Light deflector and light deflector array

[0001] [Technical field to which the invention belongs] The present invention relates to an optical deflector and an optical deflector array that deflect light using micromachine technology. [0002] [Conventional technology] In recent years, light deflectors using micromachine technology have been attracting attention. This technique is disclosed in, for example, Japanese Patent Application Laid-Open No. 60-5751. As shown in FIG. 6A, it has a rotor portion 2 made of silicon and twisting bars 3 and 4 provided on the rotation axis of the rotor portion 2, and the rotor The portion 2 is connected to the semiconductor plate portion 1 via the twist bars 3 and 4. The rotor portion 2, the twist bars 3 and 4, and the semiconductor plate portion 1 are integrally manufactured from the same silicon substrate, and the semiconductor plate portion 1 functions as a support. [0003] On the other hand, a substrate (hereinafter referred to as an electrode substrate) 5 on which a driving electrode is formed is formed below the substrate on which the rotor portion 2 and the like are formed. In the electrode substrate 5, an annular recess 6 is formed around the rotor portion 2 and the twist bars 3 and 4, and an island-shaped portion 7 is provided in the annular recess 6 located on the rotation axis of the rotor portion 2. Has been done. [0004] Further, two conductive elements (hereinafter referred to as drive electrodes) 8 and 9 for driving are formed axially symmetrically with the island-shaped portion 6, and the drive electrodes 8 and 9 extend beyond the annular recess and are an electrode substrate. It is formed up to the end of 5. The electrode substrate 5 and the semiconductor plate portion 1 are joined to form an optical deflector. [0005] The light deflector configured in this way is driven by an electrostatic attraction due to the voltage applied to the two drive electrodes 8 and 9. Therefore, the deflection angle of the rotor portion 2 is determined by the voltage difference applied to both electrodes. Further, the rotor portion 2 comes into contact with the island-shaped portion 7 by electrostatic attraction, and deflects with the contact surface with the island-shaped portion 7 as the base point of rotation. [0006] Further, the above-mentioned publication also discloses an application using a light deflector. As shown in FIG. 6 (b), an optical deflector having a semiconductor plate portion 11 in which two rotor portions 12 and 12'on the same substrate are formed in parallel in a direction perpendicular to the rotation axis, and a first An optical deflector comprising an electrode substrate 5 having a fixed mirror 15 for deflecting light 14 from a light source 13 reflected by the rotor portion 12 to a second rotor portion 12 is shown. [0007] That is, in this configuration, the deflection angle can be increased as shown by the arrow 16 by utilizing the two rotor portions 12 and 12'formed in parallel. [0008] Further, the above-mentioned publication also describes a case where two rotor portions are arranged so that their rotation axes are orthogonal to each other. In this case, there is an advantage that the light can be deflected two-dimensionally through the fixed mirror. [0009] [Problems to be Solved by the Invention] However, in the above-mentioned optical deflector, since the twist bar portion for connecting to the semiconductor plate portion is on the rotation axis, the rotors cannot be arranged without a gap in the rotation axis direction. Therefore, the above-mentioned optical deflector is not suitable for the configuration in which the rotors are closely arranged in the rotation axis direction. [0010] For example, when used as a micro light deflection element in a scanning optical device as shown in Japanese Patent Application Laid-Open No. 2001-116696, it is necessary to arrange the rotor portions in a direction parallel to the rotation axis without a gap. .. This is because the purpose of the minute light deflection element is to introduce the dispersed light into a plurality of photodetectors with an arbitrary wavelength width, and if the distance between the adjacent rotors is wide, the spectral characteristics are adversely affected. Because it exerts. Further, in the conventional optical deflector described above, since the rotor portions cannot be arranged without a gap in the rotation axis direction, there is a problem that the spectral characteristics are deteriorated. [0011] The present invention has been made in view of such a problem, and an object of the present invention is to provide an optical deflector capable of being closely arranged in the rotation axis direction. [0012] Another object of the present invention is to provide an optical deflector array