Power supply noise resistance testing circuit and power supply noise resistance testing method
14 claims: 11 independent, 3 dependent
- 1半導体チップ上に形成される機能ブロックのデータ入力部にテストパターンを印加すると共に、前記機能ブロックの給電部に電源ノイズを重畳した電圧を供給して前記機能ブロックの電源ノイズ耐性を検査する電源ノイズ耐性検査回路であって、 前記機能ブロックの周辺又は内部に設けられ、前記電源ノイズを生成する電源ノイズ生成回路と、 該電源ノイズ生成回路の電源部と前記機能ブロックの電源部とを接続し、前記電源ノイズを伝搬させる接続路とを備え てな る と共に、 前記電源ノイズ生成回路は、複数段のノイズ生成回路から構成され、前記ノイズ生成回路の出力部に前記機能ブロックの稼動時にオンチップキャパシタが接続されている ことを特徴とする電源ノイズ耐性検査回路。
- 2前記電源ノイズ生成回路は、前記電源ノイズを生成させる駆動制御手段とを備えることを特徴とする請求項1記載の電源ノイズ耐性検査回路。
- 3前記機能ブロックの電源部は、前記機能ブロックの主電源であることを特徴とする請求項1又は2記載の電源ノイズ耐性検査回路。
- 4前記機能ブロックの電源部は、前記機能ブロックの主電源以外の電源であることを特徴とする請求項1又は2記載の電源ノイズ耐性検査回路。
- 5前記ノイズ生成回路の出力部は、正相の出力部と逆相の出力部とを有し、各出力部毎に前記機能ブロックの稼動時にオンチップキャパシタが接続されることを特徴とする請求項 1 記載の電源ノイズ耐性検査回路。
- 6前記ノイズ生成回路は、前記駆動制御手段から出力されるノイズ信号と基準電位とを前記駆動制御手段から出力されるテストモード信号によって選択する第1のセレクタと、クロック信号と基準電位とを前記駆動制御手段から出力されるテストモード信号によって選択する第2のセレクタと、前記第1のセレクタの出力に接続される第1の入力と前記第2のセレクタの出力に接続される第2の入力とを有する双安定回路と、該双安定回路の出力に接続されるドライバとからなり、該ドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続されることを特徴とする請求項 2 記載の電源ノイズ耐性検査回路。
- 7前記ノイズ 生成回路は、前段の前記ドライバの出力信号が前記ノイズ信号として当該段の前記第1のセレクタに供給され、前記クロック信号が当該段の第2のセレクタに供給され、当該段の前記ドライバの出力信号が前記ノイズ信号として次段の前記第1のセレクタの出力に供給され、前記クロック信号が次段の第2のセレクタに供給されることを特徴とする請求項 6 記載の電源ノイズ耐性検査回路。
- 8前記ノイズ 生成回路は、初段が、前記駆動制御手段から出力されるノイズ信号と基準電位とを前記駆動制御手段から出力されるテストモード信号によって選択する第1のセレクタと、クロック信号と基準電位とを前記駆動制御手段から出力されるテストモード信号によって選択する第2のセレクタと、前記第1のセレクタの出力に接続される第1の入力と前記第2のセレクタの出力に接続される第2の入力とを有する双安定回路と、該双安定回路の出力に接続される第1のドライバとを有し、該第1のドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続される構成とされ、次段は、前記第1のドライバの出力に接続される第 2 のドライバを有し、該第 2 のドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続される構成とされ、前記次段以降の各段も前記次段と同様に構成されることを特徴とする請求項 2 記載の電源ノイズ耐性検査回路。
- 9前記ノイズ生成回路は、初段が、前記駆動制御手段から出力されるノイズ信号と基準電位とを選択する第1のセレクタと、クロック信号と基準電位とを選択する第2のセレクタと、前記第1のセレクタの出力に接続される第1の入力及び前記第2のセレクタの出力に接続される第2の入力並びに正相出力及び逆相出力を有する双安定回路と、該双安定回路の正相出力に接続される第1のドライバと、前記双安定回路の逆相出力に接続される第2のドライバとを有し、前記第1のドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続され、前記第2のドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続される構成とされ、次段以降の各段は、前記第1のドライバの出力信号を順次伝搬する正相のノイズデータ伝搬系を構成するセレクタ、双安定回路及びドライバを有し、該ドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続さ れ て構成され、前記第 2 のドライバの出力信号を順次伝搬する逆相のノイズデータ伝搬系を構成するセレクタ、双安定回路及びドライバを有し、該ドライバの出力に前記機能ブロックの稼動時にオンチップキャパシタが接続さ れ て構成されることを特徴とする請求項 2 記載の電源ノイズ耐性検査回路。
- 10前記オンチップキャパシタは、半導体素子から構成され、該半導体素子の制御電極は前記ノイズ生成回路の出力部に接続されることを特徴とする請求項 1、6、8又は9 記載の電源ノイズ耐性検査回路。
- 11前記オンチップキャパシタは、第1の導電形の電界効果型トランジスタと、導電形が前記第1の導電形とは逆極性である第 2 の導電形の電界効果型トランジスタと、出力が前記第2の導電形の電界効果型トランジスタのゲートに接続されるインバータとからなり、前記第1の導電形の電界効果型トランジスタのゲートと前記インバータの入力とが前記ドライバの出力に接続されることを特徴とする請求項 10 記載の電源ノイズ耐性検査回路。
- 12前記第1のドライバに接続さる前記オンチップキャパシタは、第1の導電形の電界効果型トランジスタで、前記第 2 のドライバに接続される前記オンチップキャパシタは、導電形が前記第1の導電形とは逆極性である第 2 の導電形の電界効果型トランジスタであることを特徴とする請求項 9 記載の電源ノイズ耐性検査回路。
