Ultraviolet light source lighting device and ultraviolet irradiation device

The present invention relates to an ultraviolet light source lighting device for lighting a plurality of elongated ultraviolet light sources and an ultraviolet irradiation device using the same.

Known elongated ultraviolet light sources include sterilization lamps, metal halide lamps, and excimer lamps. The application of ultraviolet light emitted from an ultraviolet light source is wide-ranging.

Among the above-mentioned ultraviolet light sources, the excimer lamp is easy to manufacture in various shapes and sizes, so that it is not limited by the size of the irradiation area and can generate radiation of an effective wavelength. That is, an excimer lamp is a lamp in which a rare gas such as xenon or a halide of a rare gas is subjected to silent discharge, that is, a dielectric barrier discharge to generate radiation close to a unique monochromatic color, and has been described in many documents. (See, for example, Patent Document 1). In the dielectric barrier discharge, a pulsed current flows. This pulsed current has a high-speed electron flow and has a long rest period, so when a substance that emits ultraviolet rays such as xenon is temporarily bound to the molecular state (excimer state) and it returns to the ground state. Efficiently emits short-wavelength ultraviolet rays with little reabsorption . In the case of xenon, molecular emission with a wide half-value width with 172 nm as the central wavelength is performed. The energy of ultraviolet rays having a wavelength of 172 nm is larger than that of ultraviolet rays having a wavelength of 185 nm or 254 nm obtained from a low-pressure mercury lamp, and is also larger than the binding energy of an organic compound to be decomposed. Therefore, by irradiating with ultraviolet rays having a wavelength of 172 nm, the bonds of the organic compounds can be cleaved, decomposed and removed. Furthermore, by irradiating ultraviolet rays with a wavelength of 172 nm in the atmosphere, oxygen in the atmosphere decomposes to generate active oxygen, and the organic compound whose bond is broken reacts with the active oxygen to produce carbon dioxide (CO).₂) And water (H)₂Since O) and the like are generated, it becomes easy to remove organic compounds. Therefore, the excimer lamp is extremely effective as an elongated ultraviolet light source. Patent Document 1 uses an elongated tubular airtight container. As a result, those with an effective length exceeding 1 m have come to be used. The use of such a long and slender excimer lamp enables various industrial applications such as ashing of a large-area liquid crystal substrate, curing and sterilization of a photosensitive resin.

By the way, in many applications of an elongated ultraviolet light source, a plurality of lamps are arranged adjacent to each other in order to obtain a desired irradiation area and ultraviolet irradiation intensity.<patcit num="1"><text>Japanese Unexamined Patent Publication No. 2003-197152</text></patcit>

<p> However, when multiple elongated ultraviolet light sources are arranged adjacent to each other, if some of them become defective for some reason while being lit, if ultraviolet light irradiation is continued, the required irradiation intensity cannot be obtained. Poor quality occurs in the ultraviolet light irradiation process. Therefore, an appropriate backup is required in such an emergency, but the prior art has not been able to meet this requirement.</p><p> In the present invention, in a configuration in which a plurality of elongated ultraviolet light sources are arranged adjacent to each other, an ultraviolet light source lighting device that appropriately backs up when a part of the ultraviolet light sources becomes defective during lighting for some reason and the ultraviolet light source lighting device are used. An object of the present invention is to provide an ultraviolet irradiation device.</p>

<p> The ultraviolet light source lighting device of the present invention is composed of a plurality of elongated lamps arranged adjacent to each other so as to irradiate the irradiated surface by synthesizing the ultraviolet light emitted by each.<u style="single">Dielectric barrier discharge lamp</u>When;<u style="single">these</u>Of multiple lights<u style="single">Each of the dielectric barrier discharge lamps is connected to the plurality of dielectric barrier discharge lamps.</u>Each lights up<u style="single">plural</u>With lighting circuit;<u style="single">Said</u>Of multiple lights<u style="single">Dielectric barrier discharge lamp</u>Disadvantages<u style="single">Respectively</u>To detect<u style="single">plural</u>With spot detection means;<u style="single">these</u>It became a point in conjunction with the point detection means<u style="single">The dielectric barrier discharge lamp</u>Adjacent to<u style="single">The dielectric barrier discharge lamp</u>of<u style="single">Said</u>It is characterized by being equipped with a backup means at the time of failure to control the lighting circuit and increase the ultraviolet light output.</p>

