Angular velocity sensor and its manufacturing method

[0001] [Technical field to which the invention belongs] The present invention is an angular velocity sensor suitably used for detecting an angular velocity of, for example, a rotating body.<u style="single">To</u>Related. [0002] [Conventional technology] Generally, the angular velocity sensor includes a substrate, a mass portion displaceably supported by the substrate in two directions orthogonal to each other via a support beam, and the mass portion in a vibration direction parallel to the substrate in the two directions. A vibration generating means for vibrating and an angular velocity detecting means for detecting the amount of displacement when the mass portion is displaced in a detection direction orthogonal to the vibration direction as an angular velocity are known (for example, Japanese Patent Application Laid-Open No. 5-312576 Gazette, etc.). [0003] In this type of conventional angular velocity sensor, the mass portion of the X-axis parallel to the substrate and the Z-axis perpendicular to the Y-axis is vibrated with a predetermined amplitude along, for example, the X-axis direction, and Z in this state. When the angular velocity around the axis is applied, the Coriolis force in the Y-axis direction acts on the mass part. As a result, the mass part is displaced in the Y-axis direction, so that the angular velocity detecting means outputs a detection signal according to the angular velocity by detecting the displacement amount of the mass part at this time as a change in capacitance or the like. Is. [0004] In this case, the mass portion is supported by a support beam provided on the substrate so that it can be displaced (vibrated) in the X-axis direction or the like. The support beam has a configuration in which the base end side is fixed to the substrate, the tip end side is connected to the mass portion, and when the angular velocity sensor is operated, the support beam bends and deforms, causing the mass portion to vibrate in the X-axis direction. It has become. [0005] [Problems to be Solved by the Invention] By the way, when the above-mentioned angular velocity sensor according to the prior art is mounted on a vehicle or the like, for example, the angular velocity around two axes such as around the Y axis and around the Z axis may be detected at the same time. In this case, since the conventional angular velocity sensor can detect only the angular velocity around one axis such as around the Z axis, it is necessary to use two angular velocity sensors to detect the angular velocity around two axes at the same time. was there. Therefore, in the prior art, there is a problem that the manufacturing cost increases and the mounting area of the angular velocity sensor also increases. [0006] The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is an angular velocity sensor capable of simultaneously detecting angular velocities around two axes, reducing manufacturing cost, and reducing the size.<u style="single">Sa</u>To provide. [0007] [Means for solving problems] To solve the above-mentioned problems<u style="single">、</u>The invention of claim 1<u style="single">Angular velocity sensor by</u>Is a three-axis direction consisting of a substrate and an X-axis, a Y-axis, and a Z-axis that face each other with a gap and are orthogonal to each other.<u style="single">Chishake</u>X-axis direction by motion generating means<u style="single">Shake</u>To move<u style="single">1st</u>With the mass part of<u style="single">A second mass portion that is provided on both sides in the Y-axis direction with the first mass portion in between and vibrates in the X-axis direction in a phase opposite to that of the first mass portion by a vibration generating means, and the first mass portion.</u>Mass part<u style="single">Through the third mass part</u>Connect so that it can be displaced in the X-axis direction<u style="single">And the second mass part is displaceably connected in the X-axis direction via the fourth mass part.</u>An X-axis direction support beam, a fixing portion provided between the X-axis direction support beam and the substrate, and a fixing portion for connecting the X-axis direction support beam to the substrate, and the above.<u style="single">1st</u>And the mass part of the above<u style="single">Third mass part</u>Provided between and<u style="single">1st</u>Y-axis direction support beam that supports the mass part of the<u style="single">No. 2</u>And the mass part of the above<u style="single">4th mass part</u>Provided between<u style="single">The second</u>Z-axis direction support beam that supports the mass part of the<u style="single">1st</u>When the angular velocity acts on the mass part of<u style="single">The first</u>The first detecting means for detecting the amount of displacement in which the mass portion of the above is displaced in the Y-axis direction as the angular velocity around the Z-axis, and the above-mentioned<u style="single">No. 2</u>When the angular velocity acts on the mass part of<u style="single">The second</u>With a second detection means that detects the amount of displacement in which the mass part of is displaced in the Z-axis direction as the angular velocity around the Y-axis.