Pressure detector mounting structure

Description: TECHNICAL FIELD [Detailed description of the invention]

【0001】

[Technical field to which the invention belongs]

The present invention mainly relates to an improvement in a mounting structure of a pressure detector using a sensor chip (pressure sensitive element), and is mainly used in a strongly corrosive gas supply system or the like in a semiconductor manufacturing facility. is there.

【0002】

[Conventional technology]

A diaphragm-type pressure detector using a sensor chip (pressure sensitive element) or a strain gauge has been widely used for detecting the fluid pressure in a pipeline. FIGS. 9 and 10 show an example of the structure of the diaphragm type pressure detector, which has been published by the applicant as Japanese Patent Application Laid-Open No. 10-820707 and Japanese Patent Application No. 10-008841. That is, in FIGS. 9 and 10, 1 is a sensor base, 2 is a sensor chip (pressure sensitive element), 3 is a diaphragm, 4 is a diaphragm base, 5 is a pressure transmission medium (silicon oil), and 6 is a seal. Ball, 7 is a lead pin, 8 is a welded part, 10 is a fluid pressure, and when the fluid pressure 10 is applied to the sensor chip 2 via the diaphragm 3 and the pressure transmission medium 5, the semiconductor pressure transducer forming the sensor chip 2 A voltage signal proportional to the pressure is output to the outside through the lead pin 7.

【0003】

11 and 12 show an example of the mounting structure of the diaphragm type pressure detector shown in FIGS. 9 and 10 to a pipeline or the like, and FIG. 13 shows an enlarged cross section of part A in FIG. It is a figure. In FIGS. 11 to 13, 11 is the fixture body, 12 and 13 are the presser members, 14 is the bearing, 15 and 16 are the fixtures, and 17 is the metal gasket. As a result, the airtightness between the diaphragm base 4 and the fixture body 11 is maintained via the metal gasket 17.

【0004】

The diaphragm-type pressure detector having the structures shown in FIGS. 9 and 10 can extremely reduce the so-called dead space when attached to a pipeline or the like, which is only convenient for improving gas displacement. Instead, a desired passivation film can be relatively easily formed on the gas contact surface of the diaphragm 3 with a uniform thickness without spots, and has excellent practical utility. However, there are still many problems to be solved for the diaphragm type pressure detector, and the biggest problem is the fluctuation of the measured value due to the stress strain of the diaphragm 3 when it is attached to a pipeline or the like. It is a point.

【0005】

That is, in order to increase the pressure detection sensitivity, the thickness of the diaphragm 3 is selected to be extremely thin, about 0.05 to 0.06 mm. As a result, when the contact surface of the gasket 17 is applied to the lower surface 4f of the main body of the diaphragm base 4 in the form shown in FIG. 11, the stress strain generated in the diaphragm 3 when tightened by the fixing bolt 15 is unavoidable. As a result, the stress applied to the sensor element 2 via the silicon oil 5 changes significantly. For example, the thickness of diaphragm 3 ..0.05 ~ 0.06mm, inner diameter about ..10mmφ, detection pressure .. number Torr ~ 7kgf / cm²According to the test using the pressure detector of abs, the pressure P applied to the diaphragm 3 is P._S= 7kgf / cm²In the case of high pressure of about abs, even when the pressure detector is attached to the pressure detector fixture body 11, the output V is compared with the case where the pressure detector is in the free state._SThere is no significant difference in (mv) and temperature characteristic STC (% FS / ° C).

【0006】

However, the pressure P applied to the diaphragm 3 is low pressure, for example, the pressure P.₀= 0kgf / cm²When abs, output V by assembling the pressure detector₀A large fluctuation of 5.2 mv (output before assembly 16.66 mv, output after assembly 21.86 mv) appears, and the value of temperature characteristic ZTC (% FS / ° C) also fluctuates greatly as 0.162 to 0.719. That is, the variation of the measured value is too large from the viewpoint of output, and the fluctuation is large outside the range that can be compensated from the viewpoint of temperature characteristics, which causes a problem in practical use as a pressure detector.

