Reductive heat exchange water and heat exchange system using such water

[0001] [Technical field to which the invention belongs] The present invention relates to heat exchange water and a supply device thereof that can reduce the environmental load of performing heat exchange with a heat exchanger such as mechanical equipment, air, or liquid with high efficiency. [0002] [Conventional technology] Heat exchangers that cool mechanical equipment, heat exchangers such as air and liquid, are used in various fields such as various factories and laboratories. Conventionally, in this heat exchanger, as a heat medium that exchanges heat with a heat exchanger, water such as city water and industrial water is widely used because it is safe to handle and inexpensive. This is because water has a very high specific heat and thermal conductivity. Further, the conventional heat medium, that is, the heat exchange water supply device, includes, for example, a heat exchange water circulation pump 51, a cooler 52 that cools the heat exchange water with water 521, and a heat subject, as shown in the flow chart of FIG. A circulation system is formed by connecting the cooler 57 that cools the exchanger 571 with a pipe 54, and a discharge pipe 56 that discharges a part or all of the cooling water if deterioration occurs from the circulation system. It has a replenishment pipe 55 that supplies replenishment water for cooling water to the circulation system. [0003] [Problems to be Solved by the Invention] However, the conventional heat exchanger using water as a heat medium has the following problems. That is, (1) the water used for heat exchange water dissolves an oxidizing agent such as dissolved oxygen or hypochlorite or sodium hypochlorite for sterilization, and the heat exchange water supply pipe is provided by these oxidizing powers. Metallic materials used in systems and heat exchanger wetted parts are oxidized, and (i) an oxide film is formed on the wetted parts, and in severe cases, bumpy ridges are formed, which not only significantly reduces heat exchange efficiency. , The resistance in the system is increased and the predetermined amount of water for heat exchange cannot flow. (ii) The metal in the wetted part is oxidatively dissolved and the wall thickness is reduced, the mechanical strength of the constituent members is reduced, and in some cases, the constituent materials may burst, causing water leakage for heat exchange. (iii) The generation of so-called red water and the increase in turbidity due to the metal pieces that have been corroded and peeled off cause problems such as clogging of the filter in the piping system. (2) In order to solve the above problems, equipment that adds chemicals such as rust preventives is often used, and the chemicals must always be purchased and stored, which is costly and storage space costs, and also prevents When blowing down the heat exchange water to which the rust inhibitor is added, it must be discarded in consideration of the environmental impact. (3) In order to prevent oxidation by dissolved oxygen, there is a method of degassing the heat exchange water to reduce the dissolved oxygen concentration, but simply reducing the oxygen should sufficiently prevent oxidation and corrosion of the metal material used. I can't. (4) In some cases, algae and microorganisms may grow in the piping system, and a biofilm may be formed in the wetted part, causing a decrease in heat exchange efficiency and an increase in pipe resistance. In this case, it is necessary to add a chemical such as a bactericide, which causes the same cost increase and environmental problems as in (2) above. (5) The flow rate of the cooling water flowing through the heat exchanger is usually set with a margin so that the temperature of the heat exchanger becomes lower than the predetermined temperature when the heat exchanger generates the maximum heat load. , The flow rate is not controlled individually. Furthermore, the heat generation load varies greatly depending on the operating conditions of the heat exchanger, and even though the equipment does not generate heat while stopped, a constant flow rate of cooling water is constantly flowing according to the maximum heat generation load. is the current situation. That is, most of the cooling water is wasted depending on the operating status of the equipment. Further, in the conventional heat exchange water supply device, the supply temperature of the cooling water is usually room temperature, and the discharge temperature is about 5 ° C higher than that. The temperature difference between the supply temperature and the discharge temperature of the cooling water must be small, and in the end, a large flow rate of cooling water is required. For these reasons, a factory with a large number of heat exchangers installed requires a heat exchange water supply device and a cooling water supply system that circulate a huge amount of cooling water. In order to allow a large flow of cooling water to flow, the cooling water circulation line should be thickened to reduce the conductance of the piping. Although it is necessary, there is a limit, so a method of increasing the pressure feeding pressure of the pumping pump is adopted. However, the power consumption of the pumping pump increases depending on the discharge speed of the pump and the number of installed pumps. Therefore, the size of the pump, the cost associated with large-diameter piping, the increase in the occupied area, the vibration generated by the large pump, etc. There is a problem, and in addition, the environmental impact of blowing down a large amount of heat exchange water cannot be ignored. As described above, it has been difficult to say that conventionally, heat exchange water and a supply device thereof that are environmentally friendly and that maintain a highly efficient and stable cooling effect for a long period of time have been obtained. [0004] Therefore, an object of the present invention is to completely prevent oxidative deterioration of the metal material of the heat exchange water supply / circulation pipe or the wetted part of the heat exchanger, suppress the growth of algae and microorganisms, and environmentally friendly heat exchange. To provide water. Another object of the present invention is to provide a heat exchange water supply device that is simple and can use existing equipment while suppressing a cost increase. Further, another object of the present invention is to realize a small flow rate and a low pressure of the cooling water by controlling the optimum temperature and temperature by the flow rate of the cooling water, reduce the occupied area and vibration by the pump, and increase the cost. It is an object of the present invention to provide a water supply device for heat exchange that suppresses the heat exchange. [0005] [Means for solving problems] In such a situation, as a result of diligent studies, the present inventors have conducted a diligent study, and as a result, in a heat exchanger that cools a heat exchanger such as mechanical equipment, air, or liquid, heat of cooling water or the like that exchanges heat with the heat exchanger. If zero or negative reducing water with a standard