Substrate processing apparatus with motors integral to chamber walls

This application claims the interests of US Provisional Patent Application No. 60 / 938,913 filed on May 18, 2007, the full text of which is hereby incorporated herein by reference. It will be used.

Exemplary embodiments generally relate to substrate transfer systems, especially to substrate transfer robots.

A conventional substrate processing apparatus may include one or more compartments having a chamber with an isolated atmosphere (vacuum, inert gas, etc.). Also, conventional process equipment may include a substrate transfer system arranged in an isolated atmosphere for transporting the substrate between various stations of the processing apparatus. A conventional transfer system may include one or more arms and a motorized drive unit that powers the arms. The motor or part thereof may be located in an isolated atmosphere and the conventional drive unit may include a conventional bearing support shaft that powers the arm.

<p> In the case of conventional bearings, there is concern that contact with the bearings and, for example, the use of lubricants that may emit gas in a vacuum, may result in unwanted contamination in the isolated atmosphere. Also, conventional drives may be located outside the chamber wall in an isolated atmosphere or vacuum in order to communicate an isolated portion of the drive with the chamber to provide a connection to an arm within the chamber. Therefore, in conventional equipment, the drive unit can create additional volume in the isolated atmosphere or vacuum chamber, resulting in longer time to pump the isolated atmosphere or vacuum in the chamber. is there. Further, the arm portion of the conventional transfer system can be centrally arranged to realize transfer over the entire processing apparatus. Therefore, the drive of a conventional system would be located in the lower center of the bottom of the chamber in an isolated atmosphere or vacuum, which would limit access for other systems to connect to the bottom of the chamber in the isolated atmosphere. Or limited. The exemplary embodiments disclosed herein overcome the challenges of conventional systems, as detailed below.</p>

<p> In one exemplary embodiment, a substrate transfer device is provided. The substrate transfer device has at least one stator module located within the peripheral wall between the peripheral wall having an inner surface that defines a substrate transfer chamber capable of maintaining an isolated atmosphere, and the inner surface and adjacent outer surfaces of the peripheral wall. One substantially ring-shaped motor and at least one whose peripheral wall surface surrounded by the ring-shaped motor is connected to a given device and at least one rotor to hold at least one substrate. Includes at least one rotor suspended in the transfer chamber with virtually no contact, as configured for mounting at least one board transfer arm with end effectors.</p><p> In another one embodiment, a substrate transfer device is provided. The substrate transfer device includes a frame forming the chamber and a plurality of stator module sets embedded at least partially in the peripheral wall of the chamber, each of the plurality of stator module sets being contained in the plurality of stator module sets. Supported by a stator module set, each forming part of each motor when radially separated from different stator module sets, and one each of the stator module sets, each with virtually no contact. Includes multiple rotors and at least one end effector connected to each one of the multiple rotors, each configured to support the board, each of the stator module sets and Each rotor is configured to provide each one extension and retract of at least one end effector.</p><p> In yet another embodiment, a substrate processing apparatus is provided. The substrate processing apparatus is configured to carry at least one substrate and a frame having at least one separable chamber capable of retaining a predetermined atmosphere, and at least partially in at least one separable chamber. At least two nested stator modules, each detachably embedded in the perimeter wall of at least one separable chamber, a board transfer device located in, each with at least two nested motors. With each of the at least one stator forming, there is virtually no contact so that at least one of the two nested motors is surrounded by another one of the at least two nested motors. At least one rotor coupled to at least two rotors with at least two rotors located in at least one sequesterable chamber supported in the state and at least one end effector for holding the substrate. A board transfer device with a transfer arm and at least two nested motors provide at least two degrees of freedom of movement for at least one transfer arm.</p><p> In yet another exemplary embodiment, the substrate transfer apparatus is mounted with a frame forming the substrate transfer chamber and each stator module distributed circumferentially on the peripheral wall of the substrate transfer chamber independently of the peripheral wall. Connects to at least one motor and at least one common ring rotor, each configured to support the board, with a possible set of stator modules and further with at least one common ring rotor working with each stator module. Including at least one end effector, the stator module set and at least one common ring rotor are configured to provide at least one degree of freedom to the motor of at least one end effector.</p><p> Other features of the exemplary embodiments described above and disclosed are described in the following description along with the accompanying drawings.</p>

<figref num="1">It is a schematic plan view of the substrate processing apparatus which concerns on one exemplary embodiment.</figref><figref num="2A">It is a schematic top perspective view of the transfer chamber part which concerns on one exemplary embodiment.</figref><figref num="2B">It is a vertical sectional view of the transfer chamber part which concerns on one exemplary embodiment.</figref><figref num="2C">It is the schematic bottom perspective view of the transfer chamber part which concerns on one exemplary embodiment.</figref><figref num="3A">It is the schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="3B">It is a partial schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="3C">It is a vertical sectional view of the transport device which concerns on one exemplary embodiment.</figref><figref num="4A">It is the schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="4B">It is a partial schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="4C">It is a vertical sectional view of the transport device which concerns on one exemplary embodiment.</figref><figref num="5">It is the schematic perspective view of the drive part which concerns on one exemplary embodiment.</figref><figref num="6">It is a partial perspective view of the stator segment and the rotor of the drive part of FIG.</figref><figref num="7A">It is a schematic top perspective view of the transfer chamber part which concerns on one exemplary embodiment.</figref><figref num="7B">It is a vertical sectional view of the transfer chamber part which concerns on one exemplary embodiment.</figref><figref num="7C">It is the schematic bottom perspective view of the transfer chamber part which concerns on one exemplary embodiment.</figref><figref num="8A">It is the schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="8B">It is a partial schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="8C">It is a vertical sectional view of the transport device which concerns on one exemplary embodiment.</figref><figref num="9">FIG. 8A is a cross-sectional view of a typical rotor of the transfer device shown in FIG. 8A.</figref><figref num="10">A part of the motor according to one exemplary embodiment is shown.</figref><figref num="11">Part of one exemplary embodiment is the transport device shown in FIG.</figref><figref num="12A">It is a schematic top perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="12B">It is a vertical sectional view of the transport device which concerns on one exemplary embodiment.</figref><figref num="12C">It is a bottom perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="13A">It is the schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="13B">It is a partial schematic perspective view of the transport device which concerns on one exemplary embodiment.</figref><figref num="13C">It is a vertical sectional view of the transport device which concerns on one exemplary embodiment.</figref><figref num="14">It is the schematic perspective view of the drive part which concerns on one exemplary embodiment.</figref><figref num="15">FIG. 5 is a schematic plan view of a substrate processing tool and a carrier connected thereto according to another exemplary embodiment.</figref><figref num="16">FIG. 5 is a schematic plan view of a substrate processing tool and a carrier connected thereto according to another exemplary embodiment.</figref>

With reference to FIG. 1, a schematic plan view of the substrate processing apparatus 10 incorporating the features according to one exemplary embodiment is shown. Each exemplary embodiment will be described with reference to the embodiments shown in the drawings, but it should be understood that many alternative forms are also possible. You may also use any suitable size, shape, or type of element or material.