using optical deflectors that can be arranged closely side by side in the rotation axis direction. [0013] [Means for solving problems] That is, the invention according to claim 1 comprises a support member, a movable plate having a reflective surface, at least one elastic body in which one end is supported by the support member and the movable plate is attached to the other end, and the one end. A driving means for swinging the movable plate with respect to the support member is provided with a second direction orthogonal to the first direction connecting the other end and the swing axis as a swing axis, and the support member is movable. It has a facing substrate facing the surface of the plate opposite to the reflective surface, and the facing substrate has a maximum deflection angle of the movable plate in order to define a maximum deflection angle when the movable plate is swung. A contact portion that comes into contact with the movable plate is provided, and the movable plate can swing to the first and second deflection positions that come into contact with the contact portion when a driving force is applied by the driving member. It is characterized by being driven. [0014] According to the second aspect of the present invention, in the optical deflector according to the first aspect, the contact portion is the first contact portion provided in the vicinity of the swing axis of the movable plate and the first contact portion. It is characterized by consisting of second and third contact portions provided on both sides of the contact portion. [0015] The invention according to claim 3 is characterized in that, in the optical deflector according to claim 2, the first, second, and third contact portions are formed by an end portion of a convex surface. [0016] Further, in the invention according to claim 4, in the optical deflector according to claims 1 to 3, the elastic body is formed by two parallel springs supported by the support member from both ends of the movable plate. It is composed of two bent portions provided inside the two parallel springs and connected to each other, and a connecting plate for connecting the two parallel springs provided between the bent portion and the support member. It is characterized by. [0017] In the invention according to claim 5, in the optical deflector according to claim 2 or 3, the movable plate has a conductive surface on at least one surface, and the first to third contact portions are made of an insulating material. It is characterized by having two electrodes which are provided on the facing substrate and are insulated from the facing substrate with the first contact portion as a boundary. [0018] The invention according to claim 6 is an array in which a plurality of the optical deflectors according to claims 1 to 5 are arranged in the second direction parallel to the swing axis. [0019] The invention according to claim 7 is characterized in that, in the optical deflector array according to claim 6, all the conductive surfaces of the movable plate are electrically conductive. [0020] According to the first aspect of the present invention, since the elastic body supporting the movable plate is formed in the direction orthogonal to the swing axis, a space that can be freely used in the swing axis direction can be created. Therefore, the light deflectors can be closely arranged in the swing axis direction. Further, the maximum deflection angle of the movable plate can be uniquely determined by bringing the movable plate into contact with the contact surface formed on the facing substrate surface facing the movable plate. [0021] [0021] According to the second aspect of the present invention, by providing the contact portions formed on the facing substrates in the vicinity of the swing axis and on both sides thereof, when the movable plate is deflected in two directions about the swing axis, respectively. The maximum deflection angle of can be specified. At this time, by forming the first contact portion in the vicinity of the swing axis, the deflection axis of the movable plate can be substantially aligned with the swing axis. [0022] According to the third aspect of the present invention, the contact portion formed on the facing substrate can be basically made into line contact by using the end portion of the convex surface. The contact has the advantage that the maximum deflection angle can be easily adjusted to the desired specifications. [0023] According to the invention of claim 4, when the movable plate is supported by two elastic bodies, the elastic body also extends in the longitudinal direction when the movable plate is deflected. If an attempt is made to absorb this elongation with a flat plate, the driving force required for deflection becomes very large. In