<p> According to the present invention, if a part of the ultraviolet light sources of a plurality of elongated lamps becomes defective for some reason during lighting, appropriate backup is performed, so that the required irradiation intensity can be obtained even if the ultraviolet light irradiation is continued. Therefore, quality defects do not occur in the ultraviolet light irradiation step, and a highly reliable ultraviolet light source lighting device and an ultraviolet irradiation device using the same can be provided.</p>

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. [First form] FIG. 1 is a circuit block diagram of a first embodiment for carrying out the ultraviolet light source lighting device of the present invention. In the present embodiment, the ultraviolet light source lighting device UVO includes an elongated ultraviolet light source UVL, a lighting circuit OC, a point detection means D, and a point backup means BA. In addition, among the above, a plurality of sets of the ultraviolet light source UVL, the lighting circuit OC, and the point detection means D are used, and the numerical values of 1, 2, 3, ... n are added to the end of the symbols indicating the respective elements in the figure. It is added.

[About the elongated ultraviolet light source UVL] The elongated ultraviolet light source UVL is a light source having an elongated light emitting part that mainly generates ultraviolet light when lit, and for example, a mercury vapor discharge lamp, a metal halide lamp, an excimer lamp, or the like can be appropriately selected and used. it can. A mercury vapor discharge lamp is a lamp in which mercury and a rare gas are sealed inside an ultraviolet transmissive valve, and ultraviolet rays having a wavelength of 254 nm or 360 nm, which is a characteristic spectrum of mercury, are mainly emitted by mercury vapor discharge. is there. Further, the metal halide lamp is a lamp in which a metal halide such as iron (Fe) that mainly emits ultraviolet rays when discharged, a lamp voltage forming metal such as rare gas and mercury, or a metal halide is sealed. The mercury vapor discharge lamp and the metal halide lamp may be either an electrodeed type in which a pair of electrodes are sealed inside the discharge container or an electrodeless type in which an excitation coil is wound around the outside of the discharge container. Further, the excimer lamp is as described above.

In the form shown in FIG. 1, the ultraviolet light sources UVL1, UVL2, UVL3, ... UVLn of a plurality of elongated lamps are arranged adjacent to each other and connected in parallel, and the lighting circuits OC1, OC2, OC3, which will be described later, respectively. Lighted by .OCn.

[About the lighting circuit OC] The lighting circuit OC is a circuit means for lighting the elongated ultraviolet light source UVL, and various known lighting circuits can be used depending on the type of the elongated ultraviolet light source UVL. The elongated ultraviolet light source UVL discharges mercury vapor. In the case of lamps and metal halide lamps with electrodes, it is necessary to include a current limiting impedance called a ballast connected in series with the ultraviolet light source UVL. However, in the case of the electrodeless type, no ballast is required. Further, in the case of an excimer lamp, since a dielectric barrier discharge using the wall surface of the airtight container as a dielectric is used, ballasting is also unnecessary.

Further, the lighting circuit OC includes a voltage generating circuit for applying a voltage having a required frequency, waveform and voltage value to the ultraviolet light source UVL according to the characteristics of the elongated ultraviolet light source UVL to be lit. Although the power supply can be used as it is in this voltage generation circuit, it is preferable to use a voltage conversion circuit in order to generate a desired voltage. As the voltage conversion circuit, a DC-DC conversion circuit, a DC-AC conversion circuit, or the like can be used alone or in combination. An example of a configuration that is relatively easy to control is a mode in which a DC chopper and an inverter are subordinately connected. In this embodiment, a DC chopper can be used to obtain a desired value of smoothed DC voltage, and the inverter can further convert the smoothed DC voltage into an AC voltage or pulse voltage having a desired frequency and waveform.

In the form shown in FIG. 1, the lighting circuit OC is composed of a lighting main circuit mc and a control circuit cc. The lighting main circuit mc is a power system circuit that mainly handles the voltage applied to the elongated ultraviolet light source UVL and the lamp current. The control circuit cc is a control system circuit that generates an operation signal of the lighting main circuit mc and controls and inputs the operation signal to the lighting main circuit mc.

Multiple lighting circuits OC1, OC2, OC3, ... OCn are connected in parallel to the low frequency AC power supply AC.