【0007】

On the other hand, the shape of the outer peripheral edge of the diaphragm base 4 is as shown in FIG. 10, and as shown in FIG. 13, the outer peripheral surface 4d of the main body of the diaphragm base 4 and the inner peripheral surface 17d of the metal gasket 17 are not formed. When tightened and fixed as a contact state, pressure P₀= 0kgf / cm²Output fluctuation amount before and after assembly in abs V₀Can be reduced to ± about 3.5 mv or less. Similarly, the temperature characteristic ZTC (% FS / ° C) also has a value in the range of 0.052 to 0.259, and even if the pressure detector is attached to an actual pipeline, etc., it can be fully put into practical use by a predetermined calibration operation. Can be accommodated.

【0008】

In the mounting structure of the pressure detector shown in FIGS. 12 and 13, the amount of output fluctuation before and after assembly is ΔV.₀The gasket 17 is arranged between the lower surface 4c of the flange portion 4a provided on the diaphragm base 4 and the outer peripheral surface 4d of the main body portion 4b of the thick wall (about 2 mm) of the diaphragm base 4. In addition, since the inner peripheral surface 17d of the gasket 17 and the outer peripheral surface 4d of the main body 4b are in a non-contact state, the downward pressing force is applied by the sensor pressing member 13 via the sensor base 1 and the diaphragm base 4. Even if it is applied to the gasket 17, all the reaction forces in the upward and downward directions of the gasket 17 are received by the flange portion 4a of the diaphragm base 4, and the diaphragm 3 integrally formed with the main body portion 4b of the diaphragm base 4 is tightened. This is because the strain stress of time is hardly applied.

【0009】

However, the amount of output fluctuation before and after the assembly of the pressure detector is ΔV.₀The smaller the temperature characteristic ZTC (% FS / ° C), the more convenient it is, and even in the case of assembling the structure as shown in Fig. 13, the output fluctuation amount is still ΔV.₀Has the drawback of being too large.

【0010】

[Problems to be Solved by the Invention]

The present invention is based on the case where the diaphragm type pressure detector having the configuration shown in FIGS. 9 to 13 disclosed in Japanese Patent Application Laid-Open No. 10-82707 and Japanese Patent Application No. 10-8841 is actually applied to a piping line or the like. If the above-mentioned problem, that is, the variation in stress strain of the diaphragm that occurs when the pressure detector is incorporated into the pressure detector fixture body, causes a large fluctuation in the output and temperature characteristics, and the measurement accuracy of the pressure measuring instrument deteriorates. The purpose is to solve the problem, and by improving the mounting structure of the pressure detector to the pressure detector fitting body, even when the pressure detector is fixed to the fitting body, the output and output can be increased. Allows the pressure detector to be applied to piping lines, etc., with almost no difference from the output and temperature characteristics when the temperature characteristics are free, and without increasing the dead space of the fluid passage. That is the main purpose of the invention.

【0011】

[Means for solving problems]

In the invention of claim 1, a pressure detector formed by combining and fixing a diaphragm base provided with a diaphragm and a sensor base having a built-in sensor element that operates by displacement of the diaphragm base is attached to a piping line or a mechanical device. In the mounting structure of a pressure detector in which a gasket is inserted into the insertion hole of the fixture body and the pressure detector is airtightly pressed and fixed by a pressing member inserted inward from above. The first step portion 19 and the second step portion 20 are provided in the lower portion of the insertion hole 11a of the fixture main body 11, and a seal is provided between the horizontal surface 20b of the second step portion 20 and the lower contact surface 17b of the gasket 17. A flange portion 1a and a flange portion 4a are provided above the sensor base 1 and the diaphragm base 4 of the pressure detector, and both flange portions 1a and 4a are combined and fixed in a facing manner, and the diaphragm base 4 is fixed. A sealing portion is formed between the lower surface 4c of the flange portion 4a and the upper contact surface 17a of the gasket 17, and a shallow groove 18c is provided at the inner position of the upper surface 1b of the flange portion of the sensor base 1 to form a shallow groove 18c on the lower surface 4c of the flange portion of the diaphragm base 4. A shallow groove 18d is formed in each inner position in a ring shape, and the gasket 17 is a metal gasket 13 having an upper contact surface 17a and a lower contact surface 17b having a substantially rectangular cross-sectional shape. The basic configuration of the present invention is that the strain generated by the pressing of the upper surface 1b of the flange portion is absorbed by the shallow grooves 18c and 18b.