The processing apparatus 10 in the exemplary embodiment illustrated in FIG. 1 has a representative configuration, and in an alternative embodiment, the apparatus can be in any other desired configuration. In the exemplary embodiment shown in FIG. 1, the processor is shown as a cluster tool for illustration purposes only. It should be noted that the exemplary embodiments are equally well applicable to any other suitable type of substrate processing system having a transfer device, including but not limited to linear processing systems. Examples of suitable processing systems in which such exemplary embodiments can be incorporated include "linearly distributed semiconductor workpiece processing," the full text of which is incorporated herein by reference. Includes, but is not limited to, US Patent Application No. 11 / 442,511 filed May 26, 2006, entitled "Tools".

The exemplary processing device 10 shown in FIG. 1 can generally include an interface section 12, which may be referred to as, for example, a front-end module (as feasible, the reference frame used in this description is exemplary and alternative. In embodiments, any desired reference frame can be used, for example positioning the interface section on the back or side of the device). In this exemplary embodiment, the apparatus 10 can include a processing unit 14 connected to an interface unit 12. For example, the interface section 12 can be arranged to allow loading / unloading of the board or other desired workpiece from device 10 (eg, one or more load ports 12L and a suitable transfer system 12T). , It may be held in a properly environmentally controlled module 12M, etc.). The transfer system 12T of the interface unit 12 can transfer the substrate within a properly controlled environment of the module 12M, for example between the cassette and the processing unit 14 at the load station of the interface unit.

The processing unit 14 of this exemplary embodiment generally has a large number of transfer chambers 14T1 and 14T2 (FIG. 1 shows two transfer chambers for illustration purposes, but in alternative embodiments more than two. Or it can be a small number of chambers) and can have a large number of processing modules 14M communicatively connected to the transfer chambers 14T1 and 14T2. The treatment module 14M is a thin film treatment using vacuum such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma deposition (PVD), implantation such as ion implantation, measurement, rapid heat treatment (RTP), etc. On a substrate such as dry strip atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonders, evaporation, other thin film processes using vacuum pressure, or other desired processes. It can be configured to carry out the desired process. In this exemplary embodiment, the transfer chambers 14T1 and 14T2 can be arranged to maintain an sequesterable atmosphere that can be isolated from the outside atmosphere. In this exemplary embodiment, the transfer chambers 14T1, 14T2 can be configured to have the ability to retain a vacuum atmosphere (while in an alternative embodiment, the transfer chamber has any other desired, such as an inert gas N2, Ar, etc. Can maintain an isolated atmosphere). Therefore, the transfer chambers 14T1 and 14T2 in this exemplary embodiment can include suitable vacuum pump systems and ventilation systems, as described below. In order to maintain an isolated atmosphere without compromising, the transfer chambers 14T1 and 14T2 of the processing unit 14 can be communicated with the interface unit 12 via the load lock 16. As feasible, the process module 14M can be isolated from the transfer chambers 14T1 and 14T2 by a suitable slot valve.

In this exemplary embodiment, the transfer chambers 14T1 and 14T2 may be capable of isolating from each other. For example, in this exemplary embodiment, the transfer chambers 14T1 and 14T2 can be arranged in series with the front of the device or the interface section 12, and an intermediate load lock 14LL can be placed between the transfer chambers 14T1 and 14T2 as shown in FIG. Can be placed. Therefore, since the transfer chambers 14T1 and 14T2 can have the ability to maintain different atmospheres in isolation, such as different levels of vacuum, the process module 14M connected to each transfer chamber 14T1 and 14T2 will have different reference pressures. Can be equipped with the ability to carry out different processes. In an alternative embodiment, the transfer chambers 14T1 and 14T2 do not have to have different atmospheres. In an alternative embodiment, the intermediate chamber 14LL between the transfer chambers 14T1 and 14T2 can also be configured as a substrate buffer, aligner, or measuring unit.

In the exemplary embodiment shown in FIG. 1, the transfer chambers 14T1 and 14T2 can be internally equipped with transfer devices 20 and 22, respectively. As feasible, the transfer device 20 located in the chamber 14T1 can transfer the substrate between the load lock 16 and the processing module 14M or the intermediate load lock 14LL connected to the transfer chamber 14T1. The 22 can transport the substrate between the processing modules connected to the intermediate load lock 14LL and the transport chamber 14T2. In an alternative embodiment, the transfer chambers 14T1 and 14T2 of the processing unit may include more or less transfer devices. The substrate processing apparatus 10 and its subsections (interface unit 12, processing unit 14, transfer equipment 20, 22, etc.) are 200 mm, 300 mm, 450 mm, or any other desired diameter substrate (such as one that can be used for semiconductor manufacturing). ), Reticles or pellicle, and flat panels (such as those that can be used in the manufacture of flat panel displays), but not limited to, can be appropriately configured to process any desired substrate.

Here, with reference to FIGS. 2A-2C, schematic perspective views and vertical cross-sections of the top and bottom surfaces of the transfer chamber section 14T are shown (in FIG. 2A, the closing elements are provided to reveal details inside the chamber. It is omitted). As described above, the transfer chambers 14T1 and 14T2 are used to transfer the substrate to and from the load lock 16 (see also FIG. 1) and the processing module 14M of the processing section 14 via the transfer chambers 14T1 and 14T2. In this exemplary embodiment, the transfer system, which is the devices 20 and 22, can be included. In this exemplary embodiment, the transport devices 20, 22 are generally connected or, as detailed below, in the desired radial (R) and rotational (T) directions to the transport end effector. A junction arm powered by a rotary drive with a number of independent axes of rotation to produce motion (eg, as indicated by arrows R and T in FIG. 2A, respectively). The rotary drive can be incorporated into the walls that define the respective transfer chambers 14T1 and 14T2, and is also referred to as a coiled ring motor, which isolates the coil from the chamber atmosphere, as described below. It can be equipped with something that can be used. In this exemplary embodiment, this arrangement of drive motors frees the bottom surface of the transfer chamber, or otherwise, for example, mounting and mounting a vacuum pump system 100 (see Figures 2B, 2C) or other desired system. It will be accessible for the interface. In this exemplary embodiment, the arm and the drive of the transfer device arm can be magnetically levitated and centered, for example by a self-bearing motor, eliminating or substantially reducing the possibility of particle formation in the chamber atmosphere. Ru.

