Electronic apparatus

0001The present invention relates to an electronic device having a circuit composed of a photo sensor and a transistor. For example, An electron equipped with an electro-optic device such as a liquid crystal display panel using a chip panel as a component. Regarding equipment.

0002CMOS sensors are mainly installed in digital cameras and mobile phones, and are important imaging functions. have. The CMOS sensor is a photo sensor that uses the amplification function of a MOS transistor. , Can be manufactured using a general purpose CMOS process. Also, the drive voltage is higher than that of the CCD sensor. Since it is low, the power consumption of the solid-state image sensor can be kept low.

0003In addition, a display device equipped with a touch sensor is attracting attention. Display equipped with a touch sensor The device is called a touch panel, a touch screen, or the like (hereinafter, this is simply referred to as "ta". Also called "titch panel"). Touch panels are mainly for personal computers and mobile phones It is installed and has a function that allows display and operation to be performed on the same panel. Also, the light A display device equipped with a type touch sensor is disclosed in Patent Document 1.

0004The CMOS sensor has a charge storage operation by a photodiode and a charge reading operation. And the above-mentioned charge reset operation are performed. Generated by a photodiode during the above three operations A node that accumulates electric charge due to the photocurrent generated (hereinafter referred to as FD) and wiring that supplies control signals. Is used. The potential of the FD that accumulates this charge is not easily affected by fluctuations in the potential of the signal line. Patent Document 2 discloses a configuration of a solid-state image sensor to be output.

<p num="0005"><patcit num="1"><text>Japanese Unexamined Patent Publication No. 2001-292276</text></patcit><patcit num="2"><text>Japanese Unexamined Patent Publication No. 2006-148513</text></patcit></p>

<p num="0006">During the above three operations, it is controlled by the FD that accumulates electric charge by the photocurrent generated by the photodiode. If there is a parasitic capacitance between the wiring that supplies the signal and other signal lines, the above signal Due to the change, the potential of FD changes. As a result, the output of the photo sensor changes and the image quality Decreases.</p><p num="0007"> Further, in a display device using a CMOS sensor, an FD is arranged in each pixel. That Therefore, as with the wiring of the image sensor, there is a parasitic capacitance between the signal line of the display element and the FD. In that case, the potential of the FD changes due to the change in the above signal. As a result, the output of the photo sensor changes. The image quality deteriorates.</p><p num="0008">The challenge is to have a pixel configuration that prevents the output of the photo sensor from changing and the image quality from deteriorating. It is one of.</p>

