IL280370B1
Metrology method, target and substrate
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Published
- Today
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US2006103033A1 | Cites | United States of America | Y | Search report | 1-9,12-20,23-29 |
| US2008144036A1 | Cites | United States of America | Y | Search report | 1-9,12-20,23-29 |
| US2013107259A1 | Cites | United States of America | – | Search report | – |
56 members in 7 offices
Priority claims7
| Document | Office | Kind | Date |
|---|---|---|---|
| 14182962 | European Patent Office (EPO) | A | |
| 141829622 | European Patent Office (EPO) | – | |
| 201462090801 | United States of America | P | |
| 62090801 | United States of America | – | |
| 201562170008 | United States of America | P | |
| 62170008 | United States of America | – | |
| 2015069062 | European Patent Office (EPO) | W |
Members56
| Document | Office | Kind | |
|---|---|---|---|
| US2016061589A1 | United States of America | A1 | |
| WO2016030255A2 | World Intellectual Property Organization (WIPO) | A2 | |
| TW201614382A | Taiwan Province of China | A | |
| WO2016030255A3 | World Intellectual Property Organization (WIPO) | A3 | |
| IL250588D0 | Israel | D0 | |
| KR20170048489A | Republic of Korea | A | |
| CN107148597A | China | A | |
| TWI598699B | Taiwan Province of China | B | |
| JP2017526973A | Japan | A | |
| TW201809903A | Taiwan Province of China | A | |
| JP6421237B2 | Japan | B2 | |
| TWI645260B | Taiwan Province of China | B | |
| JP2019012291A | Japan | A | |
| KR101986258B1 | Republic of Korea | B1 | |
| KR20190064674A | Republic of Korea | A | |
| TW201923486A | Taiwan Province of China | A | |
| US10386176B2 | United States of America | B2 | |
| US2019346256A1 | United States of America | A1 | |
| TWI689792B | Taiwan Province of China | B | |
| JP6686097B2 | Japan | B2 | |
| CN107148597B | China | B | |
| CN111338187A | China | A | |
| US10718604B2 | United States of America | B2 | |
| JP2020112827A | Japan | A | |
| TW202034096A | Taiwan Province of China | A | |
| US2020348125A1 | United States of America | A1 | |
| IL280370A | Israel | A | |
| IL280370D0 | Israel | D0 | |
| KR102230150B1 | Republic of Korea | B1 | |
| KR20210032009A | Republic of Korea | A | |
| IL250588A | Israel | A | |
| IL250588B | Israel | B | |
| KR102295507B1 | Republic of Korea | B1 | |
| KR20210110732A | Republic of Korea | A | |
| JP6951495B2 | Japan | B2 | |
| US11204239B2 | United States of America | B2 | |
| JP2022008510A | Japan | A | |
| TWI754237B | Taiwan Province of China | B | |
| US2022057192A1 | United States of America | A1 | |
| TW202215170A | Taiwan Province of China | A | |
| KR102406393B1 | Republic of Korea | B1 | |
| KR20220078732A | Republic of Korea | A | |
| US11428521B2 | United States of America | B2 | |
| US2023016664A1 | United States of America | A1 | |
| TWI796917B | Taiwan Province of China | B | |
| JP7288020B2 | Japan | B2 | |
| JP2023111932A | Japan | A | |
| KR102574171B1 | Republic of Korea | B1 | |
| TW202340875A | Taiwan Province of China | A | |
| IL280370B1This record | Israel | B1 | |
| IL310602A | Israel | A | |
| JP7506800B2 | Japan | B2 | |
| IL280370B2 | Israel | B2 | |
| TWI861727B | Taiwan Province of China | B | |
| IL310602B1 | Israel | B1 | |
| US12429328B2 | United States of America | B2 |
Numbers
- Publication
- 280370
- Application
- 280370
Titles2
- English
- METROLOGY METHOD, TARGET AND SUBSTRATE
- Hebrew
- שיטה מטרולוגית, מטרה ומצע
Classification
- CPC, 5
- G03F7/70633
- G01B11/14
- G03F7/70683
- G03F7/70608
- G03F7/706847
- IPC, 2
- G01B11 14
- G03F7 20