hydrogen electrode as the reference electrode is used for the replacement water, the oxidative deterioration of the metal material in the heat exchange water supply / circulation piping or the heat exchanger wetted part is completely eliminated. In addition to being able to prevent the growth of algae and microorganisms and reduce the environmental load, this reducing water is simple and easy because it is obtained by adding hydrogen gas or a reducing agent other than hydrogen gas to the water. It is the minimum if a heat exchange water supply device that can use existing equipment and suppresses the cost increase can be obtained, and if a flow control control means for controlling the temperature of the cooling water flowing through the cooler to a desired temperature is provided. We have found that a heat exchange water supply device that can exchange heat with a heat exchanger with cooling water with high efficiency, has good heat equalization properties, and can contribute to cost reduction can be obtained, and has completed the present invention. It was. [0006] That is, the invention (1) of claim 1 is<u style="single">Covered</u>With heat exchanger<u style="single">Of heat exchangers that exchange heat with water for heat exchange</u>Heat exchange water<u style="single">The heat exchange water is returned</u>With original water<u style="single">The reducing water is hydrogen-dissolved water in which hydrogen gas is dissolved in water, and the standard oxidation-reduction potential is -0.3 V or less with the standard hydrogen electrode as the reference electrode, and the dissolved oxygen concentration is 3 mg / liter or less. Furthermore, when the dissolved hydrogen concentration is 0.1 to 1.5 mg / liter</u>It provides water for heat exchange, which is characterized by being present. By adopting such a configuration, it is possible to surely prevent oxidative corrosion of the metal material in the wetted part, and it is extremely effective in generating aerobic microorganisms and algae that form a biofilm, which are difficult to inhabit under reducing conditions. Can be suppressed.<u style="single">Further, oxidative corrosion of the metal material in the wetted portion can be reliably prevented, and reducing water having a desired standard redox potential can be easily obtained. Furthermore, the environmental load can be reduced with reducing water obtained by a simple method without using chemicals that conventionally require purchase cost and storage space and may affect the environment, and corrosion of materials used and biofilms can be reduced. It is possible to suppress the formation of a film.</u>[0009] Claim<u style="single">2</u>Invention (<u style="single">2</u>) Is the cooling water used to cool the heat exchanger of the electronic component manufacturing equipment (1).<u style="single">)Record</u>It provides water for heat exchange. By adopting such a configuration, it is possible to surely prevent oxidative corrosion of the metal material in the wetted part, and it is extremely effective in generating aerobic microorganisms and algae that form a biofilm, which are difficult to inhabit under reducing conditions. It is possible to maintain the cooling efficiency required for the cooling system of the semiconductor manufacturing equipment for a long period of time, and it is possible to construct a reliable cooling system. [0010] Claim<u style="single">3</u>Invention (<u style="single">3</u>) Is<u style="single">, Covered</u>With heat exchanger<u style="single">Hydrogen-dissolved water in which hydrogen gas is dissolved in water, the standard oxidation-reduction potential is -0.3 V or less with the standard hydrogen electrode as the reference electrode, the dissolved oxygen concentration is 3 mg / liter or less, and the dissolved hydrogen concentration is 0.1 to 1.5 mg / liter</u>A heat exchanger that exchanges heat with reducing water, a reducing water supply means that supplies the reducing water to the heat exchanger, a reducing water cooling means that cools the reducing water, and the heat exchange. It has a reducing water circulation pipe connected so as to form a circulation system by the vessel, the reducing water supply means and the reducing water cooling means, and the reducing water circulation system is substantially a closed system. It provides a characteristic heat exchange water supply device. By adopting such a configuration, the above (1) to (<u style="single">2</u>) The effects of the described invention can be surely realized, and the cost increase due to large-scale capital investment can be suppressed because a simple device can be installed. [0011] Claim<u style="single">4</u>Invention (<u style="single">4</u>) Is a reducing water producing means for producing the reducing water in the middle of the reducing water circulation pipe or in the middle of the bypass pipe which is partially branched from the reducing water circulation pipe and is connected to the reducing water circulation pipe again. The () is characterized in that the reducing water circulation system including the reducing water producing means and the bypass pipe is substantially a closed system.<u style="single">3</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, the invention (<u style="single">3</u>), In addition to being able to install a small-scale reducing water production device at a location far from the circulatory system, it is easy and convenient to modify the existing heat exchange water supply equipment. Only construction work is required. [0012] Claim<u style="single">5</u>Invention (<u style="single">5</u>) Has an external pipe provided with a reducing water producing means for producing the reducing water in the middle of the pipe connected to the reducing water circulation pipe, and the reducing water including the external pipe provided with the reducing water producing means. The above-mentioned (1), wherein the circulation system of the above is substantially a closed system.<u style="single">3</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, the above (<u style="single">4</u>) It has the same effect as the described invention. [0013] Claim<u style="single">6</u>Invention (<u style="single">6</u>) Is a cooling water supply means for supplying cooling water<u style="single">, Covered</u>With heat exchanger<u style="single">Hydrogen-dissolved water in which hydrogen gas is dissolved in water, the standard oxidation-reduction potential is -0.3 V or less with the standard hydrogen electrode as the reference electrode, the dissolved oxygen concentration is 3 mg / liter or less, and the dissolved hydrogen concentration is 0.1 to 1.5 mg / liter</u>It has a heat exchanger that exchanges heat with cooling water, and a cooling water circulation pipe that is connected to the cooling water supply means so as to form a circulation system, and the cooling water is taken into the cooling water circulation pipe. A water supply port, a cooling water discharge port for discharging cooling water, a flow rate adjusting valve for adjusting the flow rate of cooling water flowing from the cooling water supply port to the cooling water circulation pipe, and the cooling from the cooling water supply port. Cooling