- 13半導体チップ上に形成される機能ブロックのデータ入力部にテストパターンを印加すると共に、前記機能ブロックの給電部に電源ノイズを重畳した電圧を供給して前記機能ブロックの電源ノイズ耐性を検査する電源ノイズ耐性検査回路であって、 前記機能ブロックの周辺又は内部に設けられ、前記電源ノイズを生成する電源ノイズ生成回路と、 該電源ノイズ生成回路の電源部と前記機能ブロックの電源部とを接続し、前記電源ノイズを伝搬させる接続路とを備えてなると共に、 前記電源ノイズ生成回路は、複数段のノイズ生成回路から構成され、該ノイズ生成回路は、 駆動制御手段 から出力されるノイズ信号と基準電位とを前記駆動制御手段から出力されるテストモード信号によって選択する第1のセレクタと、クロック信号と基準電位とを前記駆動制御手段から出力されるテストモード信号によって選択する第2のセレクタと、前記第1のセレクタの出力に接続される第1の入力と前記第2のセレクタの出力に接続される第2の入力とを有する双安定回路と、該双安定回路の出力に接続されるドライバとからなることを 特徴とする電源ノイズ耐性検査回路 。
- 14半導体チップ上に形成される機能ブロックのデータ入力部にテストパターンを印加すると共に、前記機能ブロックの給電部に電源ノイズを重畳した電圧を供給して前記機能ブロックの電源ノイズ耐性を検査する電源ノイズ耐性検査方法であって、 前記機能ブロックの外周又は内部に形成された請求項 1乃至13 のいずれか一に記載の電源ノイズ耐性検査回路の前記電源ノイズ生成回路の電源から前記電源ノイズを前記機能ブロックの電源へ供給することを特徴とする電源ノイズ耐性検査方法。
Independent claims14
34 paragraphs, as filed
The present invention relates to a power supply noise immunity inspection circuit, and more particularly to a power supply noise immunity inspection circuit and a power supply noise immunity inspection method for optimizing the generation of power supply noise necessary for performing a power supply noise immunity inspection of a functional block.
With the evolution of the LSI manufacturing process, LSIs are becoming faster, more integrated, and lower in voltage, and in recent years, LSI malfunction due to power supply noise has become a major problem. Until now, past experience, evaluation results with TEG (evaluation sample chip), simulation results, etc. are fed back to the LSI manufacturing process, and design considering power supply noise immunity when designing an LSI (for example, power supply wiring structure and on). Although the chip capacitors are arranged, etc.), the power supply noise immunity of the LSI changes due to manufacturing variations and the like. Therefore, there is a need for a method that can easily measure the power supply noise immunity during shipment inspection, acceptance inspection, or defect analysis of LSI.
In the past, techniques for power supply noise immunity inspection have been developed. One example thereof is described in Patent Document 1. Patent Document 1 discloses an integrated circuit measuring device, and the outline of this device is as follows. On the other hand, the power supplied from the power supply to the power supply terminal of the integrated circuit under the control of the control unit of the tester is superposed with noise by the power supply noise source under the control of the control unit, and the power is supplied to the integrated circuit. , The test pattern is input to the integrated circuit. The signal output from the integrated circuit is compared with the expected value for the test pattern by the comparator. As a result, a function test is performed with noise added to measure the noise margin.
