Probe device for a display panel and prove positioning method

Description: TECHNICAL FIELD [Detailed description of the invention]

【0001】

[Technical field to which the invention belongs]

The present invention relates to a display panel probe device used for an electrical characteristic inspection of a display panel having a large number of inspection pads on a substrate.

【0002】

[Conventional technology]

In recent years, display panels used from portable televisions to large televisions have been manufactured in various sizes and in different shapes such as rectangles and squares. Then, in order to test the electrical characteristics of this display panel, a probe head having a probe is prepared according to the number of electrode terminals arranged vertically and horizontally in the display panel according to the size and shape of the display panel, and the probe and the display panel are prepared. The test has been conducted by making contact with the electrode terminals of the above and exchanging signals with the tester body. However, if the screen is large like a large TV and the number of pixels is large, prepare as many probes as the number of electrode terminals on the display panel, and then use the electrode terminals and probes on the display panel. It took a long time to complete the test because the test was conducted by contacting the two parts in several steps.

【0003】

A display probe that solves this problem and shortens the test time is disclosed in Japanese Patent Application Laid-Open No. 4-134482. For this display panel probe, a probe assembly having a plurality of probes using thin lines or tab substrates arranged at the same pitch as the display panel electrodes is prepared, and a plurality of probes are prepared according to the shape and size of the display panel. The probe assemblies are combined in the horizontal and vertical directions and mounted side by side on the mounting plate, and the probes are brought into contact with all the electrode terminals of the display panel at the same time to measure the electrical characteristics in order to shorten the test time.

【0004】

In addition, this display panel probe is provided with a manipulator that makes it possible to adjust the probe tip position of each probe assembly, and this probe assembly is relatively small with respect to the increase in electrodes due to the increase in size of the display panel. Since the number of units is combined and the tip of the probe of each probe assembly is aligned with the electrode with a manipulator and adjusted, it is easy to handle even a large display panel.

【0005】

[Problems to be Solved by the Invention]

Although the conventional display panel probe described above can handle a large display panel, it is difficult to handle a display panel having electrode terminals having various pitches. What happens is that the probe assembly unit must be replaced and adjusted each time the pitch is different, and the probe assembly unit must be prepared according to the pitch, resulting in high operating costs.

【0006】

In addition, although each probe assembly is provided with a man-hour plater for adjusting the tip position of the probe, it is unclear whether the position of the probe and the electrode terminal portion is visually or otherwise performed. If it is performed visually for each probe assembly unit, there is a drawback that a large amount of adjustment man-hours are required due to individual differences, and it is not possible to confirm whether or not the position adjustment is complete until the measurement is started. ..

【0007】

An object of the present invention is to provide a display panel probe device capable of supporting display panels having different pitches of electrode terminals and having high alignment accuracy between the probe and the electrode terminals.

【0008】

[Means for solving problems]

A feature of the present invention is that a plurality of probe units are prepared by contacting each of a plurality of electrode terminals arranged side by side around a display panel and having a plurality of probes according to the spacing, and the plurality of probe units are prepared. An actuator having a connecting mechanism capable of inserting and removing any of the above and having a moving mechanism for moving any of the probe units inserted into the connecting mechanism, and both ends of the probe unit while moving the probe unit. A base plate for mounting a probe assembly unit including the actuator and the probe unit inserted into the actuator side by side along an opening is provided with an alignment means for measuring circuit resistance including the probe and the electrode terminal. The probe head, the stage on which the display panel is placed and held, the compound table that moves the stage independently in the rotation and XY directions, the alignment camera that recognizes the alignment mark on the display panel, and the operation of the actuator. This is a display panel probe device including a controller for transmitting and receiving signals from the probe, transmitting and receiving signals to and from the tester body, and performing sequence control. Further, it is desirable that the probe unit is moved in a stepped manner by the moving mechanism. Further, it is desirable that the moving mechanism includes a piezoelectric element.

【0009】

【0010】

BEST MODE FOR CARRYING OUT THE INVENTION

Next, the present invention will be described with reference to the drawings.

【0011】

1 (a) and 1 (b) are a plan view and a front surface showing a probe device for a display panel according to an embodiment of the present invention. In this surface panel probe device, as shown in FIG. 1, a plurality of probes 14 in contact with the electrode terminals 21 of the display panel 20 project side by side from the front end surface, and a plug integrated with the probe 14 projects from the rear end surface. The unit 2 and the actuator 3 which is attached by inserting the plug of the probe unit 2 and finely moves the probe unit 2 in the vertical and horizontal directions, and the probe assembly unit 1 composed of the probe unit 2 and the actuator 3 are opened 19 A probe head 6 that has a base plate 6a mounted side by side along the above and a pole 8 that supports the base plate 6a and moves up and down, a stage 9 that mounts and holds the display panel 20, and a stage 9 that rotates and rotates in the XY directions. A compound table 10 that moves independently, an alignment camera 7 that recognizes the alignment mark on the display panel 20, and a controller 4 that operates the actuator 3, sends and receives signals from the probe 14, sends and receives signals to the tester body 5, and controls the sequence. It has.