Further referring to FIG. 2A-2C, in this exemplary embodiment, the transfer devices 20 and 22 of the transfer chambers 14T1 and 14T2 can be different from each other. For example, the transfer device 20 can have a state that can be described as a bilateral arm arrangement in the description, and the transfer device 22 can have a symmetrical arm arrangement. In an alternative embodiment, the substrate transfer device can be in any other arrangement, for example a scalar arrangement. In other alternative embodiments, the transfer devices in the transfer chamber may be similar. A suitable example of a transfer arm is a US patent application filed May 8, 2008, entitled "Substrate Transfer Device," which is incorporated herein by reference in its entirety as a part of this specification. It can be found on 12 / 117,355.

Also with reference to FIGS. 3A-3B, a schematic perspective view and a partial perspective view of the transport device 20 are shown, respectively. As mentioned above, in this exemplary embodiment, the transport device 20 has, for example, two arm assemblies 24, 26 (in alternative embodiments, there may be more or less arm assemblies) bilaterally. It can be arm-arranged. The arm assemblies 24, 26 can be substantially similar to each other, and in this exemplary embodiment, the arms extend and retract substantially in opposite directions, as most clearly shown in FIG. 3A. They are generally placed on opposite sides of each other. The arm 24 has one (or more) end effector 24E (which can hold the desired number of substrates on it), and a pair of end effectors 24E movably mounted on it. Arm links 30R, 30L can be provided (since the arm assembly 26 is similar, the arm assembly will be specifically described below with reference to the arm assembly 24, unless otherwise noted. To do). As feasible, the curved shapes of the arm links 30R, 30L are exemplary, and in alternative embodiments, the arm links can be of any suitable shape, including but not limited to straight and bow. it can. One end of the arm links 30R, 30L can be pivotally attached to the base members 34, 36 in any suitable manner in the pivots 32L, 32R. The opposite ends of the arm links 30R, 30L can be pivotally joined to the end effector 24E at the wrist joints 35R, 35L. In an alternative embodiment, the arm links 30R, 30L can be pivotally joined to the base member and end effector at any suitable point along the arm link. In this exemplary embodiment, both arm assemblies 24, 26 are attached or not to a common base member 34, 36, and to a drive 28 via the base member 34, 36. If so, they will be joined. In this exemplary embodiment, a nested motor is provided in which the drive 28 is provided with two independent axes of rotation (T1, T2), thereby providing the arm assemblies 24, 26 with two degrees of freedom (R, T). Can be prepared. As feasible, the bilateral shape of the arm links of the arm assemblies 24, 26 generally separates the movement of R between the arm assemblies (caused by the reverse rotation of the axes T1 and T2 from the battery or retracted position. For example, extending and retracting one arm assembly (R movement) causes little corresponding R movement in the other arm assembly at the battery position). In an alternative embodiment, the arm assemblies can be individually coupled to the drive so that each arm assembly can be moved individually in the R direction. The base members 34, 36 can have any desired shape that allows the external pivot joints 32L, 32R of the arm links 30L, 30R to be coupled to the rotor of the drive motor (base members 34, 36 shown in FIGS. 3A-3B). The configuration of is only exemplary, and in alternative embodiments, the base member may comprise any other suitable configuration).

As mentioned above, in the exemplary embodiment shown in FIG. 3A-3C, the drive unit 28 can include nested ring motors 40, 42 (defining independent rotation axes T1, T2) and a base. Members 34, 36 can be connected to the corresponding drive motors 40, 42, respectively, in a substantially shaftless or hubless manner. As most clearly shown in FIGS. 3A-3B, the base members 34, 36 each hang from the general hoops 34R, 36R, and from there to the corresponding pivot joints 32L, 32R of the arm assemblies 24, 26. Can be equipped with 34E. In this exemplary embodiment, the base member can be substantially flat, such as press sheet metal, but in an alternative embodiment, the base member can be any suitable material and any other desired material. It can be formed in the following manner. The hoops 34R and 36R, which can be closed or opened, are joined to the corresponding ring rotors of the motors 40 and 42, respectively. The hoop portion of the base member can be fixed to the rotor of the motor in any desired manner (mechanical fixture, chemical bond, etc.). In an alternative embodiment, the rotor of the motor can be integrated with the base member in another way (eg, the base member is configured to have the ability to operate as a rotor of the motor, integrated). It may have a ring of magnetic material formed). The hoop portion of the base member can extend and be fixed to the periphery of the desired length section of the rotor boundary. In this exemplary embodiment, the nested motors 40, 42 are configured such that one of the motors surrounds the other and the base members 34, 36 allow their rotation without interfering with each other. It can be positioned concentrically (the respective rotation axes T1 and T2 are coaxial). In an alternative embodiment, the base member and the coupling between the base member and the drive units T1 and T2 motors can be in any other desired embodiment and include one or more shafts or hubs. can do.

With reference to FIG. 2A-2C again, in this exemplary embodiment, the motors 40, 42 of the drive unit 28 are integrated within the bottom wall 14B, which defines the transfer chambers 14T1, 14T2. In an alternative embodiment, the drive motor can be integrated within any other wall that borders the transport chamber, such as the side walls and upper walls. In this exemplary embodiment, the drive ring motors 40, 42 are clean or substantial for locating or accommodating other components such as the vacuum pump system 100 (see, eg, FIGS. 2B and 3B) inside the motor. It can be arranged to define a free space 44 (not obstructed by drive system components) and ancillary components for atmosphere control (such as pressure gauges, sensors, and ventilation system piping (not shown)). In an alternative embodiment, the atmosphere control component can be positioned at any suitable position in the transfer chambers 14T1, 14T2. See also FIG. 5 here for a schematic perspective view of the drive unit 128 that is substantially similar to the drive unit 28 (the drive unit 128 in the illustrated exemplary embodiment has four independent rotation axes T1-. It can be equipped with a motor to define the T4, and the drive 28 can be equipped with two independent axes of rotation, as described above). In this exemplary embodiment, the motors 40, 42 (T1, T2) arranged concentrically can be substantially similar. In an alternative embodiment, the drive unit may include different types of motors. In this exemplary embodiment, the motors 40, 42 can be synchronous motors, such as brushless DC motors. Any suitable example of a brushless DC motor is incorporated herein by reference in its entirety as part of this specification, filed June 27, 2007, U.S. Patent Application No. 11 / 769,688. , U.S. Patent Application No. 11 / 769,651 filed June 27, 2007, and U.S. Patent Application No. 12/163, filed June 27, 2008, It is described in No. 996. As described above, in this exemplary embodiment, the motors 40 and 42 can be similar, and therefore, unless otherwise specified, the motor 40 will be particularly referred to below.