water having a temperature lower than the temperature of the cooling water circulating in the cooling water circulation pipe is supplied to the water circulation pipe, and the cooling water flowing out from the cooling water discharge port is cooled by the cooling means and then cooled again. The cooling water is provided with a cooling water supply system configured to flow in from a water supply port, and the cooling water passes through the flow control valve for the purpose of controlling the temperature of the cooling water flowing in the cooling water circulation pipe to a desired temperature. Provided is a heat exchange water supply device provided with a control means for controlling a flow rate. The flow rate control valve includes a valve with an opening / closing control mechanism, a drive device that continuously changes the opening / closing of the valve, and a control circuit that feeds back temperature information from a temperature sensor provided on the load to the valve to control the drive device. By adopting such a configuration, by controlling the cooling water flow rate according to the heat load of the heat exchanger, heat exchange with the heat exchanger of the heat exchanger with the minimum cooling water can be performed with high efficiency. It is possible to realize a cooling water system that can be performed, has good heat solicitation, and contributes to cost reduction. [0014] Claim<u style="single">7</u>Invention (<u style="single">7</u>) Further, the above-mentioned () is characterized in that a cooling water tank is provided in the cooling water circulation pipe.<u style="single">6</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, the above (<u style="single">6</u>) It has the same effect as the described invention. [0015] The invention of claim 8 (<u style="single">8</u>) Is<u style="single">,Before</u>The above-mentioned (1), wherein the cooling water circulation system is substantially a closed system.<u style="single">6</u>) Or (<u style="single">7</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration<u style="single">、(1</u>) Or (<u style="single">7</u>) It has the same effect as the described invention. [0016] Claim<u style="single">9</u>Invention (<u style="single">9</u>) Suppresses a reducing water producing means for producing reducing water in series, in parallel with or outside the cooling supply system, and the cooling water circulation system including the reducing water producing means is substantially a closed system. The above (<u style="single">6</u>)~(<u style="single">8</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, the above (<u style="single">8</u>) It has the same effect as the described invention. [0017] Claim<u style="single">10</u>Invention (<u style="single">10</u>) Is characterized in that the cooling water discharge port is provided with a check valve so that the cooling water does not flow back from the cooling water discharge port to the cooling water circulation pipe.<u style="single">6</u>)~(<u style="single">9</u>) Shall provide the heat exchange water supply device. By adopting such a configuration, it is possible to prevent the inflow of the cooling water that has exchanged heat with the heat exchanger and maintain the water temperature of the cooling water tank in the state of the cooling water supply temperature. [0018] Claim<u style="single">11</u>Invention (<u style="single">11</u>) Is characterized in that a heat insulating material is provided around the reducing water circulation pipe or the cooling water circulation pipe.<u style="single">3</u>)~(<u style="single">10</u>) Shall provide the heat exchange water supply device. By adopting such a configuration, the temperatures of the reducing water and the cooling water flowing in the reducing water circulation pipe and the cooling water circulation pipe can be kept constant, and dew condensation can be prevented. Further, heat exchange can be performed with high efficiency with the heat exchanger included in the heat exchanger. [0019] Claim<u style="single">12</u>Invention (<u style="single">12</u>) Further has a discharge pipe for discharging a part or all of the circulating water of the circulatory system to the outside of the circulatory system and / or a replenishment pipe for replenishing the make-up water for adjusting the circulating water.<u style="single">3</u>)~(<u style="single">11</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, the above (<u style="single">3</u>)~(<u style="single">11</u>) In addition to achieving the same effect as the invention described, it is possible to replace part or all of the circulating water due to deterioration of the quality of the circulating water. [0020] Claim<u style="single">13</u>Invention (<u style="single">13</u>) Further has a standard oxidation-reduction potential measuring means for measuring the standard oxidation-reduction potential of the reducing water produced by the reducing water producing means and / or a dissolved hydrogen measuring means for measuring the dissolved hydrogen concentration, and the detection thereof. Control the quality of reducing water based on the results (<u style="single">4</u>) Or (<u style="single">5</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, in addition to achieving the same effect as the above invention, for example, in order to control the amount of hydrogen dissolved based on the detection result, the reducing property and hydrogen concentration of the cooling water can be monitored, and a predetermined value can be obtained. It becomes easy to keep it in a state. In addition, it is possible to prevent unnecessary use of hydrogen gas by adding as much hydrogen gas as necessary. [0021] [0021] Claim<u style="single">14</u>Invention (<u style="single">14</u>) Is a medium for heat exchange of circulating water by the reducing cooling means.<u style="single">Hydrogen-dissolved water in which hydrogen gas is dissolved in water, the standard oxidation-reduction potential is -0.3 V or less with the standard hydrogen electrode as the reference electrode, the dissolved oxygen concentration is 3 mg / liter or less, and the dissolved hydrogen concentration is 0.1 to 1.5 mg / liter</u>Reducing water (<u style="single">3</u>)~(<u style="single">5</u>) Is provided for the heat exchange water supply device described. By adopting such a configuration, in addition to achieving the same effect as the above-mentioned invention, not only the secondary heat exchange water of the circulatory system but also the primary cooling system for heat exchange of the secondary heat exchange water is included. Bacterial control and corrosion prevention can be performed. [0022] BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the heat exchanger that exchanges heat between a heat exchanger such as mechanical equipment, air, liquid, etc. and heat exchange water or cooling water includes mechanical equipment, air, liquid, etc. in various factory and laboratory equipment. Examples thereof include a cooler for cooling the heat exchanger and a warmer for heating the heat exchanger. In particular, a cooler for electronic component parts manufacturing equipment such as semiconductors and liquid crystal