Further, Patent Document 2 discloses an inspection device for a semiconductor device. This inspection device includes a tester that generates a first test pattern signal for a function test and a second test pattern signal that mimics power supply noise, and an evaluation board that is provided with a noise superimposition circuit and mounts a semiconductor device. The first test pattern signal is applied to the signal input terminal of the semiconductor device mounted on the evaluation board, while the second test pattern signal is applied to the noise superimposition circuit in a pseudo manner. Power supply noise is generated, and the power supply noise is applied to the power supply of the mounted semiconductor device to evaluate the resistance of the semiconductor device to the power supply noise.<patcit num="1"><text>Japanese Unexamined Patent Publication No. 05-107321</text></patcit><patcit num="2"><text>Japanese Patent Application Laid-Open No. 2003-050264</text></patcit>
<p> As mentioned above, it has been recognized in the past that it is necessary to easily measure the power supply noise immunity at the time of ship shipment inspection, acceptance inspection, or defect analysis of LSI, but the power supply noise immunity inspection of LSI is performed at all. As shown in Patent Document 1 and Patent Document 2, a power supply noise source was provided on a tester or a test board, and power supply noise was applied from outside the LSI to perform only a power supply noise immunity test. When power supply noise is applied from outside the LSI, when the integrated circuit is composed of multiple functional blocks (hereinafter referred to as IP cores in this section), the power supply noise immunity of each IP core is pinpointed. Can't be done. Further, although low-frequency power supply noise can be applied, high-frequency power supply noise, which has recently become a problem, cannot be applied.</p><p> The present invention has been made in view of the above circumstances, and the power supply noise immunity test of a functional block equipped in an electronic device can be performed in parallel with the function test of the functional block, and can be performed pinpointly and at a high frequency. It is an object of the present invention to provide a power supply noise immunity inspection circuit and a power supply noise immunity inspection method.</p>
<p> In order to solve the above problems, the invention according to claim 1 applies a test pattern to the data input portion of the functional block formed on the semiconductor chip, and superimposes power supply noise on the power supply portion of the functional block. A power supply noise generation circuit that is provided around or inside the functional block and generates the power supply noise, and a power supply noise generation circuit, which is provided in the vicinity or inside of the power supply noise resistance inspection circuit for inspecting the power supply noise tolerance of the functional block. It is provided with a connection path for connecting the power supply unit of the above power supply unit and the power supply unit of the above functional block and propagating the power supply noise.<u style="single">Tena</u>Ru<u style="single">At the same time, the power supply noise generation circuit is composed of a plurality of stages of noise generation circuits, and an on-chip capacitor is connected to the output unit of the noise generation circuit when the functional block is operated.</u>It is characterized by that.</p><p> The invention according to claim 2 relates to the power supply noise immunity inspection circuit according to claim 1, wherein the power supply noise generation circuit includes a drive control means for generating the power supply noise.</p><p> The invention according to claim 3 relates to the power supply noise immunity inspection circuit according to claim 1 or 2, wherein the power supply unit of the functional block is the main power source of the functional block.</p><p> The invention according to claim 4 relates to the power supply noise immunity inspection circuit according to claim 1 or 2, wherein the power supply unit of the functional block is a power supply other than the main power supply of the functional block.</p><p> Claim<u style="single">5</u>The described invention is claimed.<u style="single">1</u>In relation to the power supply noise immunity inspection circuit described, the output unit of the noise generation circuit has a positive phase output unit and a negative phase output unit, and each output unit has an on-chip capacitor when the functional block is operated. It is characterized by being connected.</p><p> Claim<u style="single">6</u>The described invention is claimed.<u style="single">2</u>In connection with the power supply noise immunity test circuit described, the noise generation circuit includes a first selector that selects a noise signal and a reference potential output from the drive control means by a test mode signal output from the drive control means. , The second selector that selects the clock signal and the reference potential by the test mode signal output from the drive control means, and the first input and the second selector connected to the output of the first selector. It consists of a bistable circuit with a second input connected to the output and a driver connected to the output of the bistable circuit, and an on-chip capacitor is connected to the output of the driver when the functional block is in operation. It is characterized by that.</p><p> Claim<u style="single">7</u>The described invention is claimed.<u style="single">6</u>In connection with the power supply noise immunity inspection circuit described,<u style="single">The above noise generation circuit</u>Is supplied as the noise signal of the driver in the previous stage to the first selector of the stage, the clock signal is supplied to the second selector of the stage, and the output signal of the driver of the stage is supplied. The noise signal is supplied to the output of the first selector of the next stage, and the clock signal is supplied to the second selector of the next stage.</p><p> Claim<u style="single">8</u>The described invention is claimed.<u style="single">2</u>In connection with the power supply noise immunity inspection circuit described,<u style="single">The above noise generation circuit</u>Is a first selector in which the first stage selects a noise signal and a reference potential output from the drive control means by a test mode signal output from the drive control means, and drives and controls the clock signal and the reference potential. A second selector selected by the test mode signal output from the means, a first input connected to the output of the first selector, and a second input connected to the output of the second selector. It has a bistable circuit and a first driver connected to the output of the bistable circuit, and an on-chip capacitor is connected to the output of the first driver when the functional block is operated. The next stage is the first connected to the output of the first driver above.