【0012】

2 (a) to 2 (c) are a plan view and a cross-sectional view for explaining the probe assembly unit of FIG. As shown in FIG. 2A, the probe assembly unit has a plug 17 at the other end of the probe 14 of the probe unit 2, and this plug 17 is inserted into the bush 18 of the actuator 3 and the probe unit 2 is inserted into the actuator 3. Is loaded. That is, when it is desired to replace the probe unit 2 having a narrow pitch with the probe unit 2a having a coarse pitch in FIG. 2 (a), the plug 17 can be easily replaced by inserting and removing the plug 17. Further, as shown in FIG. 2C, the hook 15 has a structure in which the hook 15 enters the groove 16 of the probe unit 2 so that the probe unit 2 does not come off.

【0013】

Further, the lead wire connected to the bush 18 in contact with the probe 14 is connected to each core wire of the flexible flat cable 11 at the rear. The probe 14 and the plug 17 have a structure in which a slit is formed so that the diameter can easily enter the bush 18, and the probe itself is a rod-shaped member having a spring property and a good conductor. This rod-shaped member is made of, for example, beryllium copper, is resin-sealed with a precision mold, and is formed on a resin outer body to form a probe unit 2.

【0014】

The actuator 3 includes a movable portion 3a in which the bush 18 and its connecting line are embedded, and a fixed portion 3b fixed to the base plate 6a in FIG. Then, the movable portion 3a is pushed against the leaf springs 12a and 12b by the force in the thickness direction of the piezoelectric elements 13a and 13b and is supposed to move in the X and Y directions. Further, the movable portion 3a is stopped by the plate 3c so as not to come off from the fixed portion 3b. Further, Teflon (trade name) or the like is attached to the contact portion between the fixed portion 3b and the plate 3c so that the movable portion 3a can move smoothly.

【0015】

Piezoelectric elements 13a and 13b such as PZT (lead zirconate titanate ceramics) are laminated piezoelectric elements in which a plurality of elements are stacked so that a maximum of 50 μm can be obtained when a DC voltage of 100 V is applied. In addition, 50V is set as the voltage to maintain the intermediate position, and ± 10V is applied step by step to move the movable part 3a in steps. On the other hand, the leaf springs 12a and 12b that give a repulsive force to the movable portion 3a are made of spring steel having a high spring constant, and the movable portion 3a is pressed against the piezoelectric elements 13a and 13b so as not to cause rattling.

【0016】

FIG. 3 is a flowchart for explaining the operation of the probe device for the display panel of FIG. Next, the operation of the display panel probe device will be described with reference to FIGS. 1, 2 and 3. First, in step A of FIG. 3, the display panel 20 is placed on the stage 9 of FIG. 1, and the side ends of the display panel 20 are placed on the stoppers in the X and Y directions provided on the stage 9 to mechanically position the display panel 20. After that, the vacuum pump is operated to attract and hold the display panel 20 on the stage 9.

【0017】

Although the display panel 20 was simply mechanically positioned in step A, the center of the square or rectangular area formed by the electrode terminals 21 arranged vertically and horizontally in the display panel 20 formed in the film forming process and the outer shape of the display panel 20. It does not always coincide with the center of. Therefore, in step B, the axis alignment is performed in order to align the center of the rectangular region or square region formed by the electrode terminal 21 group with the center of the rectangular region or square region formed by the probe group.

【0018】

In this axis alignment, the alignment camera 7 recognizes the cross-shaped alignment marks indicating the XY directions at two of the four corners of the display panel 20. Then, it is compared with the reference XY axis stored in the controller 4. At this time, if the X-axis or Y-axis of the alignment mark has an inclination on the reference XY-axis, the CPU calculates the degree of inclination, obtains the amount of deviation, and rotates the compound table 10 by an angle corresponding to the amount of deviation. Fix it. If there is a discrepancy between the coordinate value of the reference XY axis and the coordinate value of the alignment mark on the XY axis, the compound table 10 is moved by the amount deviated in the X or Y or X and XY directions.

【0019】

This axis alignment is a known technique that is automatically performed by a numerical control mechanism using a microcomputer built in the controller 4, a pulse generating power supply, and a pulse motor of the compound table 10. However, the rotary table should be on the top for ease of calculation and control. If there is a slight difference in the amount of deviation between the two alignment marks and the reference XY axis, correct it by averaging the amount of deviation.