display devices is preferable. Is. [0023] The heat exchange water is not particularly limited as long as the standard oxidation-reduction potential is zero or negative reducing water with the standard hydrogen electrode as the reference electrode, and hydrogen-dissolved hydrogen-dissolved water and sodium sulfite or sodium hydrogen sulfite, etc. Examples thereof include water in which a small amount of a reducing agent other than hydrogen gas is dissolved. Among them, hydrogen-dissolved water can easily control the standard oxidation-reduction potential by dissolving a small amount of hydrogen gas in water, and hydrogen. It is preferable in that it has a lower environmental load than a reducing agent other than gas. In addition, as water for dissolving hydrogen gas or a reducing agent other than hydrogen gas, particle components and oxidizing agents such as hypochlorous acid or sodium hypochlorite are removed from tap water, river water, industrial water and these waters. Examples thereof include the filtered water obtained and the pure water treated by a pure water production apparatus for removing ions and nonionic substances from these waters. In particular, when it is used as heat exchange water for electronic component parts manufacturing equipment, it is desirable to use pure water because pollution in the system is extremely disliked. Further, the water for dissolving hydrogen gas or a reducing agent other than hydrogen gas is preferably degassed water. As a degassing method, a known method can be used. The preferred standard redox potential of reducing water is -0.3 V or less with respect to the standard hydrogen electrode. This is because the desired standard oxidation-reduction potential can be easily controlled by dissolving an appropriate amount of hydrogen gas in water regardless of the dissolved oxygen concentration in the reducing water. [0024] The hydrogen-dissolved water is obtained by dissolving hydrogen gas packed in a cylinder or hydrogen gas obtained by electrolysis of water in water. Specifically, hydrogen gas is dissolved in water so that the dissolved hydrogen concentration at 25 ° C. and 1 atm is 0.1 mg / liter or more, particularly 0.2 to 1.5 mg / liter. Further, it is preferable that the water in which the hydrogen gas is dissolved is removed in advance by a known degassing device so that the dissolved oxygen concentration is 3 mg / liter or less, preferably 0.1 mg / liter or less. The method for measuring the dissolved hydrogen concentration in water and the method for measuring the dissolved oxygen concentration are not particularly limited. For example, it is preferable to measure the dissolved hydrogen concentration and the dissolved oxygen concentration in pure water with a diaphragm type electrode. Figure 4 shows the relationship between the hydrogen gas concentration and the standard oxidation-reduction potential with the dissolved oxygen gas concentration as a parameter. When the dissolved oxygen concentration is 3 mg / liter, if the dissolved hydrogen concentration is less than about 0.2 mg / liter, water It may not be possible to make sure that the oxidation-reduction potential of is a negative value. [0025] The method for dissolving hydrogen gas in water is not particularly limited, and is a method of injecting hydrogen gas into water through a gas permeable membrane to dissolve it, a method of directly bubbling hydrogen gas in a pipe to dissolve it, and hydrogen injection. Hydrogen gas is externally dissolved, such as a method of later providing a dispersion means such as a static mixer to dissolve the hydrogen gas, or a method of supplying hydrogen gas to the upstream side of the pump that supplies ultra-pure water to the gas dissolution tank and dissolving it by stirring in the pump. A method of further introducing and dissolving; a method of electrolyzing ultrapure water to obtain reducing water in which hydrogen gas is dissolved from the cathode side can be mentioned. [0026] Next, the heat exchange water supply device according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a flow chart showing an example of the present embodiment. The heat exchange water supply device 10a includes a circulation pump (reducing water supply means) 1, a cooler for reducing water (circulating water) (reducing water cooling means) 2, a deaerator 9, and a reducing water production device. It has a (reducing water producing means) 3 and a cooler 7 for cooling the heat exchanger 71, and these are connected by a pipe 4 to form a substantially sealed circulation system. This "substantially closed system" means to allow leakage to the extent that it does not interfere with the efficient operation of the supply device. Further, a replenishment pipe 81 for replenishing the circulation system with the replenishment water treated by the pretreatment device 61 from outside the system is connected to the inlet side of the circulation pump 1, and a part or all of the circulation water is discharged from the circulation system to the outside of the system. The discharge pipe 82 is connected to a part of the circulation system upstream of the supply pipe 81. [0027] The treatment method of the pretreatment device 61 differs depending on the type of make-up water, but is not particularly limited. For example, the pretreatment device 61 can be treated by combining a single device such as activated carbon, agglomeration, membrane treatment, ion exchange treatment, and degassing treatment. The target filtered water and make-up water such as pure water can be obtained. Further, as long as the reducing water cooler 2 can cool the heat exchange water of 30 to 40 ° C discharged from the cooler 7 to about 10 ° C, there is no limitation on the method, for example, a heat exchanger. By treating a single device such as a cooling tower or a chiller in combination with a single device, the target water for heat exchange of about 10 ° C can be obtained. The refrigerant of the reducing water cooler 2 is, for example, water or air, and the heat exchanger 71 is, for example, a heat generating portion of a semiconductor manufacturing apparatus. The reducing water production device 3 is composed of a hydrogen gas dissolution tank 32 and a hydrogen gas generator 31, and an oxidation-reduction potential meter 5 and a dissolved hydrogen concentration meter are provided in the middle of the piping connecting the reducing water production device 3 and the cooler 7. 