As shown in FIG. 3B, the motor windings can be arranged within the stator 40S, and the rotor 40R can include permanent magnets arranged in the circumferential direction with alternating poles at a desired pitch. In this exemplary embodiment, the rotor 40R can be provided with a ferromagnetic backing (or any other suitable magnetic material backing) for permanent magnets. The stator 40S can be placed in the stator segments 40S1-40S4, for example the four stator segments most clearly shown in FIG. 3A (see also reference number 140S1-140S4 in FIG. 5), but as an alternative. In embodiments, there may be more or less stator segments. The stator segments 40S1-40S4 can be geometrically offset (such as spaced around the rotor) and electrically offset from each other to generate the desired resultant force on the rotor. In this exemplary embodiment, the stator windings and rotor magnets are oriented in the direction of arrow τ in FIGS. 3A and 5 to provide substantially independent controllable torque (T1, T2) and self-bearing centering forces. Can be equipped with the ability to generate a tangential component and / or a radial force (r) (see Figure 5). The windings of one or more stator segments 40S1-40S4 can be coupled together to form an independently controllable set of windings, in this exemplary embodiment, independent of the motor 40. It can have at least two winding sets that can be controlled (in alternative embodiments, it may be more or less winding sets). Winding rectification in segments 40S1-40S4 to provide the desired torque and independent rotor centering can be controlled via an appropriate algorithm within the controller (not shown). An example of a suitable rectification program for rectifying windings in a stator segment 40S1-40S4 has already been incorporated herein by reference in US Patent Application No. 11/769, It is described in 688 and 11 / 769,651. As feasible, in this exemplary embodiment, the rotor centering force (radial and / or tangential component forces are rotor 40R, 42R, and therefore arm assembly 24, 26, X, Y direction movement (two). It can be controlled to provide two rotating shafts T1, T2 plus two degrees of freedom from the motor. In an alternative embodiment, the rotor is, for example, mechanical contact (shaft, bearing, etc.) or magnetic. Appropriate passive centering, such as non-contact centering, can be provided.

In this exemplary embodiment, motors 40, 42, which can be concentrically adjacent, can be configured to use or share a common or combined stator segment, eg, located between rotors. This is most clearly shown in FIG. 6, which illustrates a partial perspective view of the stator segments such as the stator segment 140S1 and the rotors 142R, 140R of the drive unit 128. The stator segments 140S1 and rotors 140R, 142R are representative of suitable stator segments. The stator segments 40S1 (see Figure 3A) of the rotors 40R, 42R and drive 28 are similar. As shown in FIG. 6, in this exemplary embodiment, the stator segment 140S1 may include, for example, a core 140C made of a suitable magnetic material. The configuration of the core portion 140C shown in FIG. 6 is an example, and in an alternative embodiment, the core portion can have any desired configuration. The core 140C may include winding slots or teeth for both windings 140W, 142W of both motors 140, 142 similar to motors 40, 42 (see Figure 3B). In this exemplary embodiment, the core portion 140C may have a single structure, but in alternative embodiments, the core portion may be a composite assembly. The winding slots 140W, 142W can be arranged on opposite sides of the core 140C, respectively, so as to face their respective corresponding motor rotors 140R, 142R. The winding slots 140W, 142W in the core 140C are illustrated as substantially symmetrical for illustration purposes only, and in an alternative embodiment, the winding slots in the core for each motor stator are (predetermined). It may be different (corresponding to the configuration and operating parameters of the motor). In other alternative embodiments, one or more slots or gaps (eg, concentrically extending the surface of the core) may be formed in the core portion to provide the core with the desired magnetic configuration. it can. Suitable examples of stator segments are described herein in full. It is described in US Patent Application No. 12 / 163,993, filed June 27, 2008, incorporated herein by reference in part. As feasible, and as shown in FIG. 6, rotors 140R, 142R (similar to rotors 40R, 42R shown in FIG. 3B) operating with the combined stator segments 140S1 can be configured as appropriate. .. For example, the rotors 140R, 142R may be provided with permanent magnets arranged to face the corresponding windings on the combined core 140C located between the rotors 140R, 142R. Therefore, the permanent magnets on each rotor 140R, 142R can be placed facing each other (preferably, the size of the gap between the rotors is set to avoid magnetic action between the rotors. And / or suitable materials can be placed within the chamber wall). In an alternative embodiment, the permanent magnets can be oriented in any suitable direction with respect to each other. In yet another alternative embodiment, the motor stator and rotor can be provided with any other suitable configuration. It is described in No. 993. As feasible, and as shown in FIG. 6, rotors 140R, 142R (similar to rotors 40R, 42R shown in FIG. 3B) operating with the combined stator segments 140S1 can be configured as appropriate. .. For example, the rotors 140R, 142R may be provided with permanent magnets arranged to face the corresponding windings on the combined core 140C located between the rotors 140R, 142R. Therefore, the permanent magnets on each rotor 140R, 142R can be placed facing each other (preferably, the size of the gap between the rotors is set to avoid magnetic action between the rotors. And / or suitable materials can be placed within the chamber wall). In an alternative embodiment, the permanent magnets can be oriented in any suitable direction with respect to each other. In yet another alternative embodiment, the motor stator and rotor can be provided with any other suitable configuration. It is described in No. 993. As feasible, and as shown in FIG. 6, rotors 140R, 142R (similar to rotors 40R, 42R shown in FIG. 3B) operating with the combined stator segments 140S1 can be configured as appropriate. .. For example, the rotors 140R, 142R may be provided with permanent magnets arranged to face the corresponding windings on the combined core 140C located between the rotors 140R, 142R. Therefore, the permanent magnets on each rotor 140R, 142R can be placed facing each other (preferably, the size of the gap between the rotors is set to avoid magnetic action between the rotors. And / or suitable materials can be placed within the chamber wall). In an alternative embodiment, the permanent magnets can be oriented in any suitable direction with respect to each other. In yet another alternative embodiment, the motor stator and rotor can be provided with any other suitable configuration.

In this exemplary embodiment, in addition to the torque τ and centering (r) forces, the motors 40, 42 may be provided with the ability to generate lift without contact (eg, Z force, see FIG. 3A). it can. For example, rotor magnets and stator cores can generate passive lift so that the rotor and thus the arm assembly can be stably held in the Z direction, for example via magnetic levitation. The stator segments 40S1-40S4 and the rotors 40R, 42R of the motors 40, 42 are the desired stiffness of the rotors 40R, 42R in the Z direction, and the stiffness of the rotor with respect to pitch and roll (rotation of the rotor with respect to the Y and Z axes, respectively). Can be established to bring about. Suitable examples of rotor and stator configurations with the desired rotor stiffness and passive Z lift in the Z direction and pitch and roll are incorporated herein by reference in a US patent application. Number 12/163, It is described in No. 993. In one embodiment, a drive unit, such as the drive unit 28, may be equipped with the ability to bring Z-axis movement to the arm assembly. In one exemplary embodiment, for example, the stator segments 40S1-40S4 can be placed on an operable platform or carriage (not shown) with controllable Z movement. As feasible, the actuable platform or carriage can be driven by any suitable motor, including but not limited to self-bearing actuators and screw drives. A suitable seal may be provided between the operable platform and the internal volume of the transfer chamber to prevent fine particles that may be produced by Z drive from entering the transfer chamber. In an alternative embodiment, the motor rotor and / or stator has an active Z force that allows the Z movement of the rotors 40R, 42R, and thus the arm assemblies 24, 26 within the transfer chambers 14T1, 14T2, relative to the stator 40S1-40S4. Can be configured to produce. In another alternative embodiment, the drive 28 may be unable to generate Z movements in the arm assembly.