<u style="single">The fixed portion comprises a portion of the X-axis direction support beam corresponding to a node when the first and third mass parts and the second and fourth mass parts vibrate in opposite phases to each other. Connect to</u>Constitution<u style="single">When</u>are doing. [0008] With this configuration, a plurality of mass parts can be connected by the X-axis direction support beam, the Y-axis direction support beam, and the Z-axis direction support beam in a state of being arranged in the Y-axis direction, and in this state, the X-axis direction support beam. Are adjacent to each other due to bending and deformation<u style="single">1st, 3rd</u>Mass<u style="single">And the second and fourth mass parts</u>Can be oscillated in almost opposite phase. And, for example, when the angular velocity around the Z axis is applied to the sensor,<u style="single">1st</u>The mass portion of the above can be displaced in the Y-axis direction via the support beam in the Y-axis direction by the Coriolis force, and the amount of displacement at this time can be detected as the angular velocity around the Z-axis by the first detecting means. Also, when the angular velocity around the Y axis is applied to the sensor,<u style="single">the 4th</u>The mass portion of the above can be displaced in the Z-axis direction by the support beam in the Z-axis direction, and the amount of displacement at this time can be detected as the angular velocity around the Y-axis by the second detecting means. [0009] Also<u style="single">, Solid</u>The fixed part is the support beam in the X-axis direction<u style="single">1st, 3rd</u>Mass<u style="single">And the 2nd and 4th mass parts</u>The part corresponding to the node when they oscillate in opposite phases to each other<u style="single">Based on</u>It is configured to connect to the board. [0010] in this case,<u style="single">1st, 3rd</u>Mass<u style="single">And the 2nd and 4th mass parts</u>When they oscillate in opposite phases with each other via the X-axis support beam, the<u style="single">1st, 3rd</u>Mass<u style="single">And the second and fourth mass parts</u>A vibration node that holds an almost constant position can be placed in the middle of the X-axis direction support beam that bends and deforms between them. Since the fixing portion can fix the support beam in the X-axis direction to the substrate side at a position corresponding to this node, it is possible to suppress the vibration of each mass portion from being transmitted to the substrate side via the support beam in the X-axis direction or the like. it can.<u style="single">Further, the second mass part is configured to be located on both sides of the first mass part in the Y-axis direction.</u><u style="single">As a result, the second mass part can be arranged symmetrically with the first mass part interposed therebetween, and these mass parts can be stably vibrated in opposite phases with respect to the X-axis direction. Then, the first mass part can detect the angular velocity around the Z axis by being displaced in the Y axis direction. In addition, the second mass part can detect the angular velocity around the Y axis by being displaced in the Z-axis direction, and the second mass part swings in the Z-axis direction at positions on both sides of the first mass part, so that the mass is massed. It is possible to balance the stress applied to the entire part.</u>[0015] Also, claims<u style="single">2</u>Invention<u style="single">Angular velocity sensor by</u>Is the first mass portion that vibrates in the X-axis direction by the vibration generating means among the three-axis directions consisting of the substrate, the X-axis, the Y-axis, and the Z-axis that face each other with a gap and are orthogonal to each other, and the first mass portion. It is located between the first mass part and the second mass part, which are provided on both sides in the Y-axis direction and vibrate in the X-axis direction by the vibration generating means. A third mass part surrounding the first mass part and the second mass part said<u style="single">Surround</u>A fourth mass part, an X-axis direction support beam that connects the fourth mass part to each other so as to be displaceable in the X-axis direction, and a connection that connects the third mass part to the X-axis direction support beam. With respect to the part and the third mass part<u style="single">Said</u>With respect to the Y-axis direction support beam that connects the first mass part in a displaceable manner in the Y-axis direction and the fourth mass part.<u style="single">Said</u>A fixing portion provided between the Z-axis direction support beam for displaceably connecting the second mass portion in the Z-axis direction and the substrate and the X-axis direction support beam and connecting the X-axis direction support beam to the substrate. The first detecting means for detecting the amount of displacement of the first mass portion in the Y-axis direction as the angular velocity around the Z axis when the angular velocity acts on the first mass portion, and the second The first and third masses are provided with a second detecting means for detecting the amount of displacement of the second mass portion in the Z-axis direction as the angular velocity around the Y-axis when the angular velocity acts on the mass portion. The part and the second and fourth mass parts vibrate in opposite phases to each other.<u style="single">, The fixed portion connects a portion of the X-axis direction support beam corresponding to a node when the first and third mass parts and the second and fourth mass parts vibrate in opposite phases to the substrate.</u>It is configured to be. [0016] As a result, the first and third mass parts can vibrate in the X-axis direction in the opposite phase to the second and fourth mass parts via the support beam in the X-axis direction. When an angular velocity around the Z-axis is applied, this angular velocity can be detected by displacing in the Y-axis direction via the support beam in the Y-axis direction. Further, the second mass part can be displaced in the Z-axis direction via the Z-axis direction support beam when an angular velocity around the Y-axis is applied, and this angular velocity can be detected. Further, the third mass part can block the bending deformation of the support beam in the X-axis direction from being transmitted to the first mass part, and the fourth mass part is the second mass due to the bending deformation of the support beam in the X-axis direction. It can block the transmission to the part. [0017] Also<u style="single">, Solid</u>The fixed part is the support beam in the X-axis direction.