<p num="0009">In order to suppress the change in the potential of the FD, the parasitic capacitance between the FD and the signal line becomes smaller or parasitic. FD and imaging signal line (PR wiring, TX wiring, SE wiring) so that the capacity is exhausted Pixel layout configuration in which shield wiring is placed between the FD and the display signal line. To. As the shield wiring, the power supply line for imaging, the power supply line for display, the GND wiring, or the common electric power Use common wiring with a fixed potential, such as position wiring.</p><p num="0010">One aspect of the present invention disclosed herein is a first shielded arrangement of two capacitance lines of adjacent pixels. Used as a wire and a second shield wiring, between the FD (node) and the display signal line, respectively. By arranging it, the change of FD potential is suppressed. Specifically, the first pixel electrode and the first signal The first transistor electrically connected to the wire and electrically connected to the photodiode A second transistor and a third transistor electrically connected to the second pixel electrode and the second signal line. Having a Langista, the second transistor is electrically connected to the node that stores the charge, The node has a first seal between the first transistor and the electrically connected first signal line. It has wiring, and the node is between the third transistor and the electrically connected second signal line. It is an electronic device characterized by having a pixel configuration having a second shielded wiring. .. However, the node shields between the first transistor and the electrically connected signal line. Having wiring means that shield wiring is arranged between the node and the signal line in the pixel plan view. Refers to the pixel layout.</p><p num="0011">The above configuration solves at least one of the above problems.</p><p num="0012">Further, in another aspect of the present invention, the capacitance line of the pixel is used as the shield wiring, and the FD (node) is used. Placed between the display signal line and the same shield between the FD (node) and the TX wiring. By arranging the wiring, the change in the potential of the FD is suppressed. Specifically, the pixel electrode and the first signal The first transistor electrically connected to the wire and electrically connected to the photodiode The second transistor and the second transistor are electrically connected to the node that stores the charge. , The node is shielded between the first transistor and the electrically connected first signal line. Having a wire, the node is with a second signal line electrically connected to the gate of the second transistor It is an electronic device characterized by having a shielded wiring between the two.</p><p num="0013">The above configuration solves at least one of the above problems.</p><p num="0014">Further, in another aspect of the present invention, the capacitance line of the pixel is used as the shield wiring, and the FD (node) is used. It is placed between the signal line for display and the same shield between the FD (node) and the PR wiring. By arranging the wiring, the change in the potential of the FD is suppressed. Specifically, the pixel electrode and the first signal The first transistor electrically connected to the wire and electrically connected to the photodiode The second transistor and the second transistor are electrically connected to the node that stores the charge. , The node is shielded between the first transistor and the electrically connected first signal line. Having a wire, the node said above between the photodiode and a second signal line electrically connected. It is an electronic device characterized by having shielded wiring.</p><p num="0015">The above configuration solves at least one of the above problems.</p><p num="0016">Further, in another aspect of the present invention, the capacitance line of the pixel is used as the shield wiring, and the FD (node) is used. It is placed between the signal line for display and the same shield between the FD (node) and the SE wiring. By arranging the wiring, the change in the potential of the FD is suppressed. Specifically, the pixel electrode and the first signal The first transistor electrically connected to the wire and electrically connected to the photodiode A second transistor, a third transistor whose gate is a node that stores electric charge, and a second transistor. It has 3 transistors and a 4th transistor electrically connected, and a 2nd transistor. The node is electrically connected to the node, and the node is electrically connected to the first transistor. It has a shielded wiring between it and the first signal line, and the node is a game of the fourth transistor. One of the features is that the shielded wiring is provided between the second signal line and the second signal line that is electrically connected. It is an electronic device to be used.</p><p num="0017">The above configuration solves at least one of the above problems.</p>

<p num="0018">By reducing the parasitic capacitance with the signal line that may affect the potential of the node, the photoset It is possible to suppress fluctuations in the output of the sensor and prevent deterioration of imaging quality.</p>

0019<figref num="1">It is an external view which shows one aspect of this invention.</figref><figref num="2">It is a block diagram which shows one aspect of this invention.</figref><figref num="3">It is an equivalent circuit diagram of a pixel which shows one aspect of this invention.</figref><figref num="4">It is the schematic of the drive circuit of the photosensor which shows one aspect of this invention.</figref><figref num="5">It is an equivalent circuit diagram of a pixel which shows one aspect of this invention.</figref><figref num="6">It is a figure which shows the timing chart which shows one aspect of this invention.</figref><figref num="7">It is a layout figure of the pixel which shows one aspect of this invention.</figref><figref num="8">It is a top view and sectional view of the periphery of the transistor connected to the photosensor which shows one aspect of this invention.</figref><figref num="9">It is a figure and a block diagram which shows the electronic device which shows one aspect of this invention.</figref>

0020Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention It is not limited to the following description, and it is possible for those skilled in the art to change its form and details in various ways. Easy to understand. Further, the present invention shall be construed as being limited to the description of the embodiments shown below. It is not something that can be done.

0021(Embodiment 1) In this embodiment, an example of an electronic device 1030 having a display unit 1032 for displaying an image is shown. It is shown in 1 (A) and FIG. 1 (B).

0022The display unit 1032 of the electronic device 1030 has a touch input function using a photo sensor, and Fig. 1 As shown in (A), multiple keyboard buttons 1031 are displayed in the display area 1033. To. The display unit 1032 refers to the entire display area and includes the display unit area 1033. And , The user touches the desired keyboard button to enter information and enter it on the display unit 1032. The information that has been sent is displayed.

0023An example of using the electronic device 1030 is shown. For example, the table in the display area 1033 Touch the indicated keyboard buttons sequentially with the user's finger, or enter characters without contact. The force is applied, and the text displayed as a result is displayed in an area other than the area 1033 of the display unit. use One period when a person removes his finger from the keyboard of the screen and the output signal of the photo sensor is not detected. After a certain period of time, the keyboard display displayed in the display area 1033 is automatically turned off. The text entered in the display area 1033 is also displayed, and the text entered on the entire screen is displayed. The user can confirm. To re-enter, place your finger on the display 1032. Display again by sequentially touching using or by detecting the output signal of the photo sensor without contact It is also possible to display a keyboard button in the area 1033 of the section and input characters.

