Perpendicular magnetic recording head, method of manufacturing the same, and magnetic recording/reproducing device

The present invention relates to a magnetic recording head that generates a recording magnetic field with respect to a magnetic recording medium, and a magnetic recording / reproducing device equipped with the magnetic recording head.

In recent years, as the amount of information has increased, there has been an increasing demand for a high in-plane recording density in magnetic recording / playback devices, and in order to increase the amount of recording information on the magnetic recording medium, the magnetic fine particles of the magnetic recording medium are made smaller. Narrowing of the writing magnetic pole is required. However, when the magnetic fine particles are made smaller, the volume is reduced, and thermal fluctuation of magnetization as a factor of destabilization in the magnetization region of the magnetic recording medium has become a problem. As a method for solving this problem, a perpendicular magnetic recording method has been proposed in which the magnetization signal is recorded in the direction perpendicular to the recording medium while increasing the volume of the magnetic fine particles by increasing the thickness of the recording layer. The main magnetic pole of the magnetic recording head used in the vertical magnetic recording method has an inverted trapezoidal shape in which the width on the trailing side is wide and the width on the reading side is narrow with respect to the traveling direction of the magnetic recording medium, and the Bevel angle (main magnetic pole). tilt angle) to the O of two different widths width and the leading side of the throat height trailing side of the difference in the amount of emission to the magnetic flux of the discharge amounts of the magnetic flux and the leading side of the Ri main pole trailing side of the provided Therefore, when writing information to the magnetic recording medium side, a magnetic clearance angle is provided to prevent attenuation and erasure of information data of adjacent tracks. At present, in this perpendicular magnetic recording method as well, in order to increase the surface recording density, the monopole portion for writing that generates a recording magnetic field perpendicular to the magnetic recording medium is narrowed, and it is sufficient to reverse the magnetization of the magnetic recording medium. It is becoming difficult to generate a perpendicular magnetic field.

Therefore, in order to make up for the lack of writing magnetic field strength due to the narrowing of the single magnetic pole for writing, the throat height portion that defines the width of the main magnetic pole is shortened to bring the saturation position of the magnetic flux closer to the floating surface side. A method of securing the magnetic field strength is used, but in this case, the magnetic flux leaking from the flare portion and the magnetic flux emitted from the throat height portion are generated by the wide flare portion that guides the magnetic flux to the throat height portion and is close to the floating upper surface. The magnetic flux reversal region to the magnetic recording medium, which was synthesized and defined by the shape of the main magnetic flux on the floating surface of the magnetic recording head, becomes wider, and the information written on the adjacent track is attenuated and erased. The isobaric line on the leading side of the magnetic field strength distribution consisting of the magnetic flux emitted by the magnetic flux is defined, which affects the magnetic clearance angle with respect to the adjacent track.

Further, when the suspension arm fixing the slider on which the magnetic head is mounted is scanned from the inside to the outside of the magnetic recording medium for recording / reproduction, the magnetic head is determined by the recording / reproducing track position of the magnetic recording medium. Will be at different angles. This is the skew angle. When the magnetic head has a skew angle, the main magnetic pole of the recording head is also provided with the same inclination, so that the data of the adjacent track should be attenuated and erased regardless of the position of the magnetic head on the magnetic recording medium. Therefore, it is essential to increase the recording density by emitting a high magnetic field strength to the recording layer of the magnetic recording medium while ensuring a magnetic clearance angle.

Therefore, in order to obtain a sufficient magnetic clearance angle, there is a method of reducing the thickness of the main magnetic pole or increasing the Bevel angle of the main magnetic pole, but the area that emits the magnetic flux on the floating surface of the main magnetic pole is reduced. As a result, the magnetic field strength decreases.

As a countermeasure, in JP-A-2007-220208, JP-A-2007-220209 and JP-A-2007-242132, the shape of the main magnetic pole is made T-shaped, so that the geometry of the writing track is formed in a wide range of parts. A method of securing the magnetic field strength and securing the magnetic clearance angle on the magnetic recording medium side while defining the scientific width is described.

<patcit num="1"><text>Japanese Unexamined Patent Publication No. 2007-220208</text></patcit><patcit num="2"><text>JP-A-2007-220209</text></patcit><patcit num="3"><text>Japanese Unexamined Patent Publication No. 2007-242132</text></patcit>

<p> In order to achieve a high in-plane recording density, it is essential to miniaturize the magnetic particles of the magnetic recording medium and narrow the recording / playback track of the magnetic head. Narrowing the single magnetic pole for writing in the recording head reduces the main magnetic pole area of the floating surface and lowers the writing magnetic field strength proportional to the magnetic pole area. Further, even if the magnetic head has a skew angle, it is also an important issue to secure a magnetic clearance angle so that the information written on the adjacent track is not attenuated and erased.</p><p> FIG. 23 is a conceptual diagram showing the positions of the magnetic recording medium and the magnetic recording head. Assuming the main magnetic pole of the magnetic recording head when the slider fixed to the suspension arm moves in the outer peripheral direction of the magnetic recording medium 11 and has a skew angle, the rectangular main magnetic pole 1a having no Bevel angle on track C In this case, the magnetic field strength distribution that magnetizes and reverses the recording layer of the magnetic recording medium shows a spread along the side surface of the writing magnetic pole, and shows a magnetic field strength distribution that narrows as the distance from the leading side of the main magnetic pole increases. Therefore, the writing magnetic field on the reading side is applied to a part of the adjacent track B, and the information written on the track B is attenuated and erased.</p><p> However, in the case of the main magnetic pole 1a having an inverted trapezoidal shape due to the addition of the Bevel angle on the track A, the magnetic field strength distribution shows a spread along the writing magnetic pole, but the Bevel angle is a magnetic clearance angle with respect to the adjacent track. (The angle of the contour line in the reading side from the widest point in the track direction of the contour line where the recording magnetic field strength of the main magnetic pole is equal to the coercive force of the recording medium) can be recorded without affecting the adjacent tracks. it can. From this, it can be seen that the Bevel angle of the main magnetic pole plays a large role. However, since the track width becomes narrower as the recording density becomes higher, there arises a problem that the Bevel angle becomes difficult to form. Further, there is a problem that the area of the main magnetic pole on the floating surface becomes smaller due to the narrowing of the main magnetic pole, which causes a decrease in the writing magnetic field strength.</p><p> An object of the present invention is to secure a sufficient magnetic field strength even if the main magnetic pole of the recording head is narrowed, and to secure a magnetic clearance angle with respect to an adjacent track even when the magnetic head has a skew angle, so that the recording density is high. The purpose is to provide a perpendicular magnetic recording head that realizes the above.</p>

