Super abrasive grain tool and its manufacturing method

Description: TECHNICAL FIELD [Detailed description of the invention]

【0001】

[Technical field to which the invention belongs]

The present invention relates to a superabrasive tool and a method for manufacturing the same. More specifically, the present invention relates to a superabrasive tool in which superabrasive grains are strongly held and cracks and chips are less likely to occur in the superabrasive grains, and a method for manufacturing the superabrasive grain tool.

【0002】

[Conventional technology]

As a method for fixing superabrasive grains in a superabrasive grain tool, resin bond, vitrified bond, metal bond, electrodeposition and the like are performed. Resin bonds have good sharpness but low durability. Vitrified bond has good sharpness and good wear resistance, but is brittle and easily chipped. The metal bond has excellent abrasive grain holding power and wear resistance. When the superabrasive grains are fixed using a Cu-Ag-Ti brazing material or a Ni-Cr brazing material, the surface of the superabrasive grains and the brazing material are chemically bonded to obtain a strong holding force. However, due to the difference in the coefficient of thermal expansion between the superabrasive grains and the brazing material, internal stress is generated in the superabrasive grains after brazing, and there is a problem that the abrasive grains are easily cracked or chipped. This tendency becomes more remarkable as the amount of superabrasive grains embedded is increased. Electrodeposition has a large degree of freedom in shape and good sharpness, and is widely used. However, there is no chemical reaction between the superabrasive grains and the plating, and only mechanical holding is performed.

【0003】

[Problems to be Solved by the Invention]

The present invention has been made for the purpose of providing a superabrasive tool in which superabrasive grains are strongly held and cracks and chips are less likely to occur in the superabrasive grains, and a method for manufacturing the superabrasive grain tool.

【0004】

[Means for solving problems]

As a result of intensive research to solve the above problems, the present inventors fixed the superabrasive grains on the base metal by brazing, and then embedded the superabrasive grains by plating to obtain the superabrasive grains. It has been found that a superabrasive tool that is strongly held and that cracks and chips are less likely to occur in the superabrasive grains can be obtained, and the present invention has been completed based on this knowledge. That is, the present invention is (1) a superabrasive tool in which superabrasive grains are fixed to a single layer on the working surface of the base metal, and the layer fixing the superabrasive grains is brazed in contact with the working surface of the base metal. A super-abrasive tool characterized by consisting of two layers, a layer and a plating layer that covers the brazing layer, and (2) after fixing the super-abrasive grains to the working surface of the base metal by brazing, super-abrasive by plating. It provides a method for manufacturing a super-abrasive grain tool, which is characterized by embedding grains. Further, as a preferred embodiment of the present invention, (3) the super-abrasive tool is a CMP conditioner, the super-abrasive tool according to item 1, and (4) the brazing material is a Cu-Ag-Ti brazing material or Ni. -Cr superabrasive tool according to item 1 which is a Cr-based brazing material, (5) Superabrasive tool according to item 1 in which the thickness of the brazing layer is 5 to 50% of the average particle size of superabrasive grains. , (6) The plating is Ni plating. The superabrasive tool according to item 1, (7) The total thickness of the brazing layer and the plating layer is 40 to 90% of the average particle size of the superabrasive. Examples thereof include the superabrasive tool according to paragraph 1 and (8) the superabrasive tool according to paragraph 1 in which the ratio of the thickness of the brazing layer to the thickness of the plating layer is 0.7 to 1.5.

【0005】

BEST MODE FOR CARRYING OUT THE INVENTION

The superabrasive tool of the present invention is a superabrasive tool in which superabrasive grains are fixed to a single layer on the working surface of the base metal, and the layer fixing the superabrasive grains is brazed in contact with the working surface of the base metal. It is a super-abrasive tool consisting of two layers, a layer and a plating layer that covers the brazing layer. In the method for manufacturing a superabrasive tool of the present invention, the superabrasive grains are fixed to the working surface of the base metal by brazing, and then the superabrasive grains are embedded by plating. The form of the superabrasive tool of the present invention is not particularly limited. For example, a wheel having various shapes specified in JIS B 4131, a honing stone, a gear dresser, a rotary dresser, a reamer, an end mill, a bite, a drill, and a band saw. , ID blades, saw blades, wire saws, drum wheels, core drills, etc. The superabrasive tool of the present invention can be particularly preferably used as a CMP conditioner and an eyeglass centering wheel. Examples of the superabrasive grain used in the present invention include diamond abrasive grain and cubic boron nitride (cBN) abrasive grain. The particle size of the superabrasive grains used in the present invention is not particularly limited, but superabrasive grains of # 35 to # 400 can be preferably used.

【0006】

The brazing material used in the present invention is not particularly limited, and for example, silver brazing, copper and copper alloy brazing, aluminum alloy brazing, phosphorus copper brazing, nickel brazing, gold brazing, palladium brazing, precious metal brazing for vacuum, etc. specified in JIS are used. , Au-Pd-Ni brazing material, Au-Cu-Ni brazing material, Au-Ni brazing material, Ag-Cu-Pd brazing material, Cu-Mn-Ni brazing material, Ag-Cu-Ni Examples of brazing materials, Cu-Ag-Ti brazing materials, Ag-Cu-Ni-Sn brazing materials, Ag-Cu brazing materials, Ag-Cu-Sn brazing materials, Ni-Cr brazing materials, etc. Can be done. Among these, the Cu-Ag-Ti-based brazing material and the Ni-Cr-based brazing material have good wettability with the diamond abrasive grains and the cBN abrasive grains, and can be particularly preferably used. In the method of the present invention, the brazing method is not particularly limited, but brazing can be preferably performed in an inert gas atmosphere or in a vacuum. In the present invention, the thickness of the brazing layer is preferably 5 to 50%, more preferably 10 to 45%, and even more preferably 15 to 40% of the average particle size of the superabrasive grains. .. If the thickness of the brazing layer is less than 5% of the average particle size of the superabrasive grains, the force for holding the superabrasive grains may be insufficient. If the thickness of the brazing layer exceeds 50% of the average particle size of the superabrasive grains, the superabrasive grains may be easily cracked or chipped.