[About the spot detection means D] The spot detection means D is a means for detecting the spots of the elongated ultraviolet light source UVL, and individually detects the flaws of the elongated ultraviolet light source UVL of a plurality of elongated lamps. In the present invention, the configuration for detecting a defect is not particularly limited. For example, the lighting state of the elongated ultraviolet light source UVL is constantly monitored by the ultraviolet light emitted from the elongated ultraviolet light source UVL and changes in the current and voltage in the lighting circuit, and when the ultraviolet light is cut off or the current or voltage in the lighting circuit is turned off. When a corresponding change occurs at times, the point can be detected by detecting these as a point phenomenon.

Further, in the case where the point detection means D is configured to constantly monitor the lighting state of the elongated ultraviolet light source UVL as described above, the elongated ultraviolet light source UVL is controlled to have a constant illuminance by feedback controlling the lighting state. Or it can be dimmed to a desired level. Furthermore, it is also possible to control the lighting circuit OC to stop the output when the point detection of the elongated ultraviolet light source UVL is detected, and to protect it for safety.

In the form shown in FIG. 1, the point detection means D corresponds to each of the ultraviolet light sources UVL1, UVL2, UVL3, ... UVLn of a plurality of elongated lamps, and the plurality of them are D1, D2, D3, ... Dn. Arranged, each UV sensor S_UV1, S_UV2, S_UV3, ... S_UVIt is composed of a set of n and judgment circuits J1, J2, J3, ... Jn. And UV sensor S_UVThe output level obtained from the above is monitored by the corresponding determination circuit J, and the defects of the ultraviolet light source UVL are individually determined.

[About the non-point backup means BA] The non-point backup means BA is an elongated ultraviolet light source that becomes a point out of the remaining ultraviolet light source UVL when a part of the ultraviolet light source UVL of multiple elongated lights becomes a point. It is a circuit means for increasing the ultraviolet light output of the elongated ultraviolet light source UVL adjacent to the light source UVL. The increase in the ultraviolet light output of the elongated ultraviolet light source UVL can be achieved by controlling the lighting circuit OC of the ultraviolet light source UVL to increase the output.

Further, the non-point backup means BA responds to the non-point detection output from the non-point detection means D in order to perform the above-mentioned non-point backup. Then, a control signal for increasing the ultraviolet light output is sent to the elongated ultraviolet light source UVL adjacent to the elongated ultraviolet light source UVL that has become a point. The relationship between the elongated ultraviolet light source UVL that has become a point and the elongated ultraviolet light source UVL adjacent to it is stored in advance as table data in the backup means BA at the time of failure, and the table data is read out and compared when necessary. This can be easily known by calculating.

Further, the backup means BA at the time of failure is allowed to have a display means ID. By providing the display means ID, it is possible to back up at the time of failure and at the same time display that one of the ultraviolet light sources UVL has become a failure.

[About the operation of the ultraviolet light source lighting device UVO] When the power of the ultraviolet light source lighting device UVO is turned on, the ultraviolet light source UVL of multiple elongated lights is turned on and emits ultraviolet light. As a result, the irradiated object can be irradiated with ultraviolet light on the irradiated surface, and the irradiated object can be subjected to the required irradiation treatment.

Assuming that a part of the ultraviolet light source UVL of a plurality of elongated lights during lighting, for example, UVL2 in the figure becomes a defect for some reason, the defect detection means D2 corresponding to the elongated ultraviolet light source UVL2 that has become a defect is the ultraviolet light. Detects the defect of the light source UVL2. Then, the detection output is sent to the backup means BA at the time of failure. When the point-of-point backup means BA receives the point-of-point detection output from the point-of-point detection means D2, it brightens the lighting circuits OC1 and OC3 of the elongated ultraviolet light sources UVL1 and UVL3 adjacent to the elongated ultraviolet light source UVL2 that has become a point. Send a control signal to increase the UV light output.

As a result, the illuminance on the irradiated surface is supplemented by the brightening of the adjacent elongated ultraviolet light sources UVL1 and UVL3 even though the elongated ultraviolet light source UVL2 has become a point. Maintained in illuminance. In addition, the light distribution characteristics do not change significantly from those before the defect. Therefore, even if some defects of the elongated ultraviolet light source UVL occur during the irradiation treatment of the irradiated object, the occurrence of quality defects in the irradiation process is prevented.