6 is provided to constantly monitor the oxidation-reduction potential and dissolved hydrogen concentration of reducing water, and control the amount of hydrogen gas to be dissolved in water in the hydrogen gas dissolution tank 32. The installation position of the redox potential meter 5 and the dissolved hydrogen concentration meter 6 is not limited to the above position and can be installed even after the heat exchanger, but it is preferably in front of the cooler 7 as in the example of the present embodiment. [0028] Before starting the heat exchange water supply device 10a, it is preferable to sterilize the inside of the circulatory system connected by the pipe 4 with a sterilizer in advance. As a sterilization method, a known method may be used. Next, the water treated by the pretreatment device 61 is supplied from the outside of the system to the inside of the circulation system through the supply pipe 81, while the sterilized water is discharged to the outside of the system from the discharge pipe 82 to replace the inside of the system with water. Next, with the deaerator 9, reducing water production device 3, standard oxidation-reduction potential meter 5, and dissolved hydrogen concentration meter 6 turned on, the circulating water in the system has a dissolved oxygen concentration of 3 mg / liter or less and a dissolved hydrogen concentration. The amount of reducing water is 0.1 mg / liter or more and the standard oxidation-reduction potential is -0.3 V or less with the standard hydrogen electrode as the reference electrode, and it is controlled to maintain this. Further, in the cooler 7, the heat exchanger 71 is cooled, while in the cooler 7, the reducing water that has received heat from the heat exchanger 71 is passed through a refrigerant 21 such as water or air. Pass through cooler 2 to cool. If the quality of reducing water deteriorates during long-term circulation, part or all of the reducing water that is being circulated is discharged from the discharge pipe 82 to the outside of the system, and the amount is replenished. The make-up water treated by the device 61 is replenished from outside the system through the make-up pipe 81. According to the embodiment of the present embodiment, it is possible to surely prevent oxidative corrosion of the metal material in the wetted portion, and to generate aerobic microorganisms and algae that form a biofilm, which are difficult to inhabit under reducing conditions. It can be suppressed extremely effectively. In addition, since it is sufficient to install a simple device, it is possible to suppress an increase in cost due to a large-scale capital investment. [0029] Next, the heat exchange water supply device according to the second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a flow chart showing an example of the present embodiment. In FIG. 2, the same components as those in FIG. 1 are designated by the same reference numerals, the description thereof will be omitted, and only the differences will be described. That is, in the example of the present embodiment, the difference from FIG. 1 is that the circulation pipe 4 is connected so as to branch from the pipe 42 between the reducing water cooler 2 and the redox potential meter 5 and further return to the circulation pipe 42. A substantially sealed bypass pipe 41 is provided, and a deaerator 9 and a reducing water production device 3 are provided in the pipe 41. Therefore, for example, if the circulating water that has been circulated from the past is circulated through the bypass pipe 41 by a valve operation omitted in the figure, and the deaerator 9 and the reducing water production device 32 are turned on, the reducing water can be produced. It can be circulated and supplied as cooling water for the cooler 7. The valve may be opened and closed on a regular basis, standard redox potential meter 5 or dissolved.<u style="single">water</u>It may be controlled by the measured value of the elementary concentration meter 6. It is also possible to constantly divide a part of the circulating water and circulate it through the bypass pipe 41. According to the heat exchange water supply device 10b of the present embodiment, the same effect as that of the first embodiment can be obtained, and a small-scale reducing water production device can be installed in a place located away from the circulatory system. It can be installed and the existing cooling water supply equipment can be used. In addition, it is easy to modify existing equipment, and simple construction is required. [0030] Next, the heat exchange water supply device according to the third embodiment of the present invention will be described with reference to FIG. FIG. 3 is a flow chart showing an example of the present embodiment. In FIG. 3, the same components as those in FIG. 1 are designated by the same reference numerals, the description thereof will be omitted, and only the differences will be described. That is, in the example of the present embodiment, the difference from FIG. 1 is that the installation location of the deaerator and the reducing water production device is not in the middle of the piping of the circulation pipe 4, but in the external pipe 43 connected to the circulation pipe 4. It is a point installed in the middle and a pretreatment device 61 for treating make-up water is provided in front of the deaerator 9, and the pretreatment device 61 and the deaerator 9 are connected by a make-up pipe 81. Therefore, for example, reducing water is replenished through the external pipe 43 to the circulating water that has been conventionally circulated. Therefore, initially, reducing water having a high dissolved hydrogen concentration is supplied, but the standard oxidation-reduction potential and dissolved hydrogen concentration of the reducing water are constantly monitored by the standard oxidation-reduction potential meter 5 and the dissolved hydrogen concentration meter 6. Therefore, the reducing water having a small amount of hydrogen dissolved is gradually supplied, and thereafter, the desired reducing water is stably circulated. [0031] Next, the heat exchange water supply device according to the fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a flow chart showing an example of the present embodiment. In FIG. 5, the same components as those in FIG. 1 are designated by the same reference numerals, the description thereof will be omitted, and the differences will be mainly described. That is, in the heat exchange water supply device 10d of the present embodiment, the difference from FIG. 1 is that the circulation system formed by removing the cooler 7 from the circulation pipe 4 of the heat exchange water supply device 10a of FIG. 1 is formed. As the second system A, separately form a circulation system with the cooler 7, the pump (first reducing water supply means) 64 that supplies the cooler 7 with reducing water, and the cooler 7 and the pump 64. A first system B having a circulation pipe (first reducing water circulation pipe) 67 connected to is formed, and the second system A and the first system B form a reducing water supply side pipe 70 and a reducing water discharge. A flow control valve 63 is provided at points connected by the side pipes 66 and in the middle of the reducing water supply side pipe 70, and the flow rate of the reducing water flowing into the first system B is controlled by the flow control valve 63 for cooling. The point is that the temperature of the reducing water passed through the vessel 7 (cooled body 71) or the cooler 7 is controlled to a desired temperature. Here, the second system A is the same as in FIG. 1 except that the cooler 7 is removed from the circulation pipe 4, and the circulation pump for supplying the reducing water to the first system B (second reducing water supply means). ) 1, a cooler for reducing water (reducing water cooling means) 2 for cooling the reducing water discharged from the cooler 7, a reducing water producing means 3, a circulation pump 