<p> In order to reduce the influence on adjacent tracks when writing to a magnetic recording medium, there is a method of increasing the Bevel angle of the main magnetic pole to obtain a magnetic clearance angle. However, if a large Bevel angle is attached to the main magnetic pole, the area of the floating top surface is reduced, which causes a problem of further reduction in the writing magnetic field strength. Therefore, we focused on the contour lines of the recorded magnetic field strength emitted by the main magnetic pole as a method for obtaining a large magnetic clearance angle by minimizing the Bevel angle of the main magnetic pole.</p><p> FIG. 24 shows the contour lines of the magnetic field strength of the recording medium and the magnetization reversal shape. As the main magnetic pole, a single magnetic pole recording head having a track width of 40 nm, a film thickness of 100 nm, and a Bevel angle of 9 deg was used. FIG. 24 (a) shows the shape of the floating surface of the main magnetic pole on the right side of the contour diagram, and shows one side of the contour line having a magnetic field strength of 3 kOe to 7 kOe on the recording medium side. The contour lines of the recorded magnetic field strength of the main magnetic pole are distributed concentrically with the central part of the main magnetic pole as the maximum strength, and the distribution is bulging toward the outside of the contour line. It produces the same magnetic clearance angle. Therefore, it can be seen that the magnetic clearance angle depends on the Bevel angle of the main magnetic pole, and the magnetic field strength difference between the trailing side and the leading side of the main magnetic pole is provided by the effect of the Bevel angle.</p><p> FIG. 24 (b) is a diagram obtained by simulation of the magnetization state recorded on the recording medium. The recording magnetization reversal shape is considered to be determined by reflecting the shape of the contour line where the recording magnetic field strength is equal to the coercive force of the recording medium, and is curved from the track center to the track end in the traveling direction of the recording medium. You can see that. This curvature causes a problem that the magnetization reversal width appears to be large and the half-value width of the arc-standing wave increases when playing back with a magnetoresistive playback head, and at the same time, the recording track width is narrowed as the line recording density increases. In order to achieve a high recording density, the position where the magnetic clearance angle of the contour line is generated must be brought closer to the trailing side to reduce the curvature.</p><p> The magnetic recording head of the present invention is characterized in that a magnetic film is provided on the trailing side of the throat height portion and the flare portion in the element height direction retracted from the floating upper surface of the main magnetic pole. The magnetic flux from the overhanging magnetic film flows into the main magnetic pole from the trailing side and the side surface of the main magnetic pole, and the magnetic field strength difference between the trailing side and the leading side becomes large while increasing the magnetic field strength of the entire main magnetic pole.</p>

<p> According to the present invention, by applying the magnetic film overhanging the trailing side of the main magnetic pole, the magnetic flux flows into the main magnetic pole side, and there is an effect that the magnetic field strength on the trailing side is increased. Further, since the difference in magnetic field strength between the trailing side and the reading side becomes large, there is an effect of generating a magnetic clearance angle larger than the Bevel angle applied to the main magnetic pole. As a result, in the main magnetic pole where the writing ability is reduced due to the narrowing of the recording head, the recording magnetic field to the recording medium can be a track adjacent to each other even if there is a skew angle, while obtaining the writing ability with a high magnetic field gradient and a strong magnetic field strength. It is possible to provide a magnetic recording head having an effect of being able to record a bit having a sufficient magnetic clearance angle and a small curvature of the magnetization reversal shape.</p>

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following figures, similar functional parts will be described with the same reference numerals. Since the portion of the magnetic layer overhanging the trailing side of the main magnetic pole of the present invention has a different function from that of the main magnetic pole, the name of the roof magnetic layer will be used below as a structure separated from the main magnetic pole. The roof magnetic layer is a magnetic film that projects from the throat height portion of the main magnetic pole so as to wrap around the trailing side of the flare portion and has a region in which the film thickness gradually increases in the element height direction.

FIG. 1 is a conceptual diagram of a magnetic recording / playback device. The magnetic recording medium (vertical magnetic disk) 11 is rotationally driven by the motor 28. When information is input and output, the slider 13 fixed to the tip of the suspension arm 12 moves to a predetermined position on the rotating magnetic recording medium 11, and the magnetic head mounted on the slider 13 records and reproduces the magnetization signal. The magnetic head can select the track position in the radial direction of the magnetic recording medium 11 by driving the rotary actuator 15. The recording signal of the recording head and the reading signal of the reproducing head are processed by the signal processing circuits 35a and 35b.

FIG. 2 is a schematic cross-sectional view of the magnetic head according to the present invention. FIG. 2 (a) is a schematic cross-sectional view at the center of the track showing an example of the magnetic head according to the present invention, and FIG. 2 (b) is an enlarged view of the vicinity of the tip of the main magnetic pole on the floating upper surface side.

This magnetic head is a recording / reproducing composite head having a single magnetic pole recording head 25 having a main magnetic pole 1 and a return magnetic pole 3 and a magnetoresistive effect type reproducing head 24. The regenerative element 4 consisting of a giant magnetoresistive element (GMR) or a tunnel magnetoresistive element (TMR) is a pair of magnetic shields (regeneration shield) consisting of a lower shield 8 on the leading side and an upper shield 9 on the trailing side. It is placed in between. The main magnetic pole 1 and the return magnetic pole 3 of the recording head 25 are magnetically connected by the pillar 17 at a position in the element height direction away from the floating upper surface, and the main magnetic pole 1, the return magnetic pole 3, the pillar 17, and the magnetic recording medium 11 are connected. The thin film coil 2 is circulated in the configured magnetic circuit. The main magnetic pole 1 is mainly composed of a main magnetic pole yoke portion 1b connected to the pillar 17, a throat height portion that defines a writing width, and a flare portion that is integrally formed with the throat height portion and gradually widens in the element height direction. It is composed of a magnetic pole writing portion 1a, and the roof magnetic layer 5 of the present invention is formed in the element height direction of the floating upper surface so as to wrap the main magnetic pole writing portion 1a from the trailing side, and has a region where the film thickness gradually increases. ing.