【0020】

Next, in step C of FIG. 3, the position of the probe 14 of each probe unit 2 and the electrode terminal 21 is adjusted by aligning the probe 14 (A and B) outside the probe unit and the electrode terminal 21 shown in FIG. It is done by aligning. Then, the alignment is performed by measuring the resistance of the internal circuit of the display panel 20 via the electrode terminals 21 that come into contact with the two probes 14. Then, if a voltage is applied to the two probes and a current within the specified range flows, it is defined that the positions are aligned. Further, here, for the sake of easy explanation, the direction in which the probe units 2 are lined up is assumed to be the X direction, and the direction perpendicular to it is assumed to be the Y direction.

【0021】

First, at the start of the probe unit adjustment in step C, the probe head 6 is lowered and the display panel 20 is inserted into the opening 19 of the base plate 6a. Next, the probe 14 is brought into contact with the electrode terminal 21 at a predetermined pressure by a pressing mechanism composed of a piezoelectric element. Then, an intermediate voltage is applied to the piezoelectric elements 13a and 13b of each actuator 3. As a result, the probe unit 2 is maintained in the intermediate position.

【0022】

Next, in step D, the program sequencer operates, and the probe unit 2 moves one step back and forth (Y direction) all at once. Then, at the same time as checking whether or not there is a change in the current, it is determined in the next step E whether or not the current flowing through the two probes is within the specified range. If there is no change in the current and the current is within the specified range, the intermediate position is maintained. Further, for the probe unit 2 which does not change but cannot obtain the current within the specified range, it is further moved back and forth in two steps to determine whether or not the current within the specified range has been reached. Then, when the specified current range is reached, a voltage is applied to the piezoelectric element 13b so that the probe unit 2 stays at that position. If the current still does not fall within the specified range, add another step and move it back and forth to make a judgment.

【0023】

This operation is repeated, and when all the adjustments in the Y direction of the probe unit 2 are completed, the process proceeds to the next step F, and the probe unit 2 is moved laterally (X direction) step by step to the left and right to generate a current. In step G, it is determined whether or not there is a change and whether or not the specified current is flowing at the same time. If the current exceeds the specified current, the probe unit 2 stays in the intermediate position. Even if there is a change, the probe unit stays in the intermediate position if the current exceeds the specified current. The probe unit 2 whose current changes and the current cannot be obtained more than the specified current is moved two steps to the left and right, and it is checked whether or not the specified current is reached. If the specified current is reached when moving to the right, the probe unit 2 is maintained in the state of moving to the right.

【0024】

This alignment operation is repeated to set the positions of all the probe units 2. Then, when the position adjustment is completed, the electrical characteristic test of the display panel 20 is started in step H. When testing a display panel with a large pitch of the electrode terminals 21, replace the probe unit 2 in FIG. 2 (a) with the probe unit 2a in FIG. 2 (b) and perform the step in FIG. 3 to position the probe unit 2a. Make adjustments.

【0025】

In this embodiment, the actuator is provided with a moving mechanism so as to move the probe unit left, right, front and back, but a mechanism for moving the probe unit only in the X direction may be used. This is because the electrode terminals are long and narrow in the extending direction of the probe, so that they hardly deviate in the front-rear direction (Y direction) and often deviate in the lateral direction (X direction).

【0026】

Further, a mechanism for rotating the probe unit can also be applied to the present embodiment. Then, in this mechanism, a rotating shaft is attached to the rear end side (flat cable 11 side) of the movable portion 3a shown in FIG. 2 (c), a crank arm is attached to the other end of the rotating shaft, and the crank arm is finely moved. If the probe unit is swiveled by a small angle, it is the same as moving it slightly in the X direction.

【0027】

[Effect of the invention]

As described above, the present invention has a mechanism for replacing a plurality of probe units having different probe intervals, and an actuator for adjusting the position of the probe and the electrode terminal. Even if the pitch is different, it can be applied immediately without preparing a new probe unit, and it has the effect of high versatility and low operating cost.

【0028】

In addition, the alignment accuracy between the electrode terminal and the probe is ensured, the test accuracy is improved, defective products are not mixed in, and there is an effect that wasteful cost is not generated in the subsequent process.

[Simple explanation of drawings]

[Figure 1]

It is a plan view and the front surface which shows the probe device for a display panel in one Embodiment of this invention.

[Figure 2]

It is a plan view and the sectional view for demonstrating the probe assembly unit of FIG.

[Fig. 3]

It is a flowchart for demonstrating the operation of the probe device for a display panel of FIG.

[Explanation of symbols]

1 Probe assembly unit 2,2a probe unit 3 Actuator 3a moving parts 3b fixed part 4 controller 5 Tester body 6 Probe head 7 Alignment camera 8 pole 9 stages 10 compound table 11 Flat cable 12a, 12b leaf spring 13a, 13b Piezoelectric element 14 probe 15 hooks 16 grooves 17 plug 18 bush 19 openings 20 Display panel 21 Electrode terminal