<u style="single">2</u>Has the driver of<u style="single">2</u>An on-chip capacitor is connected to the output of the driver when the functional block is operated, and each stage after the next stage is also configured in the same manner as the next stage.</p><p> Claim<u style="single">9</u>The described invention is claimed.<u style="single">2</u>In relation to the power supply noise immunity inspection circuit described above, in the noise generation circuit, the first stage selects a first selector for selecting a noise signal and a reference potential output from the drive control means, and a clock signal and a reference potential. A bistable with a second selector, a first input connected to the output of the first selector, a second input connected to the output of the second selector, and a positive phase output and a negative phase output. It has a circuit, a first driver connected to the positive phase output of the bistable circuit, and a second driver connected to the negative phase output of the bistable circuit, and is used as the output of the first driver. The on-chip capacitor is connected when the functional block is operating, and the on-chip capacitor is connected to the output of the second driver when the functional block is operating. It has a selector, a bistable circuit, and a driver that form a positive-phase noise data propagation system that sequentially propagates the output signal of the driver, and is configured by connecting an on-chip capacitor to the output of the driver when the functional block is operating. No. 1<u style="single">2</u>It has a selector, a bistable circuit, and a driver that form a reverse-phase noise data propagation system that sequentially propagates the output signal of the driver, and is configured by connecting an on-chip capacitor to the output of the driver when the above functional block is in operation. It is characterized by that.</p><p> Claim<u style="single">10</u>The described invention is claimed.<u style="single">1, 6, 8 or 9</u>The on-chip capacitor according to the above-described power supply noise immunity inspection circuit is characterized in that the on-chip capacitor is composed of a semiconductor element, and the control electrode of the semiconductor element is connected to the output unit of the noise generation circuit.</p><p> Claim<u style="single">11</u>The described invention is claimed.<u style="single">10</u>In relation to the power supply noise immunity inspection circuit described above, the on-chip capacitor has a first conductive field-effect transistor and a conductive type having opposite polarities to the first conductive type.<u style="single">2</u>Consists of a conductive field-effect transistor and an inverter whose output is connected to the gate of the second conductive field-effect transistor, the gate of the first conductive field-effect transistor and the inverter. It is characterized in that the input of is connected to the output of the above driver.</p><p> Claim<u style="single">12</u>The described invention is claimed.<u style="single">9</u>The on-chip capacitor connected to the first driver according to the power supply noise immunity inspection circuit is the first conductive field effect transistor, and the first driver.<u style="single">2</u>The conductive type of the on-chip capacitor connected to the driver of the above is opposite to that of the first conductive type.<u style="single">2</u>It is characterized by being a conductive field-effect transistor.</p><p> Claim<u style="single">13</u>The described invention<u style="single">A test pattern is applied to the data input section of the functional block formed on the semiconductor chip, and a voltage in which power supply noise is superimposed is supplied to the power supply section of the functional block to inspect the power supply noise immunity of the functional block. The power supply noise generation circuit, which is provided around or inside the functional block and generates the power supply noise, is connected to the power supply unit of the power supply noise generation circuit and the power supply unit of the functional block. It is equipped with a connection path that propagates power supply noise, and at the same time.</u>The power supply noise generation circuit is composed of a plurality of stages of noise generation circuits, and the noise generation circuit is<u style="single">Drive control means</u>The first selector that selects the noise signal and the reference potential output from the drive control means by the test mode signal output from the drive control means, and the clock signal and the reference potential by the test mode signal output from the drive control means. A bistable circuit having a second selector to be selected, a first input connected to the output of the first selector, and a second input connected to the output of the second selector, and the bistable. To consist of a driver connected to the output of the circuit<u style="single">Features</u>。 </p><p> The invention according to claim 14 applies a test pattern to a data input portion of a functional block formed on a semiconductor chip, and supplies a voltage in which power supply noise is superimposed to a power feeding portion of the functional block to supply the functional block. A claim relating to a power supply noise immunity inspection method for inspecting power supply noise immunity, which is formed on the outer periphery or inside of the above functional block.<u style="single">1 to 13</u>It is characterized in that the power supply noise is supplied from the power supply of the power supply noise generation circuit of the power supply noise immunity inspection circuit according to any one of the above to the power supply of the functional block.</p>
<p> According to the present invention, a power supply noise generation circuit is arranged around or inside the functional block, and the power supply unit of the power supply noise generation circuit and the power supply unit of the functional block are connected by a connection path. At times, appropriate power supply noise can be supplied to each part of the functional block to inspect power supply noise immunity. In addition, the high frequency power supply noise immunity of the functional block can be inspected. Further, the power supply noise immunity can be pinpointly inspected for each functional block formed on the semiconductor chip. Further, since the on-chip capacitor operates when the functional block is in operation, the resistance to power supply noise during the operation of the functional block can be enhanced. Further, since the power supply noise generation circuit also serves as an on-chip capacitor, it is possible to minimize the area overhead for mounting the power supply noise immunity inspection circuit (power supply noise generation circuit) on the semiconductor chip.</p>
The present invention is configured by disposing a power supply noise generation circuit around or inside the functional block, and connecting the power supply unit of the power supply noise generation circuit and the power supply unit of the functional block with a connection path. The power supply noise generation circuit is configured by clock synchronization by the drive control means.