1, a cooler for reducing water 2 It is formed by a circulation pipe 4 (second reducing water circulation pipe) that connects the reducing water producing means 3 so as to form a circulation system. In this heat exchange water supply device 10d, the temperature of the reducing water circulating in the second system A is lower than the temperature of the reducing water circulating in the first system B. Reference numeral 74 is a check valve. In FIG. 5, first, the reducing water cooled to about 10 ° C by the reducing water cooler 2 in the second system A is discharged from the circulation pipe 4 and the cooling water supply port 62 to the reducing water supply side pipe 70. And it is supplied to the cooler 7 in the first system B through the pump 64. The cooler 7 is, for example, a load component of a microwave oscillator, a dry pump, or the like that requires cooling. The temperature of the reducing water flowing through the cooler 7 is constantly monitored by the temperature sensor 65. A part of the reducing water discharged from the cooler 7 passes through the circulation pipe 67 and the reducing water discharge side pipe 66, and enters the circulation pipe 4 in the second system A from the cooling water discharge port 68. When the temperature monitored by the temperature sensor 65 exceeds the allowable set temperature, the temperature signal is converted into an electric signal, and the opening degree of the flow rate adjusting valve 63 is increased via the control circuit, the drive circuit, and the like. As the opening degree of the valve increases, the amount of reducing water flowing into the circulation line increases, and as a result, the temperature of the reducing water flowing through the cooler 7 decreases. When the temperature of the object to be cooled 71 becomes equal to or lower than the allowable set temperature, the opening degree of the flow rate adjusting valve 63 is reduced to limit the amount of reducing water. As a result, the amount of reducing water used to cool the object to be cooled 71 can always be minimized. Further, depending on the device, it is not always operating, and there is also a state in which a load is not applied in an idling state. Even in such a case, according to the example of the present embodiment, the reducing water is hardly flown in the idling state, so that the reducing water is not wasted. [0032] Next, the heat exchange water supply device according to the fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a flow chart showing an example of the present embodiment. In FIG. 6, the same components as those in FIG. 5 are designated by the same reference numerals, the description thereof will be omitted, and the differences will be mainly described. That is, in the heat exchange water supply device 10e of the present embodiment, the difference from FIG. 5 is that a plurality of coolers 7 installed in the first system B of the heat exchange water supply device 10d of FIG. 5 are used. A point (4 units) was used, which were connected in series and in parallel, and the installation position of the temperature sensor 65 was used as a pipe in front of the cooler 7 to monitor the temperature of the reducing water flowing in the pipe. It is in. In the example of this embodiment, since the heat load increases, it is necessary to use a type of the flow rate adjusting valve 63 that can be changed up to a large flow rate. According to the heat exchange water supply device 10e of the embodiment of the present embodiment, a cooling system having good heat equalization can be realized with the minimum amount of cooling water. [0033] Next, the heat exchange water supply device according to the sixth embodiment of the present invention will be described with reference to FIG. 7. FIG. 7 is a flow chart showing an example of the present embodiment. In FIG. 7, the same components as those in FIG. 5 are designated by the same reference numerals, the description thereof will be omitted, and the differences will be mainly described. That is, in the heat exchange water supply device 10f of the present embodiment, the difference from FIG. 5 is the reducing property cooled in the middle of the circulation pipe 67 of the first system B of the heat exchange water supply device 10d of FIG. There is a point where a closed buffer tank (cooling water tank) 69 for storing water is provided and a point where a check valve 50 is provided for the cooling water discharge side pipe 66. That is, the heat exchange water supply device 10f is suitable when it is necessary to rapidly cool the object to be cooled 71. That is, when the device is not in use, the flow rate adjusting valve 63 is almost closed, and a large amount of reducing water is stored in the buffer tank 69 in advance. When using the device, the pump 64 is operated to rapidly circulate the reducing water in the buffer tank 69. The cooled reducing water passes through the cooler 7, a part of which flows from the reducing water discharge port 68 to the circulation pipe 4 of the second system through the check valve 50 and the cooling water discharge side pipe 66, and the rest. It flows to the circulation pipe 67. At that time, the temperature sensor 65 monitors the temperature of the reducing water flowing through the cooler 7. When the temperature of the reducing water rises as the apparatus operates and exceeds the set allowable temperature, the temperature signal is returned and the flow rate control valve 63 is opened to introduce new reducing water. Since a large amount of reducing water is stored in advance, it can be applied even when rapid cooling is required as in a rapid heat treatment furnace in a semiconductor manufacturing process. After the device operation is completed, the pump 64 is operated with the flow rate adjusting valve 63 fully opened, and the buffer tank 69 is filled with newly cooled reducing water in preparation for the next device operation. In addition, when the cooled reducing water is stored in the buffer tank 69, the water temperature in the buffer tank 69 can be adjusted by attaching a check valve 50 to prevent the inflow of the reducing water from the high temperature side. It is possible to maintain the state at the time of inflow. [0034] In the fourth, fifth, and sixth embodiments described above, the second system A is not limited to the above example, and the cooler 7 is removed, for example, in the heat exchange water supply device 10b shown in FIG. In the circulatory system or the heat exchange water supply device 10c shown in FIG. 3, the circulatory system in which the cooler 7 is removed may be used. [0035] Next, the heat exchanger cooling device according to the seventh embodiment of the present invention will be described with reference to FIG. FIG. 8 is a flow chart showing an example of the present embodiment. In FIG. 8, the same components as those in FIG. 5 are designated by the same reference numerals, the description thereof will be omitted, and the differences will be mainly described. That is, in the heat exchanger cooling device 10g of the present embodiment, the difference from FIG. 5 is that the second system A of the heat exchange water supply device 10d of FIG. 5 can supply the cooling water to