order to absorb this elongation, the configuration of two parallel springs and a bending spring is effective. Further, the above-described configuration makes it easy for the movable plate to vibrate in the swing direction. Therefore, the connecting plate is provided for the purpose of suppressing the easiness of vibration in this direction and facilitating the vibration in the deflection direction. [0024] According to the invention of claim 5, the electrostatic attraction can be used as the driving force by forming the electrode on the opposing substrate. [0025] Further, according to the invention of claim 6, since there is a free space in the swing axis direction of the movable plate, by arranging the light deflectors by arranging the light deflectors using this space, a plurality of light deflectors are densely arranged without gaps. You can make an array of optical deflectors. [0026] According to the invention of claim 7, when electrostatic attraction is used, the electrode provided on the facing substrate is used as the driving electrode, and the conductive surface provided on the movable plate is used as the ground surface. This also applies to the case of arraying, and it is advantageous in terms of control that each ground surface is shared. Moreover, the extraction electrode can be made into one by making it common. [0027] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. [0028] First, the first embodiment of the present invention will be described with reference to FIGS. 1 to 3. [0029] FIG. 1 is a diagram showing a schematic configuration of an optical deflector array according to the first embodiment of the present invention. It should be noted that the configuration of FIG. 1 shows from the first optical deflector to the third optical deflector, and it is assumed that only the third optical deflector is deflected. [0030] In FIG. 1, the movable plate 25 described later₁、25₂、25₃And elastic body 26₁、26₂、26₃And elastic body 27₁、27₂、27₃However, the first direction is arranged as the longitudinal direction. And these movable plates 25₁、25₂、25₃And elastic body 26₁、26₂、26₃And elastic body 27₁、27₂、27₃A first convex portion 21 is continuously formed on the upper surface of the facing substrate 20 facing the above in a second direction (rotation axis O direction) orthogonal to the first direction. [0031] At the central portion of the first convex portion 21, a second convex portion 22 is formed so as to continuously project in the second direction. Drive electrodes 28, 28 are provided on the upper surface of the first convex portion 21 with the second convex portion 22 interposed therebetween. [0032] Further, above the opposed substrate 20, the first optical polarizing device 24₁, Second light polarizing device 24₂, Third light polarizing device 24₃The above-mentioned movable plate 25 that constitutes₁、25₂、25₃And elastic body 26₁、26₂、26₃And elastic body 27₁、27₂、27₃And are placed. The above movable plate 25₁、25₂、25₃Is an elastic body 26₁、26₂、26₃And elastic body 27₁、27₂、27₃It is sandwiched between the two and attached to each. [0033] The first convex portion 21 is a movable plate 25.₁~25₃It is formed inside the outer circumference of the. Further, the second convex portion 22 is the movable plate 25 described above.₁~25₃Is located substantially directly below the swing axis O so that it can rotate in the direction of the arrow shown in the figure. [0034] In such a configuration, the movable plate 25₁~25₃Assuming that one surface is the ground potential, the movable plate 25 is due to the voltage difference of the voltage applied to each electrode.₁~25₃Is biased. As the voltage difference increases, for example, the movable plate 25₁First contacts the first convex portion 21. In addition, the movable plate 25₁Is deflected until it contacts the end of the second convex 22 while contacting the end of the first convex 21. After that, the deflection angle does not change even if the voltage difference is increased. [0035] Therefore, in this configuration, the movable plate 25₁~25₃The maximum deflection angle of is determined by the end of the first convex portion 21 and the end of the second convex portion 22 provided on the facing substrate 20. [0036] Next, a specific example of the above-mentioned optical deflector will be described with reference to FIG. [0037] FIG. 2 shows the individual detailed configurations of the above-mentioned optical deflectors, (a) is a top view, (b) is along the AA'line of (a), and is a cross-sectional view in a static state. (c) is along the AA'line of (a), a cross-sectional view of the state during driving, (d) is a view showing the surface side of the movable part facing the facing substrate, and (e) is the movable part. It is the figure which showed the mirror surface side