FIG. 1 is a diagram showing the electrical configuration of the power supply noise immunity inspection circuit according to the first embodiment of the present invention, and FIG. 2 is a power supply constituting the on-chip capacitor combined power supply noise generation circuit of the power supply noise immunity inspection circuit. It is a figure which shows the noise generation unit circuit. In the power supply noise immunity inspection circuit 10 of this embodiment, a noise generation circuit is arranged around a functional block (hereinafter, also referred to as an IP core) to connect the power supply of the noise generation circuit and the power supply of the IP core, and the connection thereof. It is related to the circuit that inspects the power supply noise immunity of the IP core by propagating the power supply noise to the IP core through the path. As shown in Fig. 1, the PLL and SRAM formed on the semiconductor chip and installed in the electronic equipment. , Data Path, High-speed SerDes (Serialization Deserialization), and other power supply noise-sensitive circuits (IP cores) 12 are arranged immediately around the power supply noise generation circuit 14 and the on-chip capacitor. It is composed of a control unit 16 connected to the input of the power supply noise generation circuit 14.
The power supply noise generation circuit 14 also used as an on-chip capacitor is configured by connecting a plurality of power supply noise generation unit circuits (hereinafter referred to as unit circuits) 18 shown in FIG. 2 in series, and of the power supply noise generation circuit 14 also used as an on-chip capacitor. The power supply and the power supply of the IP core 12 are connected by the power supply line 15. The unit circuit 18 is used as the output of the first selector 20 for selecting the noise data output from the control unit and the ground potential, the second selector 22 for selecting the clock signal and the ground potential, and the first selector 20. An FF circuit 24 with a connected data input and a clock input connected to the output of the second selector 22, a driver 26 connected to the output of the FF circuit 24, and an on-chip connected to the output of the driver 26. It consists of a capacitor 28.
Both the first selector 20 and the second selector 22 have a selection control input, and a selection signal is supplied to the selection control input from the control unit 16. A test mode signal of "1" is supplied as a selection signal when the IP core 12 is in the test mode, and a test mode signal of "0" is supplied as a selection signal when the IP core 12 is in operation. The on-chip capacitor 28 is composed of a pMOS transistor 29, an nMOS transistor 30, and an inverter 31. The gate of the pMOS transistor 29 is connected to the output of the driver 26 via the inverter 31, and its source and drain are connected to the ground potential. Further, the gate of the nMOS transistor 30 is directly connected to the output of the driver 26, and its source and drain are connected to the power supply. The driver 26 is for driving the unit circuit of the next stage to fluctuate the power supply voltage.
Next, the operation of this embodiment will be described with reference to FIGS. 1 and 2. When the power supply noise immunity inspection (test) of the IP core 12 by the power supply noise immunity inspection circuit 10 is started, the noise data and clock signal of the preset data pattern are output from the control unit 16 and "1". Test mode signal is output. Noise data is fed to the data input of selector 20 and test mode signals are fed to the selective input of selector 20. Noise data is applied from the output of the selector 20 to the data input of the FF circuit 24. In parallel with this application, the clock signal is supplied to the clock input of the selector 22, and the test mode signal is supplied to the selection input of the selector 22. The clock signal is applied from the output of the selector 20 to the clock input of the FF circuit 24.