the first system B. If it is a thing (cooling water supply system), it is not particularly limited. That is, in the present embodiment, the cooling water supply system may or may not be a closed system. The cooling water here is not particularly limited, and is tap water, river water, industrial water, and filtered water obtained by removing particle components and oxidizing agents such as hypochlorite or sodium hypochlorite from these waters. Examples thereof include pure water treated by a pure water production apparatus that removes ions and nonionic substances from these waters, and the above-mentioned reducing water. Examples of the reducing water include the same as described above. [0036] In FIG. 8, the temperature of the cooling water flowing through the cooler 7 is constantly monitored by the temperature sensor 65. The cooling water cooled to about 10 ° C by the cooling water cooler in the cooling water supply system, which is omitted in the figure, passes through the cooling water supply pipe 4a, through the cooling water supply port 62, the flow control valve 63, and the pump 64. Up to cooler 7 is introduced. A part of the cooling water discharged from the cooler 7 enters the cooling water circulation pipe 67, and the rest exits from the cooling water discharge port 68 and enters the cooling water discharge pipe 66a. When the temperature monitored by the temperature sensor 65 exceeds the allowable set temperature, the temperature signal is converted into an electric signal, and the opening degree of the flow rate adjusting valve 63 is increased via the control circuit, the drive circuit, and the like. As the valve opening increases, the amount of cooling water flowing into the circulation line increases, and as a result, the temperature of the cooling water flowing through the cooler 7 decreases. When the temperature of the heat exchanger becomes equal to or lower than the allowable set temperature, the opening degree of the flow rate adjusting valve 63 is reduced to limit the amount of cooling water. As a result, the amount of cooling can always be minimized to cool the heat exchanger 7. Further, depending on the device, it is not always operating, and there is also a state in which a load is not applied in an idling state. Even in such a case, according to the example of the present embodiment, the cooling water is hardly flown in the idling state, so that the cooling water is not wasted. In FIG. 8, reference numeral 73 is a heat insulating material. [0037] Next, the heat exchanger cooling device according to the eighth embodiment of the present invention will be described with reference to FIG. FIG. 9 is a flow chart showing an example of the present embodiment. In FIG. 9, the same components as those in FIG. 6 are designated by the same reference numerals, the description thereof will be omitted, and the differences will be mainly described. That is, in the heat exchanger cooling device 10h of the present embodiment, the difference from FIG. 6 is that the second system A of the heat exchange water supply device 10e of FIG. 6 can supply the cooling water to the first system B. If it is a thing (cooling water supply system), it is not particularly limited. That is, in the example of the present embodiment, the cooling water supply system may or may not be a closed system, and the example of the cooling water is the same as that of the seventh embodiment. is there. According to the heat exchanger cooling device 10h of the embodiment of the present embodiment, a cooling system having good heat equalization can be realized with the minimum amount of cooling water. [0038] Next, the heat exchanger cooling device according to the ninth embodiment of the present invention will be described with reference to FIG. FIG. 10 is a flow chart showing an example of the present embodiment. In FIG. 10, the same components as those in FIG. 7 are designated by the same reference numerals, the description thereof will be omitted, and the differences will be mainly described. That is, in the heat exchange water supply device 10i of the present embodiment, the difference from FIG. 7 is that the second system A of the heat exchange water supply device 10f of FIG. 7 can supply cooling water to the first system B. If it is a thing (cooling water supply system), it is not particularly limited. That is, in the example of the present embodiment, the cooling water supply system may or may not be a closed system, and the example of the cooling water is the same as that of the seventh embodiment. is there. The example of the present embodiment has the same effect as the example of the sixth embodiment. [0039] In the present invention, the circulation pump as the reducing water supply means and the cooling water supply means may be known ones that are usually used, but heat exchange water or cooling water is used in the seal portion between the motor portion and the impeller portion of the circulation pump. A structure in which the air and the air do not come into contact with each other is preferable. The sealing structure of the sealing portion may be such that an inert gas is introduced into the sealing portion. [0040] [Example] Next, the present invention will be described in more detail with reference to examples, but this is merely an example and does not limit the present invention. Example 1 Using a heat exchange water supply device with a flow as shown in Fig. 2 (circulation system is a closed system), circulation supply was performed with the following device specifications, operating conditions, and circulating water quality shown in Table 1. Table 1 shows the results after 30 days of continuous operation. The circulating water quality is the result of sampling and analysis at point C in Fig. 2. [0041] Heat exchanger of cooler: Heat generating part of semiconductor manufacturing equipment Piping material: Stainless bright annealed pipe, 3/8 inch diameter Piping total length: 150m Deaerator: Vacuum degassing using a gas permeable membrane -Hydrogen gas dissolution method: Membrane dissolution using a gas permeable membrane Circulation flow rate: 10 liters / minute, but the entire amount of circulating water is constantly circulated through the deaerator 9 and hydrogen gas dissolution tank 32, and there is no replenishment or discharge of circulating water. Reduced water temperature before cooling by the cooler: 10 ° C Reduced water temperature after cooling by a cooler: 23 ° C Metal concentration of raw water: 0.25 μg Fe / L Number of viable bacteria in raw water: 2 / mL Circulation time: 30 days Evaluation: Surface condition of circulatory system piping after 30 days and water quality analysis of reducing water [0042] [table 1]<img file="JP4583530B2_D0001.tif" />[0043] Note) In the table, the upper column in Examples and Comparative Examples shows the water quality of circulating water during operation and the presence or absence of degassing and hydrogen dissolution, and the lower column in Examples and Comparative Examples shows the results after 30 days of operation. The meanings of the symbols are as follows. Nothing on the inner surface of the pipe Slightly rough on the inner surface of the pipe × There is a problem on the inner surface of the pipe [0044] Reference example Using 10 g of the heat exchanger cooling device with the flow as shown in FIG. 8, the amount of cooling water used (consumed) in a predetermined period is measured, and the average temperature (T) of the cooling water supply side of the cooler 7 is measured.