<u style="single">Chidai</u>1, The part corresponding to the node when the 3rd mass part and the 2nd and 4th mass parts vibrate in opposite phases to each other<u style="single">Based on</u>It is configured to connect to the board. [0018] As a result, when the first, second, third, and fourth mass parts vibrate through the X-axis direction support beam, the fixed part holds the X-axis direction support beam at the position corresponding to this vibration node. Since it can be fixed to the substrate side, it is possible to suppress the vibration of each mass part from being transmitted to the substrate side via the support beam in the X-axis direction or the like. [0019] In addition, claims<u style="single">3</u>According to the invention of the above, the Z-axis direction support beam is composed of a torsional support beam that is formed so as to be twistably deformable around the X-axis or the Y-axis and supports the second mass portion so as to be swingable in the Z-axis direction. .. [0020] As a result, the second mass part can swing in the Z-axis direction with this support beam as a fulcrum by deforming the Z-axis direction support beam so as to twist, and is close to the substrate by the angular velocity around the Y-axis. Can be separated. [0023] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the angular velocity sensor according to the embodiment of the present invention and the manufacturing method thereof will be described in detail with reference to the accompanying drawings. [0024] In the figure, 1 is an angular velocity sensor applied to the present embodiment, 2 is a substrate constituting the main body of the angular velocity sensor 1, and the substrate 2 is formed into a square shape by, for example, a high resistance silicon material or a glass material. It is formed. [0025] Then, as shown in FIGS. 1 and 2, for example, a low-resistance silicon material forming a single crystal or a polycrystal is provided on the substrate 2 and subjected to microfabrication such as etching treatment, which will be described later. A central mass portion 3, an outer mass portion 4, a frame-shaped mass portion 5,6, a support beam 7,9,10, a drive electrode 13,14, a detection electrode 17,18,20,22, etc. are formed. Further, on the surface side of the substrate 2, mass parts 3,4,5,6, support beams 7,9,10, movable side detection electrodes 18,22, etc. are arranged apart from the substrate 2 side in the Z-axis direction. Therefore, a plurality of recessed portions 2A are formed. [0026] Reference numeral 3 denotes a central mass portion as a first mass portion arranged near the center of the substrate 2, and the central mass portion 3 is formed as, for example, a frame-shaped body having a substantially day shape, and faces each other. It is located between the horizontal frame portions 3A and 3A extending in the X-axis direction, the vertical frame portions 3B and 3B extending in the Y-axis direction by connecting both ends of the horizontal frame portions 3A, and each horizontal frame portion 3A. It is formed by an intermediate frame portion 3C extending in the X-axis direction and connecting substantially intermediate portions of each vertical frame portion 3B. [0027] Here, the central mass portion 3 is connected to the outer mass portion 4 and the frame-shaped mass portion 5, 6 via the support beams 7, 9, 10 and the connecting portion 8, which will be described later. Then, these mass portions 3, 4, 5, 6 are arranged in a plane parallel to the substrate 2 in a substantially linear line along the Y-axis direction, and are supported by the support beam 7 so as to be displaceable in the X-axis direction. Has been done. Further, the central mass portion 3 is displaceably supported in the Y-axis direction by the support beam 9, and when the angular velocity Ω1 around the Z-axis is applied to the angular velocity sensor 1, it is displaced in the Y-axis direction according to the Coriolis force F1 at this time. Is what you do. [0028] 4 and 4 are a pair of outer mass parts as second mass parts arranged on both sides of the central mass part 3 in the Y-axis direction, and each outer mass part 4 is as shown in FIGS. 3 to 4. For example, it is formed in the shape of a quadrangular flat plate, and the end side separated from the center of gravity G toward the central mass portion 3 side in the Y-axis direction is connected to the support beam 10. [0029] As a result, the outer mass portion 4 is supported by the support beam 10 so as to be swingable in a cantilever state, with the connecting portion with the support beam 10 as a fixed end and the portion located on the electrode take-out portion 21 side described later as a free end. Has been done. Then, as described later, when the angular velocity Ω2 around the Y-axis is applied to the angular velocity sensor 1, the support beam 10 is twisted and deformed around the X-axis, so that the outer mass portion 4 is displaced in the Z-axis direction according to the Coriolis force F2. It is a thing. [0030] Reference numeral 5 denotes a frame-shaped mass portion as a third mass portion arranged between the central mass portion 3 and the outer mass portion 4, and the frame-shaped mass portion 5 is a quadrangular frame shape surrounding the central mass portion 3. It is formed by the body and has front and rear horizontal frame portions 5A and 5A extending in the X-axis direction and left and right vertical frame portions 5B and 5B extending in the Y-axis direction. The outer portion of the frame-shaped mass portion 5 is connected to the support beam 7 via the connecting portion 8, and the central mass portion 3 is connected to the inner portion thereof via the