0024Also, not automatically, by the user pressing the changeover switch 1034, Figure 1 ( As shown in B), it is also possible to display an image without the keyboard display on the display unit 1032. .. You can also display the keyboard by pressing the keyboard display switch 1036 and tap it. It is also possible to make it possible to input.

0025Also, changeover switch 1034, power switch 1035, and keyboard display switch. The 1036 is displayed as a switch button on the display unit 1032, and the displayed switch is displayed. Each operation may be performed by touching the Chi-button.

0026In addition, the electronic device 1030 has at least a battery and is used to store data information. Mori (Flash Memory circuit, SRAM circuit, DRAM circuit, etc.), CPU (Medium) It is preferable to have a configuration including a central arithmetic processing circuit) and a Logic circuit. CPU and memory By providing, various software can be installed and personal computing It is possible to have some or all of the functions of the data.

0027In addition, the tilt of the gyroscope or 3-axis accelerometer with respect to the electronic device 1030. A function to be used in the electronic device 1030 according to the signal from the tilt detection unit, which is provided with a detection unit. Functions related to display and input on the display surface can be switched by an arithmetic circuit. That Therefore, the type, size, or arrangement of the input keys is predetermined like the built-in operation keys. Unlike the one, the convenience of the user can be improved.

0028Next, an example of the display panel constituting the display unit 1032 will be described with reference to FIG. table The display panel 100 includes a pixel circuit 101, a display element control circuit, and a photosensor control circuit. To do. The pixel circuit 101 includes a plurality of pixels 103, 10 arranged in a matrix in the matrix direction. It has 4, 113, 114, and photosensor 106. Pixels 103, 104, 113, Each 114 has one display element. In this embodiment, pixel 103 and pixel 10 One photosensor 106 is arranged between 4 and between pixels 113 and 114. Immediately Then, the pixel layout structure is such that one photosensor is arranged in four pixels.

0029Pixels 103, 104, 113, 114 have a transistor, a holding capacitance, and a liquid crystal layer. It has a liquid crystal element and the like. Transistors are pixel electrodes 105, 115, 125, 135 and electricity. Connect kimatically. The transistor is an injection of charge into the holding capacity or a charge from the holding capacity. It has a function to control the discharge of. The holding capacity holds a charge corresponding to the voltage applied to the liquid crystal layer. It has a function to have. Utilizing the fact that the polarization direction changes by applying a voltage to the liquid crystal layer Image display is realized by creating light and darkness (gradation) of light that passes through the liquid crystal layer. Transparent to the liquid crystal layer The passing light is irradiated from the outside of the liquid crystal display device using external light (sunlight or illumination light). Use light. The liquid crystal layer is not particularly limited, and a known liquid crystal material (typically, nemachit) A liquid crystal material or a cholesteric liquid crystal material) may be used. For example, polymer-dispersed liquid crystal (P DLC (Polymer Dispersed Liquid Crystal), high content Child-dispersed liquid crystal, polymer-dispersed liquid crystal) or polymer network type liquid crystal (PNLC (PNLC) Polymer Network Liquid Crystal)) is used for the liquid crystal layer , White display (bright display) may be performed by using the scattered light of the liquid crystal.

0030The display element control circuit is a circuit for controlling pixels 103, 104, 113, 114. It is a transition from a signal line such as a video data signal line (also referred to as a "source signal line"). Display element drive times that input signals to pixel electrodes 105, 115, 125, 135 via a star Tran arranged in each pixel via a road 107 and a scanning line (also referred to as a "gate signal line"). It has a display element drive circuit 108 that inputs a signal to the gate electrode of the gista.

0031For example, the display element drive circuit 108 connected to the scanning line has pixels arranged in a specific row. It has a function of selecting a display element to be used. In addition, the display element drive circuit 10 connected to the signal line 7 has a function of giving an arbitrary potential to the display element of the pixels in the selected row. In addition, it should be noted. In the display element to which a high potential is applied by the display element drive circuit 108 connected to the scanning line, The ranger becomes conductive and is given by the display element drive circuit 107 connected to the signal line. Charge is supplied.

0032Further, the photo sensor 106 emits an electric signal by receiving light such as a photodiode. It has a light receiving element having a function and a transistor.