For the main magnetic pole 1a, for example, a single-layer film, a laminated film, or an alloy film of a magnetic material having a high saturation magnetic flux density Bs containing at least two elements of Co, Ni, and Fe can be used. As the material of the main magnetic pole yoke portion 1b, for example, a magnetic material having a high magnetic permeability containing two or more kinds of elements Co, Ni, and Fe is used. The roof magnetic layer 5 of the present invention may have an integral structure with the main magnetic pole 1a. In the case of a separated structure, a single-layer film, a laminated film, an alloy film, and a plating film of a magnetic material having a high saturation magnetic flux density Bs containing at least two elements of Co, Ni, and Fe, which are different from the main magnetic pole 1a, are formed. Can be used.

The magnetic field emitted from the main magnetic pole 1a of the recording head 25 passes through the magnetic recording layer 19 and the soft under layer (SUL) 20 of the magnetic recording medium 11 and enters the return magnetic pole 3 and enters the magnetic recording layer 19. The magnetization pattern is recorded. This magnetization pattern shape is defined by the writing performance of the main magnetic pole 1 and the magnetic shield 32 provided on the floating surface side.

FIG. 3 is a schematic view of a plane and a side cross section from which the main magnetic pole is extracted according to an embodiment of the perpendicular magnetic recording head according to the present invention. FIG. 4 is a schematic view of the main magnetic pole and the roof magnetic layer extracted according to an embodiment of the perpendicular magnetic recording head according to the present invention.

The examples shown in FIGS. 3 and 4 will be described. In the case of this embodiment, as shown in FIGS. 3A and 3B, the main magnetic pole 1a is surrounded on three sides by a shield 32 via a non-magnetic layer, and the magnetic flux of the main magnetic pole 1a is emitted to the magnetic recording medium. Is regulated, and the roof magnetic layer 5 is provided in the throat height portion and the flare portion that regulate the track width of the main magnetic pole 1a. The roof magnetic layer 5 shown in FIG. 3A is set wider than the track width of the main magnetic pole 1a on the floating surface, and the main magnetic pole 1a is magnetically connected to the main magnetic pole yoke portion 1b. Further, as shown in FIG. 3 (b), when the main magnetic pole 1a is viewed from the side surface, the roof magnetic layer 5 has a tapered shape portion whose film thickness increases in the element height direction and is flattened at a set film thickness. become. As shown in FIG. 4, a part of the roof magnetic layer 5 is formed so as to extend to both side surfaces of the main magnetic pole 1a on the trailing side and wrap around the trailing side of the throat height portion and the flare portion of the main magnetic pole 1a. ing. In the case of an integral shape, the structure is such that the magnetic material overhangs in the track direction.

By adopting such a form, magnetic flux is supplied from the roof magnetic layer 5 wider than the track width of the main magnetic pole 1a to the trailing side, and the magnetic field strength of the main magnetic pole 1a itself is increased while reading with the trailing side of the writing magnetic pole. It has the effect of increasing the difference in magnetic field strength on the side. Further, the main magnetic pole 1a changes the writing magnetic field strength distribution defined by the floating surface shape of the writing magnetic pole by locally supplying magnetic flux from both side surfaces on the trailing side, and the Bevel angle of the main magnetic pole 1a. It has the characteristic of bringing about the effect of increasing the magnetic clearance angle, which was dependent on.

For the magnetic recording head according to the present invention and the magnetic recording head of the conventional shape shown in FIG. 3, the magnetic field strength, the magnetic field gradient, the magnetic clearance angle, etc., which represent the recording performance, were calculated in three dimensions.

FIG. 5 shows the model conditions of the magnetic recording head of the present invention used for the three-dimensional magnetic field calculation. In the recording head of the present invention, the track width of the main magnetic pole 1a is 40 nm, the film thickness is 100 nm, the Bevel angle is 9 deg, the throat height to the floating surface is 30 nm, and the element height direction of the flare portion widening from the throat height regulation portion is 4.9. The μm was set so that the distance between the main magnetic pole and the side shield was 100 nm, the trailing distance was 25 nm, and the shield element height direction was 100 nm. The roof magnetic layer 5 of the present invention is 20 nm larger than the width of the main magnetic pole 1a from the element height direction 15 nm from the floating top surface to the flare portion 4.9 μm so as to wrap the trailing side and the side surface of the main magnetic pole 1a, and is on the trailing side. The film thickness was 60 nm and the taper angle was 20 deg. The positional relationship between the magnetic head and the recording medium was such that the distance between the magnetic head and the recording medium was 10 nm, and the distance between the magnetic head and the backing layer of the recording medium was 59.5 nm. The reason why the roof magnetic layer 5 is retracted from the floating top surface in the element height direction is to prevent the magnetic flux from the roof magnetic layer 5 from being directly written to the recording medium 11, and is larger than the floating amount of the magnetic head with respect to the recording medium. By separating it by 15 nm or more, the writing blur of the writing track due to the magnetic flux leakage from the roof magnetic layer 5 is reduced. Further, from the viewpoint of reducing the writing bleeding of the writing track, the cross-sectional area of the magnetic layer attached to the side surface of the main magnetic pole 1a on the trailing side is set to a small area, and the width is 20 nm or less and is applied to both sides in order to obtain the effect of the present invention. Is preferable.

The conventional recording head of Comparative Example 1 compared with the recording head of the present invention is a recording head that uses a single magnetic pole for the main magnetic pole 1a and does not have a roof magnetic layer. Other than that, the same conditions as those of the present invention were used for the main magnetic pole shape, the shield spacing, the shield element height direction, and the like.

The recording head of Comparative Example 2 has a low writing ability, but in order to show the effect of the present invention, there is no roof magnetic layer 5 on the trailing side of the main magnetic pole 1a, and the width is only on the trailing side side surface of the main magnetic pole 1a. A structure in which a magnetic layer having a thickness of 10 nm and a thickness of 30 nm was arranged was used. Other than that, the same conditions as those of the present invention were used for the main magnetic pole shape, the shield spacing, the shield element height direction, and the like.

Cobalt nickel iron (CoNiFe) was assumed as the material for the writing portion 1a of the main magnetic pole 1 and the roof magnetic layer 5, and the saturation magnetic flux density was 2.4T and the relative magnetic permeability was 500. For the main magnetic pole yoke portion 1b, 80at% Ni-20at% Fe with a saturation magnetic flux density of 1.0T and a relative magnetic permeability of 1500 is assumed. The shield 32 is assumed to have a saturation magnetic flux density of 1.0 T and a relative permeability of 1500, 80 at% Ni-20 at% Fe. As the material of the soft magnetic backing layer 20 of the magnetic recording medium 11, CoTaZr was assumed and the film thickness was set to 60 nm. The writing characteristics and the like were calculated at a position assuming the center position of the magnetic recording layer 22 nm from the floating top surface of the head. The medium recording layer of the recording medium 11 had a thickness of 20 nm, and the magnetization characteristics were not taken into consideration.