Here again with reference to FIG. 6, the stator segment 140S1 (similar to segment 40S1-40S4, see FIG. 3B) can include anti-cogging mechanisms 140G1, 140G2, 142G1, 142G2. In this exemplary embodiment, the combined stator segment 140S1 can be equipped with anti-cogging mechanisms for both rotors 140R, 142R of the motors 140, 142. The combined or collective effect of the anti-cogging mechanism of each stator segment (such as segment 40S1-40S4) and the anti-cogging mechanism of some or all of the stator segments 40S1-40S4 (similar to mechanisms 140G1, 140G2, 142G1, 142G2) Eliminate motor cogging or to a given level for accurate board placement on the transfer device at least in the Z, radial (r), and rotational directions (for the T1 and T2 axes) during motor operation. Reduce. A suitable example of an anti-cogging mechanism on a motor stator segment is described in US Patent Application No. 12 / 163,993, which has already been incorporated as part of this specification.

For example, referring to FIG. 3C, in this exemplary embodiment, motors 40, 42 can be equipped with suitable position feedback systems 50, 52. Position feedback systems 50, 52 can be non-invasive with respect to the isolated atmosphere within the transport chamber, as described below. The feedback systems 50, 52 for the motors 40, 42 can generally be similar to the feedback systems 150, 152 shown in FIG. Feedback systems 150, 152 for each rotor can be similar to each other and, in general, to establish absolute and incremental rotation positions of rotors 140R, 142R, as well as radial or centered positions. Sensors 150A, 150G, 150I, and target index can be incorporated. In an alternative embodiment, the sensors 150A, 150G, 105I can provide feedback information about one or more absolute and incremental rotation positions as well as radial positions. For example, the sensors 150A, 150G, 150I may be electromagnetic sensors such as Hall effect sensors, or optical or other beam sensors. In other alternative embodiments, the sensor can be any suitable sensor, including but not limited to an inductive sensor. The sensor can be positioned outside the chamber as described below. In an alternative embodiment, the sensor can be positioned at any suitable position with respect to the motors 40, 42. In this exemplary embodiment, on the rotor backing, a target index or any other that is sensed or otherwise read by the corresponding sensors 150A, 150G, 150I to establish the rotor position as described above. An appropriate position scale can be provided. In the example shown in FIG. 6, the sensor 150A (8 sensors are shown as an example, but may be more or less than 8) to establish the absolute rotation position of the rotor 140R. Rotor backing The corresponding target index track indexed above can be sensed. Sensor 150I (two sensors are shown as an example, but may be more or less than two) is indexed on the rotor backing to establish the rotor's incremental rotation position. Can sense the corresponding target index track, and the sensor 150G (one is shown as an example, but may be more or less than one) is the location of the radial gap. And thus the corresponding target track on the rotor backing can be sensed to sense the centering position of the rotor 140R. In an alternative embodiment, there can be more or less sensors (eg, sensor data from one or more sensors can be used to establish one or more position parameters for the rotor). As feasible, three types of target index tracks are described above, but in alternative embodiments, any number of feedback characteristics of the motor, such as those described above, may be allowed to be sensed. It can have more or less target index tracks than three with the proper configuration of. Suitable examples of position feedback sensor systems 50, 52 are hereby incorporated by reference in their entirety as they form part of this specification, US Application No. 12 / 163,984, filed June 27, 2008. It is described in. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below. It is described in No. 984. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below. It is described in No. 984. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below. It is described in No. 984. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below. It is described in No. 984. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below. It is described in No. 984. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below. It is described in No. 984. Sensors similar to the sensors 150A, 150I, 150G can be optionally placed in place with respect to the rotor, as described below.

As mentioned above, in this exemplary embodiment, the drive 28 can be integrated within the bottom wall 14B of the transfer chamber (see, eg, FIG. 2B). As shown in Figure 2B-2C, the bottom or outer surface of the bottom wall is virtually free of drive components. Also, as mentioned above, the motor stators 40S, 42S, and feedback position systems 50, 52 (see also FIG. 3C) can be isolated from the internal atmosphere of the transfer chamber 14T1. In addition, as can be seen in Figure 2B, the isolated motor stators 40S, 42S, and feedback systems 50, 52 (and rotors 40R, 42R in an isolated atmosphere) are specified, at least in part, by the SEMI of the transfer chamber. It can be positioned within the specified height range. As most clearly shown in FIGS. 2B and 5, the stator and feedback system sensors are mounted on the bottom wall 14B of the chamber and a wall that isolates the stator and feedback sensor from the interior of the transport chambers 14T1 and 14T2 within cover 14H. It can be located within an isolation case or cover 14H with 14P. Cover 14H is the housing channel for the stator and each motor (eg, shown in FIGS. 3B, 4B) so that the stator and rotor are at least partially embedded within what can be described as the peripheral wall of the transfer chamber. It can be configured with a groove for the rotor.

In this exemplary embodiment, the cover 14H can be split into cover segments 14H1-14H4 (see FIGS. 3A and 5), generally matching the stator segments 40S1-40S4. In this exemplary embodiment, the cover segments can be similar to each other and will be described below with reference specifically to the cover segment 14H1. The cover segment 14H1 can be a single structure and can be any suitable material (such as aluminum or other non-magnetic material). In an alternative embodiment, the cover segment 14H1 does not have to have a single structure. The cover segment 14H1 should be shaped to form a seating surface for seating on the flange 14F (see Figure 5) or the transport chamber wall (eg bottom wall 14B) to close and isolate the interior of the transport chamber. Can be done. In the exemplary embodiment shown in FIG. 5, the cover segment 14H can be provided with recesses 14SO, 14SI for the motor stator segment (eg, the stator segments 40S1-40S4 can be positioned inside the recess 14SO of the cover segment. ). FIG. 5 is a partial illustration of the cover segment 14H1 showing the stator segment 140S1 (similar to the stator segment 40S1) located inside the cover recess 14SO. As mentioned above, the wall 14P of the cover is positioned between the stator and the inside of the transfer chamber, thus isolating the stator from the atmosphere inside the transfer chamber.