0033The photo sensor control circuit is a circuit for controlling the photo sensor 106, and is a photo sensor. Read out the photo sensor connected to the signal line such as the sensor output signal line and the photo sensor reference signal line. It has a circuit 109 and a photosensor drive circuit 110 connected to a scanning line. Connect to scan line The photosensor drive circuit 110 is a photosensor having pixels arranged in a specific row. The 106 has a function of performing a reset operation and a selection operation, which will be described later. Also, the signal line The photosensor readout circuit 109 connected to is a photosensor of the pixels in the selected row. It has a function to take out the output signal of the sensor 106.

0034In the present embodiment, the circuit diagram of the pixel 103 and the photo sensor 106 is shown in FIG. explain.

0035The pixel 301 has a transistor 330, a holding capacity 331, and a liquid crystal element 332. Also , Photosensor 302 includes photodiode 351, transistor 352, transistor It has 353 and a transistor 354.

0036Transistor 330 has a gate at the gate signal line 310 and one of the source and drain. One electrode on the video data signal line 311 with the holding capacity 331 on the other side of the source or drain Is electrically connected to one of the electrodes of the liquid crystal element 332. The other electrode with a holding capacity of 331 Is electrically connected to the capacitive wiring 312 and is kept at a constant potential. In addition, the liquid crystal element 3 The other electrode of 32 is kept at a constant potential. The liquid crystal element 332 includes a pair of electrodes and the one. An element that includes a liquid crystal layer between a pair of electrodes.

0037Transistor 330 receives video data when "H" is applied to the gate signal line 310. The potential of line 311 is applied to the holding capacity 331 and the liquid crystal element 332. Retention capacity 331 is a mark Holds the applied potential. The liquid crystal element 332 changes the light transmittance depending on the applied potential. To do.

0038One electrode of the photodiode 351 is the photodiode reset signal line 341 (P). (Also called R wiring), the other electrode is connected to one of the source and drain of the transistor 352. It is connected airily. Also, the other of the source or drain of the transistor 352 is FD ( Node).

0039The transistor 352 has a role of controlling the voltage of the FD (node) and holding the voltage. The gate is connected to the photosensor charge transfer signal line 342 (also called TX wiring). the above The signal line 342 plays a role of controlling the switching of the transistor 352.

0040The gate of the transistor 354 is an FD (node), and the gate is one of the source or drain. The power supply wiring 344 is electrically connected to the side. Also, the source of transistor 354 or One of the source or drain of transistor 353 is electrically connected to one of the drains There is.

0041The gate of transistor 353 is electrically connected to the photosensor reference signal line 345 (SE wiring). It is being continued. Also, the other side of the source or drain of transistor 353 is a photosensor. It is electrically connected to the output signal line 343 (also called OUT wiring).

0042Next, an example of the configuration of the photosensor readout circuit 109 will be described with reference to FIG. .. As an example, the display unit is composed of pixels of 1024 rows and 768 columns, and the display element is in each row and column. The configuration has one pixel and one photo sensor for each pixel in 2 rows and 2 columns. That is, the table The indicator element consists of 1024 rows and 768 columns, and the photo sensor consists of 512 rows and 384 columns. Also, An example is shown in which the output signal line of the auto sensor is output to the outside of the display device as a set of two columns. That is, Obtain one output from a total of two photosensors sandwiched between eight pixels in two rows and four columns.

0043Figure 3 shows the pixel circuit configuration, showing four pixels in two rows and two columns and one photosensor. To. It has one display element per pixel and one photo sensor per four pixels. Figure 4 shows the photo In the circuit configuration of the sensor readout circuit 109, some photosensors are also shown for explanation. The transistor shown in FIG. 3 includes a transistor containing an oxide semiconductor in the channel formation region. Can be used.

0044As shown in FIG. 4, the scanning line drive circuit of the photosensor simultaneously has four rows of pixels (that is, a fo). Drives two lines of the sensor) and shifts the selected line by one line of the photo sensor, which corresponds to two lines of pixels. Let us consider an example of performing a driving method that causes the vehicle to move. Here, the photosensor of each line is driven by the scanning line. Roads will be selected consecutively for the period of two shifts of the selected row. How to drive like this By using the method, it is easy to improve the frame frequency of imaging by the photo sensor. Become. This is particularly advantageous for large display devices. The output signal line 34 of the photo sensor The output of the photo sensor for two lines is superimposed on 3 at the same time. Also, the selected line All photosensors can be driven by repeating the photo 512 times.