【0012】

In the invention of claim 2, a pressure detector formed by combining and fixing a diaphragm base provided with a diaphragm and a sensor base having a built-in sensor element that operates by displacement of the diaphragm base is attached to a piping line or a mechanical device. A mounting structure of a pressure detector in which a gasket is inserted into the insertion hole of the fixture body and the pressure detector is airtightly pressed and fixed by a pressing member inserted into the insertion hole from above. In the above, the first step portion 19 and the second step portion 20 are provided in the lower portion of the insertion hole 11a of the fixture main body 11, and the horizontal surface 20b of the second step portion 20 and the lower contact surface 17b of the gasket 17 are provided. A sealing portion is provided between the seals, and a flange portion 1a is provided on the sensor base 1 of the pressure detector. The flange portion 1a and the upper surface 4e of the main body portion of the diaphragm base 4 are combined and fixed in a facing manner, and the main body of the diaphragm base 4 is fixed. A sealing surface 4g is formed by projecting downward from the lower surface 4f of the portion, and a sealing portion is formed between the sealing surface 4g and the upper contact surface 17a of the gasket 17, and further, the inside of the upper surface 1b of the flange portion 1a of the sensor base 1. A shallow groove 18e is formed at a position, a shallow groove 18f is formed at an inner position of the lower surface 4f of the main body of the diaphragm base 4, and a ring-shaped opposed shallow groove 18g and 18h are formed above the sealing surface 4g that protrudes downward. At the same time, the gasket 17 is a metal gasket 13 having an upper contact surface 17a and a lower contact surface 17b having a substantially rectangular cross-sectional shape, and the strain generated by pressing the upper surface 1b of the flange portion of the sensor base 1 by the pressing member 13 is shallow. The basic configuration of the invention is that the grooves 18e, 18f, 18g, and 18h absorb the particles.

【0013】

According to the invention of claim 3, in the invention of claim 1 or 2, the outer peripheral portion 24 of the flange portion 1a of the sensor base 1 and the outer peripheral portion 25 of the main body portion 4b of the diaphragm base 4 are made of a material having high hardness. It was done.

【0014】

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic cross-sectional view of the pressure detector according to the first embodiment of the present invention, and FIG. 2 is a partially enlarged cross-sectional view showing a mounting structure of the pressure detector according to the first embodiment. In the following description, the same reference number shall be used for the same member used in FIGS. 9 to 13.

【0015】

In FIGS. 1 and 2, 1 is a sensor base, 2 is a sensor tip, 3 is a diaphragm, 4 is a diaphragm base, 5 is a pressure transmission medium, 7 is a lead pin, 8 is a welded part, and 10 is a fixture body. 12 is a holding member, 14 is a bearing, 15 is a fixture, and 17 is a metal gasket. The sensor base 1 is formed of stainless steel in a thick disk shape, a chip storage portion 1c is formed in the center of the lower surface, and an oil injection hole 1d and a lead pin insertion hole (not shown) are further formed. .. Further, a known diffusion type semiconductor pressure transducer is used for the sensor chip (pressure sensitive element). That is, the sensor chip 2 has a diaphragm structure that deforms when it receives pressure, and four resistors are formed on it by the same manufacturing method as the IC, and the four resistors connected in a bridge shape. Since the resistance value changes due to pressurization, a voltage signal proportional to the pressure is output to the output end of the bridge.