In addition, when the backup means BA at the time of failure has a display means ID, when one of the elongated ultraviolet light sources UVL becomes a point, it is displayed that the point has occurred, so that the operator Alternatively, attention can be drawn to the administrator, etc., and quick measures such as lamp replacement can be taken.

Hereinafter, other embodiments for carrying out the ultraviolet light source lighting device of the present invention will be described with reference to FIGS. 2 to 6. The same parts as those in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted. [Second form] 2 to 4 show a second embodiment for carrying out the ultraviolet light source lighting device of the present invention, FIG. 2 is a conceptual diagram of a main part, FIG. 3 is a partially cutaway front view of the ultraviolet light source, and FIG. 4 is. It is a partial notch front view of an arc tube. In the present embodiment, in the ultraviolet light source lighting device UVO, the elongated ultraviolet light source UVL is composed of an excimer lamp EXL, and a high frequency pulse voltage output from a lighting circuit (not shown) is applied to light the ultraviolet light source. Other configurations are the same as those of the first embodiment shown in FIG. 1, although not shown. Further, among the plurality of excimer lamps EXL, only three lamps are shown in FIG. Then, corresponding to the above, the point detection means D is arranged in each of the three excimer lamps EXL.

The excimer lamp EXL includes an airtight container 1, an excimer forming gas enclosed in the airtight container 1, an internal electrode 2, and an external electrode OE, and is urged and lit by a high-frequency lighting circuit HFI. In the illustrated form, the airtight container 1, the excimer forming gas, and the internal electrode 2 form a pre-assembled and integrated arc tube LT.

&lt;About the arc tube LT&gt; In the present embodiment, as shown in FIG. 3, the arc tube LT has a pair of feeding portions 3A and 3B and a pair of supporting portions 5 and 5 at both ends in addition to the above configuration. There is.

(About the airtight container 1) The airtight container 1 is made of a material that transmits ultraviolet rays, and an elongated discharge space 1a is formed inside. For example, both ends of the elongated tube can be sealed by a pair of sealing portions 1b and 1b to form a cylindrical discharge space 1a inside. Further, by sealing both ends of the double elongated tube, it is possible to form a structure in which an elongated discharge space having a cylindrical shape, that is, a donut-shaped cross section is formed inside. As a UV-transmissive material, synthetic quartz glass is generally used. However, any material may be used as long as it is transparent to ultraviolet rays of the wavelength to be used.

In addition, the airtight container 1 is a straight pipe having excellent linearity in order to allow the use of a plurality of excimer lamps EXL arranged in parallel at relatively narrow intervals in order to secure the required amount of ultraviolet rays. Is preferable, but it may be slightly curved. In practice, some curvature is likely to occur when forming an elongated tube, and for example, a curvature of up to about 1 mm or less can be formed with respect to a total length of about 1200 mm. However, this degree of curvature is acceptable as a nearly straight pipe.

(About excimer-producing gas) The excimer-producing gas is a mixture of one or more rare gases such as xenon (Xe), krypton (Kr), argon (Ar) or helium (He), or a rare gas halide, for example, XeCl. , KrCl and the like can be used. When a rare gas halide is sealed, the rare gas and a halogen such as fluorine (F), chlorine (Cl), bromine (Br) or iodine (I) are sealed, and the halide is formed inside the airtight container 1. It may be generated. Further, in some cases, it is permissible to mix a gas that does not generate excimer, such as neon (Ne), in addition to the excimer-producing gas.

(Regarding the internal electrode 2) As shown in FIG. 4, the internal electrode 2 is arranged so as to face the external electrode OE with the wall surface of the airtight container 1 interposed therebetween. However, the internal electrode 2 may be either enclosed so as to be exposed in the discharge space 1a of the airtight container 1 or arranged outside the discharge space 1a inside the airtight container 1, for example. In the latter aspect, for example, the airtight container 1 has a double pipe structure, and the internal electrodes 2 are arranged along a tubular wall surface formed on the central axis side of the airtight container 1. Therefore, in the present invention, it should be understood that the internal electrode 2 means an electrode that is relatively arranged inside the airtight container 1 when the airtight container 1 is viewed from the outside.