0045As shown in FIG. 4, the photosensor readout circuit 109 has one selector for every 24 columns of pixels. Have. The selector is for two rows of the output signal line 343 of the photo sensor in the display unit. Select 1 set from 12 sets with 1 set to get the output. That is, photo sensor reading The entire circuit 109 has 32 selectors and simultaneously acquires 32 outputs. Each set By making selections by the lecta for all 12 sets, the total equivalent to one line of the photo sensor You can get 384 outputs. 12 sets of selection by selector, photo sensor The output of all photosensors is obtained by performing each time the scan line drive circuit of the above shifts the selected line. be able to.

0046In this embodiment, as shown in FIG. 4, the photosensor readout circuit 1 connected to the signal line 1 09 takes out the output of the photo sensor, which is an analog signal, to the outside of the display device, and outside the display device. A configuration that amplifies using the amplifier provided in the unit and then converts it into a digital signal using an AD converter. think of. Of course, the AD converter is mounted on the same board as the display device, and the output of the photo sensor is output. After converting to a digital signal, it can be configured to be taken out to the outside of the display device.

0047Using the timing chart of FIG. 6, the driving method of the photosensor circuit of FIG. 3 will be described. To.

0048For a brief explanation in Fig. 6, TX910, PR911, and SE912 are binary-changing signals. Given as a number, the TX910 will have a high potential of "High-TX" and a low potential of "Low". -TX ", PR911, high potential is" High-PR ", low potential side is" Low-PR ", SE912 expresses high potential as "High-SE" and low potential side as "Low-SE". .. However, since each potential is actually an analog signal, each potential is limited to binary depending on the situation. It can take various values.

0049First, set TX910 to "High-TX" at time 901. Then at time 902 PR911 When is set to "High-PR", the potential of FD 913 is the same as PR911 "High-PR". The above is called the reset operation.

0050When PR911 is set to "Low-PR" at time 903, the potential of FD 913 is set to "High-". Holds PR "and puts a reverse bias on the pin photodiode (accumulation operation open) Start). At this time, the reverse current flows due to the light incident on the i layer of the pin photodiode. Therefore, the amount of charge stored in the FD changes according to the amount of light.

0051When TX910 is set to "Low-TX" at time 904, the pin photodiode from FD The transfer of electric charge to is stopped, and the amount of electric charge accumulated in the FD is determined (the accumulation operation ends).

0052When SE912 is set to "High-SE" at time 905, the power is supplied according to the potential 913 of the FD. Electric charge is supplied from the wiring to the OUT wiring (read operation starts).

0053When SE912 is set to "Low-SE" at time 906, the charge from the power supply wiring to the OUT wiring Supply is stopped and OUT914 is determined (read operation ends). Use OUT914 Can generate a captured image with.

0054After that, the operation returns to the operation at time 901 and the same operation is repeated.

0055In the present embodiment, the reset operation, the accumulation operation, and the read operation of all the photosensors are performed. By executing, the local shadow of the outside light can be detected. Also, for the detected shadow By performing image processing as appropriate, you can know the position where your finger or pen touches the display device. Can be done. In advance, the operation corresponding to the contact position, for example, in the case of character input, the character By defining the type, it is possible to input desired characters.

0056In the display device of the present embodiment, a local shadow of external light is detected by a photo sensor. To do. Therefore, even if a finger or a pen does not physically contact the display device, they approach each other in a non-contact manner. Therefore, if a shadow is formed, it can be detected. Below, a finger or pen touches the display device Then, it shall include non-contact and close proximity.

0057With the above configuration, the display unit 1032 can be provided with a touch input function.

0058(Embodiment 2) In the present embodiment, the circuit arrangement partially different from that of FIG. 3 is shown in FIG. 5, and an example of the pixel layout is shown in FIG. 7. Shown in.

0059The pixel circuit is composed of a display circuit 3501 and a sensor circuit 3502.