【0016】

The diaphragm 3 is integrally formed with the diaphragm base 4, and is formed of stainless steel to have a thickness of about 50 μm and an inner diameter of about 10 mmφ. The thickness of the diaphragm 3 varies appropriately according to the detection pressure range of the detector, and is several torr to 7 kgf / cm.²In the pressure detector of the present embodiment for the purpose of measuring the absolute pressure value of, it is desirable that the thickness of the diaphragm 3 having φ = 10 mm is about 50 μm. It is also possible to form the diaphragm 3 separately from the diaphragm base 4 and integrate them by welding. Further, the gas contact surface of the diaphragm 3 is subjected to a so-called passivation film formation treatment by a known method, and the outer surface layer portion of the gas contact surface is composed of approximately 100% chromium oxide having a thickness of about 200 Å. A passivation film or a fluoride passivation film having a thickness of about 1000 to 3000 Å or a mixed oxidation passivation film mainly containing aluminum oxide and chromium oxide having a thickness of about 200 Å is formed.

【0017】

The silicon oil 5, which is the pressure transmission medium, transmits the pressure 10 applied to the diaphragm 3 to the sensor chip 2. Here, silicone oil having a small coefficient of thermal expansion and compression coefficient and being chemically stable is used. The sealing ball 6 is for sealing the silicon oil 5 in the oil injection hole 1d, and the bearing steel ball 6 is used here. Since the configuration itself of the diaphragm type pressure detector is known, detailed description thereof will be omitted here.

【0018】

In the diaphragm type pressure used in the present invention, as shown in FIG. 1, so-called shallow grooves 18a and 18b for strain relief are formed in a ring shape on the upper surface 4e and the lower surface 4f of the main body 4b of the diaphragm base 4. Has been done. That is, the shallow grooves 18a and 18b are formed at positions inside the contact portion of the pressing member 12 and the metal gasket 17, respectively, and the cross-sectional shape thereof is V-shaped (inverted V-shaped) or U-shaped (inverted U-shaped). ), And the depth is selected to be about 0.3 to 0.5 mm when the thickness of the diaphragm base 4 is 1.5 to 2.5 mm.

【0019】

In FIG. 2, when the fixture 15 is tightened, an upward / downward compressive force (upward / downward antiverse) is applied to the outer portion of the main body 4b of the diaphragm base 4 via the pressing member 12 and the metal gasket 17. Force) is applied. In the unlikely event that the fixture 15 is tightened, the diaphragm 3 has a strain force (for example, an upward / downward compressive force) due to the upward / downward compressive force applied to the main body 4b of the diaphragm base 4. Even when a component force is generated and this is applied to the diaphragm 3), this part P is provided by the shallow grooves 18a and 18b provided so as to face the upper surface 4e of the main body and the lower surface 4f of the main body of the diaphragm base 4. Since the wall thickness of the wall is thin, the displacement due to the strain force is absorbed in the vicinity of the thin wall portion P. As a result, the strain force is not directly transmitted to the diaphragm 3, and as a result, the strain 3 is prevented from being distorted.

【0020】

3 and 4 are a schematic cross-sectional view of the pressure detector according to the second embodiment of the present invention and a partially enlarged cross-sectional view showing the mounting structure thereof. In the second embodiment, a flange portion 1a and a flange portion 4a are formed on the upper portions of the sensor base 1 and the diaphragm base 4, respectively, and the outer circumference thereof is in a state where the flange portions 1a and 4a face each other. The part is welded 8. Further, the diaphragm base 4 is formed of a ring-shaped main body portion 4b and a flange portion 4a, and the lower surface 4c of the flange portion 4a abuts on the upper contact surface 17a of the gasket 17 as shown in FIG. It is a sealing surface. Therefore, the lower surface 4c of the flange portion 4a is finished with a highly accurate smooth surface.