Therefore, the FF circuit 24 outputs an output signal corresponding to noise data, and the driver 26 outputs noise data. At that time, the power supply voltage of the power supply noise generation circuit 14 also used as an on-chip capacitor is fluctuated, and noise is added there. This noise component is propagated from the on-chip capacitor combined power supply noise generation circuit 14 to the power supply of the IP core 12 via the power supply line 15, and the drive voltage on which the noise component is superimposed is supplied to the IP core 12. In a state where this drive voltage is supplied to the IP core 12, a test pattern for evaluating the function is applied to the data input of the IP core 12 as in the conventional case. The response result for the test pattern is output from the data output of the IP core 12, and the output data is compared with the expected value for the test pattern. From this comparison result, the resistance of the IP core 12 to the power supply noise is evaluated. Since the unit circuit 18 is clock-synchronized, the power supply noise immunity can be inspected at a high frequency.
In the power supply noise immunity inspection of the IP core 12, both pMOS29 and nMOS30 constituting the on-chip capacitor 28 are turned on / off according to the noise data pattern. Since the on-period of pMOS29 or nMOS30 is short as a whole, the weakening of the power supply noise by turning on / off the on-chip capacitor 28 is insignificant. Therefore, it does not interfere with the power supply noise immunity test of the IP core 12, and the above-mentioned high-frequency power supply noise immunity test can be successfully performed.
When the test mode signal of "0" is supplied from the control unit 16 to the selectors 20 and 22 at the end of the above-mentioned power supply noise immunity inspection, the input of the FF circuit 24 is clamped to "0", so that the FF circuit Noise data does not appear at the output of 24. Therefore, a positive voltage is output to the output of the driver 26, and both pMOS29 and nMOS30 constituting the on-chip capacitor 28 are turned on. Therefore, the on-chip capacitor 28 enters the power supply of the IP core 12 in parallel via the power supply line 15 to mitigate the influence of noise generated in the power supply, that is, to absorb the noise and to strengthen the resistance to the power supply noise of the IP core. Useful.
As described above, according to the configuration of this embodiment, the unit circuits are subordinately connected and arranged around the IP core to supply noise data to the unit circuit at the starting end, and the power supply of the power supply noise generation circuit also used as an on-chip capacitor. Since it is configured by connecting the power supply of the IP core and the power supply of the IP core, it is possible to inspect the power supply noise immunity by supplying appropriate power supply noise to each part of the IP core when testing the IP core. In addition, it is possible to inspect the high frequency power supply noise immunity of the IP core.
Further, the power supply noise immunity can be inspected for each IP core formed in the semiconductor chip, that is, the power supply noise immunity of the IP core of the semiconductor chip can be inspected pinpointly. Further, since the on-chip capacitor operates when the IP core is in operation, the resistance to power supply noise during the operation of the IP core can be enhanced. Further, since the power supply noise generation circuit also serves as an on-chip capacitor, it is possible to minimize the area overhead for mounting the power supply noise immunity inspection circuit (power supply noise generation circuit) on the semiconductor chip.
FIG. 3 is a diagram showing a unit circuit constituting the power supply noise immunity inspection circuit according to the second embodiment of the present invention. The configuration of this embodiment is significantly different from that of the first embodiment in that a driver is provided for each of the positive phase output and the negative phase output of the FF circuit, and an on-chip capacitor is provided for each driver. That is, the power supply noise immunity inspection circuit 10A (not shown in FIG. 3) of this embodiment is an FF circuit as shown in FIG. 3 of the unit circuit 18A of the first stage of the power supply noise generation circuit 14A that also serves as an on-chip capacitor. Connect the driver 26-a1 to the positive phase output of 24A, and connect the driver 26-a2 to the negative phase output of the FF circuit 24A. Then, the on-chip capacitor 28-a1 is provided at the output of the driver 26-a1, and the on-chip capacitor 28-a2 is provided at the output of the driver 26-a2. The on-chip capacitor 28-a1 consists of nMOS31 with the gate connected to the output of driver 26-a1 and the source and drain connected to the voltage source. The on-chip capacitor 28-a2 is composed of pMOS32 in which the gate is connected to the output of the driver 26-a2 and the source and drain are connected to the ground potential.
Then, in the next and subsequent stages, the same selector as described above that outputs the clock signal by the test mode signal and the noise data in the previous stage are used so that a separate power supply noise generation system is configured for each driver 26-a1 and 26-a2. A bistable circuit that receives data input and receives a clock signal that has passed through a selector to the clock input, and a driver that is connected to the output of the bistable circuit are provided for each stage of each system. Since the configuration of this embodiment other than this configuration is the same as that of the first embodiment, the same reference numerals are given to the same constituent parts, and the description thereof will be omitted one by one.