FIG. 6 is a diagram showing the relationship between the contour lines of the magnetic field strength of the recording head of the present invention and the magnetic clearance angle calculated using the calculation model of FIG. For the magnetic clearance angle, the angle of the contour line of the magnetic field strength on the reading side with respect to the traveling direction of the recording medium was calculated from each magnetic field strength from the track width having the widest writing width in a state where the magnetic recording head had no skew angle.

As shown in FIG. 5, the recording head of the present invention has a film thickness of 60 nm on the trailing side of the main magnetic pole 1a, a taper angle of 20 deg, 20 nm wider than the track width of the throat height portion, and a width of 10 nm on the trailing side side surface. The roof magnetic layer 5 having a length ΔT in the depth direction of 30 nm was formed so as to enclose the main magnetic pole 1a.

The magnetic clearance angle of the single magnetic pole recording head of Comparative Example 1 shows the same 9deg as the Bevel angle, and due to the decrease in the magnetic field strength of the contour line, the magnetic clearance angle becomes smaller than the Bevel angle and the track information adjacent to the writing track is attenuated. And the problem of erasing arises. The recording head of Comparative Example 2 generates a magnetic clearance angle of 14 deg larger than the Bevel angle of 9 deg of the main magnetic pole 1a, and magnetic flux is sucked into the side shield 32 while maintaining the Bevel angle of 9 deg. That is, in the magnetic layer attached to the side surface of the main magnetic pole 1a on the trailing side, the magnetic flux flows into the main magnetic pole 1a, the difference in the magnetic field strength distribution between the trailing side and the leading side is increased, and the magnetic clearance angle of the main magnetic pole 1a is increased. It has the effect of making it larger than the geometric Bevel angle.

The feature of the recording head of the present invention is the roof magnetic layer 5 in which magnetic layers are laminated on the trailing side and the side surface of the main magnetic pole 1a by using the effect of Comparative Example 2. By providing the roof magnetic layer 5, while emitting a high magnetic field strength of 8 kOe, a magnetic clearance angle of 18 deg, which is twice the Bevel angle of 9 deg of the main magnetic pole 1a, is generated at the contour line of the magnetic field strength of 8 kOe, and the Bevel angle is generated. Magnetic flux is absorbed by the shield 32 placed on the side while maintaining a larger magnetic clearance angle.

By providing the roof magnetic layer 5 in the recording head of the present invention, it is possible to increase the magnetic field strength distribution difference between the trailing side and the reading side of the main magnetic pole 1a while obtaining a high writing magnetic field strength, and magnetic escape It has the effect of enlarging the corners.

FIG. 7 shows the relationship between the magnetic field strength and the magnetic field gradient according to the calculation model used in FIG. FIG. 7A shows the relationship between the magnetic field strength and the magnetic field gradient of the recording head of the present invention. The recording head of the present invention is provided with a roof magnetic layer 5 so as to wrap the trailing side of the main magnetic pole 1a, so that Comparative Example 1 and Comparative Example 2 provided with a magnetic layer only on the trailing side side surface of the main magnetic pole 1a. It has the effect of improving the magnetic field strength and magnetic field gradient and increasing the writing ability.

Figure 7 (b) shows the relationship between the film thickness t on the trailing side of the roof magnetic layer and the magnetic field strength. The film thickness of the roof on the trailing side of the main magnetic pole 1a is changed without changing the positions of the floating upper surface side and the flat portion of the roof magnetic layer 5. The magnetic field strength of the roof magnetic layer 5 on the trailing side of the main magnetic pole 1a tends to increase depending on the film thickness, but the amount of change in the magnetic field strength decreases from 80 nm to 100 nm. It is presumed that the magnetic field enhancement effect is small even if the roof magnetic layer is laminated on the trailing side of the main magnetic pole 1a to a film thickness of 100 nm or more.

In FIG. 8, the magnetic field strength when the film thickness ΔT portion applied to the side surface of the roof magnetic layer attached to the trailing side and the side surface of the trailing side of the main magnetic pole is changed by using the calculation model of FIG. The relationship between the magnetic field gradients is shown. The horizontal axis of FIG. 8 indicates the depth of the ΔT portion of the roof magnetic layer 5 applied to the trailing side surface of the main magnetic pole 1a. The magnetic field strength and magnetic field gradient of Comparative Example 1 without the roof magnetic layer are plotted at the position of the horizontal axis 0 in FIG. The recording head of the present invention has a significantly improved writing ability as compared with Comparative Example 1, and has an effect of increasing the magnetic field strength when the ΔT portion of the roof magnetic layer 5 applied to the trailing side surface of the main magnetic pole 1a is 10 nm or more. There is also. Regarding the magnetic field gradient, even if the magnetic field strength increases, it shows a constant value at a film thickness of 20 nm or more.

FIG. 9 shows the relationship between the magnetic clearance angle calculated using the calculation model of FIG. 5 and ΔT. The horizontal axis of FIG. 9 shows the magnetic field strengths of recording heads having different ΔTs. For the magnetic clearance angle, the angle of the contour line of the magnetic field strength on the reading side with respect to the traveling direction of the recording medium was calculated from each magnetic field strength from the track width having the widest writing width in a state where the magnetic recording head had no skew angle. Here, ΔT = 0 is a recording head in which the roof magnetic layer 5 is laminated only on the trailing side of the main magnetic pole 1a.

The recording head of the present invention maintains a magnetic clearance angle larger than the Bevel angle of the main magnetic pole 1a, but the magnetic clearance angle also increases due to the change in ΔT. Contour lines with a magnetic field strength of 8 kOe near the main magnetic pole 1a generate the largest magnetic clearance angle at ΔT = 10 nm, and tend to decrease as ΔT increases. In the magnetic field strength range of 7kOe to 5kOe, the magnetic clearance angle reverses with increasing ΔT. The reason for this is that when ΔT = 10 nm, the amount of magnetic flux entering the main magnetic pole from the magnetic layer applied to the side surface of the main magnetic pole on the trailing side is small, so that the magnetic fields on the trailing side and the leading side have a high magnetic field strength. Although the strength difference is large, it is presumed that the magnetic clearance angle decreases because the amount of magnetic flux that maintains the magnetic field strength difference is insufficient at low magnetic field strength. However, since it has the effect of making the magnetic clearance angle larger than the Bevel angle 9deg of the main magnetic pole 1a, there is a problem even if the ΔT film thickness of the roof magnetic layer 5 is applied to about 1/2 of the film thickness of the main magnetic pole 1a. It turns out that there is no.

