IL287463B2
Metrology tools comprising aplanatic objective singlet
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Published
- Today
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US2015198524A1 | Cites | United States of America | X | Search report | 1,8,11-12 |
16 members in 8 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 191750868 | European Patent Office (EPO) | – | |
| 19175086 | European Patent Office (EPO) | A | |
| 2020061185 | European Patent Office (EPO) | W |
Members16
| Document | Office | Kind | |
|---|---|---|---|
| EP3739389A1 | European Patent Office (EPO) | A1 | |
| US2020363727A1 | United States of America | A1 | |
| WO2020233929A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW202109024A | Taiwan Province of China | A | |
| KR20210142731A | Republic of Korea | A | |
| IL287463A | Israel | A | |
| IL287463D0 | Israel | D0 | |
| CN113906346A | China | A | |
| US11237484B2 | United States of America | B2 | |
| JP2022533184A | Japan | A | |
| TWI779286B | Taiwan Province of China | B | |
| JP7315718B2 | Japan | B2 | |
| CN113906346B | China | B | |
| KR102717648B1 | Republic of Korea | B1 | |
| IL287463B1 | Israel | B1 | |
| IL287463B2This record | Israel | B2 |
Numbers
- Publication
- 287463
- Application
- 287463
Titles2
- English
- METROLOGY TOOLS COMPRISING APLANATIC OBJECTIVE SINGLET
- Hebrew
- כלים מטרולוגיים הכוללים יחידת מטרה אפלאנטית
Classification
- CPC, 11
- G03F7/70616
- G03F7/7015
- G02B27/0012
- G03F7/70633
- G02B3/04
- G03F7/20
- H01L21/0274
- G01N21/95607
- H10P76/2041
- G03F7/706847
- G03F7/706851
- IPC, 5
- H01L21 027
- G02B3 04
- G02B27 00
- G03F7 20
- G01N21 956