Next, the operation of this embodiment will be described with reference to FIG. Also in this embodiment, when the power supply noise immunity test is started, the control unit 16 supplies the test mode signal of 1 to the selector 20 and the selector 22, and the noise data is input to the selector 20 to select the selector. A clock signal is input to 22. Therefore, the noise data and the clock signal are supplied to the FF circuit 24A, and the output signal corresponding to the noise data is output from the positive phase output of the FF circuit 24A, while the data corresponding to the inverted noise data is output from the negative phase output of the FF circuit 2A. The reverse phase output signal of is output.
The driver 26-a1 outputs the voltage on which the noise data is superimposed, while the driver 26-a2 outputs the voltage on which the inverted noise data is superimposed. These noise components are propagated to the power supply of the IP core 12 via the power supply line (not shown in FIG. 3) of the power supply noise generation circuit 14A that also serves as an on-chip capacitor, and are resistant to power supply noise during the function test of the I core 12. Used for inspection. A test pattern signal is supplied from a tester (not shown) to the data input (not shown) of the IP core 12 driven in this way. The test result is output from the data output of the IP core 12. The test result is compared with the expected value for the test pattern signal, and the power supply noise immunity is checked during the function test.
When the power supply noise immunity test described above is performed, the nMOS and pMOS constituting the on-chip capacitors 28-a1 and 28-a2 are turned on / off according to the waveform pattern of the voltage on which the noise data is superimposed. However, since the on-chip capacitors 28-a1 and 28-a2 are turned on for a short period of time as a whole, the weakening of the power supply noise supplied to the IP core 12 is small, and the power supply noise immunity test of the IP core 12 is small. It does not interfere with.
However, when the test mode signal of "0" is supplied from the control unit 16 to the selectors 20 and 22 at the end of the power supply noise immunity inspection, the input of the FF circuit 24A is clamped to "0", so that the FF circuit Noise data does not appear on both the positive phase output and the negative phase output of 24A. Therefore, a positive voltage is output to the output of the driver 26-a1 and the nMOS31 constituting the on-chip capacitor 28-a1 is turned on. In addition, a negative voltage is output to the output of the driver 26-a2, and the pMOS32 that constitutes the on-chip capacitor 28-a2 is also turned on. Therefore, the on-chip capacitors 28-a1 and 28-a2 enter in parallel with the outputs of the drivers 26-a1 and 26-a2 to mitigate the influence of noise on the power line of the IP core 12 and tolerate the power supply noise of the IP core. Helps to strengthen.
As described above, according to the configuration of this embodiment, the same effect as that of the first embodiment can be obtained, and the power supply noise immunity test by the power supply noise generated in the first embodiment and the power supply noise of the opposite phase type is also performed. Can be done at the same time.
FIG. 4 is a diagram showing a unit circuit constituting the power supply noise immunity inspection circuit according to the third embodiment of the present invention. The major difference between the configuration of this embodiment and that of the first embodiment is that the driver alone has resistance to power supply noise. That is, the power supply noise immunity test circuit 10B (not shown in FIG. 4) of this embodiment is sufficient to obtain resistance to power supply noise without forming an on-chip capacitor as shown in FIG. The feature is that the unit circuit 18B is configured so that the driver 26B has a capacitance. Since the configuration of this embodiment other than this configuration is the same as that of the first embodiment, the same reference numerals are given to the same constituent parts, and the description thereof will be omitted one by one.
Next, the operation of this embodiment will be described with reference to FIG. The operation of this embodiment is the operation of the first embodiment, except that the capacitance of the driver 26B is effective in the same manner as that of the first embodiment in both the test mode and the non-test mode. Is the same as.
As described above, according to the configuration of this embodiment, it is possible to perform the power supply noise immunity inspection equivalent to that of the first embodiment, and it is useful to impart the immunity to the power supply noise without providing the on-chip capacitor.
FIG. 5 is a diagram showing a power supply noise generation circuit that also serves as an on-chip capacitor that constitutes the power supply noise immunity inspection circuit according to the fourth embodiment of the present invention. The configuration of this embodiment is significantly different from that of the first embodiment in that a part of one unit circuit is shared by another unit circuit. That is, the power supply noise immunity test circuit 10C (not shown in FIG. 5) of this embodiment has selectors 20-1 and 22 of one of the unit circuits 18-1 as shown in FIG. -1 and FF circuit 24-1 are shared by other unit circuits 18-2, 18-3, ..., 18-N, that is, the output of FF circuit 24-1 is shared by other unit circuits 18-2. , 18-3, ..., 18-N drivers 26-2, 26-3, ..., 26-N inputs are connected in parallel. Since the configuration of this embodiment other than this configuration is the same as that of the second embodiment, the same reference numerals are given to the same components, and the description thereof will be omitted one by one.
