JP3545359B2

Optical member having antireflection film

Abstract

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Term

Term ended

Expired 27 April 2021, 5.4 years ago.

  1. Priority and filed
  2. Granted
  3. Expired
  4. Today

7 claims: 2 independent, 5 dependent

  1. 1
    A plastic substrate, an antireflection film of λ / 4-λ / 2-λ / 4 type (λ = 500 nm) from the substrate side, and an antireflection film provided between the plastic substrate and the antireflection film are provided on the plastic substrate. An optical member having a base layer made of metal niobium, the λ / 2 layer is an equivalent film having three or more layers having a refractive index of 1.80 to 2.40, and an even layer of the equivalent film is silicon dioxide. An optical member having an antireflection film that is a layer. プラスチック基板と、該プラスチック基板上に、基板側からλ/4-λ/2-λ/4型(λ=500nm) の反射防止膜と、該プラスチック基板と該反射防止膜との間に設けられた金属ニオブからなる下地層とを有する光学部材であって、該λ/2の層は、屈折率が1.80~2.40である3層以上の等価膜であり、該等価膜の偶数層が二酸化ケイ素層である反射防止膜を有する光学部材。
  2. 7
    An underlayer and a λ / 4-λ / 2-λ / 4 type antireflection film are provided on the plastic substrate, and the underlayer (first layer) and λ / 4 (second to fourth layers) -λ are provided. It is composed of the 1st to 8th layers of / 2 (5th to 7th layers) -λ / 4 (8th layer), and the 1st layer is a metal niobium having a thickness of 0.005λ to 0.015λ and a refractive index of 1.40 to 1.47. The second layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, the third layer is a high refractive index layer having a refractive index of 2.04 to 2.37, and the fourth layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47. The layer is a high refractive index layer with a refractive index of 2.04 to 2.37, the sixth layer is a silicon dioxide layer with a refractive index of 1.43 to 1.47, the seventh layer is a high refractive index layer with a refractive index of 2.04 to 2.37, and the eighth layer is. It is a silicon dioxide layer with a refractive index of 1.43 to 1.47, with a synthetic refractive index of λ / 4 (2nd to 4th layers) of 1.65 to 1.80 and a synthetic refractive index of λ / 2 (5th to 7th layers) of 1.85 to 2.25. An optical member having an antireflection film in which the high refractive index layer is composed of at least one metal oxide selected from titanium oxide, niobium oxide, and tantalum oxide. プラスチック基板上に、下地層と、λ/4-λ/2-λ/4型の反射防止膜とが設けられ、下地層(第1層)及びλ/4(第2~4層)-λ/2(第5~7層)-λ/4(第8層)の第1~8層からなる構成で、第1層が、膜厚0.005λ~0.015λ、屈折率1.40~1.47の金属ニオブ層、第2層が、屈折率1.43~1.47の二酸化ケイ素層、第3層が、屈折率2.04~2.37の高屈折率層、第4層が、屈折率1.43~1.47の二酸化ケイ素層、第5層が、屈折率2.04~2.37の高屈折率層、第6層が、屈折率1.43~1.47の二酸化ケイ素層、第7層が、屈折率2.04~2.37の高屈折率層、第8層が、屈折率1.43~1.47の二酸化ケイ素層であり、λ/4(第2~4層)の合成屈折率が1.65~1.80、λ/2(第5~7層)の合成屈折率が1.85~2.25であり、前記高屈折率層が、酸化チタン、酸化ニオブ及び酸化タンタルの中から選ばれた少なくとも1種類の金属酸化物より構成される反射防止膜を有する光学部材。