, the contact spacing transducer 7 can be adjusted relative to the conductor substrate 12 with a reasonably desirable tilt by screwing each nut 69 onto each screw bolt 60 reasonably deeply. Is revealed, and the respective nut positions are fixed by screwing and fixing the related screw ring 71.

Further, from FIGS. 6 to 8, unlike the case of the exemplary embodiment of FIGS. 1 to 5, the contact portion spacing conversion circuit 9 is not adhered to the inside of the accommodating portion 10, but the accommodating portion of the support portion 8 is attached. It can be read that it is placed in 10 and held by the clamp plate 75 overlying, held by the holding bolt 74. The clamp small plate 75 covers the contact portion spacing conversion circuit 9. Clamp springs 76 are provided on the two sides of the accommodating portion 10 in order to maintain a reproducible position of the contact spacing conversion circuit 9 within the rectangular or square recess 10, and the clamp spring 76 is a contact. The spacing conversion circuit 9 is pressed against the correspondingly opposed edges 77 of the accommodating section 10, thereby ensuring highly accurate positioning.

The above-mentioned types of positioning of the contact portion spacing conversion circuit 9 can of course be provided in the exemplary embodiments of FIGS. 1 to 5. On the other hand, of course, the exemplary embodiments of FIGS. 6-8 can also have a bonded contact spacing conversion circuit 9.

The installation height of the inspection device 1 of the exemplary embodiment of FIGS. 6 to 8 is relatively small due to the absence of the inclined plate. In this embodiment, the inclined plate can be eliminated, so that the cost is also reduced.

1 Inspection equipment 2 contact head 3 Guide perforation 4 contact probe 5 free end 6 The other end 7 Contact spacing converter 8 Support 9 Contact spacing conversion circuit 10 containment 11 Reference plane 12 Conductor substrate 13 Conductor plate 14 1st contact surface 15-sided contact 16 One side of the conductor substrate 17 The other side of the conductor substrate 18 Contact means 19 Insulation support 20 contact part 21 Contact spacing G The side of the converter facing the conductor substrate 22 Opposed contact surface 23 Second contact surface 24 Reference plane 25 tilting device 26 1st reinforcement device 27 2nd reinforcement device 28 Tightening means 29 Containment through hole 30 spacer 31 opening 32 Tilt element 33 Inclined plate 34 Tilt adjustment means 35 openings 36 screw bolt 37 screw bolt 38 Adjusting bolt 39 Position fixing bolt 40 Overhang 41 Screw holes 42 end 43 exterior 44 screw holes 45 head 46 Alignment means 47 Alignment pin 48 Guide opening 49 Guide opening 50 fixing bolt 51 opening 60 screw bolt 61 head 62 Containment section 63 Screw holes 64 shaft 65 containment 66 sections 67 sections 68 sections 69 nut 70 flange 71 screw ring 71'stage 72 male screw 73 Short pipe 74 Retaining bolt 75 clamp plaque 76 Clamp spring 77 rim