However, the problem of curvature from the track center to the track end of the recording magnetization reversal shape recorded on the recording medium remains. FIG. 10 shows the relationship between the distance L and ΔT from the trailing end face of the main magnetic pole to the writing width calculated using the calculation model of FIG.

The recording magnetization reversal shape is considered to be determined by reflecting the shape of the contour line where the recording magnetic field strength is equal to the coercive force of the recording medium, and the trailing side of the main magnetic pole determined by the magnetic field gradient by the shield 32 on the trailing side. It is estimated that the curvature rate is determined by the distance L, which is determined by the distance and the magnetic field distribution of the main magnetic poles. This curvature causes the magnetization reversal width to appear large when reproduced by the magnetoresistive playback head, increasing the half-value width of the arc-standing wave, and at the same time, the recording track width is narrowed as the line recording density increases, resulting in magnetic escape. If the distance L value at the position where the corner starts is small, the curvature of the magnetization signal written to the recording medium 11 on the trailing side can be reduced. If the curvature is small, the bit length is short and the recording density can be improved.

The recording head of the present invention has the smallest distance L at ΔT = 10 nm at a magnetic field strength of 8 kOe, and the distance L increases as ΔT is increased, and is a comparative example at ΔT = 50 nm, which is 1/2 the film thickness of the main magnetic pole 1a. The distance L is equivalent to 1. This indicates that as ΔT increases and the roof magnetic layer attached to the trailing side side surface of the main magnetic pole 1a approaches the leading side, the curvature increases, and ΔT is extended to the center of the film thickness of the main magnetic pole 1a. When applied, the magnetic clearance angle can be increased, but the curvature of the recording magnetization reversal shape is also increased, so ΔT is 1/2 of the main magnetic pole thickness on the floating surface side to which the roof magnetic layer on the trailing side of the main magnetic pole is applied. It is preferably less than.

11 and 12 show other examples of the present invention. FIG. 11 shows an enlarged schematic view around the main magnetic pole of the second embodiment. In Example 2 shown in FIG. 11, when the relationship between the main magnetic pole 1a track width W1 and the trailing side width W2 of the roof magnetic layer 5 is W1 &lt;W2, the magnetism applied to the trailing side side surface of the roof magnetic layer 5 When the relationship between the trailing side width w2 and the reading side width w1 of the layer is w1 &lt;w2, the method of supplying magnetic flux from the trailing side side of the main magnetic pole 1a is the same, so the magnetic clearance angle is set from the Bevel angle. The same effect can be obtained.

FIG. 12 shows an enlarged schematic view around the main magnetic pole of the third embodiment. In Example 3 shown in FIG. 12, the relationship between the track width W1 of the main magnetic pole 1a and the trailing side width W2 of the roof magnetic layer 5 is imparted to the trailing side side surface of the roof magnetic layer 5 when W1 &lt;W2. When the surface of the magnetic layer facing the recording medium is provided with a region in which the surface facing the recording medium recedes from the floating surface side in the element height direction at an angle θ, the method is the same, so that the magnetic clearance angle is increased more than the Bevel angle. The effect is obtained, and as an advantage, the emission of magnetic flux from the roof magnetic layer on the floating upper surface side to the recording medium 11 can be reduced.

In order to explain the effect of the present invention by three-dimensional magnetic field calculation, magnetism having a region extending from the throat height portion of the main magnetic pole so as to wrap around the trailing side of the flare portion and gradually increasing in film thickness in the element height direction. The film is called a roof magnetic layer and has been described as a structure separated from the main magnetic pole. This is because the functions of the main magnetic pole and the roof magnetic layer are different, and in the manufacturing method, the main magnetic pole 1a and the roof magnetic layer are used. The same effect can be obtained by forming 5 integrally.

A method for manufacturing the magnetic recording head of the present invention having roof magnetism will be described. The magnetic recording head of the present invention can be manufactured by sequentially performing the following steps to form a main magnetic pole and a shield. (1) A step of forming a resist pattern by laminating an inorganic insulating film on a substrate in which the upper surface of the substrate is flattened and the upper surface of the yoke portion 1b of the main magnetic pole 1 is exposed. (2) A step of etching an inorganic insulating film with a resist pattern as a mask to form a step, removing the resist, and then laminating a second layer of the inorganic insulating film to form a resist pattern. (3) A process of etching an inorganic insulating film with a resist pattern as a mask to form a rectangular pedestal for digging a groove. (4) A process of sequentially laminating an electrode layer that forms a side shield on the side surface of a rectangular pedestal and a protective film that protects the side surface of the rectangular pedestal. (5) Process of applying organic resin to the entire surface (6) The process of etching the organic resin until the rectangular pedestal is exposed. (7) A process of forming an inverted trapezoidal groove that serves as the main magnetic pole in a rectangular pedestal. (8) The process of widening the groove that becomes the roof magnetic film overhanging from the track width in the rectangular pedestal. (9) A process of filling the groove in the rectangular pedestal with a magnetic plating film to form the main magnetic pole and the roof magnetic film. (Ten) Process of removing unnecessary magnetic plating film (11) A process of removing the protective film on the side surface of the rectangular pedestal to expose the electrode layer forming the side shield layer. (12) Step of forming resist pattern (13) A process of forming a side shield layer by magnetic plating using a resist pattern (14) Step to flatten the magnetic film (15) A process of forming a resist pattern by laminating an inorganic insulating film on a substrate that has been flattened and the surface of each part is exposed. (16) A process of etching an inorganic insulating film, a side shield, a rectangular pedestal, and a magnetic layer in a groove using a resist pattern as a mask. (17) Step of laminating the electrode layer for shielding on the trailing side (18) Step of forming resist pattern (19) A process of forming a magnetic plating layer for a shield on the trailing side using a resist pattern as a mask.

13 to 22 are schematic views of a manufacturing process showing an embodiment of the magnetic recording head manufacturing method of the present invention. FIG. 13 shows a manufacturing process from a state where the yoke portion 1b of the main magnetic pole 1 is manufactured and then flattened by a CMP (chemical mechanical polishing) step. The left side in the figure shows a schematic view of the state seen from the floating upper surface side. A schematic view from the side surface is shown on the right side of the figure. The yoke portion 1b is shown at the lower right of the side view on the right side of the figure.