of. [0038] This photopolarizer is manufactured by using the lower opposed substrate 20 and the SOI (Silicon on Insulator) substrate 36. [0039] Single crystal silicon is used as the substrate for the opposed substrate 20. The second convex portion 22 is first produced by removing the silicon substrate, and the first convex portion 21 is produced by further processing. Further, the first convex surface 21a, which is the upper surface portion of the first convex portion 21 including the second convex portion 22, is made slightly smaller than the surface of the movable plate 25 facing the first convex surface 21a. [0040] Further, an insulating film (not shown) is formed on all the surfaces of the facing substrate 20 facing the upper substrate 36 to insulate the upper substrate 36. [0041] A drive electrode 28 is provided on the first convex surface 21a, that is, the electrode substrate surface 20b, with the second convex portion 22 interposed therebetween. Further, the end face of the second convex portion 22 is formed as the second end portion 22b. [0042] A wiring surface is formed on the substrate portion 20a from the first end portion 21b, which is the end portion of the first convex portion 21, to the end portion of the opposing substrate 20, and the wiring 29 is formed from each drive electrode 28. Is formed. [0043] The wiring 29 extends from the drive electrode 28, passes over the tapered inclined surface 20c formed from the front of the first convex portion 21, and reaches the wiring surface on the substrate portion 20a. Therefore, it is possible to prevent the wiring from being cut off at the end portion, and at the same time, it is prevented from short-circuiting even when the movable plate 25 comes into contact with the first end portion 21b. Further, as the wiring 29, it is preferable to select a wiring having a high affinity in the semiconductor process such as aluminum. [0044] A lead electrode 30 is provided on the wiring 29 formed up to the end of the facing substrate 20. The lead-out electrode 30 is formed by forming a thick metal film, and the wiring can be pulled out to the outside by wire bonding or the like. Further, support portions 31 for supporting the upper substrate 36 to be joined to the opposing substrate 20 are formed in the vicinity of the extraction electrode 30 and on both sides of the wiring 29. [0045] The joint surface on the support portion 31 is on the same plane as the second convex surface 22a, which is the upper surface of the second convex portion 22, and is formed of gold or an alloy of gold tin for bonding. This bonding is performed by metal-tin bonding with a metal thin film formed on the polyimide surface of the upper substrate 36, which will be described later, and a metal formed on the bonding surface on the opposing substrate 20. Therefore, the conductive joint portion 34 is conductive. [0046] The upper substrate 36 is manufactured by using the SOI substrate, and the movable plate 25 is formed by the active layer of the SOI substrate 36. The upper substrate 36 further comprises a polyimide layer 35 made of polyimide. In addition to the elastic bodies 26 and 27, the polyimide layer 35 is formed from the lower part of the movable plate 25 to the support 33. The support 33 is formed of an SOI substrate and supports the movable plate 25 through the elastic bodies 26 and 27. [0047] The upper part of the support 33 is composed of the SOI substrate layer 37. [0048] As shown in FIGS. 2 (d) and 2 (e), the elastic bodies 26 and 27 are in the longitudinal direction (first direction) of the mirror portion 46 or the ground (GND) electrode portion 40, which is the deflection surface of the movable plate 25. A leaf spring 43 extends and is formed in each of the two bending portions 41 and the connecting portion 42. For these leaf springs 43, for example, two window portions 44 are formed, and a connecting plate 45 is provided between these window portions 44 and in a direction orthogonal to the extending direction of the leaf spring 43. .. [0049] By forming the window portion 44 on the leaf spring 43, the window portion 44 is distorted and the leaf spring 43 can be easily extended in the longitudinal direction. This is because the elastic body is a member formed in a mere flat plate shape and is difficult to extend. [0050] Further, as shown in FIG. 2D, a metal thin film is formed on the entire back surface of the surface on which the movable plate of the polyimide layer 35 is formed. It is desirable that this metal is a gold or gold-tin alloy in consideration of conditions such as bonding. [0051] The present configuration is roughly divided into the above-mentioned upper substrate and the facing substrate, each of which is manufactured independently, and finally the two are joined