As can be understood from the above explanation, the internal electrode 2 causes an excimer discharge, in other words, a dielectric barrier discharge, inside the airtight container 1 over almost the entire length in the tube axis direction, that is, the entire effective length of the lamp. Any configuration may be used as long as the arranged electrodes, preferably electrodes long in the tube axis direction. In FIG. 3, the internal electrode 2 is not shown.

A suitable configuration example of the internal electrode 2 shown in FIG. 4 will be described. That is, the internal electrode 2 has a mesh-like structure in which a large number of independent mesh-like portions 2b are dispersedly arranged in the axial direction of the airtight container 1 and are arranged around the airtight container 1 via voids. , It has a structure that is connected and integrated via a connecting portion 2a, and has a configuration that is arranged in a state of being inserted inside the airtight container 1. By using such an internal electrode 2, the amount of ultraviolet rays generated can be relatively increased. The mesh-shaped portion 2b may be continuous or divided in the circumferential direction.

Therefore, when the internal electrode 2 has a mesh shape, it is permissible that the mesh-like portion 2b specifically has a ring shape, a spiral shape, a coil shape, a mesh shape, or the like.

Next, a support structure and a power feeding structure when the internal electrode 2 is arranged inside the airtight container 1 made of quartz glass will be described. In order to seal the internal electrode 2 in the airtight container 1, as shown in FIG. 4, a sealing structure using the sealing metal foil 1b1 can be adopted. That is, after connecting the linear end 2c formed by stretching both ends of the connecting portion 2a of the internal electrode 2 to the sealing metal foil 1b1 by welding or the like, the internal electrode 2 is inserted into the airtight container 1. , Heat the quartz glass at the end to soften it and pinch seal it from the top of the sealed metal leaf 1b1. Then, the sealing portion 1b is formed at the end of the airtight container 1 and the internal electrode 2 is supported at a predetermined position.

(Feeding unit 3A, 3B) The feeding unit 3A, 3B constitutes a feeding end for supplying the current required for excimer discharge to the internal electrode 2. The power feeding portions 3A and 3B are rod-shaped, respectively, and the inner ends are welded to the molybdenum foil 1b1 embedded in the sealing portions 1b formed at both ends of the airtight container 1, and the base end is the airtight container 1. It protrudes from the sealing portions 1b formed at both ends in the direction of the outer pipe axis. Further, the feeding portions 3A and 3B are crimped and connected to the feeding line 4 inside the support portion 5 described later. The feeder line 4 extends from the output end of the high-frequency lighting circuit HFI, which will be described later.

(Support portion 5) As shown in FIG. 3, the support portion 5 includes a bottomed cylindrical cap body 5a, a tightening ring 5b, and a mounting arm 5c. The cap body 5a surrounds the end of the arc tube LT. The bottom has an insertion hole 5a1 for the feeder line 4. The tightening ring 5b is arranged at the open end of the cap body 5a and is fixed to the end of the airtight container 1. The mounting arm 5c protrudes upward in the figure from the side surface of the cap body 5a, and a fixed portion (not shown) is used with the mounting arm 5c in a state where the upper surface of the cap body 5a is in contact with the positioning arm (not shown) showing the arc tube LT. Attached to.

&lt;About the external electrode OE&gt; The external electrode OE is in close contact with the outer surface of the airtight container 1 along the direction of the tube axis, or extends with an appropriate gap, at least in the effective length portion of the excimer lamp EXL. It is arranged so as to face the internal electrode 2. Then, by the cooperation of the external electrode OE and the internal electrode 2, a dielectric barrier discharge having at least one wall surface of the airtight container 1 as a dielectric is generated in the discharge space 1a of the airtight container 1.

Further, the external electrode OE may have either a rigid configuration or a flexible configuration. In the case of rigidity, it becomes an external electrode OE as shown in a block shape having a large heat capacity made of a conductive metal. Therefore, a member conventionally called a lamp body can be used as it is as an external electrode if desired. In this case, it is not necessary to adopt a structure in which the external electrode OE made of a thin aluminum plate, which has been conventionally used, is sandwiched between the lamp body and the airtight container 1. Further, in order to cool one portion of the airtight container in the region where the excimer discharge occurs, the cooling means 9 can be arranged on the external electrode OE. In this case, the cooling means 9 may have any configuration, but the cooling water channel through which the refrigerant flows inside is attached to the external electrode OE externally or integrally formed inside. Is preferable. Further, the external electrode OE may be in a continuous planar or mesh state. The mesh shape means that it has a mesh shape, a punching shape, a grid shape, or the like.