₁) And the average temperature on the discharge side (T₂) Was measured. For comparison, the amount of cooling water used (consumed) in the same period is determined by operating the heat exchange water supply device 10g under the same conditions using the conventional heat exchange water supply device without the temperature sensor. While measuring, the average temperature on the cooling water supply side of the cooler 7 (T)₃) And the average temperature on the discharge side (T₄) Was measured. As a result, the amount of reducing water used in 10 g of the heat exchanger cooling device having the flow as shown in FIG. 8 is 36 as a relative value with respect to the amount of reducing water used in the heat exchanger cooling device of the conventional example. It was found that the amount of cooling water used was reduced by more than 60%. Also, (T₄-T₃) Is about 8.0 ° C, while (T)₂-T₁) Was about 0.2 ° C, and it was found that there was almost no temperature difference. From this, the heat exchanger cooling device 10g of the flow as shown in FIG. 8 can make the temperature of the cooling water uniform on the supply side and the discharge side of the cooler, and more precise temperature control is required. It is suitable in such cases. [0045] [Effect of the invention] According to the invention of claim 1, oxidative corrosion of the metal material in the wetted part can be surely prevented, and aerobic microorganisms and algae that form a biofilm, which are difficult to inhabit under reducing conditions, are generated. It can be suppressed extremely effectively. According to the invention of claim 2, when hydrogen-dissolved water is used as the reducing water, reducing water having a desired standard redox potential can be obtained, and oxidative corrosion of the metal material in the wetted portion is surely prevented. be able to. Further, the maintenance of the cooling efficiency required for the cooling system of the semiconductor manufacturing equipment can be stably maintained for a long period of time, and a reliable cooling system can be constructed. According to the invention of claim 3, reducing water having a desired standard oxidation-reduction potential can be obtained, and dissolved oxygen, which is an oxidizing substance dissolved in water as the reducing water, can be reduced. Oxidative corrosion of the material can be reliably prevented. According to the invention of claim 4, the environmental load is reduced by the reducing water obtained by a simple method without using a drug which conventionally requires a purchase cost and a storage space and may have an impact on the environment. It is possible to suppress corrosion of piping materials and biofilms. According to the inventions of claims 5 to 7, the effect of the invention is surely realized, and since it is sufficient to install a simple device, it is possible to suppress a cost increase due to a large-scale capital investment, and cooling for a long period of time. The efficiency can be stabilized. Furthermore, a small-scale reducing water production device can be installed at a location far from the circulatory system, and it is easy to modify the existing cooling water supply facility, and simple construction is required. According to the inventions of claims 8 to 12, even if the heat load fluctuates in each device, it is possible to contribute to the reduction of the cooling water cost by individually controlling the heat exchange water flow rate based on the temperature control. Further, by circulating the cooling water, it is possible to contribute to the soaking property inside the heat load. According to the invention of claim 13, the temperatures of the heat exchange water and the cooling water of the circulatory system can be kept constant. According to the invention of claim 14, it is possible to replace a part or all of the circulating water due to deterioration of water quality or the like. According to the invention of claim 15, for example, since the amount of hydrogen dissolved is controlled based on the detection result, the reducing property and the hydrogen concentration of the cooling water can be monitored and can be easily maintained in a predetermined state. Become. In addition, it is possible to prevent unnecessary use of hydrogen gas by adding as much hydrogen gas as necessary. According to the invention of claim 16, not only the secondary heat exchange water of the circulation system but also the primary cooling water system for heat exchange of the secondary heat exchange water is included to suppress viable bacteria and prevent corrosion. be able to. [Simple explanation of drawings] FIG. 1 is a flow chart of a heat exchange water supply device according to the first embodiment of the present invention. FIG. 2 is a flow chart of a heat exchange water supply device according to a second embodiment of the present invention. FIG. 3 is a flow chart of a heat exchange water supply device according to a third embodiment of the present invention. FIG. 4 is a diagram showing the relationship between the dissolved hydrogen concentration and the standard redox potential. FIG. 5 is a flow chart of a heat exchange water supply device according to a fourth embodiment of the present invention. FIG. 6 is a flow chart of a heat exchange water supply device according to a fifth embodiment of the present invention. FIG. 7 is a flow chart of a heat exchange water supply device according to a sixth embodiment of the present invention. FIG. 8 is a flow chart of a heat exchange water supply device according to a seventh embodiment of the present invention. FIG. 9 is a flow chart of a heat exchange water supply device according to an eighth embodiment of the present invention. FIG. 10 is a flow chart of a heat exchange water supply device according to a ninth embodiment of the present invention. FIG. 11 is a flow chart of a conventional heat exchange water supply device. [Explanation of symbols] 1,51 Circulation pump (reducing water supply means) 2,52 Cooler (reducing water cooler) (reducing water cooling means) 3 Reducing water production equipment (reducing water production means) 4, 54, 67 Circulation piping 4a Cooling water supply side piping 5 Standard redox potential meter 6 Dissolved hydrogen concentration meter 7, 57 Heat exchanger (cooler) 9 deaerator 10a ~ 10f Heat exchange water supply device 21,521 Cooling water 31 Hydrogen gas generator 32 Hydrogen gas dissolution tank 41, 42, 43, 55, 56, 81, 82 piping 50, 74 Check valve 61 Pretreatment equipment 62 Cooling water supply port 63 Flow control valve 64 pump 65 temperature sensor 66 Reducing water discharge side piping (cooling water discharge side piping) 68 Cooling water outlet 69 Buffer tank for cooled reducing water (cooling tank) 70 Reducing water supply side piping (cooling water supply side piping) 71, 571 Heat exchanger 73 Insulation A second system B first system C sampling location