at the joining portion. [0052] Next, the operating principle of the optical polarizing device configured in this way will be described. [0053] In this configuration, a voltage is applied to the two drive electrodes 28, and an electrostatic attraction is generated between the two drive electrodes 28, so that the movable plate 25 is deflected. By applying a voltage difference between the two drive electrodes 28, the movable plate 25 is deflected toward the larger voltage. [0054] Looking at the method of deflection in detail, at the start of voltage application, the movable plate 25 is totally sunk to the opposite substrate 20 side while being deflected. This is because the movable plate 25 is separated from the second convex portion 22 by the thickness of the metal layer formed on the joint surface of the facing substrate 20. [0055] Further, when a voltage is applied, the movable plate 25 is further deflected to the high voltage side, and finally comes into contact with the first end portion 21b of the first convex portion 21. From this state, the deflection angle of the movable plate 25 does not change even if a voltage is further applied. [0056] Therefore, the function of the optical deflector of this configuration as a single unit is that the movable plate 25 has a maximum deflection angle at the first end 21b of the first convex portion 21 and the second end 22b of the second convex portion 22. It is uniquely determined by contact. For example, when this optical deflector is used as an optical device in which only a binary deflection angle is used, the voltage required for the maximum deflection angle is simply applied, and no control mechanism is required. A stable deflection angle is always obtained. [0057] Here, the binary deflection angle means, for example, a case where the maximum deflection is made to one drive electrode side and a case where the maximum deflection is made to the other drive electrode side. [0058] [0058] Further, the elastic bodies 26 and 27 are provided with the bent portion 41 and the connecting plate 45 to minimize the driving force of the movable plate 25, and further selectively restrain the movement in the driving direction other than the driving direction. Have. This is due to the following action. [0059] When the movable plate 25 is deflected, the movements of the elastic bodies 26 and 27 depend on the movable plate 25, and symmetrical deformation occurs around the two elastic body swing axes that support the movable plate 25. At this time, the elastic bodies 26 and 27 are bent and deformed upward or downward, but at the same time, they are pulled in the direction orthogonal to the swing axis (first direction). This occurs because the elastic bodies 26 and 27 support the movable plate 25 from both sides, which causes an increase in the driving force required for the deflection angle of the movable plate 25. [0060] Therefore, the bent portion 41 is provided in order to reduce the rigidity of the elastic bodies 26 and 27 of the present configuration with respect to tension. When a tensile force acts on the bent portion 41, the crank portion formed on the outside of the connecting portion 42 opens, so that the rigidity of the elastic bodies 26 and 27 with respect to the tension can be reduced. [0061] Further, the bent portion 41 is provided at an optimum position for maintaining the rigidity of the movable plate 25 in the swing axis direction (second direction). In addition, by providing the connecting plate 45 between the bent portion 41 and the support 33, it is possible to increase the rigidity of the movable plate 25 in the desired driving direction with respect to the rigidity of the movable plate 25 in the swing axis direction. Therefore, the elastic bodies 26 and 27 in this configuration can be suppressed from vibrating in the swing axis direction due to an external force or the like. [0062] Further, since the elastic bodies 26 and 27 supporting the movable plate 25 are formed in the direction orthogonal to the swing axis O (first direction), both sides of the movable plate 25 in the swing axis direction can be freely used. There are also advantages. For example, when this configuration is used as a micro light deflection element in a scanning optical device as disclosed in Japanese Patent Application Laid-Open No. 2001-116696 described above, as shown in FIG. 3, this light deflection This is an optical deflector array in which the devices are arranged in a row in the direction of the swing axis. [0063] As shown in FIG. 3, a plurality of, in this case, five photopolarizers are arranged in a direction orthogonal to the swing axis O. [0064] The micro light deflector required in JP-A-2001-116696 is desired to have a substantially zero distance between the light deflectors, but