In the illustrated form, the block-shaped external electrode OE made of aluminum detects ultraviolet light emitted from the arc tube LT in the middle portion in the tube axial direction of the arc tube LT as shown in FIG. UV sensor S of means D_UVIt has a through hole TH for leading to.

&lt;Lighting circuit&gt; The lighting circuit applies a high-frequency pulse voltage between the internal electrode 2 of the excimer lamp EXL and the external electrode OE to urge the excimer lamp EXL to light. Further, the lighting circuit is mainly composed of a step-up chopper and a parallel inverter, and the high-frequency pulse output of the high-frequency pulse output is a pair of feeding parts 3A of the arc tube LT in the excimer lamp EXL via the feeding lines 4 and 4 on the high potential side thereof. , 3B, and the low potential side is applied to the external electrode OE, respectively. The step-up chopper functions as a DC power supply for the parallel inverter, and controls the DC voltage of the output as required. Further, the parallel inverter generates a high frequency pulse voltage.

&lt;Operation of Exima Lamp EXL&gt; In Exima Lamp EXL, one of the high-frequency output ends of the lighting circuit OC, for example, the high-voltage side output end, is a pair of power supply units led out from the internal electrodes 2 via the power supply lines 4 and 4. Since it is connected to 3A and 3B, for example, the output end on the low voltage (ground) side is connected to one end of the external electrode OE, a high frequency pulse voltage is generated when an input power supply (not shown) of the lighting circuit OC is turned on. , Is applied between the internal electrode 2 and the external electrode OE facing the internal electrode 2 via the wall surface of the airtight container 1. As a result, a dielectric barrier discharge occurs inside the airtight container 1. This excimer discharge emits vacuum ultraviolet light with a central wavelength of 172 nm by the xenon excimer. Since the vacuum ultraviolet light is transmitted to the outside through the wall surface of the airtight container 1, it can be used according to each purpose. [Third form] FIG. 5 is a circuit block diagram of a third embodiment for implementing the ultraviolet light source lighting device of the present invention. In this embodiment, the elongated ultraviolet light source UVL is an excimer lamp EXL, and the lighting circuit OC is configured to include a constant voltage DC power supply CDC and a subordinate connection circuit of the DC-AC conversion circuit INV, and is based on the circuit operating state. It is equipped with a lamp state detecting means LOD configured to detect the lamp operating state.

The ultraviolet light source UVL consists of an excimer lamp EXL similar to that in the second form.

The lighting circuit OC is composed of a DC-DC conversion circuit in which the constant voltage DC power supply CDC is converted to a constant voltage such as a DC chopper, and converts a low frequency AC power supply voltage into a desired value DC voltage. Further, the constant voltage DC power supply CDC can adjust the output voltage by the feedback from the lamp state detecting means LOD, which will be described later. The DC-AC conversion circuit INV can be configured by an inverter and converts a DC voltage into a high frequency pulse voltage.

The lamp state detecting means LOD includes a current detecting means DI and / and a voltage detecting means DV of the constant voltage DC power supply CDC, and is configured to determine the state of the excimer lamp EXL based on the value of the detection output.

When the lamp state detection means LOD is composed of the current detection means DI of the constant voltage DC power supply CDC, the detection value of the output current fluctuates when the load fluctuates in the steady lighting operation of the excimer lamp EXL, and when there is a defect. The detected value is blocked. Furthermore, when the airtight container of the excimer lamp EXL is damaged and an abnormal discharge occurs, even if the abnormal discharge current is almost the same as the lamp current during steady lighting, due to the constant voltage characteristics of the constant voltage DC power supply CDC, The current detection value decreases as the lamp voltage drops extremely. Therefore, in the determination means (not shown), the relationship between the detection output of the current detection means DI and the lamp state is stored in advance as table data, for example, and the excimer lamp EXL is subjected to a comparison calculation with the detection value. It becomes possible to accurately determine the lamp state.

