Nova Patents
JP2005291844A

Surface defect inspection apparatus

Abstract

[Subject] Even when the lighting part constituted combining the layout pattern which arranged the light emitting element continuously two or more is used so that it may leave the dark side of prescribed shape inside, incorrect detection of a defect offers the surface inspection equipment controlled as much as possible. [Solution means] It has a defective evaluation means 6 to evaluate an image pick-up screen for the field illuminated by the illuminating radiation by the lighting part which arranged the light emitting element continuously so that it might leave the dark side of prescribed shape inside to be inspected, and to detect the defect in the above-mentioned field to be inspected, Surface defect inspection equipment which has the defective candidate sorting part 64 which excludes the defective candidate contained to the domain which indicates the luminescence image of the light emitting element in a light-and-darkness picture to be the isolated point extraction part 63 in which this defective evaluation means judges the isolated projection brightness area in the light-and-darkness picture of a field to be inspected to be a defective candidate from a defective candidate. [Selection figure] Fig. 3

Term

No projected expiry on record.

  1. Priority and filed
  2. Published
  3. Today

3 claims: 1 independent, 2 dependent

  1. 1
    Imaging that captures an image of a lighting unit configured by combining a plurality of layout patterns in which light emitting elements are continuously arranged so as to leave a dark surface having a predetermined shape inside, and a surface to be inspected illuminated by the irradiation light of the lighting unit. It is composed of a camera and a defect evaluation means that evaluates an output signal of the imaging camera and detects a defect on the surface to be inspected, and the defect evaluation means is a light-dark image of the surface to be inspected generated from the output signal. The isolated point extraction unit that determines the isolated protruding luminance region in the above as a defect candidate, and the defect candidate selection that excludes the defect candidate included in the region showing the emission image of the continuously arranged light emitting elements in the bright and dark image from the defect candidates. A surface defect inspection device characterized by having a part. 内側に所定形状の暗面を残すように発光素子を連続的に配置させたレイアウトパターンを複数組み合わせて構成された照明部と、前記照明部による照射光によって照明された被検査面を撮像する撮像カメラと、前記撮像カメラの出力信号を評価して前記被検査面における欠陥を検知する欠陥評価手段とから構成され、 前記欠陥評価手段が、前記出力信号から生成された前記被検査面の明暗画像における孤立した突出輝度領域を欠陥候補と判定する孤立点抽出部と、前記明暗画像における前記連続配置された発光素子の発光像を示す領域に含まれる前記欠陥候補を欠陥候補から除外する欠陥候補選別部を備えていることを特徴とする表面欠陥検査装置。