Next, the operation of this embodiment will be described with reference to FIG. In the operation of this embodiment, in the test mode, the selectors 20-1 and 22-1 of the unit circuit 26-1 and the FF circuit 24-1 operate in the same manner as in the first embodiment, and the signal corresponding to the power supply noise data is the FF circuit. It is supplied from 24-1 to driver 26-1, and is supplied in parallel to each subsequent driver 26-2, 26-3, ..., 26-N, and power supply noise data in non-test mode. Is clamped to 0 and the corresponding output signal is supplied in parallel from the FF circuit 24-1 to each of the subsequent drivers 26-2, 26-3, ..., 26-N, and each unit circuit 18- Similar to Example 1 except that 2, 18-3, ..., 18-N on-chip capacitors are equivalently connected in parallel to the power lines of the IP core to enhance resistance to power supply noise. It works. The description of this similar operation will be omitted one by one.
As described above, according to the configuration of this embodiment, the same effect as that of the first embodiment can be obtained, and the unit circuit can be shared.
Although examples of the present invention have been described in detail with reference to the drawings, the specific configuration of the present invention is not limited to these examples, and the design does not deviate from the gist of the present invention. Even if there are changes in the above, they are included in the present invention. For example, in the above embodiment, an example in which the on-chip capacitor combined power supply noise generation circuit is arranged around the IP core has been described, but the on-chip capacitor combined power supply noise generation circuit is arranged inside the IP core. May be good. Further, in the above embodiment, the configuration in which the noise data of the preset data pattern is input to the first stage of the unit circuit of the cascade connection constituting the power supply noise generation circuit also used as the on-chip capacitor has been described. Other power supply noise generation circuits configured by connecting to a power source other than the above can also be used in carrying out the present invention. In that case, the noise data pattern and signal propagation delay are taken into consideration.
<figref num="1">It is a figure which shows the electrical structure of the power supply noise tolerance inspection circuit which is Example 1 of this invention.</figref><figref num="2">It is a figure which shows the unit circuit which comprises the same power supply noise tolerance inspection circuit.</figref><figref num="3">It is a figure which shows the unit circuit which comprises the power source noise tolerance inspection circuit which is Example 2 of this invention.</figref><figref num="4">It is a figure which shows the unit circuit which comprises the power source noise tolerance inspection circuit which is Example 3 of this invention.</figref><figref num="5">FIG. 5 is a diagram showing a power supply noise generation circuit that also serves as an on-chip capacitor that constitutes the power supply noise immunity inspection circuit according to the fourth embodiment of the present invention.</figref>
Code description
10, 10A, 10B, 10C power supply noise immunity inspection circuit 12 IP core 14 Power supply noise generation circuit that also serves as an on-chip capacitor (power supply noise generation circuit) 15 Power line (connection path) 16 Control unit (drive control means) 18, 18A, 18B, 18-1, 18-2, ... 18-N Power supply noise generation unit circuit (noise generation circuit) 20 Selector (1st selector) 22 Selector (second selector) 24, 24A FF circuit (bi-stable circuit) 26 driver 26-1 driver (first driver) 26-2 driver (second driver) 26-a1 driver (first driver) 26-a2 driver (second driver) 28 on-chip capacitors 29, 32 pMOS (second conductive field effect transistor) 30, 31 nMOS (1st conductive field effect transistor)
5 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5
Every citation, both ways
| Document | Relation | Office |
|---|---|---|
| JP2002214300A | Cites | Japan |
| JP06058995A | Cites | Japan |
| JP2002216500A | Cites | Japan |
| JP2001264394A | Cites | Japan |
| JP59202644A | Cites | Japan |
| JP11086459A | Cites | Japan |
| JP05218302A | Cites | Japan |
4 members in 2 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 2005355156 | Japan | A | |
| JP20050355156 | – | – | – |
Members4
| Document | Office | Kind | |
|---|---|---|---|
| US2007132480A1 | United States of America | A1 | |
| JP2007155670A | Japan | A | |
| US7679394B2 | United States of America | B2 | |
| JP4940643B2This record | Japan | B2 |
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Numbers
- Publication
- 4940643
- Publication, DOCDB
- 4940643
- Publication, EPODOC
- JP4940643B
- Application
- 355156
- Application, DOCDB
- 2005355156
- Application, EPODOC
- JP20050355156
Titles2
- Japanese
- 電源ノイズ耐性検査回路及び電源ノイズ耐性検査方法
- English
- Power supply noise immunity inspection circuit and power supply noise immunity inspection method
Classification
- CPC, 2
- G01R31/3004
- G01R31/31721
- IPC, 4
- G01R31 28
- H01L21 66
- H01L21 822
- H01L27 04