In this exemplary embodiment, the cover segment can also include recesses 14FI, 14FN, 14FO shown for the sensors, such as the sensors 150A, 105G, 150I of the feedback systems 50, 52 (corresponding recesses of the cover segment). See also Figure 6 showing the sensor parts of the feedback systems 150 and 152 located inside the 14FN and 14FO, respectively). Therefore, in this exemplary embodiment, the recesses in the cover segment 14H place the stator segment and the feedback system located within it is further isolated from the atmosphere of the transfer chamber (by the cover segment wall located in the middle). It is placed in the bottom wall of the transport chamber. The sensors 150A, 150I, 150G can be equipped with the ability to sense the target index through the cover wall 14P. In embodiments with an optical sensor, the cover wall 14P may include a transparency or window that allows the sensor to be read while maintaining isolation within the chamber and between the sensors. The stator segments 14S1-14S4 and the feedback system sensors 50, 52 have their respective cover segments 14H1-14H4 to install the coated stator segment and the corresponding feedback system portion so that they can be removed from the transfer chamber as a unit module. Can be attached to. In an alternative embodiment, each stator cover, stator, and feedback system sensor can be installed and removed individually.

As most clearly shown in FIG. 2C, in this exemplary embodiment, the bottom walls 14B of the transfer chambers 14T1 and 14T2 have openings to allow installation of cover segments 14H1-14H4 within the bottom wall 14B. A unit 200 can be provided. In an alternative embodiment, the opening can be positioned on any suitable side surface of the transfer chambers 14T1, 14T2 for the installation of cover segments 14H1-14H4. As also shown in Figure 2C, the vacuum pump (and / or ventilation) system 100 can also be mounted on the outer surface of the bottom wall 14B. The pump system 100 can access the inside of the chamber through the access space 44 defined in the drive unit as described above.

Here, with reference to FIGS. 4A-4C, a transport device 22 according to another exemplary embodiment is shown. As mentioned above, the device 22 can include a symmetrical arm configuration with two symmetrical arm assemblies 22U, 22L facing substantially the same direction in this example. The arm assemblies 22U, 22L can be coupled to a drive unit 128 with a motor arranged to provide four rotation axes (T1, T2, T3, T4), for example as shown in FIG. In one exemplary embodiment, the movements of the arm assemblies 22U, 22L can be controlled independently. In other exemplary embodiments, the movement of the arm assembly can be controlled in any suitable manner. The arm assemblies 22U, 22L are substantially similar to each other and to the arm assemblies 24, 26 described above. In an alternative embodiment, the arm assemblies 22U, 22L do not have to be similar to each other. In this example, similar mechanisms are numbered similarly. The lower arm assembly 22L may be provided with symmetrical arm links 130LR, 130LL connecting the respective end effectors 124E to the base members 134, 136. The base members 134, 136 may be the coupled motor 140 of the drive unit 128 that provides the rotation axes T1 and T2 (due to the movement of T and R of the arm 22L). The motors 140, 142, 144, 146 may be substantially similar to each other and, as described above, to the motor of the drive 28. In an alternative embodiment, one or more of the motors 140, 142, 144, 146 may be different from each other. The upper arm assembly can be equipped with symmetrical arm links 130UL, 130UR that connect the respective end effectors 124E to the base arms 122L, 122R. As most clearly shown in Figures 4A-4B, the base arm links 122L, 122R are coupled to the corresponding motors 144, 146 to rotate the axes T3, T4 (for the T and R movement of the arm 22U). Bringing base member 16 It can be fixed to 4 and 166 respectively. The base members 164, 166 can be generally similar to the base members 34, 36, but may include extension members 164E, 166E that generally extend upward to fit into the base arms 122R, 122L. In this exemplary embodiment, the extension members 164E, 166E can be coaxial and maintain a substantially free area within the drive 128, similar to the access area 44 shown in FIG. 3B. It can be offset vertically from the motor rotor if desired. As feasible, the base member can include rotors 144R, 146R, as shown in FIG. 4B. In one embodiment, the rotors 144R, 146R can be attached to the base members 164, 166 in substantially the same manner and are substantially similar to the rotors 140R, 142R described above with respect to FIG. Can be done. The arm assemblies 22U, 22L and the drive unit 128 can be fitted, for example, to the bottom wall 14B of the transfer chamber in a manner substantially similar to the arm assemblies 24, 26 and the drive unit 28 described above. In an alternative embodiment, the arm assemblies 22U, 22L and drive 128 can be fitted to any suitable wall of the transfer chamber in any suitable manner. The 46R can be attached to the base members 164, 166 in substantially the same manner and can be substantially similar to the rotors 140R, 142R described above with respect to FIG. The arm assemblies 22U, 22L and the drive unit 128 can be fitted, for example, to the bottom wall 14B of the transfer chamber in a manner substantially similar to the arm assemblies 24, 26 and the drive unit 28 described above. In an alternative embodiment, the arm assemblies 22U, 22L and drive 128 can be fitted to any suitable wall of the transfer chamber in any suitable manner. The 46R can be attached to the base members 164, 166 in substantially the same manner and can be substantially similar to the rotors 140R, 142R described above with respect to FIG. The arm assemblies 22U, 22L and the drive unit 128 can be fitted, for example, to the bottom wall 14B of the transfer chamber in a manner substantially similar to the arm assemblies 24, 26 and the drive unit 28 described above. In an alternative embodiment, the arm assemblies 22U, 22L and drive 128 can be fitted to any suitable wall of the transfer chamber in any suitable manner.

Here, with reference to FIGS. 7A-7C, a schematic top perspective view, a schematic vertical sectional view, and a schematic bottom perspective view of the transfer chamber portion 714T of the processing apparatus according to another exemplary embodiment are shown. The transport devices 722, 723 in the transport chambers 714T1, 714T2 can include bilateral arm assemblies 724, 726 and symmetrical arm assemblies 722U, 722L. In this exemplary embodiment, the arm assemblies 724, 726, 722U, 722L are powered by their respective drives, 728, 728U, 728L, which can be incorporated into the side wall 714W around the transfer chamber. In one embodiment, the drives 728, 728U, 728L can be embedded in the wall 714W or mounted on the surface of the wall 714W without being isolated from the internal atmosphere of the transport chambers 714T1, 714T2. You may.

As most clearly shown in FIGS. 8A and 8B, the bilateral transfer device 723 is shown. Unless otherwise stated, the transport device 723 may be substantially similar to the transport device 20 described above with respect to FIG. 2A-2C, for example. In this exemplary embodiment, the arm links 730L, 730R of the arm assemblies 724, 726 can be pivotally connected to the base members 734, 736, respectively. The base members 734, 736 can be coupled to the rotor hoops 740R, 742R of the motor of the drive unit 728 (to bring about the rotation of T1, T2). In this exemplary embodiment, the rotor hoops 740R, 742R can be extended to the outside of the arm link 730L, 730R pivots 732L, 732R so that the base members 734, 736 hang from the inner surface of the rotor hoop. In an alternative embodiment, the base member can be suspended from any suitable surface of the rotor hoop (eg, top surface, bottom surface, and outer surface). In this exemplary embodiment, the rotor hoops 740R, 742R can be arranged in a typical laminated configuration. In an alternative embodiment, the rotor hoop can have any suitable mutual spatial relationship. As feasible, the bilateral arrangement of the arm links of the arm assemblies 724, 726 will generally separate the movement of R between the arm assemblies (of the rotating shafts T1, T2 from the battery or retracted position). Extension and retract (R movement) of one arm assembly, such as those brought about by reverse rotation, causes little corresponding R movement in the other arm assembly at the battery position). In an alternative embodiment, the arm links of the two arms 724, 726 can be independently coupled to their respective motors so that each arm assembly can be moved individually in the R direction.