FIG. 13A shows a process in which the inorganic insulating film 100a is laminated on the substrate in which the upper surface of the substrate is flattened and the upper surface of the yoke portion 1b of the main magnetic pole 1 is exposed to form the resist pattern 101. As the inorganic insulating film 100a, for example, oxides such as Al, Si, Ta, Ti and the like, nitrides and the like can be used. FIG. 13 (b) shows the etching of the inorganic insulating film 100a using this resist pattern 101 as a mask. Using the ion milling method, Ar is used as the main gas for etching to form a step. A place where the resist is removed after etching is shown in FIG. 13 (c). The position of the formed step corresponds to the position of the floating upper surface of the magnetic film overhanging in the track width direction on the trailing side of the main magnetic pole 1a. In the case of Example 3 shown in FIG. 12, a taper can be manufactured in ΔT by giving a taper angle in the element height direction to the machined step portion. FIG. 13 (d) shows the process of laminating the second layer of the inorganic insulating film 100b. The second layer of the inorganic insulating film 100b has the same processing speed as the lower inorganic insulating film 100a in the ion milling method, the RIE method, and the RIM method, and the RIE method (reactive ion etching). ), In the RIM method (reactive ion milling), for example, by changing the main gas for processing to chlorine-based gas and fluorine-based gas, it has a high selective processing speed, for example, Al, Si, Ta, Ti. Oxides, nitrides, etc. can be used.

FIG. 14 shows a process of etching an inorganic insulating film to form a rectangular pedestal 100 for digging a groove. The rectangular pedestal 100 has a pattern shape similar to that of the main magnetic pole 1a, but is wider in the width direction than the main magnetic pole 1a and has a rectangular cross-sectional shape. Refers to a non-magnetic structure that has the function of defining the position of the main magnetic pole 1a. The process of laminating the second layer of the inorganic insulating film 100b to form the resist pattern 104 is shown in FIG. 14 (a). The resist pattern 104 has a shape similar to that of the main magnetic pole 1a, and a wide pattern is formed in the track direction. FIG. 14 (b) shows a rectangular etching of the inorganic insulating films 100a and 100b using the resist pattern 104 as a mask. At the time of this process, it is as shown in FIG. 25 (a) as a whole. The rectangular pedestal 100 may have an inverted trapezoidal shape with a Bevel angle similar to that of the main magnetic pole 1a. The place where the resist pattern 104 is removed is shown in FIG. 14 (c).

FIG. 15 shows a step of sequentially laminating an electrode layer 102 forming a side shield 32 on the side surface of the rectangular pedestal 100 and a protective film 103 protecting the side surface of the rectangular pedestal, and a step of applying the organic resin 105 to the entire surface. The step of etching the organic resin 105 until the upper surface of the rectangular pedestal 100 is exposed is shown.

In FIG. 15A, the electrode layer 102 for magnetic plating of the side shield 32 and the protective film 103, which are formed on the side surface of the rectangular pedestal 100 in a subsequent process, are sequentially laminated so as to cover the rectangular pedestal 100. The place is shown. The electrode layer 102 for plating includes, for example, a single-layer film or a laminated film of a non-magnetic metal film such as Cr, NiCr, Rh, Mo, Nb, Au, and at least two kinds of Co, Ni, Fe. A single-layer film or a laminated film of a magnetic material containing an element can be used. The protective film 103 is formed with, for example, an organic resin 105 such as a resist or an imide resin used in a subsequent process in order to prevent the electrode layer 102 for plating from being oxidized and to prevent the pedestal 100 processed into a rectangular shape from spreading in the track direction. For example, a single layer film or a laminated film of Cr or NiCr, which has good adhesion and can be removed by wet etching, can be used. FIG. 15 (b) shows that the organic resin 105 is formed on the entire surface of the substrate by rotary coating.

FIG. 15 (c) shows the organic resin 105 etched by the RIM method (reactive ion milling) until the upper surface of the rectangular pedestal 100 is exposed. The RIM method for organic resins 105 such as resists and imide resins includes, for example, O containing oxygen-based gases as the main gas.₂, CO, CO₂A single gas such as, mixed gas, and Ar gas were added until the film on the upper surface of the rectangular pedestal 100 was exposed. In FIG. 15 (d), the protective film 103 exposed on the upper surface of the rectangular pedestal 100 and the electrode layer 102 for magnetic plating are removed by etching by the ion milling method, and the second layer of inorganic insulation of the rectangular pedestal 100 is insulated. The upper surface of the layer 100b is exposed. The reason for setting the organic resin 105 to the same height as the rectangular pedestal 100 is that when the rectangular pedestal 100 is higher than the pattern of the rectangular pedestal 100, a shadow effect that hinders ion incident by the ion milling method occurs. Therefore, a phenomenon occurs in which the bottom of the rectangular pedestal 100 is not processed.

FIG. 16 shows a schematic view of a manufacturing process in which the roof magnetic layer 5 of the present invention is integrally formed with the main magnetic pole 1a. FIG. 16 shows a step of forming an inverted trapezoidal groove in the rectangular pedestal 100, a step of widening the groove in the rectangular pedestal 100, and a step of filling the groove in the rectangular pedestal 100 with a magnetic plating film 109. Is shown.

FIG. 16A shows that the inorganic insulating layers 100a and 100b of the rectangular pedestal 100 are grooved in an inverted trapezoidal shape by the RIM method. The RIM method is CHF for fluorine-based gas.₃, CF₄, C₄F₈An inverted trapezoidal groove can be formed by adding Ar gas using the above as the main gas and depositing C that inhibits processing on the processed surface. FIG. 16 (b) shows that the upper inorganic insulating layer 100b was processed to widen the groove width. At the time of this process, it is as shown in FIG. 25 (b) as a whole. The inorganic insulating layer 100b is processed by the RIE method (reactive ion etching) at a high selective processing speed with respect to the inorganic insulating layer 100a by using, for example, chlorine-based gas and fluorine-based gas as the main gas for processing. Etching can be stopped at the interface of the inorganic insulating layer 100a. When the relationship between the trailing side width w2 and the reading side width w1 of the magnetic layer applied to the trailing side side surface of the roof magnetic layer 5 shown in FIG. 11 is w1 &lt;w2 in Example 2, the processing conditions of RIE ( It can be easily manufactured by changing the voltage, current, gas amount, etc.). FIG. 16 (c) shows a stack of electrode layers 108 for filling the grooves in the rectangular pedestal 100 with the magnetic plating film 109. As the electrode layer 108, a non-magnetic material may be used, or a single-layer film or a laminated film of a magnetic material containing at least two main elements of, for example, Co, Ni, and Fe, which is a magnetic material, may be used. FIG. 16 (d) shows the magnetic film 109 plated by the electrolytic plating method. At the time of this process, it is as shown in FIG. 25 (c) as a whole. When the electrolytic plating method is used, for example, a single-layer plating film or a mixed plating film of a magnetic material having a high saturation magnetic flux density Bs containing at least two elements of Co, Ni, and Fe can be used.