the optical deflector of the present configuration can satisfy the requirement. it can. [0065] When the optical polarizing device is arrayed, it can be used as a common electrode by electrically conducting a metal thin film formed on each movable plate. This indicates that it can be used as a common ground in a drive system using electrostatic attraction, and as shown in FIG. 3, only one lead electrode for the ground formed at the end of the array. Can be pulled out to the outside ground with. [0066] Of course, each configuration of the first embodiment described above can be modified and changed in various ways. [0067] Next, a second embodiment of the present invention will be described. [0068] FIG. 4 shows the individual detailed configurations of the optical deflector according to the second embodiment, (a) is a top view, (b) is a cross-sectional view in a static state, and (c) is a driving state. The cross-sectional view of (d) is a view showing the mirror surface side of the movable part. [0069] The configuration of the photopolarizer according to the second embodiment is a cantilever configuration in which the movable plate 25 is supported by one of the elastic bodies 48 on one side. Since the elastic body 48 has the same configuration as that of the first embodiment described above except that the elastic body 48 is formed of a flat plate and that the elastic body 48 is composed of only one elastic body, the same parts are the same. The detailed description will be omitted with the reference number of. [0070] In this configuration, since the movable plate 25 is supported by one of the elastic bodies 48 on one side, the tension generated in the elastic body 48 when the movable plate 25 is driven in the direction orthogonal to the swing axis direction is applied. Does not occur. Therefore, the bent portion and the like shown in the first embodiment described above are not required, and the flat plate can be used. [0071] In addition, since there is only one elastic body, the driving force required to deflect the movable plate by the same amount is reduced, and power consumption can be suppressed. [0072] Next, a third embodiment of the present invention will be described. [0073] As the third embodiment, as shown in FIG. 5, a configuration using an electromagnetic force as a driving force can be considered. [0074] FIG. 5 shows the configuration of the optical deflector according to the third embodiment, (a) is a cross-sectional view in a static state, (b) is a cross-sectional view in a driven state, and (c) is a top view. (d) is a view showing the mirror surface side of the movable part, and (e) is a view showing the surface side of the movable part facing the facing substrate. [0075] The facing substrate 50 has a support portion 51 formed at an end portion thereof and a first convex portion 53 formed substantially at a central portion thereof. A second convex portion 54 is formed on the first convex portion 53 in the vicinity of the swing axis of the movable plate 61, which will be described later. The first convex portion 53 is formed so as to have an end portion slightly inward from the end portion of the movable plate 61. Further, the end portion of the first convex portion 53 is a portion that comes into contact with the movable plate 61 as the end contact portion 53a when the movable plate 61 is deflected. [0076] Further, on the outside of the support portion 51, a permanent magnet portion 52 magnetized in a direction (first direction) orthogonal to the swing axis is provided. As a result, the magnetic flux line 63 orthogonal to the swing axis is formed in the entire optical deflector. [0077] An insulating film is formed on the surface of the facing substrate 50 facing the movable plate 61. Further, on the contact surface on the support portion 51 formed on the same plane as the convex surface of the second convex portion 54, a joint portion 55 for joining the opposing substrate 50 and the upper substrate described later is formed. There is. The bonding portion 55 is formed by a drawing electrode portion 55a for the extraction electrode 56 and a conductive bonding film 55b formed on the upper substrate for bonding while electrically conducting with a coil electrode to be described later. There is. [0078] The upper substrate is composed of a movable plate 61 and two elastic bodies 57 and 58 that support the movable plate 61 and the joint support portion 66 with the movable plate 61 sandwiched between them. It is the polyimide film 62 that forms the elastic bodies 57 and 58. The polyimide film 62 constitutes the elastic bodies 57 and 58, and is formed in a state where the two elastic bodies 57 and 58 are connected through the movable plate 61. [0079] A mirror portion 64, which is a deflection