【0007】

In the present invention, the metal forming the plating layer is not particularly limited, and examples thereof include Ni, Cr, and Cu. Among these, Ni can be used particularly preferably. The plating method is not particularly limited, and known methods such as electroplating and electroless plating can be used. In the present invention, the total thickness of the brazing layer and the plating layer is preferably 15 to 90%, more preferably 30 to 80%, and 40 to 70% of the average particle size of the superabrasive grains. It is more preferable to have. If the total thickness of the brazed layer and the plating layer is less than 15% of the average particle size of the superabrasive grains, the force for holding the superabrasive grains may be insufficient. If the total thickness of the brazing layer and the plating layer exceeds 90% of the average particle size of the superabrasive grains, the amount of protrusion of the superabrasive grains may be insufficient and the sharpness may be lowered. FIG. 1 is a schematic explanatory view of one aspect of the superabrasive tool of the present invention. In the superabrasive tool of this embodiment, the superabrasive grain 2 is fixed to the working surface of the base metal 1 as a single layer, and the layer for fixing the superabrasive grains is a brazing layer 3 in contact with the working surface of the base metal and a brazing layer. It is formed by two layers of plating layer 4 covering the attachment layer.

【0008】

When the superabrasive tool of the present invention is used as a CMP conditioner, the working surface can be further coated after the plating layer is formed. The coating material used is not particularly limited, for example, acrylic resin, synthetic resin such as Teflon (registered trademark), ceramic such as TiC, TiN, TiAlN, cermet, CVD diamond, diamond-like carbon which is a composite material of ceramic and metal. (DLC), metal DLC, etc. can be mentioned. By coating the working surface, it is possible to prevent the adhesion of chips, promote the discharge, reduce the grinding resistance, and in the case of the CMP conditioner, prevent the plating and the elution of the brazing material. The superabrasive tool of the present invention can be used without particular limitation in the field to which the superabrasive tool manufactured by the brazing method or the electrodeposition method is conventionally applied, but the CMP conditioner and the spectacle core can be used without particular limitation. It can be particularly preferably used as a brazing wheel. In the CMP conditioner, since the superabrasive grains are never allowed to fall off, the superabrasive grains are strongly held by the base metal by the brazing layer and protected by the plating layer, so that cracks and chips are less likely to occur. Super-abrasive tools are suitable.

【0009】

[Example]

Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples. Example 1 JIS H A base metal having a size of 100D-4T was prepared using one type of nickel bullion specified in 2104. A masking tape with holes with a diameter of 250 μm was attached to the working surface of the base metal at the intersections of square grids with a grid line spacing of 0.5 mm, and one diamond abrasive grain with a grain size of # 100 was placed in each hole of the masking tape. , Temporarily fixed to the working surface of the base metal using an adhesive [Cemedine Co., Ltd., Industrial Cemedine]. After removing the masking tape, Ni-Cr brazing powder was filled between the diamond abrasive grains and held in a vacuum furnace at 1,050 ° C. for 20 minutes to fix the diamond abrasive grains. At this time, the embedding amount of the brazing material was set to 35% of the average particle size of the diamond abrasive grains. After that, the CMP conditioner was completed by further embedding up to 70% of the average particle size by nickel plating. After conditioning the pad using this CMP conditioner, CMP processing was performed on the silicon wafer with an oxide film. The processed silicon wafer had good flatness and no scratches were observed. Moreover, when the individual diamond abrasive grains were observed with an optical microscope, no falling or cracking of the abrasive grains was observed. Example 2 A diamond wheel for centering spectacle lenses with dimensions of 100D-20T-20H was manufactured. Adhesive of diamond abrasive grains with grain size # 80 at the intersection of rectangular grids with a pitch of 2.0 mm in the wheel rotation direction and a pitch of 0.9 mm in the wheel thickness direction on the working surface of the wheel base metal made of SUS304 [Cemedine Co., Ltd., Temporarily fixed using Industrial Cemedine]. Cu-Ag-Ti brazing powder is filled between the temporarily fixed diamond abrasive grains, fixed with a 30% graphite outer mold from the outer circumference, and held in a vacuum furnace at 1,050 ° C for 15 minutes. The diamond abrasive grains were fixed. At this time, the embedding amount of the brazing material was set to 30% of the average particle size of the diamond abrasive grains. After that, it was further embedded by nickel plating up to 60% of the average particle size. The abrasive grain surface of this wheel was observed with an optical microscope, and no dropout or cracking was observed in the individual diamond abrasive grains.

【0010】

[Effect of the invention]

In the superabrasive tool of the present invention, the superabrasive grains are strongly held by the base metal, and the superabrasive grains are less likely to be cracked or chipped. According to the method of the present invention, such a superabrasive tool can be easily manufactured.

[Simple explanation of drawings]

[Figure 1]

FIG. 1 is a schematic explanatory view of one aspect of the superabrasive tool of the present invention.

[Explanation of symbols]

1 unit 2 Super abrasive grains 3 Brazing layer 4 Plating layer