support beam 9. [0031] 6 and 6 are frame-shaped mass parts as a fourth mass part arranged by surrounding the outer mass part 4 in a substantially U-shape, and each frame-shaped mass part 6 extends in the X-axis direction and has both ends. It is composed of an extension portion 6A connected to each support beam 7 and outer protrusions 6B and 6B protruding from the extension portion 6A to the left and right sides of the outer mass portion 4. [0032] Reference numerals 7 and 7 are X-axis direction support beams that support the mass portions 3, 4, 5, 6 so as to be displaceable in the X-axis direction, and the X-axis direction support beams 7 are on the left and right sides of the frame-shaped mass portion 5. It is arranged and extends in the Y-axis direction in a state where it can be flexed and deformed in the X-axis direction. Then, when the angular velocity sensor 1 is activated, the mass parts 3, 5 and the mass parts 4, 6 vibrate in the X-axis direction in substantially opposite phases to each other via the support beam 7, etc., and at this time, in the length direction of the support beam 7. In the middle part, four knots 7A are arranged as vibration nodes when the support beam 7 vibrates (deflects and deforms) and holds a substantially constant position. [0033] 8 and 8 are left and right connecting portions that connect the frame-shaped mass portion 5 to each support beam 7, and each connecting portion 8 is formed with high rigidity, and the frame-shaped mass portion 5 is displaced in the Y-axis direction. Is regulated. [0034] 9,9, ... are, for example, four Y-axis direction support beams that support the central mass portion 3 so as to be displaceable in the Y-axis direction, and each Y-axis direction support beam 9 has a central mass portion 3 on one end side. It is connected to the four corners, and the other end extends in the X-axis direction and is connected to each horizontal frame portion 5A of the frame-shaped mass portion 5, and can be bent and deformed in the Y-axis direction. [0035] 10,10, ... are torsional support beams as, for example, four Z-axis direction support beams that support each outer mass portion 4 so as to be displaceable in the Z-axis direction, and each torsional support beam 10 has each outer mass. It is arranged on both the left and right sides of the portion 4, one end side is connected to the outer mass portion 4, and the other end side extends in the X-axis direction and is connected to each outer protrusion 6B of the frame-shaped mass portion 6. [0036] As shown in FIGS. 3 and 4, the support beam 10 has, for example, a length L in the X-axis direction of about 200 to 400 μm, a width w in the Y-axis direction of about 10 to 20 μm, and a thickness t in the Z-axis direction. It is formed in the shape of a thin plate with a size of about 30 to 70 μm, and by setting its width w smaller than the length L and thickness t, it elastically deforms so as to twist around the X axis as shown in FIG. It is composed. [0037] Reference numeral 11 denotes a fixing portion for connecting the node portion 7A of the support beam 7 to the substrate 2, and the fixing portion 11 is formed by a quadrangular frame shape surrounding the mass portions 3, 4, 5, 6 and is formed on the substrate 2. It is composed of a fixed pedestal portion 11A and, for example, four arm portions 11B integrally provided on the inner portion of the pedestal portion 11A and separated from the substrate 2. [0038] In addition, two arm portions 11B are arranged on the left and right sides of each support beam 7 with respect to the X-axis direction, and are separated from each other in the Y-axis direction. Then, as shown in FIG. 6, the fixing portion 11 supports the mass portions 3,4,5,6 and each support beam 7 at the joint portion 7A by each arm portion 11B, whereby the mass portion 3,5 When the mass parts 4 and 6 vibrate in the opposite phase in the X-axis direction, the vibration is suppressed from being transmitted to the substrate 2. [0039] On the other hand, 12, 12, ... Are, for example, four drive electrode support portions fixedly provided on the substrate 2, and each drive electrode support portion 12 is in the Y-axis direction as shown in FIG. On the other hand, two are arranged on both sides of each frame-shaped mass portion 6. [0040] 13,13, ... are fixed-side drive electrodes provided on the support portions 12 for each drive electrode, and each of the fixed-side drive electrodes 13 protrudes in the X-axis direction and has a comb-like shape with an interval in the Y-axis direction. It has a plurality of arranged electrode plates 13A, 13A, .... [0041] 14,14, ... are movable side drive electrodes provided on the outer protrusions 6B of each frame-shaped mass portion 6 corresponding to each fixed side drive electrode 13, and each movable side drive electrode 14 is X. It has a plurality of electrode plates 14A, 14A, ... That project in a comb-teeth shape in the axial direction and mesh with each electrode plate 13A of the fixed side drive electrode 13. [0042] 15,15, ... are vibration generating parts as vibration generating means provided between the substrate 2 and the outer mass part 4, and each of the vibration generating parts 15 is a fixed side drive electrode 13 and a movable side drive electrode. It is composed of 14 and. Then, the vibration generating unit 15 alternately generates an electrostatic attractive force between the electrode plates 13A and 14A by applying an AC driving signal together with the DC bias voltage between the driving electrodes 13 and 14, and the outer mass portion 15 4 is vibrated in the directions a1 and a2 shown in Fig. 1. [0043] Reference numerals 16 and 16 are two support portions for detection electrodes located inside the central mass portion 3 and provided on the substrate 2. Each of the detection electrode support portions 16 is the central mass portion 3 with