If the lamp state detection means LOD is composed of the current detection means DI and the voltage detection means DV of the constant voltage DC power supply DCS, the output power can be obtained based on the current detection value and the voltage detection value, and the change can be detected. , In the steady lighting operation of the EXIMA lamp EXL, the output power fluctuates when the load fluctuates, and the output power is cut off when there is a point. Further, when the airtight container of the excimer lamp EXL is damaged and an abnormal discharge occurs, the detected power becomes small. Therefore, in the determination means (not shown), the relationship between the detected power value by the constant voltage DC power supply DCS and the lamp state is stored in advance, for example, table data, and the detected value and the comparison calculation are performed to perform an excimer lamp. It becomes possible to accurately determine the lamp state of EXL.

Then, according to this embodiment, the state of the excimer lamp EXL can be detected by the above configuration, and the excimer lamp EXL can be appropriately controlled and protected as desired. In addition, when a part of the excimer lamp EXL of a plurality of lamps is defective, when compensating for the lack of irradiance on the irradiation surface due to the defect, the same configuration as in the first embodiment is added. The adjacent excimer lamp EXL can be brightened in the event of a defect, and the lack of irradiation illuminance due to the defect can be compensated to a desired degree. [Fourth form] FIG. 6 is a circuit block diagram of a fourth embodiment for implementing the ultraviolet light source lighting device of the present invention. In this embodiment, in comparison with the third embodiment shown in FIG. 5, in addition to the current detection means DI1 and the determination means JC1 of the constant voltage DC power supply CDC of the lighting circuit OC, the output current of the DC-AC conversion circuit INV is used. It is provided with a current detecting means DI2 for detecting and a determining means JC2 thereof, and is further provided with a lamp state determining means JC3.

Since the detection output of the current detecting means DI1 becomes small when the excimer lamp EXL and the DC-AC conversion circuit INV become abnormal, the above abnormality can be determined by determining this with the determining means JC1.

Since the detection output of the current detecting means DI2 becomes small when the excimer lamp EXL becomes abnormal, the above abnormality can be determined by determining this with the determining means JC2.

The lamp state determination means JC3 can identify which of the excimer lamp EXL and the DC-AC conversion circuit INV is abnormal by performing a comparative determination based on the determination results of the determination means JC1 and JC2.

FIG. 7 is a conceptual diagram of one embodiment for carrying out the ultraviolet irradiation device of the present invention. In the figure, the same parts as those in FIG. 2 are designated by the same reference numerals and the description thereof will be omitted. In the present invention, the ultraviolet irradiation device UVW means any device that utilizes the ultraviolet rays generated from the dielectric barrier discharge lamp EXL. For example, a light cleaning device, a photocuring device, a light drying device, and the like. The ultraviolet irradiation device UVW includes an ultraviolet light source lighting device UVO and an ultraviolet irradiation device main body 11.

The ultraviolet light source lighting device UVO has the configurations shown in FIGS. 1 and 2.

The ultraviolet irradiation device main body 11 is a residual portion excluding the ultraviolet light source lighting device UVO from the ultraviolet irradiation device UVW, and includes, for example, a shutter SY and an object to be irradiated stand 12. The irradiated object mounting table 12 supports the irradiated object 13 so as to be located on the irradiated surface. Further, although not shown, an irradiated object cooling means for cooling the irradiated object 13 with cold air can be provided, if desired.

<figref num="1">The circuit block diagram of the 1st embodiment for carrying out the ultraviolet light source lighting apparatus of this invention.</figref><figref num="2">Conceptual diagram of a main part showing a second embodiment for carrying out the ultraviolet light source lighting device of the present invention.</figref><figref num="3">Similarly, a front view of a partially cutaway cross section of an ultraviolet light source</figref><figref num="4">Similarly, a front view of a part of the arc tube notched</figref><figref num="5">Circuit block diagram of a third embodiment for carrying out the ultraviolet light source lighting device of the present invention.</figref><figref num="6">A circuit block diagram of a fourth embodiment for carrying out the ultraviolet light source lighting device of the present invention.</figref><figref num="7">Conceptual diagram of one form for carrying out the ultraviolet irradiation apparatus of this invention</figref>

Code description

ACS ... low frequency AC power supply, BA ... backup means at the time of failure, cc ... control circuit, ID ... display means, mc ... lighting main circuit, OC ... lighting circuit, S_UV... UV sensor, UVL ... Elongated UV light source, UVO ... UV light source lighting circuit