surface of the movable plate 61, is formed on the surface side of the polyimide film 62. Then, a joint support portion 66 is provided from the mirror portion 61 toward the end portion via the support beam portion 65. [0080] [0080] On the other hand, on the back surface of the polyimide film 62, an electromagnetic coil 67 extending from the first coil electrode 59 is formed. The electromagnetic coil 67 is circulated on the support portion side of the swing shaft of the movable plate 61 and is connected to the second coil electrode 60. The electric power of the electromagnetic coil 67 can be obtained from the extraction electrode 56 via the first coil electrode 59 and the second coil electrode 60. [0081] In FIG. 5, the electromagnetic coil 37 is wound only once, but when it is wound multiple times, it is possible to connect from the end of the electromagnetic coil to the second coil electrode by overpass wiring. , It is necessary to ensure the insulation with the orbiting electromagnetic coil. [0082] The method of driving the optical polarizing device configured in this way uses the Lorentz force generated between the electromagnetic coil 67 and the permanent magnet portion 52 by passing an electric current through the electromagnetic coil 67. At this time, the force generated in the electromagnetic coil 67 can drive the movable plate 61 to both the facing board 50 side and the opposite side (upper side in FIG. 5A), but it must be on the facing board 50 side. By generating a force, the movable plate 61 comes into contact with the end of the first convex portion 53 and the end of the second convex portion 54, and as in the first embodiment described above, any control mechanism is provided. A stable maximum deflection angle can always be obtained without using it. [0083] Further, by using an electromagnetic drive source, a force larger than the electrostatic attraction can be generated, which is very effective when it is necessary to increase the deflection angle. [0084] [Effect of the invention] As described above, according to the present invention, it is possible to provide an optical deflector that can be arranged closely side by side in the rotation axis direction. [0085] Further, according to the present invention, it is possible to provide an optical deflector array using optical deflectors that can be arranged closely side by side in the rotation axis direction. [Simple explanation of drawings] FIG. 1 is a diagram showing a schematic configuration of an optical deflector array according to the first embodiment of the present invention. FIG. 2 shows the individual detailed configurations of the optical deflector of FIG. 1, (a) is a top view, (b) is along the AA'line of (a), and is a cross section in a static state. The figure, (c) is along the AA'line of (a), is a cross-sectional view of the state during driving, (d) is a view showing the surface side of the movable part facing the facing substrate, and (e) is a view. It is a figure which showed the mirror surface side of a movable part. FIG. 3 is a top view showing the configuration of an optical deflector array in which the optical deflectors having the configuration of FIG. 2 are arranged in a row in the swing axis direction. 4A and 4B show individual detailed configurations of an optical deflector according to a second embodiment of the present invention, in which FIG. 4A is a top view, FIG. 4B is a cross-sectional view in a static state, and FIG. A cross-sectional view of the state during driving, (d) is a view showing the mirror surface side of the movable part. 5A and 5B show a configuration of an optical deflector according to a third embodiment of the present invention, in which (a) is a cross-sectional view in a static state, (b) is a cross-sectional view in a driven state, and (c). Is a top view, (d) is a view showing the mirror surface side of the movable part, and (e) is a view showing the surface side of the movable part facing the facing substrate. FIG. 6 is a diagram showing a configuration example of a conventional optical deflector. [Explanation of symbols] 20 Opposed board, 20a board part, 20b Electrode substrate surface, 20c slope, 21 First convex part, 21a First convex surface, 21b 1st end, 22 Second convex part, 22a Second convex surface, 22b second end, twenty four₁ First photopolarizer, twenty four₂ Second photopolarizer, twenty four₃ Third photopolarizer, 25, 25₁、25₂、25₃ Movable plate, 26, 26₁、26₂、26₃、27、27₁、27₂、27₃ Elastic body, 28 drive electrode, 29 wiring, 30 Drawer electrode, 31 Support, 33 Support, 34 Conductive joints, 35 polyimide layer, 36 Top board, 37 SOI (Silicon on Insulator) board, 40 Ground (GND) electrode part, 41 Bending part, 42 connecting part, 43 leaf spring, 44 windows, 45 connecting plate, 46 Mirror part.