17 and 18 show a schematic view of the manufacturing process of the embodiment in which the roof magnetic layer 5 and the main magnetic pole 1a are separated and formed. FIG. 17 shows a step of forming an inverted trapezoidal groove in the rectangular pedestal 100 and a step of filling the groove in the rectangular pedestal 100 with the magnetic plating film 109. FIG. 17A shows an inverted trapezoidal groove formed by processing the inorganic insulating films 100a and 100b of the rectangular pedestal 100. This process uses the same manufacturing process as in FIG. 16 (a). FIG. 17 (b) shows a place where the electrode layer 108a for electroplating is laminated on the groove processed into an inverted trapezoid. As the electrode layer 108a, a non-magnetic material may be used, or a single-layer film or a laminated film of a magnetic material containing at least two main elements of, for example, Co, Ni, and Fe, which is a magnetic material, may be used. FIG. 17 (c) shows the magnetic film 109 plated by the electrolytic plating method. When the electrolytic plating method is used, for example, a single-layer plating film or a mixed plating film of a magnetic material having a high saturation magnetic flux density Bs containing at least two elements of Co, Ni, and Fe can be used.

FIG. 18 shows a schematic view of a manufacturing process of an example in which the roof magnetic layer 5 and the main magnetic pole 1a of the present invention are formed separately. FIG. 18 shows the step of removing the magnetic plating film 109 to the trailing side height of the floating upper surface of the main magnetic pole 1a, and the magnetic film 116 having a saturation magnetic flux density Bs equal to or higher than the saturation magnetic flux density Bs of the main magnetic pole 1a. The manufacturing process for laminating is shown. FIG. 18 (a) shows that the magnetic plating film 109 was removed by the ion milling method to the height on the trailing side of the floating upper surface of the main magnetic pole 1a. The magnetic plating film 109 can be etched using Ar gas as the main gas of the ion milling method at a speed about twice that of the inorganic insulating layer 100b. In FIG. 18 (b), the inorganic insulating layer 100b was processed to widen the groove width by, for example, chlorine-based gas and fluorine-based gas as the main gas for processing by the RIE method (reactive ion etching). However, it shows. FIG. 18 (c) shows a place where the magnetic film 116 is laminated in the groove of the rectangular pedestal 100. The laminated film 116 is a single layer or laminated magnetic material having a high saturation magnetic flux density Bs even with the same saturation magnetic flux density Bs as the main magnetic pole 1a containing at least two elements of Co, Ni, Fe, for example, by using a sputtering method. A membrane can be used.

Using the manufacturing methods of FIGS. 17 and 18, the roof magnetic layer 5 (the magnetic film protruding from the throat height portion of the main magnetic pole so as to wrap the trailing side of the flare portion) and the main magnetic pole 1a can be formed separately.

FIG. 19 shows a step of removing an unnecessary magnetic plating film, a step of removing the protective film 103 on the side surface of the rectangular pedestal 100 to expose the electrode layer 102 forming the side shield layer 32, and forming a resist pattern 112. The process is shown.

FIG. 19 (a) shows the unnecessary magnetic film 109 removed by the ion milling method. In the ion milling method, an incident angle of 55 to 70 degrees, which is a low angle with respect to the substrate using Ar as the main gas, is used to reduce the etching of the magnetic film 109 in the groove of the rectangular pedestal 100 and to be in the periphery. The magnetic film 109 is removed to expose the organic resin 105 on the side surface of the rectangular pedestal 100. FIG. 19 (b) shows the organic resin 105 removed. On the side surface of the rectangular pedestal 100, in order to prevent the oxidation of the electrode layer 102 for plating laminated in the manufacturing process of the shield 32 provided on the side surface of the main magnetic pole 1a and to prevent the processing spread of the rectangular pedestal 100. The surface of the laminated protective film 103 is exposed.

FIG. 19C shows a case where the protective film 103 is removed to expose the plating electrode layer 102 for the shield 32 provided on the side surface of the main magnetic pole 1a. As the protective film 102, for example, a single-layer film of Cr or NiCr or a film that can be removed by wet etching of a laminated film may be used. FIG. 19D shows a resist pattern 112 for the shield 32 provided on the side surface of the magnetic pole 1a after the oxide film was lightly removed from the surface of the plating electrode layer 102 by an ion milling method.

FIG. 20 shows a step of forming the side shield layer of the shield 32 provided on the side surface of the main magnetic pole 1a by magnetic plating using the resist pattern 112, and a pre-step of flattening the magnetic film. FIG. 20A shows a shield 32 provided on the side surface of the main magnetic pole 1a formed by an electrolytic plating method. At the time of this step, as a whole, it is as shown in FIG. 26 (a). As the shield 32, for example, a magnetic plating film of a magnetic material containing at least two elements of Co, Ni, and Fe is used. FIG. 20B shows the resist pattern 112 removed. In Fig. 20 (c), Al is used as a pre-process for flattening the magnetic film using the CMP method (chemical mechanical polishing).₂O₃It shows a place where the film is laminated on the entire surface.

FIG. 21 shows a step of laminating an inorganic insulating film 113 on a flattened substrate to form a resist pattern 114, and using the resist pattern 114 as a mask, the inorganic insulating film 113, a shield 32 on the side surface of the main magnetic pole, and a rectangular pedestal. The process of etching 100 and the magnetic layer 109 in the groove is shown. In FIG. 21 (a), a rectangular pedestal 100 flattened by the CMP method, a magnetic material 109 in the groove, a shield 32 on the side surface of the main magnetic pole, and Al are shown.₂O₃The exposed surface of the film is shown. The remaining film thickness of each part may be determined by the CMP method by flattening, but the remaining film thickness may be determined by using the ion milling method in combination. In FIG. 21 (b), the inorganic insulating film 113 is laminated on the flattened substrate. At the time of this process, it is as shown in FIG. 26 (b) as a whole. As the inorganic insulating film 113, for example, oxides such as Al, Si, Ta, Ti, and nitrides can be used. FIG. 21 (c) shows a resist pattern 114 formed on the laminated inorganic insulating film. FIG. 21 (d) shows that the inorganic insulating film 113, the shield 32 on the side surface of the main magnetic pole, the rectangular pedestal 100, and the magnetic layer 109 in the groove are processed by the ion milling method using the resist pattern 114 as a mask. .. The ion incident angle of ion milling is set to 45 to 60 degrees, and the shape is processed so that it has a taper from the vicinity of the resist mask to the floating surface side.