respect to the Y-axis direction. It is arranged on both sides of the intermediate frame part 3C of . [0044] 17,17, ... Are fixed-side detection electrodes provided on the support 16 for each detection electrode in order to detect the displacement of the central mass portion 3, and each of the fixed-side detection electrodes 17 is X. It has a plurality of electrode plates 17A, 17A, ... Protruding in the axial direction and arranged in a comb-teeth shape with an interval in the Y-axis direction. [0045] 18,18, ... are a plurality of movable side detection electrodes provided in the intermediate frame portion 3C of the central mass portion 3 corresponding to each fixed side detection electrode 17, and each movable side detection electrode 18 is an X-axis. It has a plurality of electrode plates 18A, 18A, ... That project in a comb-like shape in the direction and mesh with each electrode plate 17A of the fixed side detection electrode 17 with a gap in the Y-axis direction. [0046] Reference numerals 19 and 19 are angular velocity detection units provided between the substrate 2 and the central mass portion 3 as a first detection means, and each angular velocity detection unit 19 includes a fixed side detection electrode 17 and a movable side detection electrode 18. It is composed of. Then, the angular velocity detection unit 19 forms a parallel plate capacitor whose capacitance changes as the central mass portion 3 is displaced in the Y-axis direction, and the angular velocity Ω1 around the Z-axis is detected by the capacitance between the detection electrodes 17 and 18. It is detected as a change in capacity. [0047] Reference electrodes 20 and 20 are fixed-side detection electrodes provided in the recessed portion 2A of the substrate 2 at positions corresponding to the outer mass portions 4, and the fixed-side detection electrodes 20 are formed of, for example, a metal film in FIGS. 4 and 5. It is formed in a quadrangular shape as shown in. Further, a part of the fixed side detection electrode 20 extends to the outside of the recessed portion 2A and is connected to the electrode taking-out portion 21 projecting on the substrate 2. [0048] Reference numerals 22 and 22 are movable side detection electrodes composed of portions of the outer mass portions 4 facing the substrate 2, and each movable side detection electrode 22 has a fixed side detection electrode 20 and a Z axis as shown in FIG. They face each other with a gap in the direction. [0049] Reference numeral 23 denotes an angular velocity detection unit as a second detection means provided between the substrate 2 and the outer mass portion 4, and the angular velocity detection unit 23 is composed of a fixed side detection electrode 20 and a movable side detection electrode 22. ing. Then, the angular velocity detection unit 23 forms a parallel plate capacitor whose capacitance changes as the outer mass portion 4 is displaced in the Z-axis direction, and the angular velocity Ω2 around the Y-axis is detected by the capacitance between the detection electrodes 20 and 22. It is detected as a change in capacity. [0050] The angular velocity sensor 1 according to the present embodiment has the above-described configuration, and its operation will be described next. [0051] First, when an AC drive signal having opposite phases is applied to the left and right vibration generators 15 together with a DC bias voltage, an electrostatic attraction force is applied between the left and right fixed side drive electrodes 13 and the movable side drive electrode 14. Are alternately generated, and the outer mass portion 4 and the frame-shaped mass portion 6 vibrate in the directions a1 and a2 shown in FIG. 6 due to the bending and deformation of the support beam 7. [0052] Further, when the vibration of the mass parts 4 and 6 is transmitted to the frame-shaped mass part 5 via the support beam 7 and the like, the central mass part 3 and the frame-shaped mass part 5 have the phase of vibration with respect to the mass parts 4 and 6. Vibrates in the opposite phase with a shift of about 180 °. By adjusting the frequency of the AC drive signal to be applied, this vibration can be brought into a resonance state. In this case, since the node 7A of the support beam 7 holds a substantially constant position, the vibrations of the mass portions 3 to 6 are hardly transmitted to the substrate 2 via the support beam 7, the fixing portion 11, and the like. [0053] Then, in this vibrating state, for example, when the angular velocity Ω1 around the Z axis is applied to the angular velocity sensor 1, the Coriolis force F1 shown in the following equation 1 acts on the central mass portion 3 in the Y-axis direction, and the support beam 9 bends. By deforming, it is displaced in the Y-axis direction according to the magnitude of the Coriolis force F1. [0054] [Number 1] F1 = 2MΩ1v However, M: the mass of the central mass part 3 Ω1: Angular velocity around the Z axis v: Velocity of central mass 3 along the X axis [0055] As a result, in the two angular velocity detection units 19, the interval (capacitance) between the detection electrodes 17 and 18 changes according to the displacement amount of the central mass portion 3 with respect to the Y-axis direction. Therefore, for example, each angular velocity detection unit 19 By differentially outputting the amount of change in capacitance in, the angular velocity Ω1 around the Z axis can be detected. [0056] On the other hand, when the angular velocity Ω2 around the Y-axis is applied to the angular velocity sensor 1, the Coriolis force F2 in the Z-axis direction acts according to the angular velocity Ω2, so that the outer mass portion 4 is the support beam 10. Is elastically deformed so as to twist around the X-axis, so that it swings around the support beam 10 as a fulcrum and is displaced in the Z-axis direction according to the magnitude