IL287034B2

Methods and systems for combining x-ray metrology data sets to improve parameter estimation

Abstract

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Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US2003197872A1	Cites	United States of America	Y	Search report	1-2,8,10-16,20
US2013064442A1	Cites	United States of America	Y	Search report	9
US2016011523A1	Cites	United States of America	Y	Search report	6-7
US2017287751A1	Cites	United States of America	Y	Search report	4-5
US2019049861A1	Cites	United States of America	Y	Search report	1-2,8,10-16,20

16 members in 9 offices

This recordMember, by publication datePriority claim

Priority claims5

Priority claims
Document	Office	Kind	Date
62836261	United States of America	–	2019-04-19
201962836261	United States of America	P	2019-04-19
16847388	United States of America	–	2020-04-13
202016847388	United States of America	A	2020-04-13
2020028386	United States of America	W	2020-04-16

Members16

Family members, oldest first
Document	Office	Kind
US2020335406A1	United States of America	A1	2020-10-22
WO2020214745A1	World Intellectual Property Organization (WIPO)	A1	2020-10-22
TW202104841A	Taiwan Province of China	A	2021-02-01
CN113677983A	China	A	2021-11-19
KR20210143922A	Republic of Korea	A	2021-11-29
SG11202111073XA	Singapore	A	2021-11-29
IL287034A	Israel	A	2021-12-01
DE112020002023T5	Germany	T5	2022-01-05
JP2022529043A	Japan	A	2022-06-16
CN113677983B	China	B	2022-11-15
US11990380B2	United States of America	B2	2024-05-21
JP7545412B2	Japan	B2	2024-09-04
IL287034B1	Israel	B1	2024-11-01
TWI862575B	Taiwan Province of China	B	2024-11-21
IL287034B2This record	Israel	B2	2025-03-01
KR102874233B1	Republic of Korea	B1	2025-10-20