In this exemplary embodiment, the rotor hoops 740R, 742R can be generally similar to the rotors 40R, 42R described above. Here, with reference to FIG. 9, a cross-sectional view of a typical rotor hoop 742R is shown in great detail. The rotor hoop 742R can generally include a permanent magnet 742M mounted on a ferromagnetic backing ring 742B and a sensor target track 742T properly indexed for determining rotor position. As can be seen from FIG. 9, in this exemplary embodiment, the permanent magnet 742M and the sensor track 742T are positioned outward. In an alternative embodiment, the permanent magnets and sensor tracks can be oriented in any suitable direction with respect to the rotor hoop. In this exemplary embodiment, the rotor hoop 742R is connected to the rotor backing 742B and permanent magnet 742M mounted on the hoop support 742H1 with appropriate fixtures to form the motor hoop 742R. It can be an assembly with a sensor track 742T attached to the 742H2. In an alternative embodiment, the hoop supports 742H1, 742H2 can be joined in any suitable manner, including but not limited to any suitable mechanical or chemical fixture. In this exemplary embodiment, the hoop supports 741H1, 742H2 can be formed of any suitable material, such as, but not limited to, non-magnetic materials, including but not limited to aluminum alloys. As most clearly shown in FIG. 10, the motor stators 740S, 742S can be housed in isolation cases 714HU, 714HL, for example with sensors in a position feedback system, as described above (with respect to FIGS. 5 and 5). Similar, any number of stator segment configurations can be configured (six are shown for illustration). Note that in FIG. 10, two motor stator sets 710S1 and 740S2 are shown for illustration purposes only. Realizable from Figure 10

Figure 11 shows a transport device with symmetrical arm assemblies 722U, 722L connected to the rotor hoops 740R, 742R, 744R, 746R (to bring the rotating shafts T1, T2, T3, T4) of the drives 728U, 728L. Shows 722. As feasible from Figure 9-10, in this exemplary embodiment, the drive arm 728L, 728U passes between the motors 740, 742 and 744, 746 as the arm extends and retracts. It can be placed with motors 740, 742 located below the assemblies 722L, 722U, and motors 744, 746 located above the arm assembly. The motors 744 and 746 of the upper drive unit 728U (rotation of T3 and T4) can supply power to the upper arm assembly 722U, and the motors 740 and 742 of the lower drive unit 728L (rotation of T1 and T2) are the lower arm. It can power the assembly 722L. Further, the upper rotor hoops 744R and 746R can also be driven by the stator 740S as shown in FIG. Each stator 740S can be a modular unit that can be individually installed or removed from the transfer chamber 714T. In an alternative embodiment, the plurality of stators are joined to each other so that the stators arranged adjacent to each other (for example, stacked one above the other such as the stators 740S1 and 740S2) can be removed or installed as a unit. It can be joined or made into a single structure. As feasible from Figures 7A and 7C, access slots 714SU, 714SL are within the top and / or bottom of the chamber perimeter for the installation of the respective stator cases 714HU, 714HL for the upper and lower drives 728U, 728L. Can be formed into.

Here, with reference to FIGS. 12A-12C, a top perspective view, a vertical sectional view, and a bottom perspective view of the transfer chamber portion 1114T according to another exemplary embodiment are shown. The transfer chamber portion 1114T may be similar to the transfer chamber portion 714T unless otherwise stated. Section 1114T can include transport equipment with arm assemblies 1122U, 1122L and 1124, 1126. The arm assemblies 1124 and 1126 are coupled to a drive unit 1128 that is substantially similar to the aforementioned arm assemblies 724, 726 shown in FIG. 7A and that is substantially similar to the drive unit 728 described above. In this exemplary embodiment, the arm assemblies 1122U, 1122L are generally similar to the arm assemblies 722U, 722L and have a drive unit having motors 1240, 1242, 1244, 1246 that provide rotation with respect to axes T1, T2, T2, T4. Connected to 1228, see also Figure 12D).

As most clearly shown in Figures 13B and 14, the motors 1240, 1242, 1244, 1246 of the drive unit 1228 are generally stacked configurations, all of which are arm assemblies 1122U, 1122L (bottom surface, etc.) 1 Located on one surface. In this exemplary embodiment, the arm assembly 1122U can be coupled to the rotor hoops 1244R, 1246R by the connecting bridge section 1123 most clearly shown in FIG. 13A. As shown in FIG. 13B, the connecting bridge portion 1123 includes the first bridge portion 1131 and the second bridge portion 1130. The first bridge includes an upper base member extension 1132EU and a lower base member extension 1132EL joined by a shaft 1131S. The second base member portion 1130 includes an upper base member extension portion 1134EU and a lower base member extension portion 1134EL coupled by a shaft 1130S. As shown in FIGS. 13A and 13B, the bridge portions 1131 and 1130 are pivotally joined to each other by their respective shaft portions 1131S and 1130S. In this example, the shaft portions 1131S, 1130S are concentrically positioned so that the shaft 1131S passes through or inside the shaft 1130S. The connecting bridge portions 1131 and 1130 can be joined to each other so as to be fixed to each other in the axial direction (relative to the movement of the shaft).

In this example, the arm assembly 1122L can be coupled to the rotor hoops 1240R, 1242R while the arm assembly 1122U is coupled to the rotor hoops 1244R, 1246R. For example, the arm link 1122LR of the arm 1122L can be pivotally coupled to each end effector 24E at one end and to the base member 1132BU of the rotor 1240R at the opposite end. The other arm link 1122LL of the arm 1122L can be pivotally coupled to each end effector 24E at one end and to the base member 1134BU of the rotor 1242R at the opposite end. The arm link 1122UR of arm 1122U can be pivotally coupled to each end effector at one end and to the base member extension 1132EU of bridge 1123 at the opposite end. The other arm link 1122UL of the arm 1122U is pivotally coupled to each end effector at one end and to the base member extension 1134EU of the bridge 1130 at the other end. In an alternative embodiment, the arm assembly can be connected to the rotor hoop in any other desired manner. In this example, the end effector is extended and retracted above the rotor hoop, but in an alternative embodiment, the transfer arm may be configured to allow the end effector to pass under the rotor hoop during extension and retract.