of the Coriolis force F2. [0057] As a result, in the two angular velocity detection units 23, the capacitance between the detection electrodes 20 and 22 changes according to the displacement amount of the outer mass portion 4 with respect to the Z-axis direction. Therefore, for example, the capacitance in each angular velocity detection unit 23 The angular velocity Ω2 around the Y-axis can be detected by adding and outputting the amount of change in capacitance. [0058] [0058] Next, a method of manufacturing the angular velocity sensor 1 will be described with reference to FIGS. 7 to 12. [0059] First, as shown in FIG. 7, a glass plate 31 to be a substrate 2 is prepared, and in the substrate forming step shown in FIG. 8, the mass portions 3,4,5,6 and the support beam 7 of the surface side of the glass plate 31 are formed. , 9,10, connecting portion 8, electrodes 14,18,22, etc., each recessed portion 2A is bored in a predetermined portion corresponding to, for example, grinding, sandblasting, etc. to form a substrate 2. .. [0060] Next, in the electrode forming step shown in FIG. 9, a metal film is formed in each recessed portion 2A of the substrate 2 by means of, for example, sputtering, CVD, etc., and the metal film is etched to detect the fixed side. Form the electrode 20. [0061] Then, in the substrate bonding step shown in FIG. 10, the silicon plate 32 to be the processing substrate is bonded to the surface side of the substrate 2 by means such as anode bonding, and in the etching step shown in FIG. 11, the silicon plate 32 is bonded. By performing one etching process from the surface side in the plate thickness direction, mass parts 3,4,5,6, support beams 7,9,10, connecting parts 8, fixing parts 11, support parts 12,16, electrodes 13,14,17,18,22, electrode take-out part 21, etc. are formed almost at the same time. [0062] Next, in the other substrate bonding step shown in FIG. 12, for example, the glass plate 33 to be the lid plate is bonded to the mass portions 3,4,5,6 in a reduced pressure atmosphere on the opposite side to the substrate 2, and the mass is increased. The angular velocity sensor 1 can be manufactured by forming a through hole or the like for taking out an electrode in the glass plate 33 after the parts 3 to 6 and the like are sealed under reduced pressure between the substrate 2 and the glass plate 33. [0063] Thus, according to the present embodiment, the central mass portion 3, the outer mass portion 4, and the frame-shaped mass portion 5, 6 are connected to each other by the support beams 7, 9, 10, etc., and the displacement amount of the mass portions 3, 4 is determined. The angular velocity detectors 19 and 23 detect the angular velocity Ω1 around the Z-axis and the angular velocity Ω2 around the Y-axis, respectively. [0064] As a result, a plurality of mass parts 3 to 6 can be connected to each other in a state of being arranged in the Y-axis direction. For example, the support beam 7 in the X-axis direction bends only by vibrating the frame-shaped mass part 6 of the mass parts 3 to 6. By deforming, the mass parts 3, 5 and the mass parts 4, 6 can be efficiently vibrated in substantially opposite phases to each other. [0065] When the angular velocity Ω1 around the Z axis is applied to the angular velocity sensor 1, the central mass portion 3 can be displaced in the Y-axis direction by the Y-axis direction support beam 9 according to the Coriolis force F1. The displacement amount of 3 can be reliably detected by the angular velocity detection unit 19 as the angular velocity Ω1 around the Z axis. Further, when the angular velocity Ω2 around the Y-axis is applied, the outer mass portion 4 can be displaced in the Z-axis direction by the torsional support beam 10 according to the Coriolis force F2, and the displacement amount of the outer mass portion 4 at this time is the angular velocity. The detection unit 23 can reliably detect the angular velocity Ω2 around the Y-axis. [0066] Therefore, with a single angular velocity sensor 1, the angular velocities Ω1 and Ω2 around two axes can be detected at the same time with a simple structure using mass parts 3 to 6, and the detection performance as a sensor can be reliably improved and its dimensions can be adjusted. The size can be reduced and the manufacturing cost can be reduced. [0067] In this case, since the portion of the outer mass portion 4 that is separated from the center of gravity G is connected to the frame-shaped mass portion 6 by the torsional support beam 10, each torsional support beam 10 is connected to the torsional support beam 10 of the outer mass portion 4. The connecting portion is a fixed end, the portion on the electrode extraction portion 21 side is a free end, and the outer mass portion 4 can be swingably supported in a cantilevered state. Then, when the angular velocity Ω2 around the Y-axis is applied, each torsional support beam 10 is elastically deformed so as to be twisted around the X-axis, so that the outer mass portion 4 is stably oscillated and displaced with respect to the substrate 2. Therefore, a mechanism for displacing the outer mass portion 4 in the Z-axis direction can be realized on the substrate 2 in a small area. [0068] [0068] Further, by arranging the mass parts 4 and 6 symmetrically on both sides of the mass parts 3 and 5, these mass parts 3 to 6 can be arranged almost linearly in the Y-axis direction, and these are arranged in opposite phases to each other. Can be vibrated stably. Then, each outer mass portion 4 swings in the Z-axis direction at positions on both sides of the central mass portion 3 so that the stress applied to the entire mass portions 3 to 6 can be balanced. [0069] Further, the central mass portion 3 is connected to the X-axis direction support beam 7 via the frame-shaped mass portion 5 and the connecting portion 8, and the outer mass portion 4 is connected to the