【0021】

Further, in the second embodiment, the diameter of the diaphragm base 4 is 13 mmφ, the diameter of the diaphragm pressure receiving surface is 11 mmφ, the thickness of the diaphragm 3 is 0.06 mm, the inactive film is a chromium oxide film having a thickness of about 200 Å, and the total thickness. 4 mm, 7 lead pins (one of which is the ground electrode) are selected respectively, DC1.5 mA is applied to the input circuit (not shown), and the pressure applied to the sensor element (sensor chip) changes. , The resistance values of the four sensors formed from the sensor chip change, and the output voltage V between the output terminals changes.

【0022】

In the pressure detector used in the second embodiment, as shown in FIG. 3, the sensor base 1 is shallow at the inward position of the upper surface 1b of the collar portion and the diaphragm base 4 is shallow at the inner side position of the lower surface 4c of the flange portion. The grooves 18c and 18d are formed, and the cross-sectional shape of the former shallow groove 18c is formed in a dish shape, and the cross-sectional shape of the latter shallow groove 18d is formed in an inverted U shape (or an inverted V shape).

【0023】

In this second embodiment, as shown in FIG. 4, a metal gasket 17 and a pressure detector are inserted into the insertion holes 11a of the stainless steel fixture body 11, and the pressing member 13 is pressed by the fixture 16. By pressing the upper surface 1b of the flange portion of the sensor base 1 through the metal gasket 17, the pressure detector is airtightly attached via the metal gasket 17.

【0024】

A cylindrical detector insertion hole 11a is formed in the center of the upper part of the fixture main body 11, and the bottom of the insertion hole 11a extends over two stages, a first stage portion 19 and a second stage portion 20. The peripheral wall surface 19a of the first step portion 19 serves as a guide surface for the pressing member 13. Further, the peripheral wall surface 20a of the second step portion 20 is in contact with the outer peripheral surface 17c of the gasket 17, and the horizontal surface 19b is in contact with the lower contact surface 17b of the gasket 17, respectively. Is formed. The inner portion of the horizontal plane 20b of the second step portion 20 is formed in the tapered portion 21, and the fluid passage 22 is bored in the center of the bottom surface of the insertion hole 11a.

【0025】

The gasket 17 has a ring shape, and the cross-sectional shape of the sheet portion is formed into a horizontally long quadrangle with chamfered four corners of the rectangle. The inner peripheral surface 17d of the gasket 17 is in a non-contact state with the outer peripheral surface 4d of the main body 4b of the diaphragm base 4. Further, the upper contact surface 17a of the gasket 17 is in contact with the lower surface 4c of the flange portion 4a of the diaphragm base 4. Further, the outer peripheral surface 17c of the gasket 17 is in contact with the peripheral wall surface 20a of the second step portion 20. That is, the fitting portion of the gasket 17 is formed by the lower surface 4c of the flange portion of the diaphragm base 4, the peripheral wall surface 20a of the second step portion 20, and the horizontal plane 20b, and the fitting portion of the gasket 17 is formed by the second step portion 20 of the detector insertion hole 11a. The distance between the peripheral wall surface 20a and the outer peripheral surface 4d of the flange body is set to be substantially the same as or slightly larger than the width of the gasket 17.

【0026】

In FIG. 4, the gasket 17 has an outer diameter of 14.7 mmφ, an inner diameter of 13.0 mm, a width of the seat portion of 1.5 mm, a thickness (height) of the seat portion of 0.9 mm, and a width of the contact surfaces 17a and 17b of the seat portion. Each is formed to 0.8 mm, and SUS316L-P (w melt) is used as the material of the gasket 17.