0060The display circuit consists of a transistor 3530, a liquid crystal element 3532 and a capacitance 3531. .. The gate of transistor 3530 is connected to signal line 3510 and is a source or dray. One of the electrodes is connected to the signal line 3511, and the other is the electrode of the capacitance 3531 and the liquid crystal element. It is connected to one of the electrodes of the child 3532. The other electrode of capacitance 3531 is on signal line 3512 Be connected. The other electrode of the liquid crystal element 3532 corresponds to a common electrode.

0061The sensor circuit is pin photodiode 3551, FET-T3552, FET- It consists of AMP3554 and FET-S3553. The gate of FET-T3552 is TX It is connected to two wires 3542 and 3547, and one of the source and drain is pin. Connected to the cathode of the photodiode 3551, the other is the FET-AMP3554 game Connected to

0062The source of FET-AMP3554 is connected to the power supply wiring 3544, and the drain is FET-S. Connected to 3553 sources. The gate of FET-S3553 is connected to SE wiring 3545. And the source is connected to OUT wiring 3543. pin photodiode 3551 The node is connected to PR wires 3541 and 3546. The transition shown in Fig. 5 A transistor containing an oxide semiconductor in the channel forming region can be used as the data.

0063FIG. 7 is an example of a plan view of the pixel layout corresponding to the circuit diagram of FIG.

0064For the pixel layout, the layout of four display circuits 3610a, 3610b, 3610c , 3610d and sensor circuit layout 3620 consist of one. Display circuit ray Out 3610a, 3610b, 3610c, 3610d are selected FET360 respectively 3, Cs line 3601, video data wiring 3602, selective wiring 3600, COM wiring 360 It consists of 4.

0065In addition, the layout of the sensor circuit 3620 is a pin photodiode 3630, semiconductor layer. FET-T with 3637, FET-AMP with semiconductor layer 3638, semiconductor layer 36 FET-T with 36, FD3641, vertical TX wiring 3632, horizontal TX wiring 3640 , Vertical PR wiring 3631, Horizontal PR wiring 3639, SE wiring 3635, OUT wiring 363 3. Consists of VDD wiring 3634. Materials for semiconductor layers 3636, 3637, 3638 Although not particularly limited, polycrystalline semiconductor film (polysilicon film, etc.), microcrystalline semiconductor film, etc. School ceremony InMO₃(ZnO)_mAn oxide semiconductor film represented by (m&gt; 0) can be used. To. Here, M is one or more metal elements selected from Ga, Al, Mn and Co. Shown. For example, as M, Ga, Ga and Al, Ga and Mn, Ga and Co, etc. is there. In addition, SiO is applied to the oxide semiconductor film.₂May include.

0066Each layer of the pixel layout includes semiconductor layers 3636, 3637, 3638, and gate wiring layer 365. 1. Formed from SD wiring layer 3652, Si layer 3653, and ITO electrode layer 3654. Also , Vertical TX wiring 3632, Vertical PR wiring 3631 is SD wiring layer 3652, Horizontal TX wiring The 3640 and the horizontal PR wiring 3639 are formed by using the gate wiring layer 3651. Also , Horizontal wiring and vertical wiring make contact to form a mesh-like layout. To.

0067The pixel layout is between the FD3641 and the video data line 3602 and the signal lines of adjacent pixels. There is a Cs line 3601 that functions as a shield wiring. Therefore, with FD3641 The parasitic capacitance formed between the plurality of signal lines is reduced, or the voltage of the signal lines changes. It blocks the accompanying change in peripheral potential and suppresses the change in FD potential.

0068In addition, one of the features of the pixel layout is that FD3641 and FD3641 are provided. Sufficient distance from the PR wiring, SE wiring, and OUT wiring arranged in the pixel and adjacent pixels Is provided and arranged. Therefore, the potential change of FD3641 is suppressed, and the potential change is suppressed. It is possible to provide a display device having an imaging function with less noise in the output signal of the auto sensor. To.

0069A partially enlarged view of FIG. 7 is shown in FIG. 8 (A), and an example of the cross-sectional structure thereof is shown in FIG. 8 (B).

0070In FIGS. 8 (A) and 8 (B), the same reference numerals are used for the parts common to those in FIG. 7.

0071In FIG. 8B, a transistor electrically connected to the photodiode on the substrate 500. The gate wiring layer 3651 and the horizontal PR wiring 3639 are formed of the same material and in the same process. In addition, a gate wiring layer 3651 and a gate insulating layer 502 covering the horizontal PR wiring 3639 are formed. The semiconductor layer 3637 is placed on the gate insulating layer 502 and overlaps with the gate wiring layer 3651. Is formed.