X-axis direction support beam 7 via the frame-shaped mass portion 6. Since they are connected, when the mass parts 3 to 6 vibrate in the X-axis direction, the frame-shaped mass parts 5 and 6 can block the bending deformation of the support beam 7 in the X-axis direction from being transmitted to the mass parts 3 and 4. It is possible to prevent the mass parts 3 and 4 of the above from being erroneously displaced in the Z-axis and Y-axis directions (detection direction), and to further improve the detection accuracy. [0070] Further, by vibrating the mass parts 3, 5 and the mass parts 4, 6 in opposite phases to each other, a substantially constant position is set in the middle portion of the X-axis direction support beam 7 during the vibration of the mass parts 3 to 6. A holding node 7A can be arranged, and at the position of the node 7A, the vibrations of the mass parts 3, 5 and the mass parts 4, 6 can be canceled out from each other. Then, the fixing portion 11 can connect the node portion 7A of the support beam 7 in the X-axis direction to the substrate 2, and can suppress the vibration of the mass portions 3 to 6 from being transmitted to the substrate 2 side. [0071] As a result, the mass parts 3 to 6 can be efficiently vibrated with a predetermined amplitude, vibration speed, etc. without letting the vibration energy applied from the vibration generating part 15 to the mass parts 3 to 6 escape to the substrate 2 side. At the same time, it is possible to prevent the detection accuracy for the displacement amount of the mass parts 3 and 4 from being lowered due to the vibration transmitted to the substrate 2 side, and it is possible to improve the reliability. [0072] On the other hand, at the time of manufacturing the angular velocity sensor 1, a recess 2A is first formed on the substrate 2, a fixed side detection electrode 20 is formed in the recess 2A, and then a silicon plate 32 is joined onto the substrate 2 to form the silicon. Since the plate 32 is etched, the silicon plate 32 can be etched only once, and the mass parts 3 to 6, the support beams 7, 9, 10, the connecting parts 8, the fixing parts 11, and so on. Support parts 12,16, electrodes 13,14,17,18,22, electrode take-out parts 21, etc. can be formed almost at the same time, and at this time, mass parts 3 to 6, support beams 7,9,10, etc. are formed by recessed parts 2A. It can be arranged away from the substrate 2, and the angular velocity sensor 1 can be efficiently manufactured with a minimum etching process. [0073] In particular, when forming a torsional support beam 10 that twists and deforms around the X-axis like the angular velocity sensor 1 according to the present embodiment, the torsional support beam 10 having a small width w in the Y-axis direction is etched once. Since it can be easily formed together with the mass portions 3 to 6 and the like, it is not necessary to perform a plurality of etching treatments in order to form a support beam that is easily twisted and deformed, and productivity can be improved. [0074] In the embodiment, the twisted support beam 10 that can be twisted and deformed around the X axis is used as the support beam in the Z-axis direction, but the present invention is not limited to this, and the twisted and deformable around the Y axis is possible. The formed torsional support beam may be used, or a support beam that bends and deforms in the Z-axis direction may be used. [0075] [Effect of the invention] As described in detail above, according to the invention of claim 1, it is arranged on the substrate.<u style="single">1st, 2nd</u>Of the mass part of<u style="single">The first located in the center with respect to the Y-axis direction</u>Support beam in the Y-axis direction for the mass part of<u style="single">And the third mass part</u>Connected with the X-axis support beam by<u style="single">Seconds located on both sides of the first mass in the Y-axis direction</u>Z-axis direction support beam for the mass part of<u style="single">And the fourth mass part</u>Since it is connected to the support beam in the X-axis direction and the angular velocities around the Z-axis and the Y-axis are detected by the first and second detection means, respectively, the first detection means is<u style="single">1st</u>The amount of displacement when the mass part of is displaced in the Y-axis direction via the support beam in the Y-axis direction can be detected as the angular velocity around the Z-axis, and the second detection means is<u style="single">No. 2</u>The amount of displacement when the mass part of is displaced in the Z-axis direction via the support beam in the Z-axis direction can be reliably detected as the angular velocity around the Y-axis. Therefore, with a single angular velocity sensor,<u style="single">1st, 2nd</u>With a simple structure using a mass part, the angular velocity around two axes can be detected at the same time, the detection performance as a sensor can be improved, the size of the sensor can be miniaturized, and the manufacturing cost can be reduced. [0076] Also<u style="single">, Solid</u>Since the fixed part is configured to connect the part of the support beam in the X-axis direction corresponding to the vibration node to the substrate, the vibration of each mass part can be canceled out at the position of the fixed part, and the vibration is the X-axis. It is possible to reliably suppress transmission to the substrate via the directional support beam. As a result, each mass part can be efficiently vibrated with a predetermined amplitude, vibration speed, etc. without letting the vibration energy generated by the vibration generating means escape to the substrate side, and the detection accuracy is lowered by transmitting the vibration to the substrate. Can be prevented and reliability can be improved.