【0027】

The action of the shallow grooves 18c and 18d is the same as in the case of the first embodiment shown in FIG. 2, and the strain force generated by the upward and downward compressive force (reaction force) applied through the pressing member 13 is applied. By absorbing in both shallow grooves 18c and 18d and the thin portion P between them, it is possible to prevent a strain force from being directly applied to the diaphragm 3.

【0028】

5 and 6 are a schematic cross-sectional view of the pressure detector according to the third embodiment of the present invention and a partially enlarged cross-sectional view showing a mounting structure. In the third embodiment, the diaphragm 3 and the diaphragm base 4 are formed separately, and both are integrated by providing the welded portion 23. Further, in the third embodiment, the sealing surface 4g is projected to a position below the diaphragm 3 on the lower surface side of the diaphragm base 4 (that is, the sealing surface 4g is projected downward from the lower surface 4f of the main body of the diaphragm base 4). The shallow grooves 18g and 18h with a U-shaped (or V-shaped) cross section are formed facing each other at a height position almost horizontal to the diaphragm mounting level above the protruding sealing surface 4g. Has been done. Further, shallow grooves 18e and 18f having a U-shaped (or V-shaped) cross section are formed at intermediate positions between the upper surface 1b of the flange portion 1b of the sensor base 1 and the lower surface 4f of the main body portion of the diaphragm base 4, respectively.

【0029】

In the third embodiment, the shallow grooves 18e and 18f also absorb the strain force generated by the upward and downward pressing forces applied to the diaphragm base 4 via the pressing member 13, and tighten the fixture 16. The effect of the strain force directly applied to the diaphragm 3 at the time of loading is reduced.

【0030】

7 and 8 are a schematic cross-sectional view and a partially enlarged cross-sectional view showing a main part of the pressure detector according to the fourth embodiment of the present invention. The structure of the pressure detector and the mounting structure thereof according to the fourth embodiment are basically the same as those of the third embodiment shown in FIGS. 5 and 6, but the flange of the disk-shaped sensor base 1 The outer peripheral portion 24 of the portion 1a and the outer peripheral portion 25 of the diaphragm base 4 (the outer portion of the dotted line in FIGS. 7 and 8) are formed in the hardened portion that has been subjected to the hardening treatment.

【0031】

By using a high-hardness material for the outer parts of the sensor base 1 and diaphragm base 4, the radial strain force itself generated by the compressive force applied in the upward and downward directions when tightening by the pressing member 13 becomes smaller and shallower. Since the strain force is absorbed by the grooves 18e to 18f, the strain itself of the diaphragm 3 is further suppressed. Needless to say, the configuration in which the cured portions 24 and 25 are formed can also be applied to the pressure detectors shown in FIGS. 3 and 4.

【0032】

According to the test using the pressure detector and its mounting structure according to the second embodiment, the pressure P₀= 0kgf / cm² Output fluctuation amount before and after assembly in abs V₀Is about ± 1.0 mv or less, and the output fluctuation amount is about 60 to 70% compared to the previous case.₀Can be reduced. Similarly, in the case of the third embodiment, the output fluctuation amount ΔV₀Can be reduced to about ± 1.0 mv or less. Further, in the case of the fourth embodiment, the output fluctuation amount ΔV is further higher than in the case of the third embodiment.₀It has been found that can be reduced.

【0033】

[Effect of the invention]

In the invention of claim 1, a plurality of steps are formed in the lower portion of the detector insertion hole 12 of the pressure detector fitting main body, and the diaphragm base of the pressure detector is formed into a flange portion and a thick main body. The gasket 13 formed from the portion and having a substantially rectangular cross section is arranged in the fitting portion formed by the peripheral wall surface of the second step portion, the horizontal surface, and the lower surface of the flange portion of the diaphragm base. As a result, even if the sensor retainer is inserted into the detector insertion hole and the upper part of the flange portion of the sensor base is pressed downward, all the reaction force applied to the diaphragm base 4 via the gasket 13 is the flange portion of the diaphragm base 4. The diaphragm 3, which is received by the 4a and the thick main body 4b and is integrated with the main body 4b, is hardly distorted by the reaction force. Therefore, as in the case of claim 1, the fluctuation of the output and temperature characteristics before and after mounting the pressure detector on the fixture body is caused by the effect of absorbing strain stress by the shallow grooves 18c and 18d. Even in the low pressure region of the fluid, it becomes extremely small and does not become an obstacle in practical use, so that this type of diaphragm type pressure detector can be applied to a piping line or the like.