Referring here to FIG. 14, the stators 1240S, 1242S, 1244S, 1246S are provided, which are used to drive their respective rotors 1240R, 1242R, 1244R, 1246R (with respect to FIGS. 5 and 6 etc.). It can be placed in a stator segment similar to that described above (six are shown for illustration). The stators 1240S, 1242S, 1244S, 1246S can be substantially similar to each other and, for example, those described above with respect to FIG. As shown in FIG. 10, the stator can be housed in isolation case 1414 in a manner substantially similar to that described above, for example with sensors in a position feedback system. As feasible from FIG. 12C, the access slot 1414S can be formed within the underside of the chamber perimeter for the installation of each stator case 1414, eg, in a manner substantially similar to that described above with respect to FIG. 7C. ..

Here, with reference to FIG. 15, another exemplary embodiment of the transport device 2004R and the processing tool 2002 is shown. The tool 2002 can include processing modules 2006, 2006A and a front-end module (FEM) 2004 with the desired controlled environment (such as inert gas or very clean air). One or more of the process modules 2006 can be connected to the FEM so that the FEM transfer robot 2004R can pick up / mount the board within the process module. Process Modules 2006, 2006A (one process module is shown, but in an alternative embodiment, the stacked process modules can be joined to each of the FEMs or one or more transfer modules) with FEM2004. A common atmosphere can be shared between them. FEM2004 may be provided with a load interface or load port for loading and interface-connecting the carrier 2100 to the tool in a complete manner similar to that described above. The FEM Transfer Robot 2004R in this exemplary embodiment is incorporated herein by reference in its entirety as a part of this specification, U.S. Patent Application No. 12/123, filed May 19, 2008. , It is shown as a SCARA robot capable of picking up / mounting a board directly between the carrier 2100 and one or more process modules 2006 through a clean tunnel that is substantially similar to that described in No. 391. For illustration purposes only, the SCARA Robot 2004R includes the upper arm 2004RU, forearm 2004RF, and end effector 2004RE, which are rotatably and sequentially connected to each other, and for illustration purposes only, as shown above with respect to FIGS. 4A and 13A. A substantially similar nested drive motor can be provided. The upper arm 2004RU of the robot 2004R can be connected to or integrated with a bridge that extends to one of the rotors of the nested drive. In one exemplary embodiment, the forearm 2004RF and the end effector 2004RE can be subordinate to the upper arm. In an alternative embodiment, the forearm 2004RF can be driven by one of the nested motors, the forearm 2004RE is substantially extended in the longitudinal direction of the extension path, even when the arm is extended. It can be subordinated accordingly so that it remains aligned with. In yet another alternative embodiment, any suitable transmission member connects the robot arm link to each one of the nested motors, with each motor allowing the robot 2004R's upper arm, forearm, and end effector. The drive may be equipped with three nested motors so that each is driven individually. The robot 2004R can be configured with a plurality of arms, as described above with respect to FIGS. 4A and 13A, so that the plurality of arms provide a plurality of transport paths vertically stacked with each other. Laminated transport paths allow the substrate to be fed and removed from into the processing module and / or carrier, or transported through tunnel 2005, passing over each other in the same or different transport directions. Become. Stacked vertically

It can have different lengths or configurations (in a manner similar to 711). In this exemplary embodiment, the transfer module 2008 can be connected to the FEM so that the FEM robot can pick up / mount the board into the transfer module. The location of the transfer module is just an example. As feasible, the clean tunnel can continue to extend from the FEM via a transfer module. More or fewer transfer modules 2008, 2008A can be connected to each other (eg, in series as shown by the dotted line in FIG. 15) in order to vary the length and configuration of the clean tunnels to preference. The process module (similar to modules 2006, 2006A) allows the substrate to be transferred through a clean tunnel, eg, to / from carrier 2010 and any desired process module, or between any desired process modules. Can be joined to a clean tunnel. In this exemplary embodiment, the transfer module 2008 may include a transfer robot internally, for example to transfer the substrate to / from process module 2006A or to an adjacent transfer module / chamber 2006A. In an alternative embodiment, the board can be picked up / placed on the robot from inside the adjacent module of the clean tunnel 2005 so that the transfer module does not have an internal robot. In yet another exemplary embodiment, the transfer module can be of any suitable length and can include any suitable substrate transfer device.

In the exemplary embodiment shown in FIG. 15, the clean tunnel transfer modules 2008, 2008A within Tool 2002 can share a common controlled FEM (eg, inert gas, very clean air). In an alternative embodiment, one or more of the transfer modules 2008, 2008A can be configured as load locks so that each part of the clean tunnel can maintain a different atmosphere (eg, clean tunnel parts defined within the FEM). Has an N2 environment, the part inside module 2008A can hold a vacuum environment, and the transfer module 2008 is a load lock that can cycle the substrate between the inert gas atmosphere in the FEM and the vacuum atmosphere of module 2008A. be able to). What is feasible is that the carrier can be interfaced to the FEM and directly interfaced to the vacuum portion of the process tool described in US Patent Application No. 12 / 123,391.

With reference to FIG. 16, a plan view of another process tool 4002 according to another exemplary embodiment is shown. The tool 4002 in the exemplary embodiment shown in FIG. 16 comprises processing modules 4006, 4006A and a FEM 4004 with, for example, a vacuum atmosphere (or inert gas or very clean dry air in an alternative embodiment). Can be done. As shown in FIG. 16 and similar to the embodiment shown in FIG. 15, the vacuum transfer robot 4004R can pick up / place the substrate in the process module (eg, in a vertically stacked or offset arrangement). One or more of the process modules 4006 can be connected to the vacuum FEM. The process modules 4006 and 4006a can share a common process vacuum with the load unit 4004. The FEM4004 may be provided with a load interface or load port for loading and interface connecting the carrier 4100 to the tool in a complete manner similar to that described above. The vacuum transfer robot 4004R in this exemplary embodiment is substantially similar to that described above with respect to FIG. 15, and has already been incorporated as part of this specification, U.S. Patent Application No. The board can be configured to pick up / mount directly between the carrier 4100 and one or more process modules 4006, 4006A via a clean tunnel similar to that described in 12 / 123,391. In the exemplary embodiment shown in FIG. 16, the clean tunnel 4005 defined inside the carrier through the FEM interfaces 4010, 4012 and extending into the process modules 4006, 4006A shall be of different length or configuration. Can be done.

It should be understood that the exemplary embodiments described herein can be used individually or in any combination. It should also be understood that the above description is merely a description of the embodiments. One of ordinary skill in the art can devise various alternatives and modifications without departing from the embodiments disclosed herein. Accordingly, these embodiments are intended to include all such alternatives, modifications, and differences within the scope of the appended claims.