0072In addition, SD wiring 3652 that partially overlaps the semiconductor layer 3637 is formed, and SD wiring 3652 is used. A first interlayer insulating layer 505 is formed to cover the layer. Also, pin photodiode 3630 Is a silicon layer 3653p containing p-type impurity elements and i-type amorphous silicon. The layer 3653i and the silicon layer 3653n containing an n-type impurity element are laminated and photoelectrically changed. Form a replacement layer.

0073In addition, a second interleaving that covers the pin photodiode 3630 and the first interlayer insulating layer 505. An ITO electrode 36 formed of a transparent conductive film on the second interlayer insulating layer 509 on which the edge layer 509 is formed. 54 is formed. The ITO electrode 3654 is a transistor S having a semiconductor layer 3637. Functions as a connection electrode for connecting D wiring 3652 and pin photodiode 3630 To. In the display area, the pixel electrode is made of the same material as the ITO electrode 3654 and is in the same process. It is formed.

0074In addition, in FIG. 8 (B), the tran that is electrically connected to the pin photodiode 3630. Gista has shown an example of a bottom gate type transistor, but is not particularly limited, and other bottom gates are used. It may have a gate structure or a top gate structure.

0075(Embodiment 3) In the present embodiment, the display unit (ta) having the touch input function described in the above embodiment An example of an electronic device provided with a switch panel) will be described.

0076Figure 9 (A) shows an information terminal, which includes a housing 9630, a display unit 9631, an operation key 9632, and the sun. It can have a battery 9633 and a charge / discharge control circuit 9634. Solar cell 9633 and It is equipped with a switch panel that can be opened and closed, and the power from the solar cell is displayed on the touch panel or projected. It is an information terminal that supplies the image signal processing unit. The information terminal shown in Fig. 9 (A) provides various information ( A function to display still images, videos, text images, etc., calendar, date or time, etc. A touch input machine that performs touch input operations or edits the functions displayed on the display and the information displayed on the display. It is possible to have a function, a function to control processing by various software (programs), etc. it can. In addition. In Fig. 9 (A), the battery 9635 is an example of the charge / discharge control circuit 9634. , DCDC converter (hereinafter abbreviated as converter 9636) Is shown.

0077The solar cell 9633 has an efficient battery 9635 on the front and back of the housing 9630. It is suitable because it can be configured to be charged. As for the battery 9635, Using a lithium-ion battery has advantages such as miniaturization.

0078The configuration and operation of the charge / discharge control circuit 9634 shown in Fig. 9 (A) are shown in Fig. 9 (B). A lock diagram will be shown and described. Figure 9 (B) shows the solar cell 9633, battery 9635, and For converter 9636, converter 9637, switches SW1 to SW3, display 9631 It shows about battery 9635, converter 9636, converter 9637, The switches SW1 to SW3 correspond to the charge / discharge control circuit 9634.

0079First, an example of operation when power is generated by the solar cell 9633 by external light will be described. The power generated by the solar cell is combined so that it becomes the voltage for charging the battery 9635. The data 9636 boosts or lowers the voltage. Then, the solar cell 9 is used for the operation of the display unit 9631. When power from 633 is used, switch SW1 is turned on and converter 9637 The voltage required for the display unit 9631 will be boosted or stepped down. In addition, the display unit 9631 When not displaying with, turn off SW1 and turn on SW2 to battery 9635. It may be configured to charge the battery.

0080The solar cell 9633 is shown as an example of charging means, but it can be backed up by other means. It may be configured to charge the terry 9635. Also, combine other charging means It may be configured.

0081Further, it is provided with a display unit (touch panel) having the touch input function described in the above embodiment. Needless to say, if this is the case, the electronic devices shown in FIG. 9 are not particularly limited.

0082This embodiment can be implemented in combination with the configurations described in other embodiments as appropriate. Is.

0083100: Display panel 101: Pixel circuit 103: pixels 104: Pixels 105: Pixel electrode 106: Photo sensor 107: Display element drive circuit connected to the signal line 108: Display element drive circuit connected to the scanning line 109: Photo sensor readout circuit 110: Photo sensor drive circuit 113: Pixel 114: Pixels 115: Pixel electrode 125: Pixel electrode 135: Pixel electrode