<u style="single">Furthermore, since the second mass part is located on both sides of the first mass part in the Y-axis direction, the second mass part can be symmetrically arranged on both sides of the first mass part. These mass parts can be stably vibrated in opposite phases to each other. Then, when the angular velocity around the Y-axis is applied, the second mass part swings in the Z-axis direction at the positions on both sides of the first mass part, so that the stress applied to the entire mass part, etc. Can be balanced.</u>[0079] Also, claims<u style="single">2</u>According to the invention of the above, the first mass part is connected to the third mass part by the Y-axis direction support beam, the second mass part is connected to the fourth mass part by the Z-axis direction support beam, and the third mass part is connected. , The 4th mass part is connected to the support beam in the X-axis direction, and the displacement amounts of the 1st and 2nd mass parts are detected as the angular velocities around the Z axis and the Y axis, respectively, by the first and second detection means. With a single angular velocity sensor, the angular velocity around two axes can be detected at the same time with a simple structure using the first and second detection means and each mass part, improving the detection performance as a sensor. At the same time, the dimensions can be reduced and the manufacturing cost and the like can be reduced. Further, the third mass part can block the bending deformation of the support beam in the X-axis direction from being transmitted to the first mass part as a displacement in the detection direction, and the fourth mass part is the bending of the support beam in the X-axis direction. Since it is possible to block the deformation and the like from being transmitted to the second mass part, the detection accuracy can be further improved. [0080] [0080] Also<u style="single">, Solid</u>The fixed part is configured to connect the part corresponding to the node when the first and third mass parts and the second and fourth mass parts of the support beam in the X-axis direction vibrate in opposite phases to the substrate. Therefore, at the position of the fixed portion, the vibrations of the first to fourth mass parts can be canceled each other, and each mass part can be efficiently vibrated without letting the vibration energy generated by the vibration generating means escape to the substrate side. .. Further, it is possible to prevent the detection accuracy from being lowered due to the transmission of vibration to the substrate, and it is possible to improve the reliability. [0081] In addition, claims<u style="single">3</u>According to the invention of the above, the Z-axis direction support beam is formed by a torsional support beam which is formed so as to be twistably deformable around the X-axis or the Y-axis and which supports the second mass portion so as to be swingable in the Z-axis direction. When an angular velocity around the Y-axis is applied, the torsional support beam is elastically deformed so as to twist, so that the second mass portion can be stably oscillated and displaced in the Z-axis direction with respect to the substrate. The axial displacement mechanism can be realized in a small area on the substrate. [Simple explanation of drawings] FIG. 1 is a plan view showing an angular velocity sensor according to an embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view of the angular velocity sensor seen from the direction of arrow II-II in FIG. FIG. 3 is an enlarged plan view showing a one-sided portion of the angular velocity sensor located on the lower side in FIG. FIG. 4 is an enlarged cross-sectional view of a main part showing an outer mass part, an angular velocity detection part, and the like located on the left one side in FIG. FIG. 5 is an enlarged cross-sectional view of a main part of an angular velocity sensor showing a state in which the outer mass portion is displaced in the Z-axis direction by an angular velocity around the Y-axis. FIG. 6 is an enlarged plan view showing a state in which the central mass portion and the outer mass portion vibrate in opposite phases with each other at the left one side portion in FIG. 1 of the angular velocity sensor. FIG. 7 is an enlarged cross-sectional view showing a portion on the left side of the glass plate used in the substrate forming step. FIG. 8 is an enlarged cross-sectional view showing a portion on the left side of a glass plate having a recess formed by a substrate forming step. FIG. 9 is an enlarged cross-sectional view showing a portion on the left side of a substrate on which a fixed side detection electrode is formed by an electrode forming step. FIG. 10 is an enlarged cross-sectional view showing a portion on the left side of a substrate and a silicon plate bonded by a substrate bonding step. FIG. 11 is an enlarged cross-sectional view of a portion on the left side of the angular velocity sensor showing a state in which a silicon plate is etched by an etching step to form a mass portion, a support beam, and the like. FIG. 12 is an enlarged cross-sectional view of a portion on the left side of the angular velocity sensor showing a state in which another glass plate is joined to a mass part, a support beam, or the like by another substrate joining step. [Explanation of symbols] 1 Angular velocity sensor 2 board 3 Central mass part (first mass part) 4 Outer mass part (second mass part) 5,6 Frame-shaped mass parts (3rd and 4th mass parts) 7 X-axis support beam 7A node 8 Connection 9 Y-axis support beam 10 Torsion support beam (Z-axis direction support beam) 11 Fixed part 12,16 Electrode support 13,14 Drive electrode 15 Vibration generator (vibration generator) 17,18,20,22 Detection electrode 19,23 Angular velocity detector (angular velocity detection means) 21 Electrode extraction part 31,33 Glass plate 32 Silicon plate (processing board)