【0034】

In the invention of claim 2, since the shallow groove 18g / 18h is formed above the sealing surface 4g of the diaphragm base 4, the shallow groove 18g / 18g is further added to the effect of the invention of claim 2. The effect of absorbing strain stress due to 18h is added, and the output fluctuation before and after mounting is further reduced.

【0035】

In the invention of claim 3, since the member of the portion where the pressing force is applied by the pressing member 13 is a high hardness member, the material deformation due to the stress at the time of tightening is further reduced. As a result, the amount of strain generated in the diaphragm is significantly reduced, and the amount of output fluctuation is further reduced. As described above, the present invention has excellent practical utility.

[Simple explanation of drawings]

[Figure 1]

It is sectional drawing of the pressure detector which concerns on 1st Embodiment of this invention.

[Figure 2]

It is a partially enlarged sectional view which shows the mounting structure of the pressure detector which concerns on 1st Embodiment.

[Fig. 3]

It is sectional drawing of the pressure detector which concerns on 2nd Embodiment of this invention.

[Fig. 4]

It is a partially enlarged sectional view which shows the mounting structure of the pressure detector which concerns on 2nd Embodiment.

[Fig. 5]

It is sectional drawing of the pressure detector which concerns on 3rd Embodiment.

[Fig. 6]

It is a partially enlarged sectional view which shows the mounting structure of the pressure detector which concerns on 3rd Embodiment.

[Fig. 7]

It is sectional drawing of the pressure detector which concerns on 4th Embodiment.

[Fig. 8]

It is a partially enlarged sectional view which shows the mounting structure of the pressure detector which concerns on 4th Embodiment.

[Fig. 9]

It is a vertical cross-sectional view which shows an example of the structure of the conventional pressure detector.

[Fig. 10]

FIG. 5 is a vertical cross-sectional view showing another example of the structure of a conventional pressure detector.

[Fig. 11]

It is a vertical cross-sectional view which shows the mounting structure of the pressure detector which concerns on FIG. 9 above.

[Fig. 12]

It is a vertical cross-sectional view which shows the mounting structure of the pressure detector which concerns on FIG.

[Fig. 13]

It is an enlarged sectional view of the part A of FIG.

[Explanation of symbols]

1 is the sensor base, 1a is the flange, 1b is the top of the flange, 1c is the chip storage, 1d is the oil injection hole, 2 is the sensor chip, 3 is the diaphragm, 4 is the diaphragm base, 4a is the flange, 4b is the main body. 4c is the lower surface of the flange, 4d is the outer peripheral surface of the main body, 4e is the upper surface of the main body, 4f is the lower surface of the main body, 4g is the sealing surface, 5 is the pressure transmission medium, 6 is the sealing ball, 7 is the lead pin, 8 is the weld, 10 is the fluid pressure, 11 is the fixture body, 11a is the insertion hole, 12 and 13 are the holding members, 14 is the bearing, 15 is the fixture, 17 is the metal gasket, 17a is the upper contact surface, 17b. Is the lower contact surface, 17c is the outer peripheral surface of the gasket, 17d is the inner peripheral surface of the gasket, 18a / 18b is a shallow groove, 18c / 18d is a shallow groove, 18e / 18f is a shallow groove, 18g / 18h is a shallow groove, 19 is the first. Steps, 20 is the second step, 21 is the taper, 22 is the fluid passage, 23 is the weld, 24 is the hardened part (sensor base), 25 is the hardened part (diaphragm base).