FIG. 22 shows a step of laminating the gap film 110 of the shield 32 on the trailing side, a step of forming the resist pattern 115, and a step of forming a magnetic plating layer for the shield on the trailing side using the resist pattern 115 as a mask. Shown. FIG. 22A shows a place where the resist pattern 114 is removed, the gap film 110 is laminated, and a part of the gap film 110 on the upper surface of the shield 32 on the side surface of the main magnetic pole is removed by etching. Since the gap film 110 also serves as an electrode layer for magnetic plating of the shield 32 on the trailing side of the main magnetic pole 1a, for example, a single layer film of a non-magnetic metal film such as Cr, NiCr, Rh, Mo, Nb, Au. And by using a laminated film, it also has the function of a gap layer. In order to match the functions of the shield 32 on the side surface of the main magnetic pole and the shield 32 on the trailing side, a part of the gap film 110 is removed by etching to have a magnetic bond. FIG. 22B shows the formation of the resist pattern 115 for the shield 32 on the trailing side. FIG. 22 (c) shows the shield 32 on the trailing side of the main magnetic pole 1a magnetically plated by the electrolytic plating method. When a part of the shield and the inorganic insulating layer is removed during this step, the periphery of the main magnetic pole 1a is as shown in FIG. 26 (c) as a whole. For the shield 32 on the trailing side of the main magnetic pole 1a, the same magnetic film as the shield 32 on the side surface of the main magnetic pole 1a is used. FIG. 22 (d) shows the resist pattern 115 removed. According to the manufacturing process of the present invention, the main magnetic pole 1a is provided with a magnetic film overhanging in the track direction on the trailing side, and is surrounded by a shield from three sides via a non-magnetic layer.

As described above, the perpendicular magnetic recording head according to the present invention is a perpendicular recording system equipped with a recording head having a main magnetic pole and an auxiliary magnetic pole and a single magnetic pole type recording / reproducing head provided with a magnetoresistive reproduction element. It is a magnetic head. Although the embodiment relating to the periphery of the main magnetic pole 1a has been described, the present invention is not limited to the above embodiment and floats without widening the geometric track width of the floating top surface of the writing magnetic pole of the recording head. Manufactured as long as it has a structure with auxiliary magnetic poles wider than the geometric track width of the writing magnetic poles on both side surfaces and the upper part of the trailing side of the flare portion in the element height direction from the throat height portion in the element height direction from the surface. The method, material, film thickness, shape, etc. can be changed.

<figref num="1">Conceptual diagram of a magnetic recording / playback device.</figref><figref num="2">Schematic diagram of a cross section of a magnetic head according to the present invention.</figref><figref num="3">Schematic diagram of the plane and side cross section of the main magnetic pole portion of the perpendicular magnetic recording head according to the present invention.</figref><figref num="4">The schematic diagram of the main magnetic pole and the roof magnetic layer of the perpendicular magnetic recording head by this invention.</figref><figref num="5">The figure which shows the model condition used for the 3D magnetic field calculation of this invention.</figref><figref num="6">The figure which shows the relationship between the contour line of the magnetic field strength of the recording head of this invention, and the magnetic clearance angle.</figref><figref num="7">The figure which shows the relationship between the magnetic field strength and the magnetic field gradient.</figref><figref num="8">The figure which shows the relationship between the magnetic field strength, the magnetic field gradient and the magnetic clearance angle when the ΔT part is changed.</figref><figref num="9">The figure which shows the relationship between the magnetic clearance angle of this invention and ΔT.</figref><figref num="10">The figure which shows the relationship between the distance L and ΔT from the trailing end face of the main magnetic pole to the writing width.</figref><figref num="11">The figure which shows the other embodiment of this invention.</figref><figref num="12">The figure which shows the other embodiment of this invention.</figref><figref num="13">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="14">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="15">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="16">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="17">The manufacturing process diagram which shows one Example (separation form) of the method of manufacturing the magnetic recording head of this invention.</figref><figref num="18">The manufacturing process diagram which shows one Example (separation form) of the method of manufacturing the magnetic recording head of this invention.</figref><figref num="19">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="20">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="21">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="22">FIG. 3 is a manufacturing process diagram showing an embodiment of a method for manufacturing the magnetic recording head of the present invention.</figref><figref num="23">The conceptual diagram which shows the magnetic recording medium and the magnetic recording head position.</figref><figref num="24">The figure which shows the contour line of the magnetic field strength of a recording medium, and the magnetization reversal shape.</figref><figref num="25">The perspective view of the intermediate process which shows one Example of the method of manufacturing the magnetic recording head of this invention.</figref><figref num="26">The perspective view of the intermediate process which shows one Example of the method of manufacturing the magnetic recording head of this invention.</figref>

Code description

1 ... main magnetic pole, 1a ... writing magnetic pole, 1b ... main magnetic pole yoke, 2 ... thin film conductor coil, 3 ... return magnetic pole, 4 ... reproduction element, 5 ... roof magnetic layer, 8 ... lower shield, 9 ... upper shield, 11 ... magnetic recording medium, 12 ... suspension arm , 13 ... Magnetic head slider, 15 ... Rotary actuator, 17 ... Pillar, 19 ... Magnetic recording layer, 20 ... Backing layer, 24 ... Playback head, 25 ... Recording head , 28 ... motor, 32 ... shield, 100 ... rectangular pedestal, 100a, 100b ... inorganic insulating layer, 101 ... resist pattern, 102 ... electrode layer, 103 ... protection Film, 104 ... resist pattern, 105 ... organic resin, 108 ... electrode layer, 108a ... electrode layer (separated form), 109 ... magnetic plating layer, 110 ... gap film, 112 ... resist pattern, 113 ... inorganic insulating layer, 114 ... resist pattern, 115 ... resist pattern, 116 ... magnetic layer (separation form)